Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/30/1998EP0887864A1 Semiconductor device with capacitor and method for fabricating the same
12/30/1998EP0887863A2 DRAM with gain memory cells
12/30/1998EP0887862A2 DRAM with gain memory cells
12/30/1998EP0887860A1 Formation of alignment mark and structure covering the same
12/30/1998EP0887859A2 Integrated circuits with metallic fuses and method
12/30/1998EP0887858A2 Protection layer for laser blown fuses in semiconductor devices
12/30/1998EP0887857A1 Method of making an sram cell and structure
12/30/1998EP0887856A1 Method of manufacturing electronic components
12/30/1998EP0887855A1 Integrated circuit devices including shallow trench isolation
12/30/1998EP0887854A1 Microelectronic structure of a semiconductor material that is difficult to etch and metallized holes
12/30/1998EP0887853A2 Electrostatic chucks for holding substrates in process chambers
12/30/1998EP0887852A2 Improved silica stain test structures and methods therefor
12/30/1998EP0887851A2 Method of forming interconnections on electronic modules
12/30/1998EP0887850A2 Lead-frame forming for improved thermal performance
12/30/1998EP0887849A2 Method for fabricating capacitor for semiconductor device
12/30/1998EP0887848A1 Process of removing CMP scratches in a dielectric layer by a reflow step, and integrated circuit chip formed thereby
12/30/1998EP0887847A1 Process of final passivation of integrated circuit devices
12/30/1998EP0887846A2 Method of reducing the formation of watermarks on semiconductor wafers
12/30/1998EP0887845A2 Processing method and apparatus for removing oxide film
12/30/1998EP0887844A2 Method of manufacturing a barrier layer on top of a contact plug
12/30/1998EP0887843A1 Method of manufacturing a transistor with a silicon-germanium gate
12/30/1998EP0887842A1 Field effect devices with improved gate insulator and method of manufacturing the same
12/30/1998EP0887836A2 Electronic device fabrication apparatus
12/30/1998EP0887835A2 Diagnostic pedestal assembly for a semiconductor wafer processing system
12/30/1998EP0887710A2 Resist development process
12/30/1998EP0887709A2 Method and appartus for manufacturing a device using a photolithograpic mask
12/30/1998EP0887708A2 An exposure system
12/30/1998EP0887443A1 Method of manufacturing a silicon monocrystal, and method of holding the same
12/30/1998EP0887442A1 Process and apparatus for producing polycrystalline semiconductor ingot
12/30/1998EP0887437A2 Protective coating by high rate arc plasma deposition
12/30/1998EP0887433A1 Silicon dioxide deposition by plasma activated evaporation process
12/30/1998EP0887323A1 Selective etching of silicate
12/30/1998EP0887153A2 Combined slurry dispenser and rinse arm and method of operation
12/30/1998EP0887128A2 Method for manufacturing vacuum chamber
12/30/1998EP0887110A1 Nozzle-injector for arc plasma deposition apparatus
12/30/1998EP0887105A1 Device and method for comminution of semiconductive material
12/30/1998EP0886894A2 Contact carriers (tiles) for populating larger substrates with spring contacts
12/30/1998EP0886884A1 Memory cell arrangement with vertical mos transistors and the production process thereof
12/30/1998EP0886874A1 Device comprising an integrated coil
12/30/1998EP0886618A1 Vacuum integrated smif system
12/30/1998EP0886617A1 Door drive mechanisms for substrate carrier and load lock
12/30/1998EP0886548A1 Method and apparatus for drying and cleaning objects using aerosols
12/30/1998EP0807317A4 Method for purging a multi-layer sacrificial etched silicon substrate
12/30/1998CN2302599Y Continuous detecting apparatus for electronic equipment test station
12/30/1998CN2302598Y Clamping, welding and cutting apparatus for wire soldering machine
12/30/1998CN1203706A Semi-conductor integrated circuit
12/30/1998CN1203697A Capped interlayer dielectric material for chemical mechanical polishing
12/30/1998CN1203696A Method for processing semiconductor wafer, method for manufacturing IC card and carrier
12/30/1998CN1203695A Method for forming contacts on substrates on radiation detectors and imaging devices
12/30/1998CN1203545A Process for manufacturing resin-encapsulated electronic product
12/30/1998CN1203457A Semiconductor device and method for production thereof
12/30/1998CN1203456A Semiconductor device with high resistance element and process for manufacturing same
12/30/1998CN1203454A 多芯片模块 A multi-chip module
12/30/1998CN1203453A Structure of bonding inner lead to electrode in semiconductor device
12/30/1998CN1203452A Semiconductor device and method for manufacture thereof
12/30/1998CN1203451A Semiconductor integrated circuit and method of compensating for device performance variations of semiconductor integrated circuit
12/30/1998CN1203450A Semiconductor device and method for manufacturing semiconductor device
12/30/1998CN1203449A Method for fabricating semiconductor device
12/30/1998CN1203448A Method for manufacturing semiconductor device
12/30/1998CN1203447A Method for producing dynamic RAM
12/30/1998CN1203445A Method of manufacturing semiconductor device of which parasitic capacitance is decreased
12/30/1998CN1203444A Method for forming contact plugs of semiconductor device
12/30/1998CN1203443A Method and apparatus of removing sample adsorbed by static electricity from sample stage
12/30/1998CN1203442A Process and apparatus for dry-etching semiconductor layer
12/30/1998CN1203441A Method of reducing formation of watermarks on semiconductor wafers
12/30/1998CN1203440A Method of forming capacitor of semiconductor device
12/30/1998CN1203424A Ferroelectric memory device
12/30/1998CN1203285A Method for making gallium nitride crystal
12/30/1998CN1203205A Selective etching of silicate
12/30/1998CN1203181A Sheet removing apparatus and method
12/30/1998CN1203148A Micro structure and its manufacture method
12/30/1998CN1041472C Thin film transistor and method for fabricating same
12/30/1998CN1041471C Semiconductor device and method for manufacturing
12/30/1998CA2295069A1 Controlling threading dislocation densities in ge on si using graded gesi layers and planarization
12/29/1998US5854953 Method for developing treatment
12/29/1998US5854768 Semiconductor integrated circuit device
12/29/1998US5854745 Method and apparatus for mounting electronic component
12/29/1998US5854740 Electronic circuit board with semiconductor chip mounted thereon, and manufacturing method therefor
12/29/1998US5854734 Capacitor construction
12/29/1998US5854663 LCD device and method of forming the same in which a black matrix is formed on the orientation layer and covers the active semiconductor layer of a TFT
12/29/1998US5854569 For outputting a current signal
12/29/1998US5854566 RESURF EDMOS transistor and high-voltage analog multiplexer circuit using the same
12/29/1998US5854563 Process control monitoring system and method therefor
12/29/1998US5854534 For coupling an integrated circuit chip to a multichip module substrate
12/29/1998US5854514 Lead-free interconnection for electronic devices
12/29/1998US5854513 Semiconductor device having a bump structure and test electrode
12/29/1998US5854510 Low power programmable fuse structures
12/29/1998US5854509 Method of fabricating semiconductor device and semiconductor device
12/29/1998US5854505 Process for forming silicon oxide film and gate oxide film for MOS transistors
12/29/1998US5854503 Maximization of low dielectric constant material between interconnect traces of a semiconductor circuit
12/29/1998US5854502 Non-volatile memory cell having floating gate electrode and reduced bird's beak portions
12/29/1998US5854500 DRAM cell array with dynamic gain memory cells
12/29/1998US5854499 Ferroelectric film capacitor with intergranular insulation
12/29/1998US5854497 Semiconductor memory device
12/29/1998US5854496 Hydrogen-terminated diamond misfet and its manufacturing method
12/29/1998US5854495 Preparation of nucleated silicon surfaces
12/29/1998US5854494 Electric device, matrix device, electro-optical display device, and semiconductor memory having thin-film transistors
12/29/1998US5854488 Ion beam machining method and device thereof
12/29/1998US5854468 Substrate heating apparatus with cantilevered lifting arm
12/29/1998US5854315 Snap-cure epoxy adhesives
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