Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/1998
12/15/1998US5849616 Method of manufacturing a semiconductor device
12/15/1998US5849615 Semiconductor processing method of fabricating field effect transistors
12/15/1998US5849614 Method of isolation by active transistors with grounded gates
12/15/1998US5849613 Method and mask structure for self-aligning ion implanting to form various device structures
12/15/1998US5849612 MOS poly-si thin film transistor with a flattened channel interface and method of producing same
12/15/1998US5849611 Method for forming a taper shaped contact hole by oxidizing a wiring
12/15/1998US5849609 Semiconductor package and a method of manufacturing thereof
12/15/1998US5849608 Semiconductor chip package
12/15/1998US5849607 Process for attaching a lead frame to a semiconductor chip
12/15/1998US5849606 Semiconductor device and manufacturing of the same
12/15/1998US5849605 Two-phase clock type charge coupled device having electrodes with tapered sidewalls and method for producing the same
12/15/1998US5849604 Method of manufacturing a semiconductor device
12/15/1998US5849603 Method of processing a surface of a semiconductor substrate
12/15/1998US5849602 Resist processing process
12/15/1998US5849601 Electro-optical device and method for manufacturing the same
12/15/1998US5849489 Hybridization of polynucleotides conjugated with chromophores and fluorophores to generate donor-to-donor energy transfer system
12/15/1998US5849486 Methods for hybridization analysis utilizing electrically controlled hybridization
12/15/1998US5849467 Method for the pre-treatment of a photoresist layer on a substrate surface
12/15/1998US5849457 Positive-working quinonediazide sulfonic acid ester resist composition utilizing solvent system including 2-heptanone, ethyl lactate, and γ-
12/15/1998US5849455 Plasma processing method and plasma processing apparatus
12/15/1998US5849440 Process for producing and inspecting a lithographic reticle and fabricating semiconductor devices using same
12/15/1998US5849439 Method for preparing phase shift mask blank, and phase mask
12/15/1998US5849436 Block mask and charged particle beam exposure method and apparatus using the same
12/15/1998US5849396 Multilayer electronic structure and its preparation
12/15/1998US5849367 Elemental titanium-free liner and fabrication process for inter-metal connections
12/15/1998US5849207 Method for plasma etching of a perovskite oxide thin film
12/15/1998US5849163 Process for formation of epitaxial film
12/15/1998US5849147 Wafer slice base peeling system
12/15/1998US5849139 Method of sticking semiconductor wafer and its sticking device
12/15/1998US5849132 Ball contact for flip-chip devices
12/15/1998US5849104 Method and apparatus for cleaning wafers using multiple tanks
12/15/1998US5849103 Method of monitoring fluid contamination
12/15/1998US5849102 Method of cleaning a surface of a semiconductor substrate by a heat treatment in an inert gas atmosphere
12/15/1998US5849093 Process for surface treatment with ions
12/15/1998US5849092 Process for chlorine trifluoride chamber cleaning
12/15/1998US5849091 Megasonic cleaning methods and apparatus
12/15/1998US5849089 Evaporator for liquid raw material and evaporation method therefor
12/15/1998US5849088 Free floating shield
12/15/1998US5849078 Method for growing single-crystalline semiconductor film and apparatus used therefor
12/15/1998US5849077 Process for growing epitaxial silicon in the windows of an oxide-patterned wafer
12/15/1998US5849076 Cooling system and method for epitaxial barrel reactor
12/15/1998US5849071 Liquid source formation of thin films using hexamethyl-disilazane
12/15/1998US5849043 Apparatus for laser ion doping
12/15/1998US5848933 Docking and environmental purging system for integrated circuit wafer transport assemblies
12/15/1998US5848889 For processing a substrate
12/15/1998US5848868 Wafer conveying apparatus
12/15/1998US5848842 Method of calibrating a temperature measurement system
12/15/1998US5848703 Tray for integrated circuits
12/15/1998US5848702 Tray with flippable cover
12/15/1998US5848685 Photolithographically patterned spring contact
12/15/1998US5848670 For lifting a workpiece from a surface of a pedestal
12/15/1998US5848467 Methods of making semiconductor chip assemblies
12/15/1998US5848466 Method for forming a microelectronic assembly
12/15/1998CA2134257C Ball grid array plastic package
12/10/1998WO1998056102A1 Electrostatic support assembly having an integral ion focus ring
12/10/1998WO1998056046A1 THE METHOD OF FABRICATION OF SEMICONDUCTING COMPOUNDS OF NITRIDES A3B5 OF p- AND n-TYPE ELECTRIC CONDUCTIVITY
12/10/1998WO1998056043A1 Semiconductor component and method for producing the same
12/10/1998WO1998056040A2 Electrostatic chucks
12/10/1998WO1998056038A1 Method of manufacturing a semiconductor device, method of cleaning such a device, and cleaning agent for this purpose
12/10/1998WO1998056037A1 SELECTIVE PLASMA ETCHING OF SILICON NITRIDE IN PRESENCE OF SILICON OR SILICON OXIDES USING MIXTURE OF (NH3 OR SF6) AND HBr AND N¿2?
12/10/1998WO1998056036A1 Semiconductor device and method of anodization for the semiconductor device
12/10/1998WO1998056035A1 Method of anodizing silicon substrate and method of producing acceleration sensor of surface type
12/10/1998WO1998056034A1 Carousel wafer transfer system
12/10/1998WO1998056033A1 Tilt mechanism for wafer cassette
12/10/1998WO1998056032A1 Tray with flippable cover
12/10/1998WO1998056027A1 Rf plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls
12/10/1998WO1998056020A2 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
12/10/1998WO1998055669A2 Conductor track structures arranged on a nonconductive support material, especially fine conductor track structures, and method for producing the same
12/10/1998WO1998039793A3 Semiconductor processing furnace heating control system
12/10/1998DE19825275A1 Test station for investigating semiconducting test element
12/10/1998DE19825274A1 Test station for semiconducting component testing
12/10/1998DE19825081A1 Semiconductor thin film useful for TFT
12/10/1998DE19804004A1 High measurement voltage CCD image sensor production
12/10/1998DE19800640A1 Hetero bipolar transistor
12/10/1998DE19734434C1 Semiconductor body with reverse-side metallisation e.g. for power semiconductor
12/10/1998DE19723734A1 Leiterbahnstrukturen auf einem nichtleitenden Trägermaterial, insbesondere feine Leiterbahnstrukturen, und Verfahren zu ihrer Herstellung Conductor track structures on a non-conductive carrier material, in particular fine conductor track structures, and processes for their preparation
12/10/1998CA2292664A1 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
12/09/1998EP0883330A1 Circuit board with primary and secondary through holes
12/09/1998EP0883328A1 Circuit board comprising a high frequency transmission line
12/09/1998EP0883192A2 Grooved semiconductor die for flip-chip sink attachment
12/09/1998EP0883185A1 Self-amplifying DRAM gain cell and process of its manufacture
12/09/1998EP0883184A2 Camouflaged circuit structure with implants
12/09/1998EP0883183A1 Passive element circuit
12/09/1998EP0883182A2 Lattice arrangement of electrodes on a multi-layer circuit board
12/09/1998EP0883181A1 Semiconductor device and process for connecting internal ground wires with such a device
12/09/1998EP0883180A2 Semiconductor device and wiring tape for semiconductor device
12/09/1998EP0883174A2 Semiconductor device and semiconductor device module
12/09/1998EP0883172A1 Method for manufacturing contact structure having titanium/titanium nitride barrier layer
12/09/1998EP0883171A1 Semiconductor package manufacturing method having an integrated circuit
12/09/1998EP0883170A1 Semiconductor device and method for manufacturing the same
12/09/1998EP0883169A2 Method for fabricating a thin film transistor
12/09/1998EP0883168A2 Method for fabricating a semiconductor memory capacitor
12/09/1998EP0883167A2 Forming preferred orientation-controlled platinum film using oxygen
12/09/1998EP0883166A2 Deposition of fluorinated silicon glass
12/09/1998EP0883165A2 Method for producing thick crack-free coatings from hydrogen silsesquioxane resin
12/09/1998EP0883164A2 Thermally stable dielectric coatings
12/09/1998EP0883163A2 Method of forming micropatterns
12/09/1998EP0883162A2 Semiconductor wafer cleaning apparatus
12/09/1998EP0883159A2 Plasma processing apparatus
12/09/1998EP0883052A1 Integrated circuit having selective bias of transistors for low voltage and low standby current and related methods
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