Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1999
04/15/1999WO1999018601A1 Robot blade with dual offset wafer supports
04/15/1999WO1999018600A1 Apparatus and method for cleaning semiconductor wafer
04/15/1999WO1999018599A2 Holder for a semiconductor substrate, and method of manufacturing a semiconductor device using such a holder
04/15/1999WO1999018594A1 Apparatus for process monitoring of a semiconductor wafer and a method of fabricating same
04/15/1999WO1999018578A1 Memory cell arrangement
04/15/1999WO1999018478A1 Antireflection or light-absorbing coating composition and polymer therefor
04/15/1999WO1999018447A1 Burn-in board with adaptable heat sink device
04/15/1999WO1999018016A1 Slippable roller conveyor for a cleanroom
04/15/1999WO1999009599A3 Vertical interconnect process for silicon segments with dielectric isolation
04/15/1999WO1999009586A3 Method for forming titanium silicide and titanium by cvd
04/15/1999WO1999005701A3 Composite electrical contact structure and method for manufacturing the same
04/15/1999WO1999000706A9 Transferring a programmable pattern by photon lithography
04/15/1999DE19839186A1 Semiconductor chip production process employs a protective layer
04/15/1999DE19838063A1 New electrically insulating thin film system
04/15/1999DE19824209A1 Semiconductor memory device with shunt connection for e.g. SRAM
04/15/1999DE19824208A1 Fault analysis method for defect detection in semiconductor device
04/15/1999DE19824207A1 Semiconductor device substrate has a thick oxide layer at its edge section
04/15/1999DE19808327A1 Fuel injector has a piezoelectric or thermo-pneumatic micro-actuator
04/15/1999DE19807460A1 Annular housing for rotary carrier in semiconductor wafer processing
04/15/1999DE19744098A1 LCD screen TFT matrix is produced using only three lacquering steps
04/15/1999DE19744095A1 Memory cell array has stacked layer magnetoresistive effect layer memory elements
04/15/1999DE19743496A1 Insulating layer for an active diamond layer of a microelectronic component
04/15/1999DE19743495A1 Insulating layer between an electrode and an active diamond layer of a microelectronic component
04/15/1999DE19742327A1 Method for coating metal components and other rigid articles
04/15/1999CA2485328A1 Quantum efficiency improvements in active pixel sensors
04/14/1999EP0909119A2 Method for adhering a metallization to a substrate
04/14/1999EP0909033A2 Rectifying transfer gate circuit
04/14/1999EP0909021A2 Transimpedance pre-amplifier for optical communication
04/14/1999EP0908987A2 Method for manufacturing semiconductor element
04/14/1999EP0908954A2 Semiconductor memory device and manufacturing method thereof
04/14/1999EP0908951A2 Improved air isolated crossovers
04/14/1999EP0908950A2 Integrated circuit
04/14/1999EP0908948A2 Shallow trench isolation for DRAM trench capacitor
04/14/1999EP0908947A2 Method for fabricating semiconductor device with pMIS transistor
04/14/1999EP0908946A2 Improved gapfill of semiconductor structure using doped silicate glasses
04/14/1999EP0908945A2 Dual damascene with self aligned via interconnects
04/14/1999EP0908944A1 Electrical characterisation of an insulating layer on a conductive or semiconductive substrate
04/14/1999EP0908942A2 Improved nitride etch stop layer
04/14/1999EP0908941A2 Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching
04/14/1999EP0908940A2 Anisotropic and selective nitride etch process
04/14/1999EP0908939A2 Method of mechanical polishing
04/14/1999EP0908938A2 Buffer layer for improving control of layer thickness
04/14/1999EP0908937A2 Hard etch mask
04/14/1999EP0908936A2 Formation of a bottle shaped trench
04/14/1999EP0908935A2 Fabrication method of semiconductor device equipped with silicide layer
04/14/1999EP0908934A2 Method of manufacturing a gate electrode
04/14/1999EP0908933A1 Process for bonding crystalline substrates with different crystal lattices
04/14/1999EP0908932A2 Semiconductor wafer holder with cvd silicon carbide film coating
04/14/1999EP0908931A2 Conveying apparatus
04/14/1999EP0908929A2 Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs
04/14/1999EP0908928A2 Baking furnace and control method therefor
04/14/1999EP0908927A2 Semiconductor wafer transfer apparatus
04/14/1999EP0908923A2 Method and apparatus to produce large inductive plasma for plasma processing
04/14/1999EP0908896A2 A virtual ground type semiconductor storage device
04/14/1999EP0908786A2 Process for reducing shrinkage of features formed in a photoresist by treatment with an amine, an amide or an aldehyde
04/14/1999EP0908782A1 Photolithographic processing method
04/14/1999EP0908781A2 Photolithographic processing method and apparatus
04/14/1999EP0908664A2 Methods and systems for delivering an ultra-pure gas to a point of use
04/14/1999EP0908499A1 Curable silicone composition and electronic components
04/14/1999EP0908425A1 Zirconia sintered body, process for production thereof, and application thereof
04/14/1999EP0908076A1 Grid array assembly and method of making
04/14/1999EP0907968A1 Integrated circuit device and method of making the same
04/14/1999EP0907967A2 Soi-transistor circuitry employing soi-transistors and method of manufacture thereof
04/14/1999EP0907964A1 Methods and apparatuses for clamping and declamping a semiconductor wafer in a wafer processing system
04/14/1999EP0907963A1 Solder bump apparatus, electronic component and method for forming a solder bump
04/14/1999EP0907962A1 Method and apparatus for reducing warpage in semiconductor packages
04/14/1999EP0907906A1 Lithography exposure device and lithography procedures
04/14/1999EP0907905A1 Process for modulating interferometric lithography patterns to record selected discrete patterns in photoresist
04/14/1999EP0907489A1 Improvement in injection molding apparatus
04/14/1999EP0907481A1 Injection molding apparatus and method
04/14/1999EP0907461A1 Grinding machine spindle flexibly attached to platform
04/14/1999EP0907460A1 Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers
04/14/1999EP0857150A4 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE
04/14/1999EP0854829A4 300 mm SHIPPING CONTAINER
04/14/1999EP0829097A4 Method of transfer molding electronic packages and packages produced thereby
04/14/1999EP0784517B1 Process and device for thoroughly cleaning surfaces
04/14/1999EP0620931B1 Mask for photolithography
04/14/1999EP0494184B1 Mos device with integral esd protection
04/14/1999CN2314365Y Vacuum low temperature making apparatus for optic measure of semiconductor
04/14/1999CN1214150A Semiconductor device
04/14/1999CN1213879A Protective circuit and electric circuit using protective circuit
04/14/1999CN1213863A Nitrided gallium III-V group compound semiconductor device and its mfg.method
04/14/1999CN1213860A Field-effect transistor with trench isolation structure and method for manufacturing the same
04/14/1999CN1213858A 半导体装置 Semiconductor device
04/14/1999CN1213857A Reducing oxidation stress in fabrication of devices
04/14/1999CN1213856A Method of linear arrange of metallic fuse section used on crystal chips
04/14/1999CN1213855A 半导体器件 Semiconductor devices
04/14/1999CN1213854A Semiconductor package incorporating heat dispersion plate inside resin molding and fabrication method for the same
04/14/1999CN1213852A Semiconductor device and method of manufacturing the same
04/14/1999CN1213851A Copper stud structure with refractory metal liner
04/14/1999CN1213850A Semiconductor device manufacturing method press die and guide rail
04/14/1999CN1213849A Making method of transistor
04/14/1999CN1213848A Spatially uniform gas supply and pump configuration for large wafer diameters
04/14/1999CN1213847A Substrate cleaning method and apparatus
04/14/1999CN1213846A Method of manufacturing semiconductor device using phase transition
04/14/1999CN1213845A Method and apparatus for minimizing dopant outdiffusion in gate structure
04/14/1999CN1213844A Electronic device and its mfg. method
04/14/1999CN1213843A Processing method of semiconductor substrate and semiconductor substrate
04/14/1999CN1213837A Method of sealing electronic parts with resin
04/14/1999CN1213834A High density semiconductor memory having diagonal bit lines and dual word lines