Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1999
05/14/1999WO1999023697A1 Component and method for production thereof
05/14/1999WO1999023695A1 Method of plasma processing
05/14/1999WO1999023694A1 Wiring structure of semiconductor device, electrode, and method for forming them
05/14/1999WO1999023693A1 GaN SINGLE CRYSTALLINE SUBSTRATE AND METHOD OF PRODUCING THE SAME
05/14/1999WO1999023692A1 Aligner and exposure method
05/14/1999WO1999023691A2 Improved low mass wafer support system
05/14/1999WO1999023690A1 Method of processing wafers with low mass support
05/14/1999WO1999023688A1 Cleaning dried residue of a chemical-mechanical polishing slurry
05/14/1999WO1999023684A1 Apparatus and method for secondary electron emission microscope
05/14/1999WO1999023677A1 High storage capacitors
05/14/1999WO1999023514A1 Polymer optical waveguide and method for fabricating the same
05/14/1999WO1999023472A1 Method and apparatus employing external light source for endpoint detection
05/14/1999WO1999023449A1 Method and apparatus for modeling substrate reflectivity during chemical mechanical polishing
05/14/1999WO1999023276A1 Long life high temperature process chamber
05/14/1999WO1999023102A1 Polyol-based precursors for nanoporous silica thin films
05/14/1999WO1999023101A1 Alcohol-based processors for producing nanoporous silica thin films
05/14/1999WO1999022572A2 Method for producing and controlling electronic components
05/14/1999WO1999010923B1 Method for selective plasma etch
05/14/1999WO1999009587A9 Method of etching copper for semiconductor devices
05/14/1999WO1999008325A3 Electrode means, with or without functional elements and an electrode device formed of said means
05/14/1999WO1999008156A8 Laser-illuminated stepper or scanner with energy sensor feedback
05/12/1999EP0915619A1 Circuit for detecting leaky access switches in cmos imager pixels
05/12/1999EP0915522A2 Semiconductor device comprising a capacitor and method of manufacturing the same
05/12/1999EP0915517A2 Semiconductor device
05/12/1999EP0915514A2 Semiconductor device
05/12/1999EP0915513A1 High quality factor, integrated inductor and production method thereof
05/12/1999EP0915510A1 CMOS semiconductor device and method of fabricating the same
05/12/1999EP0915509A1 Process for integrating, in a same semiconductor chip, MOS technology devices with different threshold voltages
05/12/1999EP0915508A1 Integrated circuit with highly efficient junction insulation
05/12/1999EP0915507A1 Device for controlling treating station
05/12/1999EP0915506A1 Silicon wafer carrier
05/12/1999EP0915505A1 Semiconductor device package, manufacturing method thereof and circuit board therefor
05/12/1999EP0915504A1 Semiconductor package and method of forming the same
05/12/1999EP0915503A2 Semiconductor device for use in a light valve device, and process for manufacturing the same
05/12/1999EP0915502A2 Method for heat treatment of silicon wafer and silicon wafer heat-treated by the method
05/12/1999EP0915501A1 Method of forming an Al-Ge alloy with WGe polishing stop
05/12/1999EP0915500A2 Inverted thin film resistor and method of manufacture
05/12/1999EP0915499A2 Semiconductor wafer holding apparatus and semiconductor wafer storage chamber
05/12/1999EP0915498A2 Apparatus and method for detecting a position error of a wafer
05/12/1999EP0915480A2 Non-volatile MOS memory
05/12/1999EP0915479A2 Nonvolatile semiconductor memory device and method of reading data therefrom
05/12/1999EP0915475A2 Semiconductor memory
05/12/1999EP0915384A2 Dual exposure method and device manufacturing method using the same
05/12/1999EP0915382A2 Novel polymers and photoresist compositions
05/12/1999EP0915381A1 Process of forming a pattern on a substrate
05/12/1999EP0915365A2 Thin-film transistor with light-shielding film for use in liquid crystal devices, and method of making the same
05/12/1999EP0915344A2 Test head for microstructures with interface
05/12/1999EP0915343A2 Service friendly contacting device
05/12/1999EP0915342A2 Test head for microstructures with interface
05/12/1999EP0915178A2 Sputtering target of highly purified titanium
05/12/1999EP0915177A1 Highly purified metal and sputtering target using the same
05/12/1999EP0915176A1 Wiring network and semiconductor package
05/12/1999EP0915060A1 Apparatus for supplying ozonated ultrapure water
05/12/1999EP0914908A2 Polishing apparatus and method
05/12/1999EP0914907A2 Polishing member support and polishing method
05/12/1999EP0914906A2 Polishing tool support and related method
05/12/1999EP0914904A2 Apparatus for dispensing slurry
05/12/1999EP0914679A2 Method of manufacturing a non-volatile memory combining an eprom with a standard cmos process
05/12/1999EP0914678A1 Method of filling trenches in a substrate
05/12/1999EP0914677A1 Stratified structure with a ferroelectric layer and process for producing the same
05/12/1999EP0914676A2 Quartz glass component used in the production of semiconductors
05/12/1999EP0914650A2 Method of manufacturing a body having a structure of layers
05/12/1999EP0914617A1 Process for testing a product and equipment for carrying out the process
05/12/1999EP0914496A1 Microwave applicator for an electron cyclotron resonance plasma source
05/12/1999EP0914494A1 Capped porous thin films
05/12/1999EP0914350A1 Oxygen-curable coating composition
05/12/1999EP0914216A1 Method and apparatus for chemical delivery through the brush
05/12/1999EP0885460A4 Trenched dmos transistor with lightly doped tub
05/12/1999EP0840660B1 Fluxless contacting of components
05/12/1999EP0812485B1 Bandgap tuning of semiconductor well structure
05/12/1999EP0795049B1 Epitaxial growth of silicon carbide and resulting silicon carbide structures
05/12/1999EP0745271B1 Process for producing a diffusion region adjacent to a recess in a substrate
05/12/1999EP0691676B1 Wet-etching composition for semiconductors excellent in wettability
05/12/1999EP0664051B1 METHOD FOR FORMING THIN TUNNELING WINDOWS IN EEPROMs
05/12/1999EP0628996B1 High withstand-voltage semiconductor device with dielectric isolation
05/12/1999EP0572514B1 Method and device for continuous assembling of patterned strips
05/12/1999DE19826689A1 Semiconductor component with insulating film on substrate
05/12/1999DE19755902C1 Plasma surface treatment process involves hollow cathode self-cleaning
05/12/1999DE19748523A1 Halbleiterbauelement Semiconductor device
05/12/1999DE19747388C1 Contactless chip card manufacturing method
05/12/1999CN1216635A Os rectifying schottky and ohmic junction and W/WC/TiC ohmic contacts on sic
05/12/1999CN1216618A Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
05/12/1999CN1216492A Injection molding apparatus and method
05/12/1999CN1216491A Injection molding apparatus and method
05/12/1999CN1216415A Surface acoustic wave device
05/12/1999CN1216403A Semiconductor device and method of manufacturing the same
05/12/1999CN1216401A Method for fabricating multi-level mask rom
05/12/1999CN1216400A Method of manufacturing semiconductor device having interconnection composed of doped polysilicon layer
05/12/1999CN1216398A Method of manufacturing semiconductor device with copper wiring film
05/12/1999CN1216397A Method for manufacturing semiconductor devices having dual damascene structure
05/12/1999CN1216396A Photomask and method of exposure using same
05/12/1999CN1216395A Method for controlling semiconductor equipments
05/12/1999CN1216389A 半导体集成电路 The semiconductor integrated circuit
05/12/1999CN1216377A Diffusion simulation method
05/12/1999CN1216369A Test head for microstructures with interface
05/12/1999CN1216296A Method of producing bismuth layer structured ferroelectric thin film
05/12/1999CN1216285A Stocking equipment including port with operating unit
05/12/1999CN1216266A Chemical mechanical polishing system and method therefor
05/12/1999CN1043389C Semiconductor integrated circuit device including a memory device and its producing method
05/12/1999CN1043388C Polarity-reversal protection for integrated electronic circuits in CMOS technology
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