Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1999
04/01/1999WO1999016123A1 Method for producing a doped layer in a product made of a semi-conductor and related product
04/01/1999WO1999016122A1 Hybrid johnsen-rahbek electrostatic chuck and method of fabricating same
04/01/1999WO1999016121A1 Device and method for detecting substrate
04/01/1999WO1999016120A1 Component hybridising system allowing for defective planarity
04/01/1999WO1999016119A1 Process for the preparation of silicon wafers having a controlled distribution of oxygen precipitate nucleation centers
04/01/1999WO1999016118A1 Process for fabricating semiconductor device including antireflective etch stop layer
04/01/1999WO1999016117A1 Method and apparatus for plasma processing, and method for manufacturing semiconductor substrate
04/01/1999WO1999016116A1 Method for manufacturing semiconductor device
04/01/1999WO1999016115A1 Method for producing a semiconductor structure with a plurality of implanted grooves
04/01/1999WO1999016114A1 Method for producing a composite part and composite part
04/01/1999WO1999016113A1 Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby
04/01/1999WO1999016111A1 Substrate clamping apparatus
04/01/1999WO1999016110A2 Plasma process for selectively etching oxide using fluoropropane or fluoropropylene
04/01/1999WO1999016109A1 Method and apparatus for removing a liquid from a surface
04/01/1999WO1999016108A2 Method and apparatus for fault detection and control
04/01/1999WO1999016077A1 Flash memory array
04/01/1999WO1999015934A1 Techniques for fabricating and packaging multi-wavelength semiconductor laser array devices (chips) and their applications in system architectures
04/01/1999WO1999015933A1 Optical lithography beyond conventional resolution limits
04/01/1999WO1999015845A1 Improved chemical drying and cleaning system
04/01/1999WO1999015818A1 Modular fluid flow system with integrated pump-purge
04/01/1999WO1999015712A1 Cvd chamber inner lining
04/01/1999WO1999015710A1 Cell control method and apparatus
04/01/1999WO1999015609A1 Aqueous rinsing composition
04/01/1999WO1999015582A1 Duro-plastic composite material with expandable hollow microspheres and use of the same for encapsulation
04/01/1999WO1999015452A1 Wire brake
04/01/1999WO1999015445A1 Snap-in runners for conveyor carriers
04/01/1999WO1999015345A1 Process for removing residues from a semiconductor substrate
04/01/1999WO1999015311A1 Abrasive articles comprising a fluorochemical agent for wafer surface modification
04/01/1999WO1999003152A3 Semiconductor device with memory capacitor and method of manufacturing such a device
04/01/1999WO1999003151A3 A process for manufacturing ic-components to be used at radio frequencies
04/01/1999WO1998059229A3 Pod monitor for use in a controlled environment
04/01/1999WO1998058400A3 Liquid etch endpoint detection and process metrology
04/01/1999WO1998048608A3 Microbellows actuator
04/01/1999DE19841753A1 Semiconductor static random access memory
04/01/1999DE19838650A1 Negative photoresist composition useful for highly integrated electronic circuits
04/01/1999DE19825039A1 Control of photoacid diffusion by applying an electric field in structurization of chemically enhanced photoresist to increase contrast and resolution
04/01/1999DE19818024A1 Semiconductor component with separating structure for high HV strength
04/01/1999DE19741971A1 Direct-wafer-bond silicon-oxide-silicon substrate production
04/01/1999DE19741924A1 Verfahren zum elektrochemischen Verbinden und Verbundteil A method for connecting and electrochemical composite member
04/01/1999DE19741704A1 Verfahren zur Erzeugung von Isolationen in einem Substrat A process for the production of insulation in a substrate
04/01/1999DE19740792A1 Verfahren zur Erzeugung eines Plasmas durch Einstrahlung von Mikrowellen A method of generating a plasma by microwave irradiation
04/01/1999CA2304795A1 Techniques for fabricating and packaging multi-wavelength semiconductor laser array devices (chips) and their applications in system architectures
04/01/1999CA2303979A1 Improved chemical drying and cleaning system
03/1999
03/31/1999EP0906006A2 Process for manufacturing pressure-tight via connections
03/31/1999EP0905906A2 Hybrid programmable gate arrays
03/31/1999EP0905869A2 Linear motor mechanism for exposure apparatus, and device manufacturing method using the same
03/31/1999EP0905852A1 Protection circuit with filter characteristic
03/31/1999EP0905851A1 Protection circuit for an electric pulse supply line in a semiconductor integrated device
03/31/1999EP0905798A2 Method of manufacturing optical semiconductor device
03/31/1999EP0905796A1 Polycrystalline silicon
03/31/1999EP0905792A2 Stacked-fringe integrated circuit capacitors
03/31/1999EP0905791A2 Miniaturization of a semiconductor chip
03/31/1999EP0905790A2 Nonvolatile semiconductor memory device and method for fabricating the same
03/31/1999EP0905789A1 Semiconductor device having soi structure and method for manufacturing the device
03/31/1999EP0905786A1 Capacitor having a barrier layer of transition metal phosphide, arsenide, or sulphide
03/31/1999EP0905785A2 High density semiconductor memory
03/31/1999EP0905784A2 Trench capacitor DRAM cell
03/31/1999EP0905783A1 Vertical transistor implemented in a memory cell comprising a trench capacitor
03/31/1999EP0905782A1 Integrated semiconductor circuit including electrostatic discharge protection means
03/31/1999EP0905781A2 ESD protection diode
03/31/1999EP0905780A2 Integrated circuit with a protection structure against electrostatic discharge
03/31/1999EP0905779A2 Method for manufacturing an emulation integrated circuit device as a device with two integrated circuits
03/31/1999EP0905778A2 Improved multi-level conductive structure and methods therefor
03/31/1999EP0905777A1 Method for the linear arrangement of metallic fuse sections on wafers
03/31/1999EP0905775A2 Electrically conductive paste for via-hole and method of producing monolithic ceramic substrate using the same
03/31/1999EP0905774A2 Soft passivation layer in semiconductor fabrication
03/31/1999EP0905773A2 Method of making an integrated circuit comprising forming spacers from an interlevel dielectric layer
03/31/1999EP0905772A2 Trench capacitor DRAM cell and method of making the same
03/31/1999EP0905771A2 Trench capacitor DRAM cell and method of making the same
03/31/1999EP0905770A1 Method of fabrication semiconductor chips with silicide and implanted junctions
03/31/1999EP0905769A2 Semiconductor integrated circuit device with bipolar transistors and method of fabricating same
03/31/1999EP0905768A1 A dual damascene process for metal layers and organic intermetal layers
03/31/1999EP0905767A1 Method of fabricating an SOI wafer and SOI wafer fabricated thereby
03/31/1999EP0905765A2 Endpoint detection method and apparatus
03/31/1999EP0905764A2 Method of maximizing chip yield for semiconductor wafers
03/31/1999EP0905763A2 Multilayer wiring substrate and method for producing the same
03/31/1999EP0905762A1 Method for removing moulding residues in the fabrication of plastic packages for semiconductor devices
03/31/1999EP0905761A2 Method of manufacturing a field effect transistor
03/31/1999EP0905760A2 Integrated MOS capacitor fabrication method and structure
03/31/1999EP0905759A1 Process for etching a polycristalline Si1-xGex layer or stacked layers of polycristalline Si1-xGex and Si, and application to electronic devices
03/31/1999EP0905758A2 Methods for performing planarization and recess etches and apparatus therefor
03/31/1999EP0905757A2 Improved techniques for etching a silicon dioxide-containing layer
03/31/1999EP0905756A2 Planarization of a non-conformal device layer in semiconductor fabrication
03/31/1999EP0905755A2 Process to improve dishing resistance
03/31/1999EP0905754A2 Planarization process
03/31/1999EP0905753A2 Method for fabricating a conducting electrode for semiconductor device
03/31/1999EP0905752A2 Method for fabricating conductive electrode for semiconductor device
03/31/1999EP0905751A2 Method for minimizing lateral and vertical dopant diffusion in gate structures
03/31/1999EP0905750A2 Reliable polycide gate stack with reduced sheet resistance
03/31/1999EP0905749A2 Reduction of pad erosion
03/31/1999EP0905748A1 Method of removing particles and a liquid from a surface of substrate
03/31/1999EP0905747A1 Method and apparatus for removing a liquid from a surface of a rotating substrate
03/31/1999EP0905746A1 Method of removing a liquid from a surface of a rotating substrate
03/31/1999EP0905745A2 Semiconductor device manufacting apparatus
03/31/1999EP0905723A2 Amorphous dielectric materials and capacitors employing the same
03/31/1999EP0905705A2 Space-efficient semiconductor memory having hierarchical column select line architecture
03/31/1999EP0905703A2 Semiconductor memory having space-efficient layout
03/31/1999EP0905632A2 Method for reducing circuit area by grouping compatible storage devices
03/31/1999EP0905597A1 A method and apparatus for reducing the bias current in a reference voltage circuit
03/31/1999EP0905566A2 Exposure method and method of producing a photolithographic mask
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