Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1999
10/12/1999US5965035 Selective etching silicon oxide over silicon nitride
10/12/1999US5965034 High frequency plasma process wherein the plasma is executed by an inductive structure in which the phase and anti-phase portion of the capacitive currents between the inductive structure and the plasma are balanced
10/12/1999US5965005 Mask for porous silicon formation
10/12/1999US5964980 Fitted endpoint system
10/12/1999US5964978 Method and apparatus for adhesion of semiconductor substrate
10/12/1999US5964962 Substrate for solar cell and method for producing the same; substrate treatment apparatus; and thin film solar cell and method for producing the same
10/12/1999US5964958 Methods for drying and cleaning objects using aerosols
10/12/1999US5964954 Cleaning a semiconductor wafer surface and back surface by scrubbing with a brush and a supplied liquid
10/12/1999US5964953 Removing aluminum contaminants from a silicon wafer by lapping a wafer in a slurry containing aluminum, etching, and immersing the wafer in an aqueous bath comprising an alkaline component and surfactant; low cost, efficient
10/12/1999US5964952 Method of cleaning surfaces with water and steam
10/12/1999US5964951 Rinsing solution
10/12/1999US5964947 Removable pumping channel liners within a chemical vapor deposition chamber
10/12/1999US5964944 Method of producing silicon carbide single crystal
10/12/1999US5964653 Carrier head with a flexible membrane for a chemical mechanical polishing system
10/12/1999US5964652 Apparatus for the chemical-mechanical polishing of wafers
10/12/1999US5964643 Apparatus and method for in-situ monitoring of chemical mechanical polishing operations
10/12/1999US5964564 In a tray
10/12/1999US5964561 For buffering wafer carriers to be loaded to a wafer fabrication tool
10/12/1999US5964552 Method and cutting insert for cutting screw threads in metal work pieces
10/12/1999US5964413 Apparatus for dispensing slurry
10/12/1999US5964397 Passive alignment of components with micromachined tool
10/12/1999US5964396 In an electronic module
10/12/1999US5964344 Wafer storage box and method for preventing attachment of dust caused by static electricity on a wafer storage box
10/12/1999US5964030 Method of forming an integrated circuit package assembly
10/08/1999CA2268769A1 Method of fabricating semiconductor device
10/07/1999WO1999050911A2 Electronic devices comprising thin-film transistors
10/07/1999WO1999050908A1 Method of manufacturing semiconductor device, apparatus for molding semiconductor device, and semiconductor device
10/07/1999WO1999050906A1 Semiconductor device and method for manufacturing the same, circuit substrate, and electronic device
10/07/1999WO1999050903A1 Semiconductor integrated circuit device and method for manufacturing the same
10/07/1999WO1999050902A1 Semiconductor wafer processing tapes
10/07/1999WO1999050900A1 Reduced channel length lightly doped drain transistor using a sub-amorphous large tilt angle implant to provide enhanced lateral diffusion
10/07/1999WO1999050899A1 Method for forming film
10/07/1999WO1999050898A1 Organic removal process
10/07/1999WO1999050897A1 Techniques for forming trenches in a silicon layer of a substrate in a high density plasma processing system
10/07/1999WO1999050896A1 Method for producing a semiconductor surface covered with fluorine
10/07/1999WO1999050895A1 Method of manufacturing semiconductor wafer
10/07/1999WO1999050894A1 Thin oxide film for augmenting anti-reflectivity and eliminating resist footing
10/07/1999WO1999050891A1 A programmable substrate support for a substrate system
10/07/1999WO1999050890A1 Method for making multilayer thin-film electronics
10/07/1999WO1999050889A2 Printed insulators for active and passive electronic devices
10/07/1999WO1999050888A2 Semiconductor purification apparatus and method
10/07/1999WO1999050886A1 Contamination controlling method and plasma processing chamber
10/07/1999WO1999050885A1 Parallel-antenna transformer-coupled plasma generation systems
10/07/1999WO1999050884A1 Use of variable impedance having rotating core to control coil sputter distribution
10/07/1999WO1999050883A1 Method and apparatus for improving processing and reducing charge damage in an inductively coupled plasma reactor
10/07/1999WO1999050862A1 Voltage boosting circuit including capacitor with reduced parasitic capacitance
10/07/1999WO1999050606A1 Substrate support for a thermal processing chamber
10/07/1999WO1999050475A1 A high temperature ceramic heater assembly with rf capability
10/07/1999WO1999050474A1 Chamber for reducing contamination during chemical vapor deposition
10/07/1999WO1999050473A1 Multi-ledge substrate support for a thermal processing chamber
10/07/1999WO1999050145A1 Evacuation-driven smif pod purge system
10/07/1999WO1999050025A1 Apparatus and method for film thickness measurement integrated into a wafer load/unload unit
10/07/1999WO1999050024A1 Polishing apparatus
10/07/1999WO1999050023A1 Modular machine for polishing and planing substrates
10/07/1999WO1999049998A1 Composition and method for removing photoresist materials from electronic components
10/07/1999WO1999039371A3 METHOD FOR PRODUCING A STRUCTURE SUCH AS AN INSULATOR SEMICONDUCTOR AND IN PARTICULAR SiCOI
10/07/1999WO1999036336A8 Semiconductor wafer cassette positioning and detection mechanism
10/07/1999WO1999028833A8 Method and system for improving a transistor model
10/07/1999WO1999022572A3 Method for producing and controlling electronic components
10/07/1999DE19913355A1 Opto-electronic integrated circuit capable of effecting an inter-connection (mutual conversion) between an electrical signal and an optical signal through a light emitting or light receiving layer of a compound semiconductor
10/07/1999DE19900992A1 Semiconductor device especially an SOI MOSFET
10/07/1999DE19900833A1 Vacuum test-fixture for testing of printed circuit board (PCB)
10/07/1999DE19860829A1 Halbleiterbaustein und Verfahren zu dessen Herstellung Semiconductor device and process for its preparation
10/07/1999DE19848782A1 Verfahren zum Herstellen eines Dram-Zellenkondensators A method for manufacturing a DRAM cell capacitor
10/07/1999DE19841528A1 Irradiation data production device for semiconductor production using layout templates and electron beam irradiation of surfaces
10/07/1999DE19829281C1 Hollow cylinder with reduced heat radiation for holding a substrate
10/07/1999DE19828383C1 Holder tool for picking up and holding disk shaped workpieces esp. semiconductor disks
10/07/1999DE19824040C1 Coating system especially for coating silicon wafers, particularly for plasma-enhanced CVD in solar cell production
10/07/1999DE19822048A1 Tantalum oxide etching process especially for DRAM capacitor production
10/07/1999DE19815056A1 Appliance for inspecting workpieces, e.g. assemblies, individual components
10/07/1999DE19814871A1 Verfahren und Vorrichtung zur gezielten Teilchenmanipulierung und -deposition Method and device for particle manipulation and targeted -deposition
10/07/1999DE19814834A1 Gripping and holding apparatus for a flat substrate e.g. a compact disk substrate during vacuum thin film coating
10/07/1999DE19814368A1 Modular heat sink manufacturing method
10/07/1999DE19813488A1 Cleaning semiconductor wafers in alternating treatment and rinsing stations utilizing water recycling
10/07/1999DE19813188A1 Verfahren zur einseitigen Dotierung eines Halbleiterkörpers A method for unilateral doping a semiconductor body
10/07/1999DE19812670A1 Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber
10/07/1999CA2326052A1 Method for forming film
10/06/1999EP0948057A1 Semiconductor device and process for manufacturing the same
10/06/1999EP0948054A2 Buried patterned conductor planes for semiconductor-on-insulator integrated circuit
10/06/1999EP0948053A2 Semiconductor device with vertical transistor and buried word line
10/06/1999EP0948052A2 Microcontroller device
10/06/1999EP0948051A2 Semiconductor device having a protective circuit
10/06/1999EP0948046A1 Merged bipolar and CMOS circuit and method
10/06/1999EP0948045A1 Method of fabrication of a memory device in BiCMOS technology
10/06/1999EP0948044A1 Trench isolated wells in a semiconductor device
10/06/1999EP0948043A2 Method with improved controllability of a buried layer
10/06/1999EP0948042A1 Electrostatic device for clamping wafers and other parts
10/06/1999EP0948041A2 Insulated gate transistor, a method of manufacturing same, and semiconductor integrated circuit device
10/06/1999EP0948040A1 Method for manufacturing bipolar transistor capable of supressing deterioration of transistor characteristics
10/06/1999EP0948039A1 Method of manufacturing a bipolar transistor using a sacrificial sidewall spacer
10/06/1999EP0948038A1 Method of fabricating an avalanche diode with controllable threshold
10/06/1999EP0948037A1 Silicon epitaxial wafer and method for manufacturing the same
10/06/1999EP0948036A2 Method for forming semiconductor chips with a mesa structure by sawing
10/06/1999EP0948035A1 Method for applying a dielectric cap film to a dielectric stack
10/06/1999EP0948034A1 A method for manufacturing an SO1 wafer
10/06/1999EP0948033A1 Gas composition for dry etching and process of dry etching
10/06/1999EP0948032A2 Member separating apparatus and processing apparatus
10/06/1999EP0948031A2 Semiconductor fabrication line with contamination preventing function
10/06/1999EP0947991A2 Improved dynamic random assess memory circuit and methods therefor
10/06/1999EP0947883A2 Exposure apparatus and method, device manufacturing method, and discharge lamp
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