Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/1999
10/27/1999EP0815494B1 Scanning lithography system with opposing motion
10/27/1999EP0711454B1 Method for forming solder bumps
10/27/1999CN1233077A Semiconductor memory device and method of manufacturing the same
10/27/1999CN1233076A Interconnection in integrated circuit devices
10/27/1999CN1233075A Method of fabricating ferroelectric integrated circuit using dry and wet etching
10/27/1999CN1233074A Ferroelectric integrated circuit having low sensitivity to hydrogen exposure and method for fabricating same
10/27/1999CN1233073A Semiconductor device and manufacturing method of same
10/27/1999CN1233072A Method for detecting under-etched vias
10/27/1999CN1233058A Booster circuit
10/27/1999CN1232826A Novel monomer and polymer for photoresist, and photoresist using the same
10/27/1999CN1046056C Method for forming contact holes of semiconductor device
10/26/1999US5974244 Layout pattern generation device for semiconductor integrated circuits and method therefor
10/26/1999US5973976 Logic semiconductor integrated circuit device having embedded dynamic random-access memory
10/26/1999US5973962 Method of programming non-volatile memory devices having a NAND type cell array
10/26/1999US5973953 Semiconductor memory device having improved bit line structure
10/26/1999US5973930 Mounting structure for one or more semiconductor devices
10/26/1999US5973927 Mounting structure for an integrated circuit
10/26/1999US5973911 Ferroelectric thin-film capacitor
10/26/1999US5973901 Semiconductor circuit device with high electrostatic breakdown endurance
10/26/1999US5973863 Exposure projection apparatus
10/26/1999US5973785 Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabricating semiconductor integrated circuits
10/26/1999US5973764 Vacuum assisted debris removal system
10/26/1999US5973554 Semiconductor device structured to be less susceptible to power supply noise
10/26/1999US5973544 Intermediate potential generation circuit
10/26/1999US5973535 Semiconductor circuit using feedback to latch multilevel data
10/26/1999US5973520 Output buffer circuit having a variable output impedance
10/26/1999US5973505 System for evaluating probing networks
10/26/1999US5973504 Programmable high-density electronic device testing
10/26/1999US5973459 Linear motor apparatus, and stage apparatus, exposure system and device production method using the linear motor apparatus
10/26/1999US5973447 Gridless ion source for the vacuum processing of materials
10/26/1999US5973408 Electrode structure for a semiconductor device
10/26/1999US5973406 Electronic device bonding method and electronic circuit apparatus
10/26/1999US5973405 Composite electrical contact structure and method for manufacturing the same
10/26/1999US5973404 Underfill of bumped or raised die using a barrier adjacent to the sidewall of semiconductor device
10/26/1999US5973403 Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice
10/26/1999US5973402 Metal interconnection and method for making
10/26/1999US5973400 Used for micorprocessing and have high capability
10/26/1999US5973396 Surface mount IC using silicon vias in an area array format or same size as die array
10/26/1999US5973395 IC package having a single wiring sheet with a lead pattern disposed thereon
10/26/1999US5973389 Semiconductor chip carrier assembly
10/26/1999US5973387 Tapered isolated metal profile to reduce dielectric layer cracking
10/26/1999US5973386 Semiconductor substrate having silicon oxide layers formed between polysilicon layers
10/26/1999US5973385 Annealing of wafer coated with silicon dioxide and borophosphosilicate glass layers before patterning, suppreses the pattern distortion by densification of undoped silicon dioxide
10/26/1999US5973384 Semiconductor device including a bipolar transistor
10/26/1999US5973382 Capacitor on ultrathin semiconductor on insulator
10/26/1999US5973381 MOS capacitor and MOS capacitor fabrication method
10/26/1999US5973379 Ferroelectric semiconductor device
10/26/1999US5973378 Semiconductor device with insulated gate electrode configured for reducing electric field adjacent drain
10/26/1999US5973377 Semiconductor device having FETs with shared source and drain regions
10/26/1999US5973375 Camouflaged circuit structure with step implants
10/26/1999US5973374 Flash memory array having well contact structures
10/26/1999US5973373 Read-only-memory cell arrangement using vertical MOS transistors and gate dielectrics of different thicknesses and method for its production
10/26/1999US5973372 Silicided shallow junction transistor formation and structure with high and low breakdown voltages
10/26/1999US5973371 Semiconductor device with marginless contact hole
10/26/1999US5973370 Preventing boron penetration through thin gate oxide of P-channel devices in advanced CMOS technology
10/26/1999US5973369 SRAM having P-channel TFT as load element with less series-connected high resistance
10/26/1999US5973368 Monolithic class D amplifier
10/26/1999US5973366 High voltage integrated circuit
10/26/1999US5973365 MOS transistor and lateral insulating method of a MOS transistor active region
10/26/1999US5973364 MIS semiconductor device having body-contact region
10/26/1999US5973363 CMOS circuitry with shortened P-channel length on ultrathin silicon on insulator
10/26/1999US5973362 Semiconductor device and method for fabricating the same
10/26/1999US5973361 DMOS transistors with diffusion merged body regions manufactured with reduced number of masks and enhanced ruggedness
10/26/1999US5973359 MOS type semiconductor device
10/26/1999US5973358 SOI device having a channel with variable thickness
10/26/1999US5973357 Non-volatile memory elements
10/26/1999US5973356 Ultra high density flash memory
10/26/1999US5973355 Nonvolatile semiconductor memory device and manufacturing method of the same
10/26/1999US5973354 Single polycylindrical flash memory cell having high coupling ratio
10/26/1999US5973352 Ultra high density flash memory having vertically stacked devices
10/26/1999US5973351 Semiconductor device with high dielectric constant insulator material
10/26/1999US5973350 Stacked capacitor structure for high density DRAM cells
10/26/1999US5973349 Stacked capacitor semiconductor device
10/26/1999US5973348 Semiconductor device and method for manufacturing the same
10/26/1999US5973347 Semiconductor memory cell having storage electrodes with inclined portions
10/26/1999US5973346 Low-profile shallow trench double polysilicon capacitor
10/26/1999US5973345 Self-bootstrapping device
10/26/1999US5973344 EEPROM transistor for a DRAM
10/26/1999US5973343 Semiconductor memory device having bit line directly held in contact through contact with impurity region in self-aligned manner and process of fabrication thereof
10/26/1999US5973341 Lateral thin-film silicon-on-insulator (SOI) JFET device
10/26/1999US5973340 Interconnect substrate with circuits for field-programmability and testing of multichip modules and hybrid circuits
10/26/1999US5973337 Ball grid device with optically transmissive coating
10/26/1999US5973329 Ion generating apparatus for semiconductor manufacturing equipment including magnetic field switching apparatus
10/26/1999US5973323 Apparatus and method for secondary electron emission microscope
10/26/1999US5973295 Heated tool positioned in the X,Y, and 2-directions for depositing fine lines on a substrate
10/26/1999US5973290 Laser apparatus having improved via processing rate
10/26/1999US5973263 Encapsulated electronic component and method for encapsulating an electronic component
10/26/1999US5973257 Reflector layer for the well surface of a photovoltaic generator
10/26/1999US5973187 Positive-working chemical-sensitization photoresist composition
10/26/1999US5973052 Process for attaching semiconductor device to substrate
10/26/1999US5972863 Applying a slurry containing silicon dioxide, aluminum oxide, aqueous solution comprising sodium hydroxide and deionized water
10/26/1999US5972862 Comprising a fluorine-containing compound, a water-soluble or water-miscible organic solvent, an organic acid, and a quaternary ammonium salt
10/26/1999US5972804 Process for forming a semiconductor device
10/26/1999US5972803 Depositing liner on semiconductor layer of substrate; depositing dielectric material over liner; rapidly curing dielectric layer using rapid thermal processing equipment comprising heating lamp
10/26/1999US5972802 Prevention of edge stain in silicon wafers by ozone dipping
10/26/1999US5972801 Forming oxide layer on prepared silicon carbide layer; exposing to oxidizing gas to densify oxide layer and improve interface between oxide layer and underlying silicon carbide layer
10/26/1999US5972800 Method for fabricating a semiconductor device with multi-level structured insulator
10/26/1999US5972799 Dry etching method
10/26/1999US5972796 In-situ barc and nitride etch process
10/26/1999US5972794 Silicon stencil mask manufacturing method
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