Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1999
11/02/1999US5975912 Low temperature plasma-enhanced formation of integrated circuits
11/02/1999US5975836 Apparatus for visually reading semiconductor wafer identification indicia
11/02/1999US5975835 Lead frame conveying method and conveying apparatus
11/02/1999US5975834 Two-armed transfer robot
11/02/1999US5975825 Transfer apparatus for wafers
11/02/1999US5975757 Method and apparatus for providing surface images
11/02/1999US5975741 Wafer producing apparatus
11/02/1999US5975740 Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme
11/02/1999US5975409 Ceramic ball grid array using in-situ solder stretch
11/02/1999US5975408 Solder bonding of electrical components
11/02/1999US5975308 Wafer container for storing integrated circuit wafers
11/02/1999US5975178 Manufacturing method of film carrier tape, manufacturing apparatus of film carrier tape, and film carrier tape
11/02/1999US5975112 Fluid control device
11/02/1999US5975108 Automatic drain collecting and exhausting apparatus for semiconductor fabrication system
11/02/1999US5975098 Apparatus for and method of cleaning substrate
11/02/1999US5975097 Processing apparatus for target processing substrate
11/02/1999US5975094 Method and apparatus for enhanced cleaning of a workpiece with mechanical energy
11/02/1999US5975014 Coaxial resonant multi-port microwave applicator for an ECR plasma source
11/02/1999US5975012 Deposition apparatus
11/02/1999US5975011 Apparatus for fabricating spherical shaped semiconductor integrated circuits
11/02/1999US5974903 Method and apparatus for in situ visual inspection of die products in tape and reel shipping medium
11/02/1999US5974868 Downstream monitor for CMP brush cleaners
11/02/1999US5974816 Temperature-control method and apparatus
11/02/1999US5974689 Chemical drying and cleaning system
11/02/1999US5974682 Cooling process system
11/02/1999US5974681 Apparatus for spin drying a workpiece
11/02/1999US5974680 Apparatus for use in cleaning wafers
11/02/1999US5974679 Measuring the profile of a polishing pad in a chemical mechanical polishing system
11/02/1999US5974662 Method of planarizing tips of probe elements of a probe card assembly
11/02/1999CA2171020C Ternary compound film and manufacturing method therefor
11/02/1999CA2135413C Energy sensitive materials and methods for their use
11/02/1999CA2131507C Resist materials and related processes
10/1999
10/29/1999WO1999056325A1 Semiconductor element, especially a solar cell, and method for the production thereof
10/28/1999WO1999054939A1 VERTICAL BIPOLAR TRANSISTOR, IN PARTICULAR WITH SiGe BASE HETEROJUNCTION AND METHOD FOR MAKING SAME
10/28/1999WO1999054934A1 Ultra high-speed chip interconnect using free-space dielectrics
10/28/1999WO1999054933A1 Semiconductor non-laminate package and method
10/28/1999WO1999054932A1 Leadless array package
10/28/1999WO1999054931A1 Elimination of poly cap for easy poly1 contact for nand floating gate memory
10/28/1999WO1999054930A1 Deep submicron metallization using deep uv photoresist
10/28/1999WO1999054929A2 A method for manufacturing an electronic device comprising an organic-containing material
10/28/1999WO1999054928A1 Electrostatic chuck formed by integral ceramic and metal sintering
10/28/1999WO1999054927A1 Unprocessed material storing device and carry-in/out stage
10/28/1999WO1999054926A1 Improved endpoint detection for semiconductor processes
10/28/1999WO1999054925A1 Self-aligned contacts for semiconductor device
10/28/1999WO1999054923A1 A titanium nitride diffusion barrier for use in non-silicon technologies and metallization method
10/28/1999WO1999054921A1 Automated wafer buffer for use with wafer processing equipment
10/28/1999WO1999054920A2 Electro-chemical deposition cell for face-up processing of single semiconductor substrates
10/28/1999WO1999054919A2 Manufacture of field-effect semiconductor devices
10/28/1999WO1999054918A2 Manufacture of trench-gate semiconductor devices
10/28/1999WO1999054908A1 Crystalline gas distributor for semiconductor plasma etch chamber
10/28/1999WO1999054882A1 Semiconductor memory
10/28/1999WO1999054840A1 Semiconductor computing unit
10/28/1999WO1999054694A1 Method and apparatus for monitoring plasma processing operations
10/28/1999WO1999054679A1 Non-destructive analysis of a semiconductor using reflectance spectrometry
10/28/1999WO1999054522A1 Method of passivating a cvd chamber
10/28/1999WO1999054521A2 Method and apparatus for modifying the profile of high-aspect-ratio gaps using differential plasma power
10/28/1999WO1999054427A1 Aqueous composition, aqueous cutting fluid using the same, method for preparation thereof, and cutting method using the cutting fluid
10/28/1999WO1999054372A1 Adhesive and encapsulating material with fluxing properties
10/28/1999WO1999054254A1 Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use
10/28/1999WO1999054088A1 A method of chemical mechanical polishing a metal layer
10/28/1999WO1999044223A3 Process of shallow trench isolating active devices to avoid sub-threshold kinks arising from corner effects without additional processing
10/28/1999WO1999041774A3 Method of manufacturing integrated circuits in which malfunctioning apparatuses are detected
10/28/1999WO1999041423A3 Plasma processes for depositing low dielectric constant films
10/28/1999WO1999040630A3 Semiconductor device with a bipolar transistor, and method of manufacturing such a device
10/28/1999WO1999025006A3 Electrostatic chuck having improved gas conduits
10/28/1999WO1999019777A8 Automated substrate processing systems and methods
10/28/1999DE19918001A1 Heat resistant synthetic quartz glass for equipment used in the heat treatment of semiconductor materials or UV optical components
10/28/1999DE19915075A1 Ferro-electric random access memory (FRAM) with capacitor board lines
10/28/1999DE19860052A1 Semiconductor component with memory node capacitor structure
10/28/1999DE19817794A1 High purity aqueous hydrogen peroxide solution useful for electronic component substrate cleaning
10/28/1999DE19816449A1 Verfahren zum Herstellen eines SOI-Wafers für niederohmige Hochvolt-Halbleiterbauelemente A method for manufacturing an SOI wafer for low-high-voltage semiconductor devices
10/28/1999CA2328952A1 Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use
10/28/1999CA2328624A1 Non-destructive analysis of a semiconductor using reflectance spectrometry
10/27/1999EP0952662A2 Booster circuit
10/27/1999EP0952617A1 Gallium nitride-based III-V group compound semiconductor device and method of producing the same
10/27/1999EP0952614A1 Field effect device with polycrystaline silicon channel
10/27/1999EP0952611A2 Semiconductor device
10/27/1999EP0952610A2 Microelectronic device package containing a liquid and method
10/27/1999EP0952609A2 SC-2 based pre-thermal treatment wafer cleaning process
10/27/1999EP0952588A2 Boosting circuit with boosted voltage limited
10/27/1999EP0952490A2 Lens barrel and projection aligner
10/27/1999EP0952488A2 Reticle inspecting apparatus capable of shortening an inspecting time
10/27/1999EP0952239A1 Sputtering target based on highly purified titanium
10/27/1999EP0952156A2 Aluminium complex derivatives for chemical vacuum evaporation and the method of producing the same
10/27/1999EP0952128A1 An anti-corrosion ceramic member
10/27/1999EP0951980A2 Apparatus for cleaving crystals
10/27/1999EP0951963A2 Wafer flattening process, wafer flattening system, and wafer
10/27/1999EP0951740A1 Lateral dmos transistor for rf/mircrowave applications
10/27/1999EP0951739A1 High density electrical connectors
10/27/1999EP0951738A1 Arrangement for controlling parallel lines in a storage cell arrangement
10/27/1999EP0951736A1 Bumps in grooves for elastic positioning
10/27/1999EP0951734A1 Process for selective application of solder
10/27/1999EP0951733A1 Low temperature metal fill regions for ohmic contacts and via openings
10/27/1999EP0951732A2 Testing station for semiconductor wafers or wafer fragments
10/27/1999EP0951731A2 Programmable integrated passive devices and methods therefor
10/27/1999EP0951657A1 Three-mirror system for lithographic projection, and projection apparatus comprising such a mirror system
10/27/1999EP0951637A1 Generator for generating voltage proportional to absolute temperature
10/27/1999EP0951631A1 Spherical shaped semiconductor integrated circuit
10/27/1999EP0853820A4 Nonvolatile reprogrammable interconnect cell with fn tunneling and programming method thereof
10/27/1999EP0853815A4 Formation of source/drain from doped glass
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