| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/18/2000 | US6015742 Method for fabricating inductor of semiconductor device |
| 01/18/2000 | US6015741 Method for forming self-aligned contact window |
| 01/18/2000 | US6015740 Method of fabricating CMOS devices with ultra-shallow junctions and reduced drain area |
| 01/18/2000 | US6015739 Method of making gate dielectric for sub-half micron MOS transistors including a graded dielectric constant |
| 01/18/2000 | US6015737 Production method of a vertical type MOSFET |
| 01/18/2000 | US6015736 Method and system for gate stack reoxidation control |
| 01/18/2000 | US6015735 Method for forming a multi-anchor DRAM capacitor and capacitor formed |
| 01/18/2000 | US6015734 Method for improving the yield on dynamic random access memory (DRAM) with cylindrical capacitor structures |
| 01/18/2000 | US6015733 Process to form a crown capacitor structure for a dynamic random access memory cell |
| 01/18/2000 | US6015732 Dual gate oxide process with increased reliability |
| 01/18/2000 | US6015731 Method of manufacturing a semiconductor memory device |
| 01/18/2000 | US6015730 Integration of SAC and salicide processes by combining hard mask and poly definition |
| 01/18/2000 | US6015729 Integrated chip multilayer decoupling capcitors |
| 01/18/2000 | US6015728 Method for fabricating SRAM polyload resistor |
| 01/18/2000 | US6015727 Damascene formation of borderless contact MOS transistors |
| 01/18/2000 | US6015726 Semiconductor device and method of producing the same |
| 01/18/2000 | US6015725 Vertical field effect transistor and manufacturing method thereof |
| 01/18/2000 | US6015724 Manufacturing method of a semiconductor device |
| 01/18/2000 | US6015723 Lead frame bonding distribution methods |
| 01/18/2000 | US6015722 Minimizing mechanical stresses between chip and chip package or interconnection circuit device |
| 01/18/2000 | US6015720 Method of forming polycrystalline semiconductor thin film |
| 01/18/2000 | US6015718 Indentification of the composition of particles in a process chamber |
| 01/18/2000 | US6015717 Method for monitoring rapid thermal process integrity |
| 01/18/2000 | US6015652 Treating photoresist used for lift-off, prior to high temperature processing, to dimensionally stabilize pattern |
| 01/18/2000 | US6015650 Method for forming micro patterns of semiconductor devices |
| 01/18/2000 | US6015644 Process for device fabrication using a variable transmission aperture |
| 01/18/2000 | US6015643 Mask used in charged particle beam projecting apparatus |
| 01/18/2000 | US6015596 Fluorine-containing silicon network polymer, insulating coating thereof, and electronic devices therewith |
| 01/18/2000 | US6015591 Deposition method |
| 01/18/2000 | US6015506 Polishing computer disks by bringing surface of disk into contact with polishing pad and applying a dispersion to the rigid disk |
| 01/18/2000 | US6015505 Chemical wet etching of metal films in semiconductor applications using solution comprising hydrogen peroxide, potassium sulfate, potassium edta; (c4) controlled collapse chip connector |
| 01/18/2000 | US6015503 Method and apparatus for surface conditioning |
| 01/18/2000 | US6015478 Vacuum processing method |
| 01/18/2000 | US6015477 Point-of-use ammonia purification for electronic component manufacture |
| 01/18/2000 | US6015467 Using solvent mixture containing dipropylene glycol monoalkyl ether to dissolve and remove photoresist film |
| 01/18/2000 | US6015465 Temperature control system for semiconductor process chamber |
| 01/18/2000 | US6015464 Film growth system and method for spherical-shaped semiconductor integrated circuits |
| 01/18/2000 | US6015462 Semiconductor processing workpiece position sensing |
| 01/18/2000 | US6015457 Solution for coating a semiconductor device comprising a poly(hydrido siloxane) coolymer and solvent |
| 01/18/2000 | US6015333 Method of forming planarized layers in an integrated circuit |
| 01/18/2000 | US6015227 Thermoplastic foam extrusion screw with circulation channels |
| 01/18/2000 | US6015083 Direct solder bumping of hard to solder substrate |
| 01/18/2000 | US6015082 Surfaces coated with thin layers of metals or alloys, compressed and heated above the melting points to form solder joints |
| 01/18/2000 | US6015081 Electrical connections using deforming compression |
| 01/18/2000 | US6015079 Positioning device for controlling the position of a workpiece in a horizontal plane |
| 01/18/2000 | US6014979 Sacrificial collar maintained around substrate to add or remove species from process gas |
| 01/18/2000 | US6014965 Apparatus for recognizing the shape of a semiconductor wafer |
| 01/18/2000 | US6014817 Semiconductor wafer processing system |
| 01/18/2000 | CA2177790C Pressure type flow rate control apparatus |
| 01/18/2000 | CA2121608C Device fabrication entailing synchrotron radiation |
| 01/13/2000 | WO2000002259A1 A thin-film opto-electronic device and a method of making it |
| 01/13/2000 | WO2000002258A1 Large area x-ray imager with vented seam and method of fabrication |
| 01/13/2000 | WO2000002253A2 Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same |
| 01/13/2000 | WO2000002252A1 An electrically erasable programmable split-gate memory cell |
| 01/13/2000 | WO2000002251A1 Thin film transistor and liquid crystal display |
| 01/13/2000 | WO2000002250A1 Vertical semiconductor element with reduced electric surface field |
| 01/13/2000 | WO2000002249A2 Integrated circuit with p-n junctions with reduced defects |
| 01/13/2000 | WO2000002248A1 Semiconductor integrated circuit and method for manufacturing the same |
| 01/13/2000 | WO2000002247A1 Method and device for producing an interconnection between a carrier element and at least one component contained therein |
| 01/13/2000 | WO2000002246A1 Double-sided electronic device |
| 01/13/2000 | WO2000002245A1 Semiconductor device, method of manufacture thereof, circuit board, and electronic device |
| 01/13/2000 | WO2000002244A1 Semiconductor device, method of manufacture thereof, circuit board, and electronic device |
| 01/13/2000 | WO2000002243A1 Semiconductor device, method of manufacture, circuit board, and electronic device |
| 01/13/2000 | WO2000002242A1 Mould, encapsulating device and method of encapsulation |
| 01/13/2000 | WO2000002241A1 Vapor deposition routes to nanoporous silica |
| 01/13/2000 | WO2000002240A1 METHOD FOR SYNTHESIZING SINGLE CRYSTAL AlN THIN FILMS OF LOW RESISTANT n-TYPE AND LOW RESISTANT p-TYPE |
| 01/13/2000 | WO2000002239A1 Exposure system, method of manufacture thereof, method of wafer transfer, device and method of manufacture device |
| 01/13/2000 | WO2000002238A1 Post etch cleaning composition and process for dual damascene system |
| 01/13/2000 | WO2000002237A1 Dram memory capacitor and method for the production thereof |
| 01/13/2000 | WO2000002236A2 Radio frequency identification system and method for tracking silicon wafers |
| 01/13/2000 | WO2000002235A1 Method of planarizing integrated circuits |
| 01/13/2000 | WO2000002234A2 Method and device for cleaning substrates |
| 01/13/2000 | WO2000002233A2 Simplified process for producing nanoporous silica |
| 01/13/2000 | WO2000002228A1 Double slit-valve doors for plasma processing |
| 01/13/2000 | WO2000002092A1 Lighting system for microlithography, comprising a depolarizer |
| 01/13/2000 | WO2000002058A1 Method and device for determining the dependence of a first measured quantity on a second measured quantity |
| 01/13/2000 | WO2000002028A1 Method of fabricating silicon capacitive sensor |
| 01/13/2000 | WO2000002014A1 Dual output capacitance interface circuit |
| 01/13/2000 | WO2000001868A1 Geometric shape control of thin film ferroelectrics |
| 01/13/2000 | WO2000001867A1 Method for synthesizing n-type diamond having low resistance |
| 01/13/2000 | WO2000001866A1 Method for crystallising a semiconductor material and crystallising system |
| 01/13/2000 | WO2000001782A1 Electroconductive, thermoplastic and heat-activated adhesive film |
| 01/13/2000 | WO2000001615A1 Method and apparatus for the preparation of high purity phosphine or other gas |
| 01/13/2000 | WO2000001495A1 Process for coating a solid surface with a liquid composition |
| 01/13/2000 | WO1999054929A3 A method for manufacturing an electronic device comprising an organic-containing material |
| 01/13/2000 | WO1999049501A3 A high temperature multi-layered alloy heater assembly and related methods |
| 01/13/2000 | DE19931784A1 Semiconductor substrate for electronic circuit elements |
| 01/13/2000 | DE19931324A1 Silicon carbide MOS device, especially a vertical silicon carbide MOSFET, is produced |
| 01/13/2000 | DE19931278A1 Test card for IC testing device uses needle contacts coupled to contact test object |
| 01/13/2000 | DE19930296A1 Layer topology masking technique for photolithography |
| 01/13/2000 | DE19930295A1 Columnar capacitor storage node useful in a DRAM |
| 01/13/2000 | DE19928572A1 Verfahren und Vorrichtung zur Tauchbehandlung von Halbleitern und anderen Einrichtungen Method and device for immersion treatment of semiconductors and other devices |
| 01/13/2000 | DE19925653A1 Substrate positioning control apparatus in cleaning processing system for glass wafer used in liquid crystal display |
| 01/13/2000 | DE19925416A1 Apparatus and method for forming a semiconductor device photoresist pattern, especially for a contact hole |
| 01/13/2000 | DE19907070A1 Semiconductor device with contact vias extending through an interlayer insulation layer |
| 01/13/2000 | DE19905719A1 Integrated semiconductor circuit with test connections |
| 01/13/2000 | DE19849746A1 Resistors are produced in ICs e.g. memory and logic circuits |
| 01/13/2000 | DE19849745A1 Local connection production method on a substrate e.g. in the production of complex circuits such as microprocessors |
| 01/13/2000 | DE19849743A1 Embedded DRAM, used in a microprocessor or digital signal processor |
| 01/13/2000 | DE19830582A1 Photo structured dielectric used in the production of integrated capacitor |