Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2001
01/10/2001EP1067061A1 Clean box
01/10/2001EP1066928A2 Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
01/10/2001EP1066926A1 Method of polishing at least one face of a silicium based workpiece
01/10/2001EP1066925A2 Closed loop control of wafer polishing in a chemical mechanical polishing system
01/10/2001EP1066924A2 Carrier head with a flexible membrane and an edge load ring
01/10/2001EP1066923A2 Carrier head with a modified flexible membrane
01/10/2001EP1066922A2 Carrier head with pressurizable bladder
01/10/2001EP1066921A1 Planarization apparatus
01/10/2001EP1066887A1 Potted transducer array with matching network in a multiple pass configuration
01/10/2001EP1066652A2 Trench-gate semiconductor devices and their manufacture
01/10/2001EP1066650A1 No clean flux for flip chip assembly
01/10/2001EP1066649A1 Method and apparatus for testing of sheet material
01/10/2001EP1066555A1 Integration of security modules on an integrated circuit
01/10/2001EP1066418A1 Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films
01/10/2001EP1066416A1 Passivating etchants for metallic particles
01/10/2001EP1066365A1 Acidic composition containing fluoride for removal of photoresists and etch residues
01/10/2001EP1066133A1 Polishing apparatus
01/10/2001EP1066123A1 Improvement in aqueous stripping and cleaning compositions
01/10/2001EP0929367B1 Method and device for treating substrates
01/10/2001EP0864171B1 Forming contacts on semiconductor substrates for radiation detectors and imaging devices
01/10/2001EP0859672A4 Process for brush cleaning
01/10/2001CN1279822A Semiconductor device and manufacture thereof
01/10/2001CN1279821A Stress relaxation electronic part, stress relaxation wiring board and stress relaxation electronic part mounted body
01/10/2001CN1279733A Method for producing a gallium nitride epitaxial layer
01/10/2001CN1279732A Charge for vertical boat growth process and use thereof
01/10/2001CN1279650A Ultra-purity water producing apparatus by high temperature process and chemical liquid preparing system including the same
01/10/2001CN1279517A Twin film field effect transistors and use thereof
01/10/2001CN1279516A Semiconductor device and manufacture thereof
01/10/2001CN1279515A Method for manufacturing photoelectric device
01/10/2001CN1279513A Capacitors in semiconductor memory and manufacture thereof
01/10/2001CN1279511A Semiconductor device and manufacture thereof
01/10/2001CN1279510A Method for forming capacitors in semiconductor memory
01/10/2001CN1279509A Isolating axial ring of nitride lining for improvement of dynamic random memory process
01/10/2001CN1279508A Semiconductor wafer module and its making method
01/10/2001CN1279507A Semiconductor wafer device and its making method
01/10/2001CN1279506A Flat grinding device
01/10/2001CN1279505A Technology for making device with silicon (SOI) circuit on insulating layer by low-dosage oxygen injection
01/10/2001CN1279504A Growth method of III-IV nitride semiconductors and gas phase growth apparatus
01/10/2001CN1279464A Magnetic head assembly with IC core arranged on floatation part of mangetic disc by ultrasonic welding process
01/10/2001CN1279425A Automatic system for semiconductor works and method for resetting processing method
01/10/2001CN1279424A Automatic system for semiconductor works and method for controlling measurement arrangement
01/10/2001CN1279423A System and method for monitoring operation failure of stacker for automatic manufacture of semiconductor
01/10/2001CN1060590C Flash EEPROM cell and method of making the same
01/10/2001CN1060589C Method of making mask ROM
01/10/2001CN1060588C Method for fabricating semiconductor device
01/10/2001CN1060587C Method of manufacturing semiconductor device
01/10/2001CN1060424C Polishing disc for chemical-mechanical polishing and making method
01/09/2001US6173235 Method of estimating lifetime of floating SOI-MOSFET
01/09/2001US6173116 Furnace for rapid thermal processing
01/09/2001US6172934 Semiconductor memory device preventing a malfunction caused by a defective main word line
01/09/2001US6172930 Semiconductor integrated circuit device, method of investigating cause of failure occurring in semiconductor integrated circuit device and method of verifying operation of semiconductor integrated circuit device
01/09/2001US6172910 Test cell for analyzing a property of the flash EEPROM cell and method of analyzing a property of the flash EEPROM cell using the same
01/09/2001US6172905 Method of operating a semiconductor device
01/09/2001US6172904 Magnetic memory cell with symmetric switching characteristics
01/09/2001US6172902 Non-volatile magnetic random access memory
01/09/2001US6172898 Semiconductor memory device
01/09/2001US6172897 Semiconductor memory and write and read methods of the same
01/09/2001US6172896 Layout arrangements of fuse boxes for integrated circuit devices, including bent and straight fuses
01/09/2001US6172878 Multi-element module and production process thereof
01/09/2001US6172825 Catoptric reduction projection optical system and projection exposure apparatus and method using same
01/09/2001US6172820 Laser irradiation device
01/09/2001US6172749 Method of and apparatus for detecting a surface condition of a wafer
01/09/2001US6172740 Projection exposure apparatus and device manufacturing method
01/09/2001US6172739 Exposure apparatus and method
01/09/2001US6172733 Liquid crystal display including conductive layer passing through multiple layers and method of manufacturing same
01/09/2001US6172671 Active matrix type display device and fabrication method of the same
01/09/2001US6172547 Semiconductor integrated circuit capable of driving large loads within its internal core area
01/09/2001US6172521 Programmable logic IC having memories for previously storing a plurality of configuration data and a method of reconfigurating same
01/09/2001US6172425 Encapsulation of transmitter and receiver modules
01/09/2001US6172424 Resin sealing type semiconductor device
01/09/2001US6172422 Semiconductor device and a manufacturing method thereof
01/09/2001US6172421 Semiconductor device having an intermetallic layer on metal interconnects
01/09/2001US6172420 Silicon delta-doped gallium arsenide/indium arsenide heterojunction OHMIC contact
01/09/2001US6172419 Low profile ball grid array package
01/09/2001US6172418 Semiconductor device and method for fabricating the same
01/09/2001US6172414 Apparatus and method for snap-on thermo-compression bonding
01/09/2001US6172412 High frequency microelectronics package
01/09/2001US6172411 Self-aligned contact structures using high selectivity etching
01/09/2001US6172407 Source/drain and lightly doped drain formation at post interlevel dielectric isolation with high-K gate electrode design
01/09/2001US6172405 Semiconductor device and production process therefore
01/09/2001US6172402 Integrated circuit having transistors that include insulative punchthrough regions and method of formation
01/09/2001US6172401 Transistor device configurations for high voltage applications and improved device performance
01/09/2001US6172399 Formation of ultra-shallow semiconductor junction using microwave annealing
01/09/2001US6172398 Trenched DMOS device provided with body-dopant redistribution-compensation region for preventing punch through and adjusting threshold voltage
01/09/2001US6172397 Non-volatile semiconductor memory device
01/09/2001US6172396 ROM structure and method of manufacture
01/09/2001US6172395 Method of manufacture of self-aligned floating gate, flash memory cell and device manufactured thereby
01/09/2001US6172394 Non-volatile semiconductor memory device having a floating gate with protruding conductive side-wall portions
01/09/2001US6172393 Nonvolatile memory having contactless array structure which can reserve sufficient on current, without increasing resistance, even if width of bit line is reduced and creation of hyperfine structure is tried, and method of manufacturing nonvolatile memory
01/09/2001US6172392 Boron doped silicon capacitor plate
01/09/2001US6172391 DRAM cell arrangement and method for the manufacture thereof
01/09/2001US6172390 Semiconductor device with vertical transistor and buried word line
01/09/2001US6172389 Semiconductor memory device having a reduced area for a resistor element
01/09/2001US6172387 Semiconductor interconnection structure and method
01/09/2001US6172386 A capacitor comprising a ferroelectric film formed from a group lead zirconate titanium and lead lanthanum zirconate titanate where having a relatively larger amount of titanium constituent than zinconate constituent
01/09/2001US6172385 Multilayer ferroelectric capacitor structure
01/09/2001US6172384 Field effect transistor and a method for manufacturing a same
01/09/2001US6172383 Power MOSFET having voltage-clamped gate
01/09/2001US6172382 Nitride semiconductor light-emitting and light-receiving devices
01/09/2001US6172381 Source/drain junction areas self aligned between a sidewall spacer and an etched lateral sidewall