| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/12/2001 | WO2001049362A1 Method of forming vertical, hollow needles within a semiconductor substrate |
| 07/12/2001 | WO2001008207A8 Method and apparatus for anisotropic etching |
| 07/12/2001 | WO2001004944A3 Method and apparatus for simultaneously cleaning and annealing a workpiece |
| 07/12/2001 | WO2001004937A3 Method and apparatus for directing constituents through a processing chamber |
| 07/12/2001 | WO2001001454A3 Atmospheric wafer transfer module with nest for wafer transport robot and method of implementing same |
| 07/12/2001 | WO2000077833A3 Process chamber assembly with reflective hot plate |
| 07/12/2001 | WO2000077828A3 Method of manufacturing a variable work function gate mosfet using a dummy gate |
| 07/12/2001 | WO2000065636A8 A bipolar transistor |
| 07/12/2001 | WO2000033356A3 Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces |
| 07/12/2001 | WO2000015429A9 Composite wire with noble metal cladding |
| 07/12/2001 | US20010007809 Apparatus for polishing wafer and method of doing the same |
| 07/12/2001 | US20010007798 For semiconductors |
| 07/12/2001 | US20010007797 Method of forming a tungsten plug in a semiconductor device |
| 07/12/2001 | US20010007796 Polishing polymer surfaces on non-porous CMP pads |
| 07/12/2001 | US20010007795 Method for polishing surface of semicon-ductor device substrate |
| 07/12/2001 | US20010007793 Vapor deposition using organometallic complex |
| 07/12/2001 | US20010007792 Microelectronic device fabricating method, integrated circuit, and intermediate construction |
| 07/12/2001 | US20010007791 Etching aluminum, or alloy thereof, with halogen compound; removing residues |
| 07/12/2001 | US20010007790 Pre-semiconductor process implant and post-process film separation |
| 07/12/2001 | US20010007789 Doping, heating, separation |
| 07/12/2001 | US20010007788 Overcoating with polyimide; removal to form spacers |
| 07/12/2001 | US20010007786 Semiconductor wafer, wafer alignment patterns and method of forming wafer alignment patterns |
| 07/12/2001 | US20010007785 Doping semiconductor with deuterium |
| 07/12/2001 | US20010007782 Integrated circuit chip and method for fabricating the same |
| 07/12/2001 | US20010007781 Semiconductor device and manufacturing method thereof |
| 07/12/2001 | US20010007780 Resin-molded semicondutor device, method for manufacturing the same, and leadframe |
| 07/12/2001 | US20010007779 Method for manufacturing fringe field switching mode liquid crystal display device |
| 07/12/2001 | US20010007778 Continuous monitoring synchronization signals |
| 07/12/2001 | US20010007777 Capacitor, bipolar transistor |
| 07/12/2001 | US20010007772 Catalytic converter; light sensor |
| 07/12/2001 | US20010007734 Position detecting method, position detecting unit, exposure method, exposure apparatus, a computer readable recording medium, and device manufacturing method |
| 07/12/2001 | US20010007732 Forming plurality of exposure openings; overcoating with photoresist; patterning |
| 07/12/2001 | US20010007682 Method for precise molding and alignment of structures on a substrate using a stretchable mold |
| 07/12/2001 | US20010007630 Substrate transfer system and substrate processing apparatus |
| 07/12/2001 | US20010007540 Input/output line structure of a semiconductor memory device |
| 07/12/2001 | US20010007536 Electronic memory circuit and related manufacturing method |
| 07/12/2001 | US20010007531 Circuit for driving nonvolatile ferroelectric memory |
| 07/12/2001 | US20010007498 Semiconductor wafer inspection machine |
| 07/12/2001 | US20010007432 Charge pump circuit |
| 07/12/2001 | US20010007405 Lamp unit for light radiation type heating and processing device |
| 07/12/2001 | US20010007379 Saw tooth mold |
| 07/12/2001 | US20010007374 Effective diffusion barrier process and device manufactured thereby |
| 07/12/2001 | US20010007372 Micromachined chip scale package |
| 07/12/2001 | US20010007371 IC package and method of making the same |
| 07/12/2001 | US20010007369 Edge termination for silicon power devices |
| 07/12/2001 | US20010007368 Semiconductor devices and manufacturing methods thereof |
| 07/12/2001 | US20010007367 Semiconductor substrate, semiconductor device, and processes of production of same |
| 07/12/2001 | US20010007366 Ferroelectric random access memory device and fabrication method therefor |
| 07/12/2001 | US20010007365 Methods of fabricating integrated circuit memories including titanium nitride bit lines |
| 07/12/2001 | US20010007364 Semiconductor device |
| 07/12/2001 | US20010007362 Thin film transistor, liquid crystal display and fabricating methods thereof |
| 07/12/2001 | US20010007358 Liquid crystal display and manufacturing process of thin film transistor used therein |
| 07/12/2001 | US20010007357 Semiconductor device and a manufacturing method thereof |
| 07/12/2001 | US20010007356 Integrated circuit and fabricating method and evaluating method of integrated circuit |
| 07/12/2001 | US20010007348 Image-sensing apparatus |
| 07/12/2001 | US20010007288 Method for assembling a carrier and a semiconductor device |
| 07/12/2001 | US20010007285 Resin sealed semiconductor device, circuit member for use therein and method of manufacturing circuit member |
| 07/12/2001 | US20010007275 Etching silicon device |
| 07/12/2001 | US20010007262 Method of manufacturing semiconductor device |
| 07/12/2001 | US20010007259 For semiconductors |
| 07/12/2001 | US20010007254 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 07/12/2001 | US20010007253 Method of cutting CSP substrates |
| 07/12/2001 | US20010007246 Controlled heating; solar cells |
| 07/12/2001 | US20010007242 Methods of fabricating gallium nitride semiconductor layers by lateral overgrowth |
| 07/12/2001 | US20010007241 Improved purity silicon wafer for use in advanced semiconductor devices |
| 07/12/2001 | US20010007240 High efficiency silicon wafer optimized for advanced semiconductor devices |
| 07/12/2001 | US20010007239 Process for producing compound semiconductor single crystal |
| 07/12/2001 | US20010007175 Vacuum processing apparatus and operating method therefor |
| 07/12/2001 | US20010007174 Exhaust process and film depositing method using the exhaust process |
| 07/12/2001 | US20010007167 Fabrication method of solid electrolytic capacitor |
| 07/12/2001 | DE19962231A1 Verfahren zur Herstellung mikromechanischer Strukturen A process for producing micromechanical structures |
| 07/12/2001 | DE19962176A1 Production of a ball grid array housing used for a chip comprises applying a copper foil with conducting pathways on a carrier and inserting reinforcements into the foil and/or into the carrier |
| 07/12/2001 | DE19962170A1 Substrahthalter Substrahthalter |
| 07/12/2001 | DE19962169A1 Vorrichtung zum Behandeln von Substraten Apparatus for processing substrates |
| 07/12/2001 | DE19958328A1 Production of an electrical connection between chip contact element units and external contact connections comprises pressing the contact element material into the contact connection material by stamping or pressing |
| 07/12/2001 | DE19946492A1 Layer adherence intensity determination |
| 07/12/2001 | DE10100424A1 Korrosions- und abnutzungsbeständige, dünne Diamantfilmbeschichtung, Herstellungsverfahren und Anwendungen dafür Corrosion and wear-resistant, thin diamond film coating, manufacturing methods and applications for |
| 07/12/2001 | DE10065348A1 Ion implantation arrangement alters beam deflection frequency according to at least one of ion type and beam energy, alters minimum scan number according to deflection frequency change |
| 07/12/2001 | DE10059808A1 Verfahren zur Verbindung einer integrierten Schaltung und einer flexiblen Schaltung A method of connecting an integrated circuit and a flexible circuit |
| 07/12/2001 | DE10059637A1 Semiconductor wafer processing apparatus has emission unit to respectively emit APM and pure water from inner chamber and outer chamber for recycling |
| 07/12/2001 | DE10058891A1 Circuit for internal voltage generation has level shifters connected to reference voltage and internal supply voltage connections to reduce voltages to defined levels, differential amplifier |
| 07/12/2001 | DE10054447A1 Semiconductor memory has cell-supply repair circuits and row decoder circuits respectively set between neighboring cell blocks, such that cell supply conductors are set between word lines of decoder circuits |
| 07/12/2001 | DE10051890A1 Semiconductor wafer dividing process using chemical etching process, involves performing corrosion process of cutting path by chemical etching and then is divided for every circuit |
| 07/12/2001 | DE10050581A1 Reflective optical component for projection exposure device, has internal surface with reflecting sections that reflect light with wavelength shorter than 157 nanometers |
| 07/12/2001 | DE10042429A1 Oberflächenstabilisierung bei siliciumreichem Silicaglas unter Verwednung von verlängerter Post-Ablagerungsverzögerungszeit Surface stabilization in silicon-rich silica glass under Verwednung of prolonged post-deposition delay time |
| 07/12/2001 | DE10041039A1 Production of a contact structure used in the production of multiple layer switching structures uses a multi-stage process of forming insulating layers on a substrate with isotropic etching to form openings for conducting material |
| 07/12/2001 | DE10035080A1 Thermal treatment apparatus for various types of substrate has a pressure tight transparent cover |
| 07/12/2001 | DE10031481A1 Apparatus for resetting process recipe used in semiconductor factory automation (PA) system has resetting block that resets process recipe in response to reset command inputted from operator if process recipe is not conformable |
| 07/12/2001 | DE10031478A1 Halbleiterfabrikautomatisierungs-System und Verfahren zum Steuern einer Messanlage zur Messung von Halbleiterwafern Semiconductor factory automation system and method for controlling a measuring system for measuring semiconductor wafers |
| 07/12/2001 | DE10000645A1 Production of a bipolar transistor comprises applying a dopant of the conducting type of the collector on the lateral side of the inner collector region and adjusting a rise in the collector doping |
| 07/12/2001 | DE10000003A1 Production of trenches comprises applying mask layers to a semiconductor wafer, applying a lacquer mask to one mask layer, structuring the recesses in the mask layer and structuring recesses in the other mask layer |
| 07/12/2001 | CA2395656A1 Anti tamper encapsulation for an integrated circuit |
| 07/11/2001 | EP1115164A2 Magnetoresistive device and magnetic memory using the same |
| 07/11/2001 | EP1115163A1 Semiconductor light-emitting device and method for manufacturing the same |
| 07/11/2001 | EP1115156A1 Ferroelectric memory device and method of manufacturing the same |
| 07/11/2001 | EP1115153A2 Semiconductor substrate and process for its production |
| 07/11/2001 | EP1115150A2 Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor |
| 07/11/2001 | EP1115149A1 Method and device for applying ic sealant with bump |
| 07/11/2001 | EP1115148A1 Vapor growth method for metal oxide dielectric film and vapor growth device for metal oxide dielectric material |
| 07/11/2001 | EP1115146A1 Method and apparatus for vacuum processing |