| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 07/24/2001 | US6265244 Method for mounting semiconductor elements |
| 07/24/2001 | US6265243 Process for fabricating organic circuits |
| 07/24/2001 | US6265235 Method of sectioning of photoresist for shape evaluation |
| 07/24/2001 | US6265234 Alignment system for a spherical device |
| 07/24/2001 | US6265233 Method for determining crack limit of film deposited on semiconductor wafer |
| 07/24/2001 | US6265232 Yield based, in-line defect sampling method |
| 07/24/2001 | US6265231 Process control via valve position and rate of position change monitoring |
| 07/24/2001 | US6265230 Methods to cure the effects of hydrogen annealing on ferroelectric capacitors |
| 07/24/2001 | US6265138 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls |
| 07/24/2001 | US6265137 Exposure method and device producing method using the same |
| 07/24/2001 | US6265135 Positive-working electron beam or X-ray resist composition |
| 07/24/2001 | US6265129 Form a resist pattern that had a micro-groove in each element and which yet was satisfactory in feature profile and resolution. |
| 07/24/2001 | US6265119 Method for producing semiconductor devices |
| 07/24/2001 | US6265114 Method of generating mask data in fabricating semiconductor devices |
| 07/24/2001 | US6265113 Stress adjustment method of X-ray mask |
| 07/24/2001 | US6265089 Electronic devices grown on off-axis sapphire substrate |
| 07/24/2001 | US6265085 Bonding material and bump |
| 07/24/2001 | US6265042 Adhesive tape for electronic parts |
| 07/24/2001 | US6264906 Method for heat treatment of silicon substrate, substrate treated by the method, and epitaxial wafer utilizing the substrate |
| 07/24/2001 | US6264862 Method for manufacturing a plug |
| 07/24/2001 | US6264852 Substrate process chamber and processing method |
| 07/24/2001 | US6264843 Process for reclaiming a suspension |
| 07/24/2001 | US6264812 Method and apparatus for generating a plasma |
| 07/24/2001 | US6264789 System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer |
| 07/24/2001 | US6264785 Mounting structure of electric part and mounting method thereof |
| 07/24/2001 | US6264752 Reactor for processing a microelectronic workpiece |
| 07/24/2001 | US6264749 Process and apparatus for making composite films |
| 07/24/2001 | US6264748 Substrate processing apparatus |
| 07/24/2001 | US6264709 Method for making electrical and electronic devices with vertically integrated and interconnected thin-film type battery |
| 07/24/2001 | US6264706 Used foor manufacturing semiconductor device or liquid crystal display device |
| 07/24/2001 | US6264705 Processing system |
| 07/24/2001 | US6264704 Method and apparatus for mounting component |
| 07/24/2001 | US6264533 Abrasive processing apparatus and method employing encoded abrasive product |
| 07/24/2001 | US6264477 Photolithographically patterned spring contact |
| 07/24/2001 | US6264467 Micro grooved support surface for reducing substrate wear and slip formation |
| 07/24/2001 | US6264404 System and method for hydrodynamic loading and unloading of objects into and out of substantially touchless hydrodynamic transport systems |
| 07/24/2001 | US6264381 Process system |
| 07/24/2001 | US6264246 Purge system and purge joint |
| 07/24/2001 | US6264097 Method for forming a solder ball |
| 07/24/2001 | US6264094 Rework and underfill nozzle for electronic components |
| 07/24/2001 | US6264089 Connecting apparatus |
| 07/24/2001 | US6264064 Chemical delivery system with ultrasonic fluid sensors |
| 07/24/2001 | US6264037 Tray for ball grid array integrated circuit |
| 07/24/2001 | US6264036 Process cassette |
| 07/24/2001 | US6263941 Nozzle for cleaving substrates |
| 07/24/2001 | US6263830 Microwave choke for remote plasma generator |
| 07/24/2001 | US6263829 Process chamber having improved gas distributor and method of manufacture |
| 07/24/2001 | US6263740 CMOS compatible integrated pressure sensor |
| 07/24/2001 | US6263605 Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor |
| 07/24/2001 | US6263588 Vacuum processing apparatus and operating method therefor |
| 07/24/2001 | US6263587 Degassing method using simultaneous dry gas flux pressure and vacuum |
| 07/24/2001 | US6263586 Device and method for planarizing a thin film |
| 07/24/2001 | US6263563 Method of manufacturing and checking electronic components |
| 07/24/2001 | US6263542 Tolerance resistant and vacuum compliant door hinge with open-assist feature |
| 07/24/2001 | CA2280904C Methods for forming a structured metallization on a semiconductor wafer |
| 07/24/2001 | CA2211699C Nonvolatile magnetoresistive memory with fully closed-flux operation |
| 07/24/2001 | CA2055665C Field effect transistor |
| 07/19/2001 | WO2001052398A1 Charge pump circuit |
| 07/19/2001 | WO2001052326A1 Virtual-ground, split-gate flash memory cell arrangements |
| 07/19/2001 | WO2001052322A1 Semiconductor device, metal laminated plate for fabricating circuit on semiconductor, and method of fabricating circuit |
| 07/19/2001 | WO2001052321A2 Uniform recess depth of recessed resist layers in trench structures |
| 07/19/2001 | WO2001052320A2 A method for requesting trace data reports from fault detection controlled semiconductor fabrication processes |
| 07/19/2001 | WO2001052319A1 Method and apparatus for determining measurement frequency based on hardware age and usage |
| 07/19/2001 | WO2001052318A1 Part mounter |
| 07/19/2001 | WO2001052317A1 Method and device for chip mounting |
| 07/19/2001 | WO2001052316A1 Chip mounting method |
| 07/19/2001 | WO2001052315A1 Semiconductor device and method for producing the same |
| 07/19/2001 | WO2001052313A1 Top gate thin-film transistor and method of producing the same |
| 07/19/2001 | WO2001052312A1 Semiconductor wafer manufacturing process |
| 07/19/2001 | WO2001052311A2 Method of preparing a semiconductor substrate for subsequent silicide formation |
| 07/19/2001 | WO2001052310A1 Method of performing plasma warm-up on semiconductor wafers |
| 07/19/2001 | WO2001052309A1 Method of surface preparation |
| 07/19/2001 | WO2001052307A2 Semiconductor workpiece proximity plating methods and apparatus |
| 07/19/2001 | WO2001052303A1 Liner for semiconductor etching chamber |
| 07/19/2001 | WO2001052302A1 Segmented electrode assembly and method for plasma processing |
| 07/19/2001 | WO2001052301A1 Electron-optical corrector for eliminating third-order aberrations |
| 07/19/2001 | WO2001052271A1 Dielectric material and process for producing the same, and semiconductor device made therewith and process for producing the same |
| 07/19/2001 | WO2001051979A2 Microlithographic reduction projection catadioptric objective |
| 07/19/2001 | WO2001051942A1 Method for testing circuits with tri-state drivers and circuit for use therewith |
| 07/19/2001 | WO2001051866A1 Method and apparatus for high-pressure wafer processing and drying |
| 07/19/2001 | WO2001051680A1 Vacuum processing apparatus |
| 07/19/2001 | WO2001051679A2 Anti-reflective coating process and apparatus |
| 07/19/2001 | WO2001051580A1 Porous adhesive sheet, semiconductor wafer with porous adhesive sheet, and method of manufacture thereof |
| 07/19/2001 | WO2001051243A2 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulsewidths |
| 07/19/2001 | WO2001045160A8 Ceramic heater and support pin |
| 07/19/2001 | WO2001024581A8 Multi-zone resistance heater |
| 07/19/2001 | WO2001015219A3 Method for producing an integrated circuit having at least one metalicized surface |
| 07/19/2001 | WO2001006542A3 Method for producing a vertical semiconductor transistor component element and a vertical semiconductor transistor component |
| 07/19/2001 | WO2000070654A3 Low-resistance vdmos semiconductor component |
| 07/19/2001 | WO2000067297A3 Method of producing a semiconductor element |
| 07/19/2001 | WO2000034998A9 Process and system for rinsing of semiconductor substrates |
| 07/19/2001 | WO2000029636A9 High purity tantalum targets for sputtering |
| 07/19/2001 | US20010009029 Device and method for testing integrated circuit dice in an integrated circuit module |
| 07/19/2001 | US20010008993 Non-invasive system and method for diagnosing potential malfunctions of semiconductor equipment components |
| 07/19/2001 | US20010008983 Carrier system for carrying objects, carrier unit constituting carrier system, and control system for carrier system |
| 07/19/2001 | US20010008878 Comprising boric acid, organic amine, water, optional glycol solvent, chelating agent |
| 07/19/2001 | US20010008830 CMP polishing pad |
| 07/19/2001 | US20010008828 Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process |
| 07/19/2001 | US20010008827 Polishing apparatus |
| 07/19/2001 | US20010008809 Forming a resist layer on a target layer and patterning the resist layer to form original openings and a slit in the resist layer, reflowing resist layer patterned under heat to cause deformation of original openings and the slit |