Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2001
06/28/2001US20010005604 Fuse area structure including protection film on sidewall of fuse opening in semiconductor device and method of forming the same
06/28/2001US20010005603 IC-card manufacturing apparatus
06/28/2001US20010005602 Multi-chip bonding method and apparatus
06/28/2001US20010005601 Semiconductor Package Having Semiconductor Chip Within Central Aperture Of Substrate
06/28/2001US20010005600 Method of manufacturing semiconductor device including semiconductor elements mounted on base plate
06/28/2001US20010005599 Member for mounting of semiconductor and a method for producing thereof
06/28/2001US20010005597 Method for manufacturing fringe field switching mode liquid crystal display device
06/28/2001US20010005596 Method for manufacturing thin film transistor liquid crystal display
06/28/2001US20010005595 Holding a semiconductor wafer during microlithography, especially in a vacuum environment, by an electrostatic force generated by an electrode; a channel configured for heat exchanging gas flow after controller confirms adhesion
06/28/2001US20010005566 Mask pattern correction method, mask pattern creation system using the correction method, and computer-readable recording medium
06/28/2001US20010005565 Exposing the photoresist layer to a first pattern-defining light using a first mask; and exposing the photoresist layer to a second pattern defining light using a second mask; forming two dimensional random pattern
06/28/2001US20010005564 Comprising a transparent substrate and a halftone phase shift film provided on the substrate, which has a multilayer construction in which first layer is capable of being etched with chlorinated gas and second layer with a fluorinated gas
06/28/2001US20010005546 By plasma assisted chemical vapor deposition of an organosilicon compound and oxidizing gas using radio frequency power to generate reactive oxygen atoms; controlled carbon content; improved dual damascene process
06/28/2001US20010005476 Processing method and processing unit for substrate
06/28/2001US20010005332 Non- volatile semiconductor memory device and method of forming the same
06/28/2001US20010005330 Nand-type flash memory device and method of operating the same
06/28/2001US20010005329 Failure-analyzing semiconductor device and semiconductor device manufacturing method using the same
06/28/2001US20010005328 Non-volatile semiconductor memory device
06/28/2001US20010005325 Semiconductor memory device
06/28/2001US20010005314 Interconnection process for module assembly and rework
06/28/2001US20010005302 Clipping device with a negative resistance
06/28/2001US20010005286 Optical system for crystallization tool
06/28/2001US20010005265 Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus
06/28/2001US20010005227 Solid-state imaging device
06/28/2001US20010005163 Semiconductor integrated circuit
06/28/2001US20010005153 Semiconductor integrated circuit
06/28/2001US20010005148 Semiconductor intergrated circuit having logic circuit comprising transistors with lower threshold voltage values and improved pattern layout
06/28/2001US20010005144 Configuration for testing a multiplicity of semiconductor chips
06/28/2001US20010005119 Ion beam processing apparatus for processing work piece with ion beam being neutralized uniformly
06/28/2001US20010005060 Resin for sealing semiconductor device, resin-sealed semiconductor device and the method of manufacturing the semiconductor device
06/28/2001US20010005059 Three-dimensional semiconductor integrated circuit apparatus and manufacturing method therefor
06/28/2001US20010005058 Integrated circuit and method
06/28/2001US20010005056 Multiple seed layers for metallic interconnects
06/28/2001US20010005055 Semiconductor device and manufacturing method thereof
06/28/2001US20010005054 Method of forming a ball bond using a bonding capillary
06/28/2001US20010005053 Electronic part, an electronic part mounting element and an process for manufacturing such the articles
06/28/2001US20010005050 Semiconductor device, method making the same, and electronic device using the same
06/28/2001US20010005047 Flip chip C4 extension structure and process
06/28/2001US20010005046 Direct contact through hole type wafer structure
06/28/2001US20010005045 Integrated circuit chip and method for fabricating the same
06/28/2001US20010005044 Microelectronic assemblies having exposed conductive terminals and methods therefor
06/28/2001US20010005043 Semiconductor device and a method of manufacturing the same
06/28/2001US20010005039 Method and apparatus for delivering electrical power to a semiconductor die
06/28/2001US20010005038 Integrated circuit chip and method for fabricating the same
06/28/2001US20010005037 Semiconductor device having a multilayer interconnection structure
06/28/2001US20010005035 Bipolar transistor having lightly doped epitaxial collector region constant in dopant impurity and process of fabrication thereof
06/28/2001US20010005033 Semiconductor device and its manufacture
06/28/2001US20010005031 Power semiconductor device
06/28/2001US20010005030 Semiconductor device and fabrication method
06/28/2001US20010005029 Semiconductor device lacking steeply rising structures and fabrication method of the same
06/28/2001US20010005026 Conductive thin film, a capacitor using the same and a method of manufacturing.
06/28/2001US20010005025 Heterojunction bipolar transistor and its fabrication method
06/28/2001US20010005023 Method for growing nitride semiconductor crystals, nitride semiconductor device, and method for fabricating the same
06/28/2001US20010005022 Semiconductor device
06/28/2001US20010005020 Thin film transistor and method of fabricating the same
06/28/2001US20010005019 Active matrix display device
06/28/2001US20010005016 Field effect transistor
06/28/2001US20010005011 Magnetic tunnel junction device, magnetic memory adopting the same, magnetic memory cell and access method of the same
06/28/2001US20010005009 A slurry for chemical mechanical polishing a copper-containing metal film, comprising theta -alumina mainly comprising secondary particles made of aggregated primary particles as polishing grains, an oxidizer and an organic acid
06/28/2001US20010004993 Document folder and method
06/28/2001US20010004991 Wire bonding method and apparatus
06/28/2001US20010004990 Rework and underfill nozzle for electronic components
06/28/2001US20010004965 Useful for electroplating a pin grid array package having multiple pins, which are electrically connected with less physical contact; reduces damage to the pin caused by removal of the pin from the apparatus after electroplating
06/28/2001US20010004934 Compressed mesh wick, method for manufacturing same, and plate type heat pipe including compressed mesh wick
06/28/2001US20010004923 Modifying polyamide with alkylcarboxylated polyolefin compatibilizer; blow molding
06/28/2001US20010004921 Methods and apparatus for determining an etch endpoint in a plasma processing system
06/28/2001US20010004920 Provides shields for shielding the interior surface of the reactor pumping annulus from the plasma by preventing plasma from flowing through gap between wafer pedestal and the chamber sidewall without obstructing free flow of natural gas
06/28/2001US20010004916 Allowing setting of constant time for base film to pass through drying section even if length of resin film forming region differs
06/28/2001US20010004899 Substrate processing method and apparatus
06/28/2001US20010004898 For processing semiconductor wafers
06/28/2001US20010004880 Pedestal with a thermally controlled platen
06/28/2001US20010004879 Integrated temperature controlled exhaust and cold trap assembly
06/28/2001US20010004878 For photolithography process for use in manufacturing semiconductors
06/28/2001US20010004852 Transfer arm
06/28/2001US20010004807 Vacuum processing apparatus and operating method therefor
06/28/2001US20010004802 Assembling a stacked die package
06/28/2001US20010004790 Electrical connections to dielectric materials
06/28/2001DE19963281A1 Verfahren zum Herstellen von Leiterbahnen A method for producing conductor tracks
06/28/2001DE19962136A1 Etching mixture used in production of structured surfaces on multi-crystalline, tri-crystalline and monocrystalline silicon surfaces of solar cells contains hydrofluoric acid and mineral acids selected from nitric acid
06/28/2001DE19961675A1 Bauteil mit Dünnschichtschaltkreis mit trimmbarem Kondensator Component with thin-film circuit with capacitor trimmbarem
06/28/2001DE19961180A1 Dünnschichtwiderstand mit hohem Temperaturkoeffizienten als passives Halbleiterbauelement für integrierte Schaltungen und Herstellungsverfahren Thin film resistor with a high temperature coefficient as a passive semiconductor device for integrated circuits and methods of manufacture
06/28/2001DE19960573A1 Method for removing solid residual matter on surfaces of semiconductor layers occurring during wet etching involves chemical dipping, a first quick rinse with DI water, turning layers at a preset angle and a second quick rinse.
06/28/2001DE19960563A1 Semiconductor structure used in integrated circuits comprises conducting pathway folded in trenches in such a way that its length within each trench is double depth of trench
06/28/2001DE19959966A1 Dielectric layer formation for semiconductor interconnections includes forming dielectric layer over substrate carrying conductive structure using high density plasma chemical vapor deposition to form air gaps between conductive structures
06/28/2001DE19959182A1 Verfahren zum Herstellen eines optoelektronischen Bauelements A method for producing an optoelectronic component
06/28/2001DE19957122A1 Production of a ferroelectric capacitor on a semiconductor substrate comprises depositing a ferroelectric capacitor material over a first electrode, producing a second electrode and applying an alternating voltage on the capacitor
06/28/2001DE19956733A1 Verfahren zur Regelung von Sputterprozessen The method for controlling sputtering
06/28/2001DE19955280C1 Kontaktstruktur für ein elektrisch betriebenes II/VI-Halbleiterbauelement und Verfahren zu deren Herstellung Contact structure for an electrically operated II / VI semiconductor device and process for their preparation
06/28/2001DE10064654A1 Ruthenium layer, useful for the production of capacitors, has a high oxygen concentration towards the surface of the underlayer and a lower value in the direction of the outer coating surface .
06/28/2001DE10064042A1 Copper wiring production comprises forming intermediate insulating layer on semiconductor layer, forming contact hole and trench, depositing copper and chemical-mechanical polishing
06/28/2001DE10064041A1 Copper wiring production comprises forming intermediate insulating layer on semiconductor layer, forming contact hole and trench, depositing copper seed layer, plating with copper and chemical-mechanical polishing
06/28/2001DE10063263A1 Organisches nicht reflektierendes Beschichtungspolymer und dessen Herstellungsverfahren Organic non-reflective coating polymer and its production method
06/28/2001DE10063239A1 Optical projection system to form a circuit design on a wafer substrate has a lamp with vacuum ultra violet light to illuminate a lined plate with a diffraction unit of quartz glass in the optical projection assembly
06/28/2001DE10063064A1 Positive resist composition, useful for the processing of semiconductors, contains a resin derived from (meth)acrylic acid dihydroxy-1-adamantyl ester and (meth)acrylic acid-alkyl-2-adamantyl ester
06/28/2001DE10051599A1 Semiconductor device with an improved contact pin structure and method for producing it places a conductive contact pin in an intermediate insulating film layer and on an insulating layer to insulate semiconductor elements.
06/28/2001DE10051584A1 Photolithographic mask for manufacture of semiconductor circuits has pattern edges distributed on corresponding monitoring markings
06/28/2001DE10050357A1 Trench insulating structure used in the production of a semiconductor device comprises a trench formed in the non-active zones of a semiconductor substrate, an inner wall oxide film
06/28/2001DE10041620A1 Capacitor element used for a semiconductor storage device comprises an insulating layer, recesses divided by a separating wall, storage node layers formed on the surface of the recesses, a dielectric capacitor layer and a cell plate layer
06/28/2001DE10032210A1 Kondensator für Halbleiterspeicherbauelement und Verfahren zu dessen Herstellung Capacitor for the semiconductor memory device and method for its production
06/28/2001DE10004872C1 Metal oxide semiconductor field effect transistor arrangement has source, drain and gates embedded between a column protruding from semiconductor body and insulator surrounding the column and arranged on body