Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
07/2001
07/19/2001US20010008050 Vacuum processing apparatus and operating method therefor
07/19/2001DE19963824A1 Semiconductor material processing method has electromagnetic beam directed onto local area across which reactive fluid is passed
07/19/2001DE19963813A1 Schaltungsanordnung zur Regelung des Leistungsverbrauchs eines integrierten Schaltkreises Circuit arrangement for controlling the power consumption of an integrated circuit
07/19/2001DE19963587A1 Optische Anordnung Optical arrangement
07/19/2001DE19962431A1 Verfahren zum Herstellen einer Halbleiteranordnung A method of manufacturing a semiconductor device
07/19/2001DE10101900A1 Semiconductor component used in integrated circuits comprises zones of various conductivity types, an insulating film, a gate electrode and main electrodes
07/19/2001DE10101630A1 Halbleiterspeicherbauelement mit Eingabe-/Ausgabeleitungsstruktur Semiconductor memory device with input / output line structure
07/19/2001DE10101568A1 Semiconductor device used as a transistor of the trench-gate type comprises a semiconductor substrate with a trench formed in the main surface and an insulating film arranged on an inner wall of the trench
07/19/2001DE10101073A1 Image processing system transfers image pixel color information data from first to second memory without transfer of alpha-value information
07/19/2001DE10100816A1 Abtastung integrierter Schaltungen mit differentiell gepulstem Laserstrahl Scanning of integrated circuits with differential pulsed laser beam
07/19/2001DE10100194A1 Semiconductor-on-insulator field effect transistor comprises a silicon-germanium layer between an electrically insulating layer and a silicon active layer
07/19/2001DE10065852A1 Semiconductor device has bridging capacitor providing connection between 2 separate circuits formed in semiconductor substrate
07/19/2001DE10064234A1 Halbleiter-Speichervorrichtung mit einem dreifachen Trogaufbau The semiconductor memory device with a triple trough assembly
07/19/2001DE10064067A1 Verfahren zur Herstellung von Halbleitereinrichtungskondensatoren A process for producing semiconductor device capacitors
07/19/2001DE10063631A1 Virtual channel synchronized with a dynamic RAM for driving memory cells uses a semiconductor memory device with a base cell structure for a word driver, a main decoder and a reader booster for reading out information from the cells.
07/19/2001DE10060665A1 Nichtflüchtiger ferroelektrischer Speicher und Verfahren zu dessen Herstellung A non-volatile ferroelectric memory and method for its production
07/19/2001DE10060584A1 Bipolar transistor comprises used for high frequency operations a silicon layer, a silicon epitaxial layer of first type, a silicon-germanium epitaxial layer and a silicon epitaxial layer of second type
07/19/2001DE10046945A1 Production of a non-volatile storage device comprises forming trench insulations on a substrate, forming source and drain regions between neighboring insulations
07/19/2001DE10045114A1 Semiconductor memory has lower electrode of stacked capacitor coupled to underlying semiconductor substrate via conductor plug projecting through intermediate layer
07/19/2001DE10044470A1 Semiconducting device manufacturing method involves forming dielectric layer with contact hole on substrate, forming conductive layer, etching dielectric layer to defined thickness
07/19/2001DE10041960A1 Control method for semiconductor device manufacturing arrangement involves predicting time at which processing of last wafer in ready state starts to set transport start time for next item
07/19/2001DE10040397A1 Process controller e.g. for semiconductor manufacture, selects item to be processed from number of items based on performance of processing device evaluated by evaluation unit and characteristics of items
07/19/2001DE10018638A1 Compact semiconductor element comprises a wafer having a chip region, a substrate arranged on the chip region, conducting bodies, a distancing device between the wafer and the substrate and component contacts
07/19/2001DE10009678C1 Heat conducting adhesive joint between two workpieces used in the production of electronic components comprises a layer of heat conducting material having two flat sided surfaces with openings on each surface
07/19/2001DE10009345C1 Field effect transistor device with trench-shaped gate electrode
07/19/2001DE10001277A1 Elektronenoptischer Korrektor zur Beseitigung der Bildfehler dritter Ordnung Electron optical corrector to eliminate the aberrations of the third order
07/19/2001CA2395960A1 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulsewidths
07/19/2001CA2393940A1 Method for testing circuits with tri-state drivers and circuit for use therewith
07/19/2001CA2393283A1 Liner for semiconductor etching chamber
07/18/2001EP1117136A1 Ferromagnetic double quantum well tunnel magneto-resistance device
07/18/2001EP1117133A1 Semiconductor device and method for the same manufacturing
07/18/2001EP1117132A1 Ferroelectric device and semiconductor device
07/18/2001EP1117131A2 Method of forming alignment marks
07/18/2001EP1117130A2 Heatsink method of manufacturing the same and cooling apparatus using the same
07/18/2001EP1117129A2 Semiconductor wafer inspection machine
07/18/2001EP1117128A2 Method and apparatus for orienting substrates
07/18/2001EP1117127A1 Arrangement for supporting disklike objects in a processing system
07/18/2001EP1117110A2 Fabrication method of solid electrolytic capacitor
07/18/2001EP1117009A2 Method of making resist pattern
07/18/2001EP1117008A2 UV-assisted chemical modification of photoresist images
07/18/2001EP1117002A1 Negative-working resist composition
07/18/2001EP1116998A2 Blank for halftone phase shift photomask and halftone phase shift photomask
07/18/2001EP1116762A1 Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process
07/18/2001EP1116552A2 Polishing apparatus with thickness measuring means
07/18/2001EP1116314A1 Protective circuit on an integrated circuit
07/18/2001EP1116282A2 VERTICAL GEOMETRY InGaN LED
07/18/2001EP1116279A1 Semiconductor device
07/18/2001EP1116278A1 Bipolar transistor and method for producing same
07/18/2001EP1116277A1 Connection arrangement for a semiconductor device and method of manufacturing same
07/18/2001EP1116275A1 Non-volatile semiconductor memory device
07/18/2001EP1116274A1 Electronic switching device with at least two semiconductor components
07/18/2001EP1116273A1 Semiconductor device comprising a high-voltage circuit element
07/18/2001EP1116270A1 Integrated circuit comprising vertical transistors, and a method for the production thereof
07/18/2001EP1116269A1 Complementary bipolar/cmos epitaxial structure and process
07/18/2001EP1116267A1 Process for making high perf0rmance mosfet with an inverted t-shaped gate electrode
07/18/2001EP1116266A1 Method for producing self-polarized ferro-electric layers, especially pzt layers, with a rhombohedral crystal structure
07/18/2001EP1116265A1 Low capacitance dielectric layer etching using hydrogen-nitrogen plasma
07/18/2001EP1116264A1 Device and method for etching spacers formed upon an integrated circuit gate conductor
07/18/2001EP1116263A2 Method for producing an ohmic contact
07/18/2001EP1116262A2 Heating device containing a multi-lamp cone for heating semiconductor wafers
07/18/2001EP1116261A1 Method and apparatus for cooling substrates
07/18/2001EP1116248A1 Method of manufacturing a magnetic tunnel junction device
07/18/2001EP1116236A1 Method of making flexibly partitioned metal line segments for a simultaneous operation flash memory device with a flexible bank partition architecture
07/18/2001EP1116180A1 Method for contacting a circuit chip
07/18/2001EP1116141A1 A regionally time multiplexed emulation system
07/18/2001EP1116099A1 Prealigner and planarity teaching station
07/18/2001EP1116074A1 Environment exchange control for material on a wafer surface
07/18/2001EP1116072A1 Low thermal distortion extreme-uv lithography reticle
07/18/2001EP1116071A1 Mask for high resolution optical lithography
07/18/2001EP1116043A1 Method of manufacturing a magnetic tunnel junction device
07/18/2001EP1116042A1 Circuit configuration with a scan path that can be deactivated
07/18/2001EP1116011A1 Tuning a substrate temperature measurement system
07/18/2001EP1115921A2 Method for producing an amorphous or polycrystalline layer on an insulating region
07/18/2001EP1115920A1 Method for obtaining a monocrystalline germanium layer on a monocrystalline silicon substrate, and resulting products
07/18/2001EP1115918A2 ENHANCED i n /i TYPE SILICON MATERIAL FOR EPITAXIAL WAFER SUBSTRATE AND METHOD OF MAKING SAME
07/18/2001EP1115900A1 Methods for preparing ruthenium metal films
07/18/2001EP1115898A1 Tantalum films and methods for their deposition
07/18/2001EP1115892A1 Wire-bonding alloy composites
07/18/2001EP1115806A1 Workpiece retainer and method for attaching/detaching workpiece by using the same
07/18/2001EP1115805A1 Polishing cloth and method for attaching/detaching the polishing cloth to/from polishing machine base plate
07/18/2001EP1115804A1 Polishing liquid for polishing components, preferably wafers, especially for chemically-mechanically polishing components of this type
07/18/2001EP1115803A1 Oxidizing polishing slurries for low dielectric constant materials
07/18/2001EP1115648A1 Method for producing nanometer structures on semiconductor surfaces
07/18/2001EP1115643A1 Apparatus for sensing the presence of a wafer
07/18/2001EP1115565A1 Composite wire with noble metal cladding
07/18/2001EP1115535A1 Substrate transport apparatus
07/18/2001EP1115511A1 Offset rotor flat media processor
07/18/2001EP1115503A1 Electroless metal deposition of electronic components in an enclosable vessel
07/18/2001EP1044465A4 Wet processing methods for the manufacture of electronic components
07/18/2001EP0900477B1 Electronic component, in particular a component using acoustical surface acoustic waves
07/18/2001EP0740849B1 Method of forming a silicon-on-insulator (soi) material having a high degree of thickness uniformity
07/18/2001CN1304635A Method for producing wirings having solder bumps
07/18/2001CN1304634A Wiring method and wiring device
07/18/2001CN1304552A Methods for reducing semiconductor contact resistance
07/18/2001CN1304551A Self-aligned methods of fabricating silicon carbide power devices by implantation and lateral diffusions
07/18/2001CN1304550A Porous insulating compounds and method for making same
07/18/2001CN1304549A Method for single chamber processing of PECVD-Ti and CVD-Ti films in IC mfg.
07/18/2001CN1304548A Method and apparatus for laser heat treatment, and semiconductor device
07/18/2001CN1304547A Method for producing thin film semiconductor device
07/18/2001CN1304546A Method of fabricating silicon carbide power device by controlled annealing