| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/11/2001 | EP1115145A1 Method for forming compound semiconductor layer and compound semiconductor device |
| 07/11/2001 | EP1115140A2 Plasma processing apparatus |
| 07/11/2001 | EP1115086A2 Non-contact type IC card and process for manufacturing same |
| 07/11/2001 | EP1115035A1 Acetylenic diol ethylene oxide/propylene oxide adducts and their use in photoresist developers |
| 07/11/2001 | EP1115034A1 Use of N,N-dialkyl ureas in photoresist developers |
| 07/11/2001 | EP1115033A1 Use of alkylated polyamines in photoresist developers |
| 07/11/2001 | EP1115030A2 Optical system |
| 07/11/2001 | EP1115019A2 Projection exposure lens with aspheric elements |
| 07/11/2001 | EP1114965A2 Lamp unit for light radiating type heating device |
| 07/11/2001 | EP1114884A1 Process for producing compound semiconductor single crystal |
| 07/11/2001 | EP1114882A2 Apparatus and method for depositing an electroless solution |
| 07/11/2001 | EP1114805A1 Plasma-resistant member and plasma treatment apparatus using the same |
| 07/11/2001 | EP1114697A2 Apparatus and method for controlled delivery of slurry to a region of a polishing device |
| 07/11/2001 | EP1114695A2 Chemical mechanical planarization system |
| 07/11/2001 | EP1114573A1 A method for controlling stress in thin film layers deposited over a high density interconnect common circuit base |
| 07/11/2001 | EP1114514A1 Very fine grain field programmable gate array architecture and circuitry |
| 07/11/2001 | EP1114470A1 Method of producing solar cells |
| 07/11/2001 | EP1114467A1 Ferroelectric transistor, its use in a storage cell system and its method of production |
| 07/11/2001 | EP1114466A1 High-voltage semiconductor component |
| 07/11/2001 | EP1114465A1 Semiconductor device having ohmic contact and a method for providing ohmic contact with such a device |
| 07/11/2001 | EP1114464A1 Electronic devices with barrier film and process for making same |
| 07/11/2001 | EP1114463A1 A single polysilicon flash eeprom and method for making same |
| 07/11/2001 | EP1114462A1 Ternary nitride-carbide barrier layers |
| 07/11/2001 | EP1114461A1 Semiconductor circuit |
| 07/11/2001 | EP1114460A1 Semiconductor chip with surface coating |
| 07/11/2001 | EP1114459A1 High voltage shield |
| 07/11/2001 | EP1114458A1 Buried local interconnect |
| 07/11/2001 | EP1114457A1 Method for producing integrated switching circuits and semiconductor wafer comprising integrated switching circuits |
| 07/11/2001 | EP1114456A1 Collective method for conditioning a plurality of components initially formed in a common substrate |
| 07/11/2001 | EP1114455A1 Method for producing a storage cell |
| 07/11/2001 | EP1114454A2 Silicon on insulator structure from low defect density single crystal silicon |
| 07/11/2001 | EP1114453A1 Device comprising electronic components in mutually insulated regions of a semiconductor material layer and method for making same |
| 07/11/2001 | EP1114452A1 Device for quantitative detection of copper in silicon by transient ionic drift and method using same |
| 07/11/2001 | EP1114451A1 Microelectronic structure, production method and utilization of the same |
| 07/11/2001 | EP1114450A1 A system and a method for plating of a conductive pattern |
| 07/11/2001 | EP1114449A1 Ruthenium silicide diffusion barrier layers and methods of forming same |
| 07/11/2001 | EP1114448A1 A method of manufacturing a semiconductor device |
| 07/11/2001 | EP1114447A1 Semiconductor device having oxide-nitride gate insulating layer and method of manufacture thereof |
| 07/11/2001 | EP1114446A1 Method for producing a thin membrane and resulting structure with membrane |
| 07/11/2001 | EP1114444A1 Semiconductor processing method, semiconductor circuitry and gate stack |
| 07/11/2001 | EP1114443A1 Voltage-cycling recovery of process-damaged ferroelectric films |
| 07/11/2001 | EP1114441A2 Non-oxygen precipitating czochralski silicon wafers |
| 07/11/2001 | EP1114440A1 Device and method for handling individual wafers |
| 07/11/2001 | EP1114439A2 Method for forming low-impedance high-density deposited-on-laminate structures having reduced stress |
| 07/11/2001 | EP1114436A2 Physical vapor processing of a surface with non-uniformity compensation |
| 07/11/2001 | EP1114355A2 Method and apparatus for developing photoresist patterns |
| 07/11/2001 | EP1114210A1 Low-temperature process for forming an epitaxial layer on a semiconductor substrate |
| 07/11/2001 | EP1114110A1 Wafer retainer and method for attaching/detaching the wafer retainer to/from polishing machine base plate |
| 07/11/2001 | EP1113988A1 Method and device for producing aerogels |
| 07/11/2001 | EP1113982A2 Method of and apparatus for sealing an hermetic lid to a microelectronic machine |
| 07/11/2001 | EP1113981A1 Micromechanical component and its production method |
| 07/11/2001 | EP1113980A1 Aperture in a semiconductor material, and the production and use thereof |
| 07/11/2001 | EP1113898A4 Permanent magnet ecr plasma source with magnetic field optimization |
| 07/11/2001 | EP1113898A1 Permanent magnet ecr plasma source with magnetic field optimization |
| 07/11/2001 | EP1113885A1 Printing of electronic circuits and components |
| 07/11/2001 | EP1038315A4 Method for thinning semiconductor wafers with circuits and wafers made by the same |
| 07/11/2001 | EP0983394B1 Method and apparatus for low pressure sputtering |
| 07/11/2001 | EP0943119B1 Reticle that compensates for lens error in a photolithographic system |
| 07/11/2001 | EP0799096B1 Process and device for lacquering or coating a substrate |
| 07/11/2001 | CN1303521A Method for making micromodule and storage medium comprising such micromodule |
| 07/11/2001 | CN1303519A Method of severing electrically conductive links with ultravoilet laser output |
| 07/11/2001 | CN1303518A Post-etching alkaline treatment process |
| 07/11/2001 | CN1303517A Method for producing semiconductor elements |
| 07/11/2001 | CN1303516A Resin molder article for chamber liner |
| 07/11/2001 | CN1303401A Water soluble negative-working photoresist composition |
| 07/11/2001 | CN1303132A MIM capacitor |
| 07/11/2001 | CN1303131A Basis substrate for crystal growth and method for making substrate using same |
| 07/11/2001 | CN1303130A Semi-conductor device and its manufacturing method |
| 07/11/2001 | CN1303129A Method of epitaxial bipolar device and complementary metallic oxide semiconductor device |
| 07/11/2001 | CN1303128A Manufacturing method of ferroelectric semi conductor storage |
| 07/11/2001 | CN1303127A Non volatile semi-conductor memory and its manufacturing method |
| 07/11/2001 | CN1303126A Equivalent circuit for simulating ferroelectric capacitance |
| 07/11/2001 | CN1303125A Method and equipment for supplying liquid raw material |
| 07/11/2001 | CN1303124A Method of forming semiconductor apparatus |
| 07/11/2001 | CN1303098A MTJ stack type unit storage detecting method and device |
| 07/11/2001 | CN1303086A Resin hermetically sealed type semiconductor device and liquid crystal display assembly block |
| 07/11/2001 | CN1303084A Electron device |
| 07/11/2001 | CN1302713A Welding head of wire welding unit |
| 07/11/2001 | CN1068458C Body contact structure for semiconductor device |
| 07/11/2001 | CN1068457C Hidden lead wire chip package |
| 07/11/2001 | CN1068456C Crystal wafter fixing device and method |
| 07/11/2001 | CN1068442C Method for forming pattern by silylation |
| 07/11/2001 | CN1068289C Reinforced semiconductor wafer holder |
| 07/10/2001 | US6260181 Integrated circuit and the design method thereof |
| 07/10/2001 | US6260179 Cell arrangement evaluating method, storage medium storing cell arrangement evaluating program, cell arranging apparatus and method, and storage medium storing cell arranging program |
| 07/10/2001 | US6259961 Continuous processing conveying system and control method for the same |
| 07/10/2001 | US6259644 Equipotential sense methods for resistive cross point memory cell arrays |
| 07/10/2001 | US6259636 Semiconductor memory device having redundancy circuit for relieving faulty memory cells |
| 07/10/2001 | US6259612 Semiconductor device |
| 07/10/2001 | US6259592 Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same |
| 07/10/2001 | US6259513 Illumination system with spatially controllable partial coherence |
| 07/10/2001 | US6259512 Illumination system and exposure apparatus having the same |
| 07/10/2001 | US6259509 Exposure apparatus and device manufacturing method |
| 07/10/2001 | US6259508 Projection optical system and exposure apparatus and method |
| 07/10/2001 | US6259309 Method and apparatus for the replacement of non-operational metal lines in DRAMS |
| 07/10/2001 | US6259291 Self-adjusting apparatus and a self-adjusting method for adjusting an internal oscillating clock signal by using same |
| 07/10/2001 | US6259267 Power-current measuring circuit in burn-in tester |
| 07/10/2001 | US6259260 Apparatus for coupling a test head and probe card in a wafer testing system |
| 07/10/2001 | US6259209 Plasma processing apparatus with coils in dielectric windows |
| 07/10/2001 | US6259174 Positioning apparatus, drive unit and exposure apparatus incorporating the positioning apparatus |