Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2001
08/02/2001US20010010103 Scrubbing apparatus
08/02/2001EP1145436A3 A method of manufacturing a trench gated vdmos
08/02/2001EP1145252A3 Epitaxial thin films
08/02/2001DE19945178A1 Meßspitze zur Hochfrequenzmessung und Verfahren zu deren Herstellung Probe head for high-frequency measurement and process for their preparation
08/02/2001DE10102177A1 Mit Anschlußvorsprüngen versehene Anschlußstruktur Provided with terminal projections terminal structure
08/02/2001DE10101538A1 Anschlußstruktur Terminal structure
08/02/2001DE10064515A1 Measurement signal output device for testing integrated circuit, has electro-optical probe which is connected to input/output unit by cables, and signal measurement unit connected to input/output unit by connector
08/02/2001DE10050363A1 Schaltung zum Erzeugen eines Reparatursignals Circuit for generating a repair signal
08/02/2001DE10046925A1 Halbleitervorrichtung mit einer Testmarkierung A semiconductor device with a test marker
08/02/2001DE10027852A1 Verfahren zum Anordnen eines Halbleiterchips auf einem Substrat und zum Anordnen auf einem Substrat geeignetes Halbleiterbaelement A method for disposing a semiconductor chip on a substrate, and for arranging on a substrate suitable Halbleiterbaelement
08/02/2001DE10018338C1 Verfahren zur Herstellung einer Halbleiterscheibe A process for producing a semiconductor wafer
08/02/2001DE10003951A1 Tunneldiode und Verfahren zu ihrer Herstellung Tunnel diode and methods for their preparation
08/02/2001DE10003758A1 Vorrichtung und Verfahren zum Abscheiden wenigstens eines in flüssiger oder gelöster Form vorliegenden Prekursors Device and method for separating at least one present in liquid or dissolved form precursor
08/02/2001DE10003539A1 Halbleiterbauelement mit Metallschicht A semiconductor device with a metal layer
08/02/2001DE10002364A1 Silizium-Germanium-Bipolartranistor mit optimiertem Germaniumprofil Silicon-germanium-germanium Bipolartranistor with optimized profile
08/02/2001DE10002323A1 Verfahren zur Aktivierung elektrischer Dotier- und Silizidierstoffe A method for activating electrical doping and Silizidierstoffe
08/02/2001DE10001871A1 Process for the production of a controllable semiconductor logic element
08/02/2001CA2401782A1 Portable sensor array system
08/01/2001EP1120997A1 Ceramic heater
08/01/2001EP1120836A1 Memory cell structure integrated on semiconductor
08/01/2001EP1120835A2 MOSFET and method of manufacturing the same
08/01/2001EP1120834A2 Insulated gate semiconductor device and manufacturing method thereof
08/01/2001EP1120829A1 Semiconductor production device ceramic plate
08/01/2001EP1120827A1 Bump joining judging device and method, and semiconductor component production device and method
08/01/2001EP1120826A1 Semiconductor device with metal layer
08/01/2001EP1120825A1 Method for manufacturing semiconductor device
08/01/2001EP1120824A2 Process for producing an ic chip having a protective layer
08/01/2001EP1120823A2 Semiconductor device substrate and method of manufacturing semiconductor device
08/01/2001EP1120822A1 Method of manufacturing semiconductor device
08/01/2001EP1120821A2 Process for formation of cap layer for semiconductor
08/01/2001EP1120820A2 Method and apparatus for forming interconnect
08/01/2001EP1120819A1 Soi substrate and method for manufacturing the same
08/01/2001EP1120818A1 Semiconductor substrate and its production method, semiconductor device comprising the same and its production method
08/01/2001EP1120817A2 Corrosion-resistant member
08/01/2001EP1120816A1 Substrate container and method of dehumidifying substrate container
08/01/2001EP1120815A2 Free floating shield and semiconductor processing system
08/01/2001EP1120814A2 Method and apparatus for cleaning a semiconductor wafer processing system
08/01/2001EP1120813A1 Reactor for manufacturing of a semiconductor device
08/01/2001EP1120791A1 Semiconductor device
08/01/2001EP1120790A1 Magnetic memory with structures that prevent disruptions to magnetization in sense layers
08/01/2001EP1120694A2 Adaptive endpoint detection for chemical mechanical polishing
08/01/2001EP1120690A2 EUV reticle thermal management
08/01/2001EP1120689A2 Photosensitive copolymers of alkyl vinyl ether and resist compositions containing the same
08/01/2001EP1120673A1 Passive alignment of optoelectronic components to optical waveguides using flip-chip bonding technology
08/01/2001EP1120657A1 Test connector with high interconnection density for integrated circuits
08/01/2001EP1120483A2 Method for etching GaN material
08/01/2001EP1120475A1 A method and system for MOCVD of PGO films
08/01/2001EP1120474A1 Method for plasma-enhanced chemical vapor deposition of a metal nitride layer
08/01/2001EP1120469A2 Method for actively transporting DNA
08/01/2001EP1120449A1 Adhesive for bonding circuit members, circuit board, and method of producing the same
08/01/2001EP1120194A2 Optical monitoring in a two-step chemical mechanical polishing process
08/01/2001EP1120193A1 Unpolished work holding board and production method thereof and work polishing method and device
08/01/2001EP1120191A2 Wafer processing machine
08/01/2001EP1120157A2 Self-addressable electronic device
08/01/2001EP1120156A2 Method of electronically controlled hybridization of DNA
08/01/2001EP1120155A2 Method for combinatorial synthesis of a biopolymer
08/01/2001EP1119914A1 An integrated circuit provided with a fail-safe mode
08/01/2001EP1119908A1 Electronic circuit for imitating a capacitor with variable capacitance
08/01/2001EP1119878A1 Encapsulation of a device
08/01/2001EP1119876A2 Switching transistor with reduced switching losses
08/01/2001EP1119875A1 Semiconductor device with a non-volatile memory
08/01/2001EP1119874A1 Dual-damascene dielectric structures and methods for making the same
08/01/2001EP1119873A1 Flip chip mounting technique
08/01/2001EP1119872A1 Method of making a charge compensation semiconductor device using neutron transmutation
08/01/2001EP1119871A1 Method of making a charge compensation semiconductor device using direct bonding and corresponding device
08/01/2001EP1119860A2 Magnetoresistive memory having improved interference immunity
08/01/2001EP0868742B1 Process for producing an mos transistor
08/01/2001EP0739536B1 Charged particle projector system
08/01/2001CN1306692A Planar resist structure esp encapsulation for electric components and thermomechanical method for prodn thereof
08/01/2001CN1306677A Semiconductor device with transistor gate insulator
08/01/2001CN1306674A Method and device for forming bump
08/01/2001CN1306560A CMP slurry contg. solid catalyst
08/01/2001CN1306495A Highly pure aqueous hydrogen peroxide solutions, method for producing same and their use
08/01/2001CN1306476A Method of making adhesive preform lid for electronic devices
08/01/2001CN1306404A Cleaning rotary brush
08/01/2001CN1306311A Field effect transistor
08/01/2001CN1306310A Transistor of composite perovskite structure oxide membrane
08/01/2001CN1306309A 钛酸钡晶体管 Barium titanate transistor
08/01/2001CN1306308A 钛酸锶晶体管 Strontium titanate transistor
08/01/2001CN1306306A Inlayed connection of increasing reliability and mfg. tech thereof
08/01/2001CN1306305A Integrated chip nominal trough figure able to improve trough corrosion tech
08/01/2001CN1306304A Method for mfg. capacitor of semiconductor device
08/01/2001CN1306303A Steady-state service life test method by controlling junction temp of transistor
08/01/2001CN1306302A RF method for recognizing conductive line jacket of IC
08/01/2001CN1306301A Prodn tech of semiconductor device and its conductive structure
08/01/2001CN1306300A Semiconductor device and its mfg. method
08/01/2001CN1306299A Semiconductor structure with crystallzed alkaline-earth metal silicon-nitrogen compound/oxide and silicon interface
08/01/2001CN1306226A Exposure device
08/01/2001CN1306225A Method for checking exposure figure formed on optical mask
08/01/2001CN1305944A Air tight method for packing micro system in-situ
08/01/2001CN1069150C Method for fabricating semiconductor device
08/01/2001CN1069112C Method for forming ferrioelectric thin film and appts. therefor
07/2001
07/31/2001US6269472 Optical proximity correction method and apparatus
07/31/2001US6269467 Block based design methodology
07/31/2001US6269328 Testing integrated circuit device
07/31/2001US6269326 Method for testing electronic components
07/31/2001US6269322 System and method for wafer alignment which mitigates effects of reticle rotation and magnification on overlay
07/31/2001US6269281 Back lapping in-line system for semiconductor device fabrication
07/31/2001US6269280 Semiconductor device and method of fabricating the same
07/31/2001US6269209 Resin sealed optical module