| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/07/2001 | US6270618 Plasma processing apparatus |
| 08/07/2001 | US6270617 RF plasma reactor with hybrid conductor and multi-radius dome ceiling |
| 08/07/2001 | US6270613 Process of forming electrode of chip electronic part |
| 08/07/2001 | US6270587 Epitaxial wafer having a gallium nitride epitaxial layer deposited on semiconductor substrate and method for preparing the same |
| 08/07/2001 | US6270585 Device and process for treating substrates in a fluid container |
| 08/07/2001 | US6270584 Apparatus for drying and cleaning objects using controlled aerosols and gases |
| 08/07/2001 | US6270583 Closed type semiconductor wet thermal oxidation apparatus |
| 08/07/2001 | US6270582 Single wafer load lock chamber for pre-processing and post-processing wafers in a vacuum processing system |
| 08/07/2001 | US6270581 Wet-oxidation apparatus and wet-oxidation method |
| 08/07/2001 | US6270580 Modified material deposition sequence for reduced detect densities in semiconductor manufacturing |
| 08/07/2001 | US6270579 Nozzle arm movement for resist development |
| 08/07/2001 | US6270576 Used for blue and green optoelectronic devices |
| 08/07/2001 | US6270574 Method of growing a buffer layer using molecular beam epitaxy |
| 08/07/2001 | US6270573 Growing silicon carbide thin film via molecular beam epitaxy (mbe) on hexagonal crystal using an off-cut inclined surface prevents occurrence of twin; substrate crystal layers each have different stacked crystal systems; semiconductors |
| 08/07/2001 | US6270572 Method for manufacturing thin film using atomic layer deposition |
| 08/07/2001 | US6270568 Method for fabricating a semiconductor structure with reduced leakage current density |
| 08/07/2001 | US6270397 Chemical mechanical polishing device with a pressure mechanism |
| 08/07/2001 | US6270396 Conditioning apparatus and conditioning method |
| 08/07/2001 | US6270395 Oxidizing polishing slurries for low dielectric constant materials |
| 08/07/2001 | US6270393 Abrading a semiconductor integrated circuit using a slurry comprising an aluminum grain, an inorganic salt, a water-soluble chelating agent, and an abrasive oil; no microscratches; thin film magnetic head |
| 08/07/2001 | US6270392 Polishing apparatus and method with constant polishing pressure |
| 08/07/2001 | US6270353 Low cost shallow trench isolation using non-conformal dielectric material |
| 08/07/2001 | US6270307 Method for aligning wafers in a cassette |
| 08/07/2001 | US6270306 Wafer aligner in center of front end frame of vacuum system |
| 08/07/2001 | US6270246 Apparatus and method for precise mixing, delivery and transfer of chemicals |
| 08/07/2001 | US6270002 Ball arrangement method and ball arrangement apparatus |
| 08/07/2001 | US6270000 Wire bonding method |
| 08/07/2001 | US6269999 Semiconductor chip mounting method utilizing ultrasonic vibrations |
| 08/07/2001 | US6269998 Process for manufacturing electronic circuits |
| 08/07/2001 | US6269975 Chemical delivery systems and methods of delivery |
| 08/07/2001 | US6269826 Collapsible play structures |
| 08/07/2001 | US6269822 Installation for wet-treating substrates |
| 08/07/2001 | US6269742 Method and stencil for extruding material on a substrate |
| 08/07/2001 | US6269723 Method and apparatus for enhancement of a punch guide/receptor tool in a dambar removal system |
| 08/07/2001 | US6269699 Determination of actual defect size in cathode sputter targets subjected to ultrasonic inspection |
| 08/07/2001 | US6269552 Method of drying substrates and drying apparatus |
| 08/07/2001 | US6269548 Spin processing apparatus |
| 08/07/2001 | US6269510 Post CMP clean brush with torque monitor |
| 08/07/2001 | CA2203468C A cerium oxide-metal/metalloid oxide mixture |
| 08/02/2001 | WO2001056119A2 Line-narrowing module for tunable laser |
| 08/02/2001 | WO2001056088A1 Light emitting diode and semiconductor laser |
| 08/02/2001 | WO2001056087A1 Memory cell structure integrated on semiconductor |
| 08/02/2001 | WO2001056085A1 Semiconductor wafer and method for producing the same |
| 08/02/2001 | WO2001056080A1 Method and laminate for fabricating an integrated circuit |
| 08/02/2001 | WO2001056079A2 A method for transferring and stacking of semiconductor devices |
| 08/02/2001 | WO2001056078A1 Method of fabricating copper interconnections using a sacrificial dielectric layer |
| 08/02/2001 | WO2001056077A1 Method of fabricating copper interconnections in semiconductor devices |
| 08/02/2001 | WO2001056076A1 An integrated circuit with shallow trench isolation and fabrication process |
| 08/02/2001 | WO2001056075A1 Nitridation barriers for nitridated tunnel oxide for circuitry for flash memory technology and for locos/sti isolation |
| 08/02/2001 | WO2001056074A1 Wafer chuck, exposure system, and method of manufacturing semiconductor device |
| 08/02/2001 | WO2001056073A1 Wafer container and dusting prevention method thereof and method for containing wafer |
| 08/02/2001 | WO2001056072A1 Method for monitoring a manufacturing process |
| 08/02/2001 | WO2001056071A1 Method for producing silicon epitaxial wafer |
| 08/02/2001 | WO2001056070A1 Planarization process to achieve improved uniformity across semiconductor wafers |
| 08/02/2001 | WO2001056069A1 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC |
| 08/02/2001 | WO2001056068A1 Monitor, method of monitoring, polishing device, and method of manufacturing semiconductor wafer |
| 08/02/2001 | WO2001056065A2 Unreactive gas anneal and low temperature pretreatment of layered superlattice materials |
| 08/02/2001 | WO2001056064A1 Device for thermal treatment of substrates |
| 08/02/2001 | WO2001056063A2 Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners |
| 08/02/2001 | WO2001055952A2 Method and system for collecting and transmitting chemical information |
| 08/02/2001 | WO2001055836A1 Random number generator |
| 08/02/2001 | WO2001055767A2 Microlithographic reduction projection catadioptric objective |
| 08/02/2001 | WO2001055737A2 Analysis of cd-sem signal to detect scummed/closed contact holes and lines |
| 08/02/2001 | WO2001055704A1 System for transferring fluid samples through a sensor array |
| 08/02/2001 | WO2001055703A1 Method of preparing a sensor array |
| 08/02/2001 | WO2001055702A1 Portable sensor array system |
| 08/02/2001 | WO2001055701A1 System and method for the analysis of bodily fluids |
| 08/02/2001 | WO2001055479A1 Apparatus and method for epitaxially processing a substrate |
| 08/02/2001 | WO2001055478A2 Method and device for depositing a precursor on a substrate, said precursor being present in liquid form |
| 08/02/2001 | WO2001055243A1 Solvent-free thermosetting resin composition, process for producing the same, and product therefrom |
| 08/02/2001 | WO2001054880A2 Conveyorized vacuum injection system |
| 08/02/2001 | WO2001054862A1 System and method for controlled polishing and planarization of semiconductor wafers |
| 08/02/2001 | WO2001054853A2 Method and apparatus for repair of defects in materials with short laser pulses |
| 08/02/2001 | WO2001054831A1 Method and apparatus for cleaning workpieces with uniform relative velocity |
| 08/02/2001 | WO2001032793A3 Use of cesium hydroxide in a dielectric cmp slurry |
| 08/02/2001 | WO2001018870A3 Charge compensating semiconductor device and method for the production thereof |
| 08/02/2001 | WO2001018869A3 Semiconductor element for high blocking voltages during a simultaneously low closing resistance and method for the production thereof |
| 08/02/2001 | WO2001017016A3 Capacitor-over-bit line memory circuitry |
| 08/02/2001 | WO2001009662A3 Scanning interferometric near-field confocal microscopy |
| 08/02/2001 | WO2001008221A9 High frequency module |
| 08/02/2001 | WO2001004944B1 Method and apparatus for simultaneously cleaning and annealing a workpiece |
| 08/02/2001 | WO2000079298A3 Magnetic systems with irreversible characteristics and a method of manufacturing and repairing and operating such systems |
| 08/02/2001 | WO2000060644A3 A method of manufacturing a trench gated vdmos |
| 08/02/2001 | WO2000058999B1 Semiconductor structures having a strain compensated layer and method of fabrication |
| 08/02/2001 | WO2000042621A3 Epitaxial thin films |
| 08/02/2001 | WO2000033356A9 Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces |
| 08/02/2001 | US20010011362 Semiconductor layout design method and apparatus |
| 08/02/2001 | US20010011198 Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
| 08/02/2001 | US20010011003 Structure of polishing head of polishing apparatus |
| 08/02/2001 | US20010011002 Wafer processing machine |
| 08/02/2001 | US20010011000 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
| 08/02/2001 | US20010010999 Wafer polishing apparatus |
| 08/02/2001 | US20010010997 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
| 08/02/2001 | US20010010996 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
| 08/02/2001 | US20010010976 Method and system for reducing ARC layer removal bamd providing a capping layer for the ARC layer |
| 08/02/2001 | US20010010975 Feeding oxidation species containing a low concentration of water, which is generated from hydrogen and oxygen by the catalytic action, to the main surface of or in the vicinity of a semiconductor wafer |
| 08/02/2001 | US20010010974 Method for fabricating an electronic device |
| 08/02/2001 | US20010010973 Method for producing a structure with narrow pores |
| 08/02/2001 | US20010010972 Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes |
| 08/02/2001 | US20010010971 Silicide pattern structures and methods of fabricating the same |