Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2001
08/09/2001DE10062991A1 Lasermarkierungsverfahren und Lasermarkierer zur Durchführung des Verfahrens A laser marking method The laser marker and for performing the method
08/09/2001DE10049354A1 Semiconductor component structure for suppressing voltage fluctuations without disadvantageous effects incorporates a diode with PN transition, high turnover voltage and fast reverse recovery characteristics.
08/09/2001DE10046915A1 Halbleitervorrichtung und Verfahren zum Herstellen derselben A semiconductor device and method of manufacturing the same
08/09/2001DE10035670A1 Semiconducting manufacturing system computes optimal exposure value from size of detected pattern produced by photolithography and detected exposure value
08/09/2001DE10029036C1 Verfahren zur Erhöhung der Trenchkapazität A method for increasing the capacity Trench
08/09/2001DE10005189A1 Projection exposure system has light source, illumination system, reflective reticle, beam divider cube in reduction objective that superimposes illumination and imaging beam paths
08/09/2001DE10004649A1 Tuning method for signal delays on bus systems or networks between quick memory modules, involves selectively separating strip conductor run from certain capacitive load structures of printed circuit board
08/09/2001DE10004111A1 Bipolartransistor Bipolar transistor
08/09/2001DE10003639A1 Vorrichtung zum thermischen Behandeln von Substraten An apparatus for thermal treatment of substrates
08/09/2001DE10002354A1 Verfahren zur Herstellung einer Halbleiterscheibe A process for producing a semiconductor wafer
08/09/2001CA2368988A1 Light-emitting thyristor matrix array and driver circuit for the array
08/08/2001EP1122989A2 Method of plating for filling via holes
08/08/2001EP1122988A2 Mounting board, method of manufacturing the same and method of mounting electronic-circuit element
08/08/2001EP1122982A1 Heating apparatus
08/08/2001EP1122882A2 Amplifier circuit
08/08/2001EP1122841A1 Process for producing nitride semiconductor device
08/08/2001EP1122800A2 Light-emitting device and method of manufacturing the same
08/08/2001EP1122796A2 Vertical semiconductor device with a source-down-design and corresponding fabrication process
08/08/2001EP1122795A2 High dielectric constant gate oxides for silicon-based devices
08/08/2001EP1122794A2 Semiconductor device and manufacturing method thereof
08/08/2001EP1122788A1 Soi substrate, method of manufacture thereof, and semiconductor device using soi substrate
08/08/2001EP1122787A2 Semiconductor device for integrated injection logic cell and process for fabricating the same
08/08/2001EP1122782A2 Etched tri-layer metal with integrated wire traces for wire bonding
08/08/2001EP1122781A2 High-density mounted device employing an adhesive sheet
08/08/2001EP1122779A2 Carbon fiber reinforced resin heat radiation fin mounted on a substrate
08/08/2001EP1122778A2 Circuit device and manufacturing method of circuit device
08/08/2001EP1122777A2 Semiconductor device and semiconductor modul using the same
08/08/2001EP1122776A2 Process for producing semiconductor chip
08/08/2001EP1122775A2 Treatment of a metal nitride/metal stack
08/08/2001EP1122774A1 Plasma treatment of a titanium nitride film formed by chemical vapor deposition
08/08/2001EP1122773A2 Semiconductor device manufacturing method
08/08/2001EP1122772A2 Method of forming self-aligned contact structures in semiconductor integrated circuit devices
08/08/2001EP1122771A2 Raised silicide source/drain MOS transistors and method
08/08/2001EP1122770A2 Silica-based insulating film and its manufacture
08/08/2001EP1122769A1 Semiconductor device and method for manufacturing the same
08/08/2001EP1122768A2 Electrically insulating resin composition and method for forming thin film therefrom
08/08/2001EP1122767A1 Wafer polishing method and cleaning method, and protection film
08/08/2001EP1122766A2 Method and apparatus for enhanced chamber cleaning
08/08/2001EP1122762A2 Power delivery system
08/08/2001EP1122719A2 Tunneling magnetoresistive device and method for manufacturing the same
08/08/2001EP1122612A2 Position detection
08/08/2001EP1122611A2 Method of reducing surface defects of a patterned resist layer
08/08/2001EP1122609A2 Exposure method and apparatus and method for producing exposure apparatus
08/08/2001EP1122608A2 Projection exposure system with reflective reticle
08/08/2001EP1122606A2 Chemically amplified positive resist composition
08/08/2001EP1122604A2 Chemically amplified positive resist composition
08/08/2001EP1122567A1 Passive alignement using slanted wall pedestal
08/08/2001EP1122342A1 Method for removing defects of single crystal material and single crystal material from which defects are removed by the method
08/08/2001EP1122341A1 Single crystal SiC
08/08/2001EP1122339A2 Megasonic plating using a submerged transducers-array
08/08/2001EP1122337A2 Apparatus and method for forming deposited film
08/08/2001EP1122336A2 Apparatus and method for forming a deposited film by means of plasma CVD
08/08/2001EP1122335A1 Methods and apparatus for vaporization of liquids
08/08/2001EP1122333A2 UV cure process and tool for low k film formation
08/08/2001EP1122332A1 Method and apparatus for deposition of low residual halogen content TiN film
08/08/2001EP1122301A1 Cleaning solution for electronic materials and method for using the same
08/08/2001EP1122291A2 Layered organic-inorganic perovskites having metal-deficient inorganic frameworks
08/08/2001EP1122020A2 Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
08/08/2001EP1121840A1 Soldering of a semiconductor chip to a substrate
08/08/2001EP1121752A1 Electrostatic sensing chuck using area matched electrodes
08/08/2001EP1121717A1 Improved methods for barrier layer formation
08/08/2001EP1121716A2 Elevated channel mosfet
08/08/2001EP1121715A1 METHOD FOR FORMING AN ANTIREFLECTING SiON FILM, NON-POLLUTING FOR LIGHT-SENSITIVE RESINS FOR FAR-ULTRAVIOLET RADIATION
08/08/2001EP1121714A1 Method of plasma etching dielectric materials
08/08/2001EP1121713A1 Gas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuits
08/08/2001EP1121712A1 Sorting/storage device for wafers and method for handling thereof
08/08/2001EP1121706A1 Integrated power modules for plasma processing systems
08/08/2001EP1121704A1 Electron beam aperture element with beam shielding
08/08/2001EP1121672A1 Wafer mapping system
08/08/2001EP1121622A1 Structure for reflection lithography mask and method for making same
08/08/2001EP1121603A1 Method and system for manufacturing lamp tiles
08/08/2001EP1121474A2 Organocopper precursors for chemical vapor deposition
08/08/2001EP1121222A1 Oscillating orbital polisher and method
08/08/2001EP1121218A1 Method and apparatus for placing solder balls on a substrate
08/08/2001EP1121205A1 Method and apparatus for cleaning low k dielectric and metal wafer surfaces
08/08/2001EP0985021A4 Non-corrosive stripping and cleaning composition
08/08/2001EP0981413B1 A method of producing a heat transfer device
08/08/2001EP0970337B1 Method for cooling a furnace, and furnace provided with a cooling device
08/08/2001EP0756758B1 Mosfet with reduced leakage current
08/08/2001EP0734079B1 Method for vapor-phase growth
08/08/2001EP0645055B1 Array of integrated micromechanical sensor elements, which are adapted to respond to radiation, and method of making same
08/08/2001EP0639294B1 Semiconductor device with integrated rc network and schottky diode
08/08/2001CN1307793A Assembly of an electronic component with spring packaging
08/08/2001CN1307730A Thin-film transistor and method of manufacture thereof
08/08/2001CN1307653A Epitaxial silicon wafers substantially free of grown-in defects
08/08/2001CN1307647A Susceptor for barrel reactor
08/08/2001CN1307545A Wet processing methods for manufacture of electronic components using liquids of varying temperature
08/08/2001CN1307442A Luminescent device and its manufacture
08/08/2001CN1307365A N channel metal-oxide-semiconductor drive circuit and its manufacture
08/08/2001CN1307364A Semiconductor device and its manufacture
08/08/2001CN1307363A Semiconductor device and its manufacture, chemical-mechanical grinding device and method
08/08/2001CN1307362A Semiconductor chip package and its packaging method
08/08/2001CN1307361A Service signal generating circuit
08/08/2001CN1307360A 半导体器件 Semiconductor devices
08/08/2001CN1307359A Method of manufacturing capacitor for semiconductor device
08/08/2001CN1307358A Needle test film card
08/08/2001CN1307357A 半导体封装方法 Semiconductor packaging method
08/08/2001CN1307356A Method of manufacturing epitaxial LED chip
08/08/2001CN1307341A Integrated circuit semiconductor device and self-repairing circuit and method for built-in storage
08/08/2001CN1307326A Device and method for manufacture of liquid crystal display