| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/28/2001 | US6280652 Polishing edge surface of silicon wafers or oxide film-coated semiconductor wafers with formulation comprising water, silicon dioxide selected form colloidal silica, fumed silica, and precipitated silica |
| 08/28/2001 | US6280651 Can etch different types of silicon oxide at different relative etch rates |
| 08/28/2001 | US6280645 Wafer flattening process and system |
| 08/28/2001 | US6280644 Method of planarizing a surface on an integrated circuit |
| 08/28/2001 | US6280640 Providing layers of copper conductors on base; electrically connecting layers of copper conductors by aluminum studs; providing barrier metal mask; anodizing unprotected aluminum; removing aluminum oxide; etching copper conductor; polishing |
| 08/28/2001 | US6280595 Providing substrate having electrode at its surfacethat is proximate to molecule bearing protected functional group; applying potential to electrode to generate electrochemical reagents to deprotect; bonding with monomer |
| 08/28/2001 | US6280585 Sputtering apparatus for filling pores of a circular substrate |
| 08/28/2001 | US6280527 Aqueous quaternary ammonium hydroxide as a screening mask cleaner |
| 08/28/2001 | US6280507 Air manager apparatus and method for exhausted equipment and systems, and exhaust and airflow management in a semiconductor manufacturing facility |
| 08/28/2001 | US6280308 Wafer suction pad |
| 08/28/2001 | US6280299 Combined slurry dispenser and rinse arm |
| 08/28/2001 | US6280297 Apparatus and method for distribution of slurry in a chemical mechanical polishing system |
| 08/28/2001 | US6280295 Apparatus and method to polish a wafer using abrasive flow machining |
| 08/28/2001 | US6280292 Polishing apparatus |
| 08/28/2001 | US6280291 Wafer sensor utilizing hydrodynamic pressure differential |
| 08/28/2001 | US6280290 Method of forming a transparent window in a polishing pad |
| 08/28/2001 | US6280289 Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers |
| 08/28/2001 | US6280183 Substrate support for a thermal processing chamber |
| 08/28/2001 | US6280134 Apparatus and method for automated cassette handling |
| 08/28/2001 | US6280081 Methods and apparatus for calibrating temperature measurements and measuring currents |
| 08/28/2001 | US6280062 Light source device and illumination system |
| 08/28/2001 | US6280060 Cooling arrangement of a heating device of the light irradiation type |
| 08/28/2001 | US6279976 Wafer handling device having conforming perimeter seal |
| 08/28/2001 | US6279889 Loose die fixture |
| 08/28/2001 | US6279881 Method and apparatus which exposes a second object with a pattern formed on a first object and which performs statistical calculation based on position information of marks on the first object |
| 08/28/2001 | US6279816 Apparatus and process for mounting conductor balls on terminal pads of semiconductor devices |
| 08/28/2001 | US6279815 Stacked chip process carrier |
| 08/28/2001 | US6279814 Soldering apparatus for providing a fixed quantity of solder piece onto target plate |
| 08/28/2001 | US6279810 Piezoelectric sensor for measuring bonding parameters |
| 08/28/2001 | US6279724 Automated semiconductor processing system |
| 08/28/2001 | US6279648 Method of manufacturing cooling devices made up of several metal shaped-section elements for mounting on semiconductor components, shaped-section elements for use in the manufacture of such cooling devices, and cooling devices manufactured by the method |
| 08/28/2001 | US6279585 A residue of the barrier metal is produced, oxidized, and then removed; patterning of the thin film resistor is stable, and short-circuit does not occur to a wiring pattern disposed above the barrier metal |
| 08/28/2001 | US6279564 Rocking apparatus and method for slicing a workpiece utilizing a diamond impregnated wire |
| 08/28/2001 | US6279563 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions |
| 08/28/2001 | US6279504 Plasma CVD system |
| 08/28/2001 | US6279503 Chemical vapor deposition apparatus for manufacturing semiconductor devices |
| 08/28/2001 | US6279502 Resist developing method by magnetic field controlling, resist developing apparatus and method of fabricating semiconductor device |
| 08/28/2001 | US6279490 Epicyclic stage |
| 08/28/2001 | US6279412 Corrosion resistant exoskeleton arm linkage assembly |
| 08/28/2001 | US6279402 Device for measuring pressure in a chamber |
| 08/28/2001 | US6279249 Reduced particle contamination manufacturing and packaging for reticles |
| 08/28/2001 | US6279227 Method of forming a resilient contact structure |
| 08/28/2001 | US6279226 Lead bonding machine for bonding leads of a chip disposed over a carrier tape to an electrode pad formed on the chip |
| 08/28/2001 | CA2054706C Very large scale immobilized polymer synthesis |
| 08/24/2001 | CA2336569A1 Photo mask pattern designing method, resist pattern fabricating method and semiconductor device manufacturing method |
| 08/23/2001 | WO2001062062A2 Component mounting apparatus and component mounting method, and recognition apparatus for component mount panel, component mounting apparatus for liquid crystal panel, and component mounting method for liquid crystal panel |
| 08/23/2001 | WO2001061847A1 Electronic device |
| 08/23/2001 | WO2001061798A1 Injection seeded f2 lithography laser |
| 08/23/2001 | WO2001061765A1 Semiconductor component which emits radiation, and method for producing the same |
| 08/23/2001 | WO2001061762A2 Punch-through diode and method of manufacturing the same |
| 08/23/2001 | WO2001061761A1 Polycrystalline thin film and semiconductor device |
| 08/23/2001 | WO2001061760A1 Method of manufacturing thin-film transistor, and liquid-crystal display |
| 08/23/2001 | WO2001061758A1 Lateral dmos improved breakdown structure and method |
| 08/23/2001 | WO2001061755A1 Semiconductor devices |
| 08/23/2001 | WO2001061754A1 Semiconductor device fabrication method and semiconductor device fabrication device |
| 08/23/2001 | WO2001061753A1 Electronic component comprising an electrically conductive connection consisting of carbon nanotubes and a method for producing the same |
| 08/23/2001 | WO2001061750A2 Method of etching a shaped cavity |
| 08/23/2001 | WO2001061749A1 SEMICONDUCTOR DEVICE WITH AN INTEGRATED CMOS CIRCUIT WITH MOS TRANSISTORS HAVING SILICON-GERMANIUM (Si1-xGex) GATE ELECTRODES, AND METHOD OF MANUFACTURING SAME |
| 08/23/2001 | WO2001061747A2 Method for eliminating stress induced dislocation in cmos devices |
| 08/23/2001 | WO2001061746A2 Test structure for metal cmp process control |
| 08/23/2001 | WO2001061745A2 Surface passivation method and arrangement for measuring the lifetime of minority carriers in semiconductors |
| 08/23/2001 | WO2001061744A1 Method for manufacturing semiconductor device |
| 08/23/2001 | WO2001061743A1 Method for low temperature bonding and bonded structure |
| 08/23/2001 | WO2001061742A1 Method for annealing an integrated device using a radiant energy absorber layer |
| 08/23/2001 | WO2001061741A1 A method of manufacturing a semiconductor device |
| 08/23/2001 | WO2001061740A1 Self-cleaning process for etching silicon-containing material |
| 08/23/2001 | WO2001061739A1 Process for planarization and recess etching of polysilicon in an overfilled trench |
| 08/23/2001 | WO2001061738A1 Dram capacitor with ultra-thin nitride layer |
| 08/23/2001 | WO2001061737A1 Electron beam modification of cvd deposited films, forming low dielectric constant materials |
| 08/23/2001 | WO2001061736A1 Method of processing wafer |
| 08/23/2001 | WO2001061735A2 Implantation mask for high energy ion implantation |
| 08/23/2001 | WO2001061734A1 Non-single crystal film, substrate with non-single crystal film, method and apparatus for producing the same, method and apparatus for inspecting the same, thin film transistor, thin film transistor array and image display using it |
| 08/23/2001 | WO2001061733A2 Double recessed transistor |
| 08/23/2001 | WO2001061728A1 Method and apparatus for plasma deposition |
| 08/23/2001 | WO2001061727A1 Method and device for attenuating harmonics in semiconductor plasma processing systems |
| 08/23/2001 | WO2001061515A1 Laser lithography quality alarm system |
| 08/23/2001 | WO2001061514A1 Process monitoring system for lithography lasers |
| 08/23/2001 | WO2001061412A1 A method of improving photomask geometry |
| 08/23/2001 | WO2001061411A1 Zoom illumination system for use in photolithography |
| 08/23/2001 | WO2001061409A2 Apparatus and method of cleaning reticles for use in a lithography tool |
| 08/23/2001 | WO2001061407A1 Laser thermal processing apparatus and method |
| 08/23/2001 | WO2001061369A1 Lssd interface |
| 08/23/2001 | WO2001061368A1 Tester and holder for tester |
| 08/23/2001 | WO2001061065A1 Method of depositing an io or ito thin film on polymer substrate |
| 08/23/2001 | WO2001060764A1 METHOD FOR MANUFACTURING Si-SiC MEMBER FOR SEMICONDUCTOR HEAT TREATMENT |
| 08/23/2001 | WO2001060567A1 Process for reducing surface variations for polished wafer |
| 08/23/2001 | WO2001060242A2 Test structure for metal cmp process control |
| 08/23/2001 | WO2000075975A3 Low dielectric constant polyorganosilicon coatings generated from polycarbosilanes |
| 08/23/2001 | WO1999059191A3 Method and device for drying photoresist coatings |
| 08/23/2001 | US20010016938 Inspection method and inspection system using charged particle beam |
| 08/23/2001 | US20010016937 System and method for compressing LSI mask writing data |
| 08/23/2001 | US20010016934 Designing method of semiconductor integrated circuit using library storing mask pattern of macro circuit and designing apparatus executing the same |
| 08/23/2001 | US20010016933 Block based design methodology |
| 08/23/2001 | US20010016923 Program execution system for semiconductor testing apparatus |
| 08/23/2001 | US20010016893 Layout for a semiconductor memory device having redundant elements |
| 08/23/2001 | US20010016826 Assistance method and apparatus |
| 08/23/2001 | US20010016786 Tool position measurement method, offset measurement method, reference member and bonding apparatus |
| 08/23/2001 | US20010016674 Method and apparatus for cleaning a vacuum line in a CVD system |
| 08/23/2001 | US20010016551 Shock resistance; high strength; heat resistance |
| 08/23/2001 | US20010016470 Polishing apparatus and polishing method |