Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2001
08/22/2001EP1126508A2 Processing apparatus having integrated pumping system
08/22/2001EP1126507A2 Apparatus for positioning a thin plate
08/22/2001EP1126506A2 Apparatus and method for robotic alignment of substrates
08/22/2001EP1126505A2 Apparatus and method for chemical cleaning and etching of discrete disk-shaped substrates
08/22/2001EP1126477A2 Method for structure investigation in a semiconductor substrate
08/22/2001EP1126474A1 Semiconductor memory device
08/22/2001EP1126473A1 Semiconductor memory device
08/22/2001EP1126472A1 Flash-erasable semiconductor memory device
08/22/2001EP1126471A1 Method for reading or writing from or into a ferroelectric transistor of a memory cell and a memory matrix
08/22/2001EP1126470A2 Integrated semiconductor memory with memory cells having ferroelectric memory effect
08/22/2001EP1126469A2 Magnetic memory
08/22/2001EP1126468A2 MRAM device including differential sense amplifiers
08/22/2001EP1126352A1 Bandgap voltage comparator used as a low voltage detection circuit
08/22/2001EP1126323A2 Exposure method and exposure apparatus
08/22/2001EP1126321A1 Positive photoresists containing crosslinked polymers
08/22/2001EP1126320A2 Chemically amplified resist composition containing low molecular weight additives
08/22/2001EP1126319A1 Photosensitive resin composition and method of improving dry etching resistance of photosensitive resin composition
08/22/2001EP1126047A1 Fastening device for a purge ring
08/22/2001EP1126046A2 Chemical vapor deposition of barriers from novel precursors
08/22/2001EP1126001A2 Radiation-curable heat-peelable pressure-sensitive adhesive sheet and process for producing cut pieces with the same
08/22/2001EP1125999A1 Polishing composition
08/22/2001EP1125686A1 Work holding disc for polishing, work polishing apparatus, and work polishing method
08/22/2001EP1125479A1 Fabrication process for flex circuit applications
08/22/2001EP1125332A1 Cell based array having compute/drive ratios of n:1
08/22/2001EP1125328A1 Method for producing a dram cell arrangement
08/22/2001EP1125327A1 High-performance dual-damascene interconnect structures
08/22/2001EP1125326A2 Selectively doped trench device isolation
08/22/2001EP1125325A1 Device for providing balls or preforms for making flip-chip connections
08/22/2001EP1125324A1 Radical-assisted sequential cvd
08/22/2001EP1125323A1 Deposition of oxide layer on the gate
08/22/2001EP1125322A1 Method for self-adjusted tuning of thyristors with sequential triggering
08/22/2001EP1125320A1 Low temperature formation of backside ohmic contacts for vertical devices
08/22/2001EP1125319A2 Semiconductor processing chamber calibration tool
08/22/2001EP1125318A1 Apparatus for and method of manufacturing a semiconductor die carrier
08/22/2001EP1125317A2 Chamber liner for semiconductor process chambers
08/22/2001EP1125316A1 Component affixing method and apparatus
08/22/2001EP1125315A1 Method and apparatus for hf-hf cleaning
08/22/2001EP1125314A1 Improved endpoint detection for substrate fabrication processes
08/22/2001EP1125228A1 Method and apparatus for channel routing
08/22/2001EP1125180A1 Load device
08/22/2001EP1125168A1 Stripping compositions for semiconductor substrates
08/22/2001EP1125167A1 Methods of reducing proximity effects in lithographic processes
08/22/2001EP1125166A1 Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography
08/22/2001EP1125113A1 Method and apparatus for improved defect detection
08/22/2001EP1125096A1 Method of and device for determining the warpage of a wafer
08/22/2001EP1125008A1 Thermally annealed, low defect density single crystal silicon
08/22/2001EP1125007A1 Submicron metallization using electrochemical deposition
08/22/2001EP1125003A1 Excess cvd reactant control
08/22/2001EP1125002A1 Systems and methods for two-sided etch of a semiconductor substrate
08/22/2001EP1125001A1 An in-line sputter deposition system
08/22/2001EP1124912A1 A chemical mechanical polishing slurry system having an activator solution
08/22/2001EP1124882A1 PREPARATION OF CROSS-LINKED 2-DIMENSIONAL POLYMERS WITH SIDEDNESS FROM $g(a),$g(b)-LACTONES
08/22/2001EP1124745A1 Transport system with integrated transport carrier and directors
08/22/2001EP1124674A1 Method and device for separating into two slices a wafer of material, in particular semiconductor material
08/22/2001EP1124666A1 Use of zeta potential during chemical mechanical polishing for end point detection
08/22/2001EP1124622A1 Method for reducing the amount of perfluorocompound gas contained in exhaust emissions from plasma processing
08/22/2001EP1124467A2 Method and apparatus for insertion and retainment of pomade within a dispenser
08/22/2001EP1086353A4 Method and apparatus for determining processing chamber cleaning or wafer etching endpoint
08/22/2001EP0975979B1 Method for making cards with multiple contact tips for testing semiconductor chips
08/22/2001EP0954425A4 Method for transfer molding standard electronic packages and apparatus formed thereby
08/22/2001EP0885407B1 Bottom antireflective coatings through refractive index modification by anomalous dispersion
08/22/2001EP0834082B1 Performance driven bist technique
08/22/2001EP0819314B1 Method and device for controlling the energy of at least one charged species bombarding a body immersed in a plasma
08/22/2001EP0815596B1 Improved non-destructively read ferroelectric memory cell
08/22/2001CN2444380Y 光电模块装置 Photovoltaic module device
08/22/2001CN2444312Y Improved microcrystalline plate memory band
08/22/2001CN2444311Y Crystal plate tester
08/22/2001CN1309816A Nitride based transistors on semi-insulating silicon carbide substrates
08/22/2001CN1309814A DC sputtering process for making smooth electrodes and thin film ferroelectric capacitors having improved memory retention
08/22/2001CN1309810A Storage assembly comprised of plurality of resistive ferroelectric storage cells
08/22/2001CN1309785A Silicate-contg. alkaline compositions for cleaning microelectronic substrates
08/22/2001CN1309759A Method and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
08/22/2001CN1309430A Magnetic tunnel junction element and magnetic memory using it
08/22/2001CN1309426A Storage cell for voltage control of independent threshold and device and method for selecting grid
08/22/2001CN1309425A Semiconductor integrated circuit device and mfg. method thereof
08/22/2001CN1309424A Semiconductor device
08/22/2001CN1309423A Semiconductor device and mfg method thereof
08/22/2001CN1309421A Thin slice resistance measurer and electronic part mfg. method
08/22/2001CN1309420A Method for manufacturing channel-type power MOSFET
08/22/2001CN1309419A Semiconductor field effect metal oxide transistor with minimum covered capacitance
08/22/2001CN1309418A Method and device for forming film on substrate
08/22/2001CN1309417A Method for cleaning electronic element
08/22/2001CN1309416A Micropicture forming material and method for mfg. semiconductor device using said material
08/22/2001CN1309401A Voltage-variable capacitor with improved C-V linearity
08/22/2001CN1309332A Exposure method and device, and method for mfg. device
08/22/2001CN1309301A Magnetic element with double magnetic state and mfg. method thereof
08/22/2001CN1309192A Metal compound solution and method for preparing film using same
08/22/2001CN1309156A Pressure-sensitive adhesive tablet for adhering wafers
08/22/2001CN1309095A Water distribution pipeline for cleaning water contg gas dissolved therein
08/22/2001CN1309073A Long lead rack conveying mechanism of electric plating device
08/22/2001CN1069935C Method for reducing formation of microtransistor defect in epitaxial growth of silicon carbide, and resulting silicon carbide structure
08/22/2001CN1069933C Method and apparatus for forming deposited film
08/21/2001US6278951 Crosstalk noise calculation method and storage medium
08/21/2001US6278905 Method and system for controlling robot arms of automatic guided vehicles on semiconductor wafer production line
08/21/2001US6278871 Integrated circuit including a low-dispersion capacitive network
08/21/2001US6278698 Radio frequency data communications device
08/21/2001US6278647 Semiconductor memory device having multi-bank and global data bus
08/21/2001US6278635 Storage method of semiconductor storage apparatus
08/21/2001US6278631 Magnetic random access memory array divided into a plurality of memory banks
08/21/2001US6278629 Read-only memory and method for fabricating the same