| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/13/2001 | WO2001094640A2 Bio-mediated assembly of micrometer-scale and nanometer-scale structures |
| 12/13/2001 | WO2001094273A1 Method for manufacturing aluminum nitride sintered body in which via hole is made |
| 12/13/2001 | WO2001094245A1 Material transport system |
| 12/13/2001 | WO2001094076A1 Chemical-hydrodynamic etch planarization |
| 12/13/2001 | WO2001094075A1 Orbital polishing apparatus |
| 12/13/2001 | WO2001094074A1 Polishing pad window for a chemical-mechanical polishing tool |
| 12/13/2001 | WO2001094038A1 Surface tension effect dryer with porous vessel walls |
| 12/13/2001 | WO2001094037A1 Edge bead removal for spin-on materials using carbon-dioxide cleaning |
| 12/13/2001 | WO2001077243B1 Die-attaching paste and semiconductor device |
| 12/13/2001 | WO2001063233A3 Device for detecting wave fronts |
| 12/13/2001 | WO2001051243A3 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulsewidths |
| 12/13/2001 | WO2001043184A3 Electrostatic chucks with flat film electrode |
| 12/13/2001 | WO2001043169A3 Methods for separating microcircuit dies from wafers |
| 12/13/2001 | WO2001041212A3 Integrated circuit package |
| 12/13/2001 | WO2001039257A3 Silicon layer highly sensitive to oxygen and method for obtaining same |
| 12/13/2001 | WO2001039250A3 Conductive interconnection |
| 12/13/2001 | WO2001035051A3 X-ray tomography bga (ball grid array) inspections |
| 12/13/2001 | WO2001033621A3 Methods for forming openings in a substrate and methods for creating assemblies |
| 12/13/2001 | WO2000019524A9 Ic interconnect structures and methods for making same |
| 12/13/2001 | WO2000014797A3 Isolation region forming methods |
| 12/13/2001 | WO2000004587A9 Nitride based transistors on semi-insulating silicon carbide substrates |
| 12/13/2001 | WO2000000560A3 Chemical mechanical polishing slurry and method for using same |
| 12/13/2001 | WO1999062671A9 Apparatus for polishing silicon wafers |
| 12/13/2001 | US20010052116 Method for the analysis of a test software tool |
| 12/13/2001 | US20010052096 Low power scan flipflop |
| 12/13/2001 | US20010051839 Differential process control method |
| 12/13/2001 | US20010051837 Substrate processing system and substrate processing method |
| 12/13/2001 | US20010051836 Fab yield enhancement system |
| 12/13/2001 | US20010051742 Norbornene ester such as 1-ethylcyclopentyl 3-acetoxy-3-(5-norbornen-2-yl)propionate for use as monomer in photoresist resin having good reactivity and radiation transparency using excimer laser as light source |
| 12/13/2001 | US20010051741 Novel ester compounds having alicyclic structure and method for preparing same |
| 12/13/2001 | US20010051597 Aqueous solution of citric acid and chelate compound |
| 12/13/2001 | US20010051500 Polishing apparatus |
| 12/13/2001 | US20010051499 Substrate rotating apparatus |
| 12/13/2001 | US20010051496 Methods and apparatuses for planarizing microelectronic substrate assemblies |
| 12/13/2001 | US20010051494 Method of cleaning glass |
| 12/13/2001 | US20010051447 Semiconductor device, semiconductor wafer, and methods of producing the same device and wafer |
| 12/13/2001 | US20010051446 Method of manufacturing insulating film-forming material, the insulating film-forming material, and insulating film |
| 12/13/2001 | US20010051445 Semiconductor device and method of manufacturing the same |
| 12/13/2001 | US20010051444 Method for manufacturing aluminum oxide film for use in semiconductor device |
| 12/13/2001 | US20010051443 Defect analysis method in image sensor device |
| 12/13/2001 | US20010051442 Method for producing high surface area foil electrodes |
| 12/13/2001 | US20010051440 Acid blend for removing etch residue |
| 12/13/2001 | US20010051439 Self cleaning method of forming deep trenches in silicon substrates |
| 12/13/2001 | US20010051438 Process and apparatus for dry-etching a semiconductor layer |
| 12/13/2001 | US20010051437 Process Monitoring Apparatus and Method |
| 12/13/2001 | US20010051436 Fabrication method and structure for ferroelectric nonvolatile memory field effect transistor |
| 12/13/2001 | US20010051435 Chemical-organic planarization process for atomically smooth interfaces |
| 12/13/2001 | US20010051434 Methods Incorporating Detectable Atoms Into Etching Processes |
| 12/13/2001 | US20010051433 Chemical mechanical polishing using cesium hydroxide |
| 12/13/2001 | US20010051432 Manufacturing method of semiconductor device |
| 12/13/2001 | US20010051431 Fabrication process for dishing-free cu damascene structures |
| 12/13/2001 | US20010051430 Planarization process for semiconductor substrates |
| 12/13/2001 | US20010051429 High vacuum apparatus for fabricating semiconductor device and method for forming epitaxial layer using the same |
| 12/13/2001 | US20010051428 Low-resistive tungsten silicide layer strongly adhered to lower layer and semiconductor device using the same |
| 12/13/2001 | US20010051427 Methods of forming refractory metal silicide components and methods of restricting silicon surface migration of a silicon structure |
| 12/13/2001 | US20010051426 Method for forming a semiconductor device having a mechanically robust pad interface. |
| 12/13/2001 | US20010051425 Method of forming a contact hole in a seminconductor device |
| 12/13/2001 | US20010051424 Method of forming an opening in a dielectric layer in integrated circuit |
| 12/13/2001 | US20010051423 Multilayer passivation process for forming air gaps within a dielectric between interconnections |
| 12/13/2001 | US20010051422 Semiconductor devices and methods for manufacturing the same |
| 12/13/2001 | US20010051421 Method of manufacturing a semiconductor device |
| 12/13/2001 | US20010051420 Dielectric formation to seal porosity of low dielectic constant (low k) materials after etch |
| 12/13/2001 | US20010051419 Method for fabricating a mosfet having polycide gate electrode |
| 12/13/2001 | US20010051418 Method of manufacturing semiconductor device having memory cell transistors |
| 12/13/2001 | US20010051417 Spot-implant method for MOS transistor applications |
| 12/13/2001 | US20010051415 Thin microelectronic substrates and methods of manufacture |
| 12/13/2001 | US20010051414 Semiconductor integrated circuit and method for manufacturing the same |
| 12/13/2001 | US20010051413 Process for fabricating a self-aligned double-polysilicon bipolar transistor |
| 12/13/2001 | US20010051412 Method of fabricating semiconductor device |
| 12/13/2001 | US20010051411 Manufacturing method of semiconductor device |
| 12/13/2001 | US20010051410 Semiconductor device having reduced field oxide recess and method of fabrication |
| 12/13/2001 | US20010051409 Processing methods of forming integrated circuitry memory devices, methods of forming DRAM arrays, and related semiconductor masks |
| 12/13/2001 | US20010051408 Method for providing improved step coverage of deep trenches and use thereof |
| 12/13/2001 | US20010051407 Semiconductor processing methods of forming integrated circuitry |
| 12/13/2001 | US20010051406 Fabrication of dram and other semiconductor devices with an insulating film using a wet rapid thermal oxidation process |
| 12/13/2001 | US20010051405 Microlens, solid state imaging device, and production process thereof |
| 12/13/2001 | US20010051404 Semiconductor device with test circuit |
| 12/13/2001 | US20010051403 Method and apparatus for deposition of porous silica dielectrics |
| 12/13/2001 | US20010051401 Production of a semiconductor device |
| 12/13/2001 | US20010051400 Method of manufacturing a laterally diffused metal oxide semiconductor device |
| 12/13/2001 | US20010051399 Control system for use when growing thin-films on semiconductor-based materials |
| 12/13/2001 | US20010051398 Electro-optical device |
| 12/13/2001 | US20010051397 Plastic lead frames for semiconductor devices, packages including same, and methods of fabrication |
| 12/13/2001 | US20010051396 Method for fabricating electronic circuit device, semiconductor device and electronic circuit device |
| 12/13/2001 | US20010051394 Die bonding equipment |
| 12/13/2001 | US20010051392 Semiconductor devices having protective layers thereon through which contact pads are exposed and stereolithographic methods of fabricating such semiconductor devices |
| 12/13/2001 | US20010051391 Stereolithographically fabricated conductive elements, semiconductor device components and assemblies including such conductive elements, and methods |
| 12/13/2001 | US20010051389 Method for manufacturing high efficiency photovoltaic devices at enhanced depositions rates |
| 12/13/2001 | US20010051388 Microcrystalline series photovoltaic element, process for the production of said photovoltaic element, building material in which said photovoltaic element is used, and power generation apparatus in which said photovoltaic element is used |
| 12/13/2001 | US20010051387 Method of growing silicon crystal in liquid phase and method of producing solar cell |
| 12/13/2001 | US20010051386 Method of manufacturing a semiconductor device |
| 12/13/2001 | US20010051382 Method for fabricating epitaxial substrate |
| 12/13/2001 | US20010051381 Method for manufacturing a ferroelectric memory |
| 12/13/2001 | US20010051317 Slit in tube; dividing eddy current zone |
| 12/13/2001 | US20010051313 Positive resist composition |
| 12/13/2001 | US20010051302 Preferential etching |
| 12/13/2001 | US20010051289 Anti-corrosion ceramic member |
| 12/13/2001 | US20010051232 Plasma processing method |
| 12/13/2001 | US20010051228 Method of forming interlayer insulating film |
| 12/13/2001 | US20010051215 Silicon titanium nitrides formed by reacting titanium halide such as titanium tetraiodide, a vapor phase silicon compound and a reactive nitrogen gas such as ammonia in presence of the substrate at given temperature range until nitride forms |