| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/26/2001 | CN1076874C 静电放电保护电路 Electrostatic discharge protection circuit |
| 12/26/2001 | CN1076873C Integrated chip package and its connecting member |
| 12/26/2001 | CN1076872C Chip carrier and method of maufacturing and mounting the same |
| 12/26/2001 | CN1076871C 探测卡 Probe card |
| 12/26/2001 | CN1076870C Method for fabricating metal oxide field effect transistors |
| 12/26/2001 | CN1076869C Method of forming SOG film in semiconductor device |
| 12/26/2001 | CN1076868C Method for processing through-hole on crystal chip with protective layer |
| 12/26/2001 | CN1076867C Rotary type apparatus and method for processing semiconductor waters |
| 12/26/2001 | CN1076866C Fabricating method for high-melting point metal silicide layer on surface of polysilicon layer |
| 12/26/2001 | CN1076865C Method of forming grid electrode in semiconductor device |
| 12/26/2001 | CN1076864C Laser process |
| 12/26/2001 | CN1076863C Apparatus and method of manufacturing semiconductor element |
| 12/26/2001 | CN1076862C Fabrication process of SOI (silicon on insulator) substrate |
| 12/26/2001 | CN1076861C Semiconductor substrate and process for production thereof |
| 12/25/2001 | US6334209 Method for exposure-mask inspection and recording medium on which a program for searching for portions to be measured is recorded |
| 12/25/2001 | US6334206 Forgery prevention microcontroller circuit |
| 12/25/2001 | US6334120 Semiconductor arithmetic circuit and data processing device |
| 12/25/2001 | US6334097 Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods |
| 12/25/2001 | US6333961 Reflection masks, microlithography apparatus using same, and integrated circuit manufacturing methods employing same |
| 12/25/2001 | US6333889 Logic-merged semiconductor memory having high internal data transfer rate |
| 12/25/2001 | US6333880 Semiconductor memory device capable of detecting high-voltage test command signal |
| 12/25/2001 | US6333878 Semiconductor memory device having program circuit |
| 12/25/2001 | US6333869 Semiconductor memory device with readily changeable memory capacity |
| 12/25/2001 | US6333866 Semiconductor device array having dense memory cell array and heirarchical bit line scheme |
| 12/25/2001 | US6333864 Power supply adjusting circuit and a semiconductor device using the same |
| 12/25/2001 | US6333858 Carrier module |
| 12/25/2001 | US6333786 Aligning method |
| 12/25/2001 | US6333785 Standard for calibrating and checking a surface inspection device and method for the production thereof |
| 12/25/2001 | US6333781 Projection optical system and exposure apparatus and method |
| 12/25/2001 | US6333780 Projection aligner |
| 12/25/2001 | US6333670 Semiconductor device capable of stably generating internal voltage with low supply voltage |
| 12/25/2001 | US6333667 Antifuse programming circuit |
| 12/25/2001 | US6333638 Semiconductor test apparatus and test method using the same |
| 12/25/2001 | US6333636 Semiconductor wafer aligning system and method using same |
| 12/25/2001 | US6333601 Planar gas introducing unit of a CCP reactor |
| 12/25/2001 | US6333571 MOS integrated circuit device operating with low power consumption |
| 12/25/2001 | US6333566 Semiconductor having high density packaging thereof |
| 12/25/2001 | US6333565 Semiconductor device and method of manufacturing the same, circuit board, and electronic instrument |
| 12/25/2001 | US6333564 Surface mount type semiconductor device and method of producing the same having an interposing layer electrically connecting the semiconductor chip with protrusion electrodes |
| 12/25/2001 | US6333562 Multichip module having stacked chip arrangement |
| 12/25/2001 | US6333561 Method for mounting a semiconductor chip on a substrate, and semiconductor device adapted for mounting on a substrate |
| 12/25/2001 | US6333560 Process and structure for an interlock and high performance multilevel structures for chip interconnects and packaging technologies |
| 12/25/2001 | US6333559 Method/structure for creating aluminum wirebound pad on copper BEOL |
| 12/25/2001 | US6333558 Semiconductor device and method for fabricating the same |
| 12/25/2001 | US6333556 Insulating materials |
| 12/25/2001 | US6333554 Semiconductor device with gold bumps, and method and apparatus of producing the same |
| 12/25/2001 | US6333553 Wafer thickness compensation for interchip planarity |
| 12/25/2001 | US6333551 Surface profiling in electronic packages for reducing thermally induced interfacial stresses |
| 12/25/2001 | US6333549 Integrated circuit package having interchip bonding and method therefor |
| 12/25/2001 | US6333548 Semiconductor device with etch stopping film |
| 12/25/2001 | US6333547 Semiconductor device and method of manufacturing the same |
| 12/25/2001 | US6333545 Semiconductor device having blocking layer and fuses |
| 12/25/2001 | US6333542 Semiconductor device and method of manufacturing the same |
| 12/25/2001 | US6333541 MOSFET gate insulating films with oxynitride and oxide |
| 12/25/2001 | US6333540 Semiconductor device manufacturing method and semiconductor device |
| 12/25/2001 | US6333539 Semiconductor transistor devices and methods for forming semiconductor transistor devices |
| 12/25/2001 | US6333538 COB DRAM having contact extending over element-isolating film |
| 12/25/2001 | US6333537 Thin film capacitor with an improved top electrode |
| 12/25/2001 | US6333536 Depletion compensated polysilicon electrodes |
| 12/25/2001 | US6333535 Semiconductor device |
| 12/25/2001 | US6333534 Semiconductor device and method of fabricating |
| 12/25/2001 | US6333533 Trench storage DRAM cell with vertical three-sided transfer device |
| 12/25/2001 | US6333532 Patterned SOI regions in semiconductor chips |
| 12/25/2001 | US6333531 Dopant control of semiconductor devices |
| 12/25/2001 | US6333530 Semiconductor memory device having redundancy function |
| 12/25/2001 | US6333529 Capacitor with noble metal electrode containing oxygen |
| 12/25/2001 | US6333528 Semiconductor device having a capacitor exhibiting improved moisture resistance |
| 12/25/2001 | US6333527 Semiconductor device and method for fabricating the same |
| 12/25/2001 | US6333525 Charge transfer apparatus and manufacture method thereof |
| 12/25/2001 | US6333523 Field-effect transistor |
| 12/25/2001 | US6333522 Light-emitting element, semiconductor light-emitting device, and manufacturing methods therefor |
| 12/25/2001 | US6333519 Semiconductor apparatus process for production thereof and liquid crystal apparatus |
| 12/25/2001 | US6333518 Thin-film transistor and method of making same |
| 12/25/2001 | US6333517 Semiconductor integrated circuit device equipped with power make-up circuit used in burn-in test after packaging and method for testing the same |
| 12/25/2001 | US6333508 Illumination system for electron beam lithography tool |
| 12/25/2001 | US6333493 Heat treating method and heat treating apparatus |
| 12/25/2001 | US6333469 Wafer-scale package structure and circuit board attached thereto |
| 12/25/2001 | US6333460 Structural support for direct lid attach |
| 12/25/2001 | US6333284 As substrate for photomask |
| 12/25/2001 | US6333279 Method for producing silicon wafer and silicon wafer |
| 12/25/2001 | US6333278 Forming an interlayer insulating film by chemical vapor deposition employing a mixed gas of hydrogen peroxide and a reactive silicon compound gas |
| 12/25/2001 | US6333277 Method for reducing non-homogenous density during forming process of borophosphosilicate glass layer |
| 12/25/2001 | US6333276 Semiconductor device and method of forming semiconductor device |
| 12/25/2001 | US6333275 Etchant mixing system for edge bevel removal of copper from silicon wafers |
| 12/25/2001 | US6333274 Method of manufacturing a semiconductor device including a seamless shallow trench isolation step |
| 12/25/2001 | US6333273 Method and apparatus for dry etching |
| 12/25/2001 | US6333272 Gas distribution apparatus for semiconductor processing |
| 12/25/2001 | US6333271 Multi-step plasma etch method for plasma etch processing a microelectronic layer |
| 12/25/2001 | US6333270 Etching gas used for plasma-enhanced etching of vanadium oxide film and method of plasma-enhanced etching of vanadium oxide film |
| 12/25/2001 | US6333269 Plasma treatment system and method |
| 12/25/2001 | US6333268 Method and apparatus for removing post-etch residues and other adherent matrices |
| 12/25/2001 | US6333267 Forming an interconnect/electrode film on a substrate by physical vapor deposition; patterning interconnect/electrode film; anodic-oxidizing part or all of interconnect/electrode film to form an anodic oxidation film |
| 12/25/2001 | US6333266 Manufacturing process for a semiconductor device |
| 12/25/2001 | US6333265 Low pressure, low temperature, semiconductor gap filling process |
| 12/25/2001 | US6333264 Semiconductor processing method using high pressure liquid media treatment |
| 12/25/2001 | US6333263 Method of reducing stress corrosion induced voiding of patterned metal layers |
| 12/25/2001 | US6333262 Method for forming silicide |
| 12/25/2001 | US6333261 Method for preventing aluminum intrusions |
| 12/25/2001 | US6333260 Semiconductor device having improved metal line structure and manufacturing method therefor |
| 12/25/2001 | US6333259 Semiconductor device and apparatus and method for manufacturing the same |