| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/20/2001 | US20010053600 Barrier layers of metal nitride or oxynitrides decrease metal salt formation and areas of delamination |
| 12/20/2001 | US20010053599 Method of manufacturing a metal wiring in a semiconductor device |
| 12/20/2001 | US20010053598 Semiconductor device having bumps |
| 12/20/2001 | US20010053597 Method of manufacturing semiconductor devices |
| 12/20/2001 | US20010053596 Multilevel interconnects; sputtering a conformal titanium layer on an opening, covering it with an aluminum, silicon and copper alloy, which is then covered by an aluminum and copper alloy; integrated circuits |
| 12/20/2001 | US20010053595 Method for forming a silicide gate stack for use in a self-aligned contact etch |
| 12/20/2001 | US20010053594 High-k gate dielectric process with self aligned damascene contact to damascene gate and a low-k inter level dielectric |
| 12/20/2001 | US20010053592 Method of manufacturing semiconductor device |
| 12/20/2001 | US20010053591 Plasma treatment to enhance inorganic dielectric adhesion to copper |
| 12/20/2001 | US20010053589 Method of manufacturing an integrated edge structure for high voltage semiconductor devices, and related integrated edge structure |
| 12/20/2001 | US20010053586 Enhancing chemical vapor deposition of titanium nitride from tetrakis(dialkylamino)titanium and ammonia; removing hydro-carbon impurities; adding small amount of such as dipropyl-amine |
| 12/20/2001 | US20010053585 Cleaning process for substrate surface |
| 12/20/2001 | US20010053584 Method for fabricating a bipolar transistor of the self-aligned double-polysilicon type with a heterojunction base and corresponding transistor |
| 12/20/2001 | US20010053583 Shallow trench isolation formation process using a sacrificial layer |
| 12/20/2001 | US20010053582 Semiconductor device |
| 12/20/2001 | US20010053581 Ldmos device with self-aligned resurf region and method of fabrication |
| 12/20/2001 | US20010053580 Inverted MOSFET process |
| 12/20/2001 | US20010053579 Manufacturing method of semiconductor device |
| 12/20/2001 | US20010053578 Semiconductor device having high-density capacitor elements, and manufacturing method thereof |
| 12/20/2001 | US20010053577 Method of fabricating a semiconductor-on-insulator memory cell with buried word and body lines |
| 12/20/2001 | US20010053576 DRAM capacitor formulation using a double-sided electrode |
| 12/20/2001 | US20010053575 Trench dram cell with vertical device and buried word lines |
| 12/20/2001 | US20010053574 Method for fabricating a semiconductor component having a wiring which runs piecewise in the substrate, and also a semiconductor component which can be fabricated by this method |
| 12/20/2001 | US20010053573 Semiconductor device manufacturing method for preventing electrical shorts between lower and upper interconnection layers |
| 12/20/2001 | US20010053572 Semiconductor device having opening and method of fabricating the same |
| 12/20/2001 | US20010053571 Method for forming a thin film |
| 12/20/2001 | US20010053570 Infiltrating solution of organic solvent into film and reflowing, etching exposed region using film as mask |
| 12/20/2001 | US20010053569 Process for fabricating a MOS transistor having two gates, one of which is buried and corresponding transistor |
| 12/20/2001 | US20010053568 Method for manufacturing a semiconductor component |
| 12/20/2001 | US20010053566 Leadframe alteration to direct compound flow into package |
| 12/20/2001 | US20010053564 Method of manufacturing semiconductor device |
| 12/20/2001 | US20010053562 Process for producing a substrate and plating apparatus |
| 12/20/2001 | US20010053561 Insulated-gate semiconductor element and method for manufacturing the same |
| 12/20/2001 | US20010053560 Transparent electrode, patterning method for same, and manufacturing method for semiconductor element using same |
| 12/20/2001 | US20010053559 Method of fabricating display device |
| 12/20/2001 | US20010053558 Oxidizing in the presence of an organometallic catalyst using chemical vapor deposition; for use in dynamic random access memory devices; integrated circuits; semiconductors |
| 12/20/2001 | US20010053557 Inspection of defects on the circumference of semiconductor wafers |
| 12/20/2001 | US20010053540 Forming biocompatible label; provide nucleotide sequences, denature, attach compound which prevents crystalization, monitor denatured nucleotide sequences |
| 12/20/2001 | US20010053508 Substrate processing apparatus and substrate processing method |
| 12/20/2001 | US20010053507 Heat processing apparatus of substrate |
| 12/20/2001 | US20010053500 Semiconductor device fabrication system and method of forming semiconductor device pattern using the same and photoresist for manufacturing semiconductor devices thereby |
| 12/20/2001 | US20010053496 Photoresist compositions and use of same |
| 12/20/2001 | US20010053493 Comprising alkali-soluble resin, quinonediazide ester, 4,4'-bis(diethylamino)benzophenone; high sensitivity and definition and improved focal depth |
| 12/20/2001 | US20010053486 Stacking plurality of photoresist films differing in sensitivity on film formed on semiconductor substrate, exposing, etching, embedding metal material in formed spacings to form plurality of wiring elements |
| 12/20/2001 | US20010053446 Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing |
| 12/20/2001 | US20010053423 Improvement includes a second process gas distributor having a second process gas exit spaced apart from the substrate support, and an oxygen-supplying gas distributor have a third exit spaced above the substrate support |
| 12/20/2001 | US20010053422 Diamond film depositing apparatus and method thereof |
| 12/20/2001 | US20010053418 Substrate transportation container |
| 12/20/2001 | US20010053411 A low pressure-high hydrogen flow rate process of cleaning a silicon wafer surface is described. the combination of process pressures below about 1 torr with hydrogen flow rates up to about 3 slm has been found to remove substantially all oxygen |
| 12/20/2001 | US20010053324 By introducing carbon dioxide to the pulp suspension; for the production of paper or board |
| 12/20/2001 | US20010053291 Exposure apparatus, substrate processing unit and lithographic system, and device manufacturing method |
| 12/20/2001 | US20010053244 Clamp for pattern recognition |
| 12/20/2001 | US20010053242 Image processor and image processing method |
| 12/20/2001 | US20010053197 Method and apparatus for measuring a bump on a substrate |
| 12/20/2001 | US20010053196 Weight compensation apparatus, stage apparatus using the same, and exposure apparatus |
| 12/20/2001 | US20010053164 Laser imaging apparatus |
| 12/20/2001 | US20010053099 Semiconductor integrated circuit device capable of ensuring reliability of transistor driving high voltage |
| 12/20/2001 | US20010053086 Semiconductor memory device with memory test circuit |
| 12/20/2001 | US20010053058 High dielectric capacitor and method of manufacturing the same |
| 12/20/2001 | US20010053057 Capacitor with conductively doped Si-Ge alloy electrode |
| 12/20/2001 | US20010053054 Electrostatic discharge protection circuit |
| 12/20/2001 | US20010053030 Beam homogenizer, laser illumination apparatus and method, and semiconductor device |
| 12/20/2001 | US20010053027 Efficient illumination system for color projection displays |
| 12/20/2001 | US20010053017 Optical member for vacuum ultraviolet, and aligner and device manufacture method using same |
| 12/20/2001 | US20010052976 Scanning optical detection system |
| 12/20/2001 | US20010052975 Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination |
| 12/20/2001 | US20010052970 Stage apparatus, exposure apparatus, and device manufacturing method |
| 12/20/2001 | US20010052968 Exposure apparatus and device manufacturing method |
| 12/20/2001 | US20010052967 Exposure apparatus, method of manufacturing semiconductor devices and plant therefor |
| 12/20/2001 | US20010052966 Scanning exposure method and system |
| 12/20/2001 | US20010052951 Liquid crystal display device |
| 12/20/2001 | US20010052950 Semiconductor display device and manufacturing method thereof |
| 12/20/2001 | US20010052949 Liquid crystal display apparatus and manufacturing method for the same |
| 12/20/2001 | US20010052889 Liquid crystal display device and deficiency correcting method thereof |
| 12/20/2001 | US20010052867 Digital-to-analog converter |
| 12/20/2001 | US20010052820 High frequency power amplifier having a bipolar transistor |
| 12/20/2001 | US20010052800 Semiconductor integrated circuit device |
| 12/20/2001 | US20010052783 Device for measurement and analysis of electrical signals of an integrated circuit component |
| 12/20/2001 | US20010052781 Method of inspecting pattern and inspecting instrument |
| 12/20/2001 | US20010052676 Multi-channel rotary joint |
| 12/20/2001 | US20010052653 Semiconductor device and method of producing the same |
| 12/20/2001 | US20010052651 Driver circuits and methods for manufacturing driver circuits |
| 12/20/2001 | US20010052650 Semiconductor device and method of manufacturing the same |
| 12/20/2001 | US20010052649 Semiconductor device |
| 12/20/2001 | US20010052648 Semiconductor device and method of manufacturing the same |
| 12/20/2001 | US20010052647 Laminated integrated circuit package |
| 12/20/2001 | US20010052644 Copper pad structure |
| 12/20/2001 | US20010052643 Semiconductor device and method for manufacturing same |
| 12/20/2001 | US20010052642 Semiconductor device package and method |
| 12/20/2001 | US20010052635 Semiconductor integrated circuit device |
| 12/20/2001 | US20010052634 Semiconductor device having the effect that the drop in the current gain is kept to the minimum, when the substrate density is amplified and that the variation in the collector current is improved |
| 12/20/2001 | US20010052633 Semiconductor device |
| 12/20/2001 | US20010052631 Semiconductor device having active area with angled portion |
| 12/20/2001 | US20010052628 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate |
| 12/20/2001 | US20010052626 Method for fabricating dual-gate structure |
| 12/20/2001 | US20010052625 Semiconductor memory device and manufacturing method therefor |
| 12/20/2001 | US20010052623 Semiconductor integrated circuit |
| 12/20/2001 | US20010052622 Microwave transistor subjected to burn-in testing |
| 12/20/2001 | US20010052620 Semiconductor device, method of manufacturing the same and resistor |
| 12/20/2001 | US20010052619 Semiconductor device, and operating device, signal converter, and signal processing system using the same semiconductor device |