| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/02/2002 | EP0834191B1 Removal of material by polarized radiation and back side application of radiation |
| 01/02/2002 | EP0702843B1 Device for high energy ion implantation of the low or medium current kind and method for its use |
| 01/02/2002 | EP0664925B1 Interconnection structure for integrated circuits and method for making same |
| 01/02/2002 | EP0616573B1 Groove width trimming |
| 01/02/2002 | EP0584349B1 Process and device for three-dimensional interconnection of housings for electronic components |
| 01/02/2002 | CN2469662Y Mould for connecting electronic elements with adhesive |
| 01/02/2002 | CN1329756A FEMFET device and method for producing same |
| 01/02/2002 | CN1329755A Semiconductor device, method of manufacture thereof, and electronic device |
| 01/02/2002 | CN1329753A Wafer prober |
| 01/02/2002 | CN1329752A Semiconductor copper bond pad surface protection |
| 01/02/2002 | CN1329751A An epitaxial silicon wafer with intrinsic gettering and method for preparation thereof |
| 01/02/2002 | CN1329750A Low imprint ferroelectric material for long retention memory and method of making the same |
| 01/02/2002 | CN1329749A A method and apparatus for transport and tracking of electronic component |
| 01/02/2002 | CN1329748A Wafer cleaning and vapor drying system and method |
| 01/02/2002 | CN1329721A Photoetching contact elements |
| 01/02/2002 | CN1329681A Method and apparatus for electrochemical mechanical deposition |
| 01/02/2002 | CN1329678A Sputtering apparatus |
| 01/02/2002 | CN1329583A High purity, silconized silcon carbide having high thermal shock resistance |
| 01/02/2002 | CN1329533A Reverse linear polisher with loadable housing |
| 01/02/2002 | CN1329396A Semiconductor IC, logical calculus circuit and trigger |
| 01/02/2002 | CN1329369A Luminous module and drive method for said same and optical detector |
| 01/02/2002 | CN1329367A Semiconductor device and manufacturing method thereof |
| 01/02/2002 | CN1329362A Mixed IC device |
| 01/02/2002 | CN1329359A Opening aligned with local region in layer |
| 01/02/2002 | CN1329358A Method for manufacturing semiconductor device and using filling material and semiconductor device |
| 01/02/2002 | CN1329338A Method for controlling electrostatic lens and ion implantation device |
| 01/02/2002 | CN1329336A Writing-in circuit of magnetic RAM large array |
| 01/02/2002 | CN1329287A Photoetching device and exposure method |
| 01/02/2002 | CN1329286A 曝光装置 Exposure device |
| 01/02/2002 | CN1329261A Platform and optical module, and producing method and optical transmission device |
| 01/02/2002 | CN1077333C Power transistors manufactured on tube core of semiconductor |
| 01/02/2002 | CN1077332C Method for fabircating specimen for analyzing defects of semiconductor device |
| 01/02/2002 | CN1077331C Resin sealing mold die set with less resin remainder for semiconductor device |
| 01/02/2002 | CN1077330C Method of manufacturing transistor in semiconductor device |
| 01/02/2002 | CN1077300C Micro-miniature structures and method of fabrication thereof |
| 01/02/2002 | CN1076998C Soft solder and electronic component using the same |
| 01/01/2002 | US6336209 Information processing system that processes portions of an application program using programmable logic circuits |
| 01/01/2002 | US6336204 Method and apparatus for handling deadlocks in multiple chamber cluster tools |
| 01/01/2002 | US6336086 Method and system for analyzing wafer processing order |
| 01/01/2002 | US6336056 Method of manufacturing a semiconductor device |
| 01/01/2002 | US6336055 Method for controlling unit operating states of semiconductor fabricating equipment arranged in a processing line |
| 01/01/2002 | US6336054 Interlock apparatus for a transfer machine |
| 01/01/2002 | US6335981 Photomask pattern correcting method and photomask corrected by the same and photomask pattern correcting device |
| 01/01/2002 | US6335896 Dynamic random access memory |
| 01/01/2002 | US6335895 Semiconductor storage device and system using the same |
| 01/01/2002 | US6335894 Semiconductor integrated circuit device, method of investigating cause of failure occurring in semiconductor integrated circuit device and method of verifying operation of semiconductor integrated circuit device |
| 01/01/2002 | US6335880 Nonvolatile semiconductor memory |
| 01/01/2002 | US6335879 Method of erasing and programming a flash memory in a single-chip microcomputer having a processing unit and memory |
| 01/01/2002 | US6335876 Semiconductor memory and method of testing the same |
| 01/01/2002 | US6335875 Memory circuit/logic circuit integrated device capable of reducing term of works |
| 01/01/2002 | US6335874 Symmetric segmented memory array architecture |
| 01/01/2002 | US6335873 Semiconductor integrated circuit device |
| 01/01/2002 | US6335863 Package for semiconductors, and semiconductor module that employs the package |
| 01/01/2002 | US6335791 Apparatus for detecting positions of wafer and mask and deformation error detecting method |
| 01/01/2002 | US6335785 Scan-type reducing projection exposure method and apparatus |
| 01/01/2002 | US6335783 Lithography system |
| 01/01/2002 | US6335716 Semiconductor display device correcting system and correcting method of semiconductor display device |
| 01/01/2002 | US6335652 Method and apparatus for the replacement of non-operational metal lines in DRAMS |
| 01/01/2002 | US6335648 Circuit using internal pull-up/pull-down resistor during reset |
| 01/01/2002 | US6335645 Semiconductor integrated circuit having built-in self-test circuit |
| 01/01/2002 | US6335629 Test fixture having an opening for exposing the back of a semiconductor chip and testing module comprising the same |
| 01/01/2002 | US6335628 Wafer probe station for low-current measurements |
| 01/01/2002 | US6335626 Method and device for determining a parameter for a metallization bath |
| 01/01/2002 | US6335571 Semiconductor flip-chip package and method for the fabrication thereof |
| 01/01/2002 | US6335570 Semiconductor device and manufacturing method thereof |
| 01/01/2002 | US6335569 For use in a semiconductor device |
| 01/01/2002 | US6335568 Semiconductor device and method of fabrication thereof, circuit board, and electronic equipment |
| 01/01/2002 | US6335567 Semiconductor device having stress reducing laminate and method for manufacturing the same |
| 01/01/2002 | US6335565 Semiconductor device |
| 01/01/2002 | US6335563 Semiconductor device, method of fabricating the same, circuit board, and electronic device |
| 01/01/2002 | US6335562 Prevention of stray charge associated fault, termed, a single-event upset (seu) |
| 01/01/2002 | US6335561 Semiconductor device having a passivation film |
| 01/01/2002 | US6335560 Semiconductor device having a mark section and a dummy pattern |
| 01/01/2002 | US6335559 Semiconductor device cleave initiation |
| 01/01/2002 | US6335558 Complementary bipolar/CMOS epitaxial structure and method |
| 01/01/2002 | US6335557 Metal silicide as a barrier for MOM capacitors in CMOS technologies |
| 01/01/2002 | US6335556 Semiconductor device and method for manufacturing semiconductor device |
| 01/01/2002 | US6335555 Semiconductor device and a manufacturing method for the same |
| 01/01/2002 | US6335554 Semiconductor Memory |
| 01/01/2002 | US6335553 Nonvolatile semiconductor memory and method of fabrication |
| 01/01/2002 | US6335552 Semiconductor device and method for fabricating the same |
| 01/01/2002 | US6335551 Thin film capacitor having an improved bottom electrode and method of forming the same |
| 01/01/2002 | US6335550 Fet with ferroelectric gate |
| 01/01/2002 | US6335549 EEPROM with high channel hot carrier injection efficiency |
| 01/01/2002 | US6335546 Nitride semiconductor structure, method for producing a nitride semiconductor structure, and light emitting device |
| 01/01/2002 | US6335543 Polycrystalline silicon thin film transistor and manufacturing method thereof |
| 01/01/2002 | US6335542 Fabrication method for a thin film semiconductor device, the thin film semiconductor device itself, liquid crystal display, and electronic device |
| 01/01/2002 | US6335541 Semiconductor thin film transistor with crystal orientation |
| 01/01/2002 | US6335540 Electro-optical device such as a liquid crystal device |
| 01/01/2002 | US6335536 Method and apparatus for low voltage plasma doping using dual pulses |
| 01/01/2002 | US6335535 Method for implanting negative hydrogen ion and implanting apparatus |
| 01/01/2002 | US6335509 Laser annealing apparatus |
| 01/01/2002 | US6335493 Multilayer wiring board |
| 01/01/2002 | US6335492 Tape carrier package with improved connecting terminals and a method of electrically interconnecting the tape carrier package to external circuitry |
| 01/01/2002 | US6335297 Forming insulating layer on semiconductor substrate, sequentially forming semiconductor layer and tungsten film on insulating layer, nitrifying tungsten film with heat treatment, selectively etching tungsten film and semiconductor |
| 01/01/2002 | US6335296 Deposition of nanoporous silica films using a closed cup coater |
| 01/01/2002 | US6335295 Flame-free wet oxidation |
| 01/01/2002 | US6335294 Removing patch of titanium oxide by applying a reagent to patch wherein reagent does not chemically react with layer, reagent comprises water, ammonium hydroxide, and hydrogen peroxide and heating |
| 01/01/2002 | US6335293 Systems and methods for two-sided etch of a semiconductor substrate |
| 01/01/2002 | US6335292 Method of controlling striations and CD loss in contact oxide etch |