| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/02/2002 | EP1168442A2 Integrated circuit with high-Q inductor and high compactness |
| 01/02/2002 | EP1168440A1 Semiconductor device having an improved structure for preventing cracks, improved small-sized semiconductor and method of manufacturing the same |
| 01/02/2002 | EP1168439A2 Gold bond wire for a semiconductor device |
| 01/02/2002 | EP1168437A2 Semiconductor device |
| 01/02/2002 | EP1168436A2 Polymer and ceramic composite electronic substrates |
| 01/02/2002 | EP1168435A2 Semiconductor device and manufacturing method thereof |
| 01/02/2002 | EP1168434A2 Method of making metallization and contact structures in an integrated circuit |
| 01/02/2002 | EP1168433A2 A method of manufacturing a wiring structure in a semiconductor device |
| 01/02/2002 | EP1168432A2 Method of integrating a thin film resistor in a multi-level metal tungsten-plug interconnect |
| 01/02/2002 | EP1168431A2 Process for the manufacture of a wiring for contact holes |
| 01/02/2002 | EP1168430A1 Semiconductor device and method of manufacturing the same |
| 01/02/2002 | EP1168429A1 Integrated circuit chip and method for mounting an integrated circuit chip to a circuit board |
| 01/02/2002 | EP1168428A2 High resistivity semiconductor substrate and formation method |
| 01/02/2002 | EP1168427A1 Method of plasma depositing silicon nitride |
| 01/02/2002 | EP1168426A2 Method of plasma depositing a low dielectric constant insulating film |
| 01/02/2002 | EP1168425A2 Method for selectively etching a SiOF film |
| 01/02/2002 | EP1168424A1 Etching solution, etched article and method for etched article |
| 01/02/2002 | EP1168423A1 Etching solution, etching method, and semiconductor silicon wafer |
| 01/02/2002 | EP1168422A2 Method and apparatus for liquid-treating and drying a substrate |
| 01/02/2002 | EP1168421A2 Liquid processing apparatus |
| 01/02/2002 | EP1168420A2 Nozzle plate member for supplying fluids in dispersed manner and manufacturing method of the same |
| 01/02/2002 | EP1168419A1 Method and apparatus for localized liquid treatment of the surface of a substrate |
| 01/02/2002 | EP1168415A2 Power supply antenna and power supply method |
| 01/02/2002 | EP1168379A2 Method of fabricating a thin film resistor with predetermined temperature coefficient of resistance |
| 01/02/2002 | EP1168376A1 Method for forming transparent conductive film by using chemically amplified resist |
| 01/02/2002 | EP1168360A1 Random access memory cell and method for fabricating same |
| 01/02/2002 | EP1168354A1 Magnetoresistive memory element |
| 01/02/2002 | EP1168240A2 Connection by depositing a viscous material following the relief shape |
| 01/02/2002 | EP1168207A2 Semiconductor integrated circuit and semiconductor integrated circuit wiring layout method |
| 01/02/2002 | EP1168205A2 Automatic circuit generation apparatus and method, and computer program product for executing the method |
| 01/02/2002 | EP1168085A2 Reference plate for exposure apparatus |
| 01/02/2002 | EP1168084A2 Drive mechanism and exposure apparatus having the same |
| 01/02/2002 | EP1168083A2 Line width compensation using spatial variations in partial coherence |
| 01/02/2002 | EP1168054A1 Tft array substrate, method of manufacture thereof, and lcd with tft array substrate |
| 01/02/2002 | EP1168034A2 Illumination device and illuminated coordinate measuring device |
| 01/02/2002 | EP1168006A2 Method for bonding a plurality of optical elements to a base |
| 01/02/2002 | EP1167585A2 Method and apparatus for forming interconnects, and polishing liquid and polishing method |
| 01/02/2002 | EP1167574A1 Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas |
| 01/02/2002 | EP1167573A1 Substrate support for a semiconductor processing chamber |
| 01/02/2002 | EP1167572A2 Lid assembly for a semiconductor processing chamber |
| 01/02/2002 | EP1167571A2 Showerhead for semiconductor processing chamber |
| 01/02/2002 | EP1167570A1 Reactor for depositing thin film |
| 01/02/2002 | EP1167569A1 Apparatus and method for depositing thin film on wafer using atomic layer deposition |
| 01/02/2002 | EP1167567A1 Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer |
| 01/02/2002 | EP1167559A1 Composite material and use thereof |
| 01/02/2002 | EP1167482A2 Aqueous dispersion for chemical mechanical polishing used for polishing of copper |
| 01/02/2002 | EP1167423A2 Polyimide silicone resin, solution containing it, and polyimide silicone resin film |
| 01/02/2002 | EP1167291A1 Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus |
| 01/02/2002 | EP1167281A2 Chip scale surface-mountable packaging method for electronic and MEMS devices |
| 01/02/2002 | EP1167280A2 Production of diaphragms |
| 01/02/2002 | EP1167068A1 Non-contact data carrier and ic chip |
| 01/02/2002 | EP1166444A1 Electronic digital circuit operable active mode and sleep mode |
| 01/02/2002 | EP1166366A1 Doting pastes for producing p, p+ and n, n+ zones in semiconductors |
| 01/02/2002 | EP1166364A1 Method and apparatus for injecting charge onto the floating gate of a nonvolatile memory cell |
| 01/02/2002 | EP1166363A1 Trench dmos transistor structure having a low resistance path to a drain contact located on an upper surface |
| 01/02/2002 | EP1166362A1 Novel semiconductor device combining the advantages of solid and soi architectures, and method for making same |
| 01/02/2002 | EP1166357A1 Memory cell arrangement |
| 01/02/2002 | EP1166356A1 Semiconductor read-only memory device with substrate contact and polysilicon bridging cells |
| 01/02/2002 | EP1166354A1 Cooling system for pulsed power electronics |
| 01/02/2002 | EP1166350A1 Method for producing a dram structure with buried bit lines or trench capacitors |
| 01/02/2002 | EP1166349A1 Method of producing a trench isolation for electrically active components |
| 01/02/2002 | EP1166348A1 Top gate thin-film transistor and method of producing the same |
| 01/02/2002 | EP1166347A2 Misfet with narrow bandgap source |
| 01/02/2002 | EP1166346A1 Semiconductor manufacture using helium-assisted etch |
| 01/02/2002 | EP1166345A1 Method for producing a microelectronic structure |
| 01/02/2002 | EP1166344A1 Method of in-situ etching a hard mask and a metal layer in a single etcher |
| 01/02/2002 | EP1166343A1 Improvements relating to annealing |
| 01/02/2002 | EP1166342A1 Etch and ash photoresist removal process |
| 01/02/2002 | EP1166340A1 Polymer-based electrospray nozzle for mass spectrometry |
| 01/02/2002 | EP1166339A1 Method of processing a monocrystalline semiconductor disk and partially processed semiconductor disk |
| 01/02/2002 | EP1166338A1 Method for improving the resistance degradation of thin film capacitors |
| 01/02/2002 | EP1166337A2 Device for manufacturing semiconductor products |
| 01/02/2002 | EP1166336A2 Device for manufacturing semiconductor products |
| 01/02/2002 | EP1166335A1 Perimeter wafer lifting |
| 01/02/2002 | EP1166334A1 Method and apparatus for transporting articles |
| 01/02/2002 | EP1166333A1 Multi-stage single-drive foup door opening system |
| 01/02/2002 | EP1166332A1 Pressure equalization system for chemical vapor deposition reactors |
| 01/02/2002 | EP1166325A1 Method for carrying out a plasma etching process |
| 01/02/2002 | EP1166324A2 Apparatus for improving plasma distribution and performance in an inductively coupled plasma |
| 01/02/2002 | EP1166323A1 Method and apparatus for compensating non-uniform wafer processing in plasma processing |
| 01/02/2002 | EP1166322A1 Plasma processing method and apparatus with control of rf bias |
| 01/02/2002 | EP1166321A1 Plasma processor with coil having variable rf coupling |
| 01/02/2002 | EP1166319A1 Multi-electron -beam lithography apparatus with mutually different beam limiting apertures |
| 01/02/2002 | EP1166275A1 Device for weighting the cell resistances in a magnetoresistive memory |
| 01/02/2002 | EP1166192A1 Bandgap voltage reference source |
| 01/02/2002 | EP1166183A1 Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass |
| 01/02/2002 | EP1166182A1 Method for producing a pattern suitable for forming sub-micron width metal lines |
| 01/02/2002 | EP1166180A1 Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
| 01/02/2002 | EP1166174A1 Active matrix substrate for liquid crystal display and method for making the same |
| 01/02/2002 | EP1166133A1 Circuit for voltage level detection |
| 01/02/2002 | EP1166090A2 Device for rapidly measuring angle-dependent diffraction effects on finely structured surfaces |
| 01/02/2002 | EP1165993A1 Dual-sided slot valve and method for implementing the same |
| 01/02/2002 | EP1165412A1 Door assembly for semiconductor wafer manufacturing |
| 01/02/2002 | EP1165288A1 A method and apparatus for stabilizing the process temperature during chemical mechanical polishing |
| 01/02/2002 | EP1165287A1 Apparatus and process for reconditioning polishing pads |
| 01/02/2002 | EP1165261A1 Semiconductor wafer treatment |
| 01/02/2002 | EP1127838A9 Flip-chip assembly of protected micromechanical devices |
| 01/02/2002 | EP1105605A4 Pod door to port door retention system |
| 01/02/2002 | EP0919014B1 Aqueous antireflective coatings for photoresist compositions |
| 01/02/2002 | EP0912996B1 Integrated circuit which uses an etch stop for producing staggered interconnect lines |