| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/03/2002 | US20020000588 Semiconductor device having a ferroelectric capacitor with tensile stress properties |
| 01/03/2002 | US20020000587 Method for forming capacitor of nonvolatile semiconductor memory device and the capacitor |
| 01/03/2002 | US20020000586 Capacitively coupled ferroelectric random access memory cell and a method for manufacturing the same |
| 01/03/2002 | US20020000585 Semiconductor device having ferroelectric memory cells and method of manufacturing the same |
| 01/03/2002 | US20020000584 Semiconductor structure and device including a monocrystalline conducting layer and method for fabricating the same |
| 01/03/2002 | US20020000583 System with meshed power and signal buses on cell array |
| 01/03/2002 | US20020000580 Scalable manufacture process for power mosfet with fully self-aligned shrinkable gate and drain |
| 01/03/2002 | US20020000579 Semiconductor device having a gate insulation film resistant to dielectric breakdown. |
| 01/03/2002 | US20020000578 Semiconductor integrated circuit device |
| 01/03/2002 | US20020000577 Semiconductor memory of good retention and its manufacture |
| 01/03/2002 | US20020000576 Display device |
| 01/03/2002 | US20020000575 Spin-valve transistor |
| 01/03/2002 | US20020000574 Semiconductor device having vertical bipolar transistor |
| 01/03/2002 | US20020000573 Radio frequency modules and modules for moving |
| 01/03/2002 | US20020000570 Semiconductor device |
| 01/03/2002 | US20020000567 Microwave array transistor for low-noise and high-power applications |
| 01/03/2002 | US20020000566 Semiconductor switching element with integrated schottky diode and process for producing the switching element and diode |
| 01/03/2002 | US20020000562 Fabrication of low leakage-current backside illuminated photodiodes |
| 01/03/2002 | US20020000557 Method of deforming a pattern and semiconductor device formed by utilizing deformed pattern |
| 01/03/2002 | US20020000556 Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus |
| 01/03/2002 | US20020000555 TFT substrate with low contact resistance and damage resistant terminals |
| 01/03/2002 | US20020000554 Electric device, matrix device, electro-optical display device and semiconductor memory having thin-film transistors |
| 01/03/2002 | US20020000553 Thin film transistor liquid crystal display and manufacturing method thereof |
| 01/03/2002 | US20020000552 Semiconductor device and method of producing the same |
| 01/03/2002 | US20020000551 Semiconductor device and manufacturing method thereof |
| 01/03/2002 | US20020000550 Algorithm for detecting sloped contact holes using a critical-dimension waveform |
| 01/03/2002 | US20020000547 Silicon/graphite composite ring for supporting silicon wafer, and dry etching apparatus equipped with the same |
| 01/03/2002 | US20020000521 Method and apparatus for conditioning an electrostatic chuck |
| 01/03/2002 | US20020000520 Surface position detection device and exposure apparatus and exposure method achieved by utilizing detection device |
| 01/03/2002 | US20020000519 Contamination prevention in optical system |
| 01/03/2002 | US20020000467 Holographic laser scanning method and system employing visible scanning-zone indicators identifying a three-dimensional omni-directional laser scanning volume for package transport navigation |
| 01/03/2002 | US20020000432 Heat treatment apparatus and substrate processing system |
| 01/03/2002 | US20020000427 Method for predicting and avoiding a bad bond when utilizing fiber push connect laser bonding |
| 01/03/2002 | US20020000424 Method and device for removing an unnecessary film |
| 01/03/2002 | US20020000423 Method for enhancing oxide to nitride selectivity through the use of independent heat control |
| 01/03/2002 | US20020000422 Anisotropic, resist layer thickness increases, remains constant, or decreases more slowly; combines with conventional plasma etch |
| 01/03/2002 | US20020000383 Placing the substrate surface within an enclosure, introducing liquid material into enclosure, and directing the liquid angularly toward substrate surface flowing rotationally upon contact; semiconductors |
| 01/03/2002 | US20020000382 Contacting metal seed layer on substrate with acidic electrolyte bath containing acids, copper compounds, suppressors and water, then subjecting to current |
| 01/03/2002 | US20020000380 Electroplating solution provides ions or complex of noble metals for electroplating the surface of the workpiece; semiconductor wafers; integrated circuits |
| 01/03/2002 | US20020000379 Electroplating apparatus and electroplating method |
| 01/03/2002 | US20020000374 Sputtering apparatus |
| 01/03/2002 | US20020000372 Dry contact assemblies, methods for making dry contact assemblies, and plating machines with dry contact assemblies for plating microelectronic workpieces |
| 01/03/2002 | US20020000371 Substrate processing apparatus and substrate plating apparatus |
| 01/03/2002 | US20020000370 Ion processing of a substrate |
| 01/03/2002 | US20020000368 Vacuum treatment chamber and method for treating surfaces |
| 01/03/2002 | US20020000330 Intaglio printing method, intaglio printer, method of formation of bumps, or wiring pattern, apparatus therefor, bump electrode and printed circuit board |
| 01/03/2002 | US20020000327 Wiring substrate, semiconductor device and package stack semiconductor device |
| 01/03/2002 | US20020000294 Method and apparatus for mounting semiconductor chips onto a flexible substrate |
| 01/03/2002 | US20020000271 Filling recessed microstructures on semiconductor surface with copper metallization; particle sizes; annealing; electroplating; robotics |
| 01/03/2002 | US20020000263 Reducing alkylmetal to the metal and alkane, then reaction with titanium tetrachloride which deposits titanium which can further be annealed to form titanium silicide; low resistance contacts |
| 01/03/2002 | US20020000251 Multi-channel rotary joint |
| 01/03/2002 | US20020000240 Liquid processing apparatus |
| 01/03/2002 | US20020000239 Stripping composition: quaternary ammonium base, surfactant and high boiling solvent; environmentally and chemically safe |
| 01/03/2002 | US20020000203 Multi-thermal zone shielding apparatus |
| 01/03/2002 | US20020000202 Remote plasma apparatus for processing sustrate with two types of gases |
| 01/03/2002 | US20020000201 Plasma chemical vapor deposition apparatus |
| 01/03/2002 | US20020000200 Chemical vapor deposition apparatus |
| 01/03/2002 | US20020000199 Film forming apparatus and method for producing tungsten nitride film |
| 01/03/2002 | US20020000197 Vacuum processing apparatus and multi-chamber vacuum processing apparatus |
| 01/03/2002 | US20020000196 Reactor for depositing thin film on wafer |
| 01/03/2002 | US20020000194 Dual degas/cool loadlock cluster tool |
| 01/03/2002 | US20020000193 Coating apparatus and mixing apparatus |
| 01/03/2002 | US20020000189 Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer |
| 01/03/2002 | US20020000185 Non-oxygen precipitating Czochralski silicon wafers |
| 01/03/2002 | US20020000091 Safety device for a moving system |
| 01/03/2002 | US20020000034 Continuous processing of thin-film batteries and like devices |
| 01/03/2002 | US20020000029 Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 01/03/2002 | US20020000019 Multi functional cleaning module of manufacturing apparatus for flat panel display and cleaning apparatus using the same |
| 01/03/2002 | DE10128928A1 Semiconductor memory used for a DRAM comprises bit lines buried in a substrate, word lines formed on the substrate, and vertical transistors formed on individual storage cells |
| 01/03/2002 | DE10127945A1 Array substrate for use in thin film transistor-liquid crystal display device, has drain electrode formed over gate electrode, such that it corresponds to inverted T-shaped opening in gate electrode |
| 01/03/2002 | DE10125031A1 Tischpositioniervorrichtung Tischpositioniervorrichtung |
| 01/03/2002 | DE10118167A1 Cleaning apparatus for semiconductor wafers includes movable marangoni dryer having hood for moving the wafers from loader into inner bath |
| 01/03/2002 | DE10109172A1 Current limiter used in an electrical circuit comprises a silicon substrate, an n-conducting layer, n+ layers formed on opposite surfaces of the n- conducting layer, and electrodes formed on opposite surfaces of the substrate |
| 01/03/2002 | DE10108542A1 Production of a wafer used in the production of integrated components comprises polishing the wafer, treating with an oxidant, cleaning, rinsing and drying, inspecting one polished side of the wafer |
| 01/03/2002 | DE10108283A1 Manufacture of semiconductor device involves using organic polymeric embedding material to embed hole patterns |
| 01/03/2002 | DE10104204A1 Halbleiter-Vorrichtung und Verfahren zur Herstellung derselben A semiconductor device and method of manufacturing the same |
| 01/03/2002 | DE10064198A1 Production of a semiconductor device comprises forming either an aluminum, a tungsten or a copper foil on a base layer on a substrate, forming an aluminum, tungsten or copper pattern |
| 01/03/2002 | DE10036897C1 Field effect transistor used in a switching arrangement comprises a gate region between a source region and a drain region |
| 01/03/2002 | DE10030694A1 Time-controlled processing of small components, especially semiconductor components in processing and test stations by receiving and depositing components at same alignment |
| 01/03/2002 | DE10030495A1 Verfahren zum Verbinden einer Vielzahl von optischen Elementen mit einem Grundkörper A method of connecting a plurality of optical elements comprising a base body |
| 01/03/2002 | DE10029919A1 Method and device for converting programmable electronic components with connector contacts like microprocessors removes the programmable electronic components with integrated flash EPROM from a feeder conveyor container. |
| 01/03/2002 | DE10029791A1 Verfahren zur Herstellung einer stabilen Verbindung zwischen zwei Wafern A process for the preparation of a stable connection between two wafers |
| 01/03/2002 | DE10029659A1 Verfahren zur Herstellung eines Feldeffekttransistors A process for producing a field effect transistor |
| 01/03/2002 | DE10029658A1 Barrier layer production comprises oxidizing a silicon substrate to produce a substrate oxide, forming an oxygen-impermeable layer on the boundary surface between the substrate oxide layer and the substrate, and etching |
| 01/03/2002 | DE10029288A1 Verfahren zur Herstellung einer planaren Maske auf topologiehaltigen Oberflächen A process for producing a planar topology mask on surfaces containing |
| 01/03/2002 | DE10029287A1 Verfahren zur Herstellung eines Feldeffekttransistors mit einem Floating Gate A process for producing a field effect transistor with a floating gate |
| 01/03/2002 | CA2413592A1 Method to restore hydrophobicity in dielectric films and materials |
| 01/03/2002 | CA2410432A1 Method and apparatus for testing high performance circuits |
| 01/02/2002 | EP1168907A1 Device for mounting a flip-chip unto a workpiece |
| 01/02/2002 | EP1168906A1 Power module with electronic power components and production method thereof |
| 01/02/2002 | EP1168607A2 An on-chip signal filter with bond wire inductors |
| 01/02/2002 | EP1168466A2 Method for manufacturing semiconductors thin film, and magnetoelectric conversion element provided with semiconductor thin film thereby manufactured |
| 01/02/2002 | EP1168462A1 Light-emitting thyristor matrix array and driver circuit |
| 01/02/2002 | EP1168460A2 Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element |
| 01/02/2002 | EP1168457A2 Ferroelectric memory cell and method of manufacture |
| 01/02/2002 | EP1168456A2 A CMOS-process compatible, tunable NDR (negative differential resistance) device and method of operating same |
| 01/02/2002 | EP1168455A2 Power semiconductor switching element |
| 01/02/2002 | EP1168454A2 Nonvolatile semiconductor memory |
| 01/02/2002 | EP1168453A2 Semiconductor device with heavily-doped diffusion layer and method for fabricating the same |
| 01/02/2002 | EP1168452A2 Semiconductor device having vertical bipolar transistor |