| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 01/03/2002 | US20020001223 Solid-state magnetic memory |
| 01/03/2002 | US20020001221 Load-less four-transistor memory cell |
| 01/03/2002 | US20020001220 Semiconductor memory and method for driving the same |
| 01/03/2002 | US20020001215 Semiconductor memory device |
| 01/03/2002 | US20020001207 Semiconductor integrated circuit and nonvolatile |
| 01/03/2002 | US20020001177 Power module having electronic power components, and a method of manufacturing such a module |
| 01/03/2002 | US20020001165 Thin film capacitor and method of fabricating the same |
| 01/03/2002 | US20020001164 Method for manufacturing capacitor in semiconductor device and the capacitor |
| 01/03/2002 | US20020001141 Optical projection system |
| 01/03/2002 | US20020001134 Illumination optical system in exposure apparatus |
| 01/03/2002 | US20020001090 Illumination device; and coordinate measuring instrument having an illumination device |
| 01/03/2002 | US20020001088 Apparatus for wavefront detection |
| 01/03/2002 | US20020001086 Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer |
| 01/03/2002 | US20020001083 Apparatus and method for measuring pattern alignment error |
| 01/03/2002 | US20020001082 Projection exposure apparatus and method of controlling same |
| 01/03/2002 | US20020001071 Method of correcting projection optical system and method of manufacturing semiconductor device |
| 01/03/2002 | US20020001070 System for adjusting a photo-exposure time |
| 01/03/2002 | US20020001048 Method of fabricating liquid crystal display with a high aperture ratio |
| 01/03/2002 | US20020001046 Apparatuses and methods for forming assemblies |
| 01/03/2002 | US20020000904 Displacement device |
| 01/03/2002 | US20020000895 Electronic component utilizing face-down mounting |
| 01/03/2002 | US20020000873 Semiconductor device having hierarchical power supply line structure improved in operating speed |
| 01/03/2002 | US20020000850 Drive circuit of capacitive load and integrated circuit for driving capacitive load |
| 01/03/2002 | US20020000837 256 meg dynamic random access memory |
| 01/03/2002 | US20020000832 Programmable circuit with preview function |
| 01/03/2002 | US20020000827 Semiconductor integrated circuit device |
| 01/03/2002 | US20020000826 Semiconductor parametric testing apparatus |
| 01/03/2002 | US20020000821 Contact probe and fabrication method thereof |
| 01/03/2002 | US20020000819 High resolution analytical probe station |
| 01/03/2002 | US20020000803 COF autohandler |
| 01/03/2002 | US20020000766 Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method |
| 01/03/2002 | US20020000677 Part maintenance device of semiconductor processing system and method for operating the same |
| 01/03/2002 | US20020000675 Method and apparatus for reduced flash encapsulation of microelectronic devices |
| 01/03/2002 | US20020000674 Semiconductor device and process for production thereof |
| 01/03/2002 | US20020000673 Mask repattern process |
| 01/03/2002 | US20020000671 Bonding over integrated circuits |
| 01/03/2002 | US20020000670 A low dielectric constant film produced from silicon compounds comprising silicon-carbon bonds |
| 01/03/2002 | US20020000669 Device comprising thermally stable, low dielectric constant material |
| 01/03/2002 | US20020000668 Semiconductor device |
| 01/03/2002 | US20020000667 Method of manufacturing an insulation film in a semiconductor device |
| 01/03/2002 | US20020000665 Semiconductor device conductive bump and interconnect barrier |
| 01/03/2002 | US20020000664 Silicon nitride composite hdp/cvd process |
| 01/03/2002 | US20020000663 Semiconductor device and its manufacturing method |
| 01/03/2002 | US20020000662 Chemical vapor deposition of titanium |
| 01/03/2002 | US20020000661 Method for fabricating metal wiring and the metal wiring |
| 01/03/2002 | US20020000660 Contact structure having a diffusion barrier |
| 01/03/2002 | US20020000659 A semiconductor device having active element connected to an electrode metal pad via a barrier metal layer and interlayer insulating film |
| 01/03/2002 | US20020000658 Semiconductor device and method of manufacturing the same |
| 01/03/2002 | US20020000654 Semiconductor device |
| 01/03/2002 | US20020000653 Method for forming an aluminum contact |
| 01/03/2002 | US20020000648 Thin integrated circuit unit |
| 01/03/2002 | US20020000647 Semiconductor device packaging assembly and method for manufacturing the same |
| 01/03/2002 | US20020000644 Insulating layer, semiconductor device and methods for fabricating the same |
| 01/03/2002 | US20020000643 Devices related to electrode pads for p-type group iii nitride compound semiconductors |
| 01/03/2002 | US20020000642 Scribe line structure for preventing from damages thereof induced during fabrication |
| 01/03/2002 | US20020000641 Microwave array transistor for low-noise and high-power applications |
| 01/03/2002 | US20020000639 Semiconductor device with inductance element |
| 01/03/2002 | US20020000638 Semiconductor device and method of manufacturing the same |
| 01/03/2002 | US20020000636 Process for forming an integrated circuit comprising non-volatile memory cells and side transistors of at least two different types, and corresponding ic |
| 01/03/2002 | US20020000635 Improved metal oxide semiconductor device having contoured channel region and elevated source and drain regions |
| 01/03/2002 | US20020000633 Semiconductor device including misfet having post-oxide films having at least two kinds of thickness and method of manufacturing the same |
| 01/03/2002 | US20020000632 Semiconductor device, and method of manufacturing the same |
| 01/03/2002 | US20020000629 MOSFET device fabrication method capable of allowing application of self-aligned contact process while maintaining metal gate to have uniform thickness |
| 01/03/2002 | US20020000628 Semiconductor device and production method thereof |
| 01/03/2002 | US20020000627 Method of forming an integrated circuit contact structure having gate electrode protection for self-aligned contacts with zero enclosure |
| 01/03/2002 | US20020000626 Improving field leakage by using a thin layer of nitride deposited by chemical vapor deposition |
| 01/03/2002 | US20020000625 Semiconductor memory having buried digit lines |
| 01/03/2002 | US20020000624 Semiconductor device |
| 01/03/2002 | US20020000623 Semiconductor device and method for fabricating the same using damascene process |
| 01/03/2002 | US20020000622 Semiconductor device having reduced sheet resistance of source/drain regions |
| 01/03/2002 | US20020000621 Enhancements to polysilicon gate |
| 01/03/2002 | US20020000619 Thin film field effect transistor |
| 01/03/2002 | US20020000618 Semiconductor device and method for fabricating the same |
| 01/03/2002 | US20020000617 Semiconductor device having misfets |
| 01/03/2002 | US20020000616 Electronic device and a method for making the same |
| 01/03/2002 | US20020000615 Multistack 3-dimensional high density semiconductor device and method for fabrication |
| 01/03/2002 | US20020000614 Coplanar gate-source-drain Poly-TFT and method for fabricating the same |
| 01/03/2002 | US20020000613 Semiconductor device |
| 01/03/2002 | US20020000611 Semiconductor device having a gate electrode with a sidewall insulating film and manufacturing method thereof |
| 01/03/2002 | US20020000610 Method for manufacturing a device separation film in a semiconductor device |
| 01/03/2002 | US20020000609 Semiconductor device |
| 01/03/2002 | US20020000608 Vertical MOS transistor and a method of manufacturing the same |
| 01/03/2002 | US20020000606 NROM cell with self-aligned programming and erasure areas |
| 01/03/2002 | US20020000605 Method of fabricating high-coupling ratio split gate flash memory cell array |
| 01/03/2002 | US20020000604 Method to fabricate a floating gate with a sloping sidewall for a flash memory |
| 01/03/2002 | US20020000603 Non-volatile semiconductor memory device and method for producing the same |
| 01/03/2002 | US20020000602 V-shaped flash memory structure |
| 01/03/2002 | US20020000601 Semiconductor device having self-aligned contact and landing pad structure and method of forming same |
| 01/03/2002 | US20020000600 Semiconductor memory |
| 01/03/2002 | US20020000599 Semiconductor device and manufacturing method thereof |
| 01/03/2002 | US20020000598 Semiconductor devices having metal layers as barrier layers on upper or lower electrodes of capacitors |
| 01/03/2002 | US20020000597 Nonvolatile semiconductor memory device and method for recording information |
| 01/03/2002 | US20020000596 Method for improved processing and etchback of a container capacitor |
| 01/03/2002 | US20020000595 Semiconductor integrated circuit device and process for manufacturing the same |
| 01/03/2002 | US20020000594 Method for fabricating semicondutor memory device |
| 01/03/2002 | US20020000593 Semiconductor device and method of manufacturing the same |
| 01/03/2002 | US20020000592 Nonvolatile semiconductor memory device and method of operation thereof |
| 01/03/2002 | US20020000591 Continuous good step coverage cvd platinum metal deposition |
| 01/03/2002 | US20020000590 Semiconductor memory device and method of manufacturing the same |
| 01/03/2002 | US20020000589 Semiconductor device with capacitor elements substantially free of titanium |