Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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02/28/2002 | US20020023329 Semiconductor processing techniques |
02/28/2002 | DE10136682A1 Selektives Epitaxieverfahren für Halbleiterbauelemente Selective epitaxy for semiconductor devices |
02/28/2002 | DE10134181A1 P-type nitride semiconductor manufacturing method for light emitting and receiving elements, involves cooling substrate of nitride semiconductor layer in environment of hydrogen |
02/28/2002 | DE10120184A1 Herstellung einer Halbleitervorrichtung mit Kupferverdrahtung Manufacturing a semiconductor device having copper wiring |
02/28/2002 | DE10114226A1 Regler für einen Linearbeschleuniger Controller for a linear accelerator |
02/28/2002 | DE10106406A1 Semiconductor device for integrated circuit protection circuit, has part insulation layer specifically formed in SOI-layer |
02/28/2002 | DE10105505A1 Integrated circuit for testing DRAM, has judging circuit which detects normal condition of DRAM, when divided test data input for every predetermined number of bits correspond to excepted level |
02/28/2002 | DE10051938A1 Arrangement comprises substrate attached to carrier element by means of adhesive layer which incorporates additional elements containing gas |
02/28/2002 | DE10040898A1 Beleuchtungssystem für die Mikrolithographie An illumination system for microlithography |
02/28/2002 | DE10039441A1 Speicherzelle, Speicherzellenanordnung und Herstellungsverfahren Memory cell, the memory cell array and production method |
02/28/2002 | DE10039411A1 Strukturierung ferroelektrischer Schichten Patterning of ferroelectric layers |
02/28/2002 | DE10039350A1 Integrierte Schaltung, Testaufbau und Verfahren zum Testen von integrierten Schaltungen An integrated circuit test set-up and method for testing integrated circuits |
02/28/2002 | DE10038955A1 Verfahren zur Herstellung eines Bipolartransistors A process for producing a bipolar transistor |
02/28/2002 | DE10038893A1 Semiconductor component used in a semiconductor laser comprises a second layer grown on a first layer doped with doping atoms |
02/28/2002 | DE10038887A1 Production of a silicon nitride layer used in the production of a semiconductor device comprises reacting silicon wafers with ammonia gas in two separate chambers |
02/28/2002 | DE10038877A1 Speicherzelle und Herstellungsverfahren Memory cell, and manufacturing method |
02/28/2002 | DE10038611A1 Fördereinrichtung für den berührungslosen Transport von Bauteilen aus Kunststoff, Halbleitermaterial oder Metall Conveyor for the contactless transport of components made of plastic, metal or semiconductor material |
02/28/2002 | DE10038378A1 Verfahren zur Herstellung von Kondensatorelektroden A process for producing capacitor plates |
02/28/2002 | DE10037957C1 Verfahren zum anisotropen Trockenätzen organischer Antireflexionsschichten A method for anisotropic dry etching organic anti-reflective layers |
02/28/2002 | DE10029035C1 Verfahren zur Bearbeitung eines Wafers A method for processing a wafer |
02/28/2002 | CA2420262A1 Method for producing composite components by powder injection molding and composite powder appropriate for use in said method |
02/28/2002 | CA2355591A1 Cooling body for semi-conductor components, process for its production and moulding tool for this |
02/27/2002 | EP1182912A1 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
02/27/2002 | EP1182779A2 Device and system for adjusting the electrical characteristics of microelectronic-circuits as well as the use of a microelectronical circuit element |
02/27/2002 | EP1182713A2 Magneto-resistive element |
02/27/2002 | EP1182708A2 High capacitance damascene capacitor |
02/27/2002 | EP1182707A2 IGBT process and device |
02/27/2002 | EP1182706A2 IGBT process and device |
02/27/2002 | EP1182703A2 Semiconductor device having integrated capacitor and/or inductor |
02/27/2002 | EP1182702A1 Device for the Protection of an Integrated Circuit |
02/27/2002 | EP1182701A1 Method of manufacturing a buffer element for reducing mechanical strain |
02/27/2002 | EP1182700A2 Process for the selective manufacturing of a T-shaped gate |
02/27/2002 | EP1182699A2 Process for forming a thick dielectric region in a semiconductor substrate |
02/27/2002 | EP1182698A2 Barrier layer for a storage capacitor |
02/27/2002 | EP1182697A2 Sapphire substrate, semiconductor device, electronic component, and crystal growing method |
02/27/2002 | EP1182696A2 Temperature compensating thinfilm capacitor |
02/27/2002 | EP1182695A2 Semiconductor processing module and apparatus |
02/27/2002 | EP1182694A2 Processing system for substrate |
02/27/2002 | EP1182693A2 Vertical heat treatment system and method for transferring substrate |
02/27/2002 | EP1182692A2 Heat-processing apparatus and method for semiconductor process |
02/27/2002 | EP1182691A2 Method and apparatus for transfering a wafer |
02/27/2002 | EP1182666A1 Integrated memory with magnetoresistive memory cells |
02/27/2002 | EP1182665A2 MRAM with an effective noise countermeasure |
02/27/2002 | EP1182526A2 Run-to-run control over semiconductor processing tool based upon mirror image |
02/27/2002 | EP1182508A2 Method of exposing a layout comprising several levels on a wafer |
02/27/2002 | EP1182507A2 Projection exposure system |
02/27/2002 | EP1182505A2 Device and process for exposing a radiation-sensitive coating using charged particles and mask therefor |
02/27/2002 | EP1182460A2 Fritting inspection method and apparatus |
02/27/2002 | EP1182276A2 Process for the production of a ferroelectric solid layer using an additive |
02/27/2002 | EP1182275A2 Method of forming an interlayer insulating film |
02/27/2002 | EP1182273A2 Gas chemistry cycling to achieve high aspect ratio gapfill with hdp-cvd |
02/27/2002 | EP1182242A1 Polishing composition and polishing method employing it |
02/27/2002 | EP1182230A1 Filler for crosslinkable elastomer and crosslinkable elastomer composition containing the same |
02/27/2002 | EP1182133A1 Stern tube sealing apparatus |
02/27/2002 | EP1181724A1 Wavelength-insensitive radiation coupling for multi-quantum well sensor based on intersubband absorption |
02/27/2002 | EP1181723A1 Double gate mosfet transistor and method for the production thereof |
02/27/2002 | EP1181720A1 Methods and apparatus for fabricating a multiple modular assembly |
02/27/2002 | EP1181719A1 Method and laminate for fabricating an integrated circuit |
02/27/2002 | EP1181718A1 Improved trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth |
02/27/2002 | EP1181717A1 Fabrication of integrated circuit by selective deposition of precursor liquid |
02/27/2002 | EP1181715A1 Method and system for providing a continuous motion sequential lateral solidification |
02/27/2002 | EP1181714A1 Method to produce high density memory cells and small spaces by using nitride spacer |
02/27/2002 | EP1181713A2 Method for the preparation of pure citalopram |
02/27/2002 | EP1181712A2 Low-resistance vdmos semiconductor component |
02/27/2002 | EP1181711A2 Method for fabrication of a low resistivity mosfet gate with thick metal silicide on polysilicon |
02/27/2002 | EP1181699A1 Amorphous barrier layer in a ferroelectric memory cell |
02/27/2002 | EP1181693A1 Magnetic device with a coupling layer and method of manufacturing and operation of such device |
02/27/2002 | EP1181692A1 Device with embedded flash and eeprom memories |
02/27/2002 | EP1181651A2 Semiconductor processing techniques |
02/27/2002 | EP1181401A2 Semi-insulating silicon carbide without vanadium domination |
02/27/2002 | EP1181400A1 Electrochemical etching installation and method for etching a body to be etched |
02/27/2002 | EP1181134A1 Method and system for cleaning a chemical mechanical polishing pad |
02/27/2002 | EP1181112A1 Temperature controlled gassification of deionized water for megasonic cleaning of semiconductor wafers |
02/27/2002 | EP1040486B1 Biasing method and structure for reducing band-to-band and/or avalanche currents during the erase of flash memory devices |
02/27/2002 | EP0931350B1 Method of fabricating a short channel self-aligned VMOS field effect transistor |
02/27/2002 | EP0925607B1 Method for producing a dram cellular arrangement |
02/27/2002 | EP0904159A4 Process to modify work functions using ion implantation |
02/27/2002 | EP0861503B1 Electrostatic discharge protection circuit comprising staggered contacts |
02/27/2002 | EP0839389B1 Integrated circuit |
02/27/2002 | EP0835518B1 Low inductance large area coil for an inductively coupled plasma source |
02/27/2002 | EP0712535B1 Trenched dmos transistor with channel block at cell trench corners |
02/27/2002 | CN1338118A Die pad crack absorption integrated circuit chip and fabrication process |
02/27/2002 | CN1338115A Semiconductor integrated circuit device and its production method |
02/27/2002 | CN1338114A Semiconductor integrated circuit device and its production method |
02/27/2002 | CN1338113A Ferroelectric device with capping layer and method of make same |
02/27/2002 | CN1338066A Four-phase charge pump with lower peak current |
02/27/2002 | CN1338007A Indium source reagent compositions |
02/27/2002 | CN1337983A Working liquids and methods for modifying structured wafers for semiconductor fabrication |
02/27/2002 | CN1337975A Electronic circuit device comprising an epoxy-modified aromatic vinyl-conjugated diene block copolymer |
02/27/2002 | CN1337905A Thermal transfer element for forming multi-layer devices |
02/27/2002 | CN1337898A Fluid dispensing fixed abrasive polishing pad |
02/27/2002 | CN1337749A Magnetic-resistance-effect type element and magnetic storage element and magnetic head made thereby |
02/27/2002 | CN1337745A Semiconductor device and method for producing same |
02/27/2002 | CN1337744A Semiconductor device |
02/27/2002 | CN1337743A Package uith for semiconductor device and its manufacture |
02/27/2002 | CN1337741A Semiconductor with injectable conductive area and mfg. method thereof |
02/27/2002 | CN1337740A Manufacture of capacitor with insulating pins |
02/27/2002 | CN1337739A Method for producing semi-conductor device |
02/27/2002 | CN1337738A Band with injectable conductive area for semiconductor package treatment and mfg. method thereof |
02/27/2002 | CN1337737A Method for producing semi-conductor device |