| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/07/2002 | US20020028544 Semiconductor device and method of manufacturing the same |
| 03/07/2002 | US20020028543 Process a fabricating a semiconductor device |
| 03/07/2002 | US20020028542 Process for the fabrication of dual gate structures for cmos devices |
| 03/07/2002 | US20020028541 Dense arrays and charge storage devices, and methods for making same |
| 03/07/2002 | US20020028540 Thin film transistor matrix device and method for fabricating the same |
| 03/07/2002 | US20020028539 Semiconductor device and method for fabricating the same |
| 03/07/2002 | US20020028537 Hermetic chip and method of manufacture |
| 03/07/2002 | US20020028536 Semiconductor chip bonded to a thermal conductive sheet having a filled through hole for electrical connection |
| 03/07/2002 | US20020028535 Circuit, method of adhering an integrated circuit device to a substrate, and method of forming a circuit |
| 03/07/2002 | US20020028533 Flip-chip package structure and method of fabricating the same |
| 03/07/2002 | US20020028532 Method of manufacturing a multi-chip semiconductor device effective to improve alignment |
| 03/07/2002 | US20020028531 Vapor, vacuum deposition in presence of metallic surfactant |
| 03/07/2002 | US20020028528 Alignment marks and method of forming the same |
| 03/07/2002 | US20020028525 Method for manufacturing circuit devices |
| 03/07/2002 | US20020028524 Method of controlling bond process quality by measuring wire bond features |
| 03/07/2002 | US20020028523 Process for making photomask pattern data and photomask |
| 03/07/2002 | US20020028503 Devices for molecular biological analysis and diagnostics including waveguides |
| 03/07/2002 | US20020028411 Forming barriers |
| 03/07/2002 | US20020028409 Positive resist laminate |
| 03/07/2002 | US20020028408 Etch resistant antireflective coating compositions |
| 03/07/2002 | US20020028407 Fine pattern |
| 03/07/2002 | US20020028406 Partially crosslinked polymer for bilayer photoresist |
| 03/07/2002 | US20020028405 Photoresist is mixture of polymers |
| 03/07/2002 | US20020028398 Charged particle beam exposure method and charged particle beam exposure apparatus |
| 03/07/2002 | US20020028395 Method of manufacturing a photomask |
| 03/07/2002 | US20020028394 Method for manufacturing a membrane mask |
| 03/07/2002 | US20020028393 Optical proximity correction method utilizing serifs having variable dimensions |
| 03/07/2002 | US20020028391 Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask |
| 03/07/2002 | US20020028390 Techniques for fabricating and packaging multi-wavelength semiconductor laser array devices (chips) and their applications in system architectures |
| 03/07/2002 | US20020028359 Dry etching method, microfabrication process and dry etching mask |
| 03/07/2002 | US20020028343 Semiconductor device, a method for manufacturing a semiconductor device and an epitaxial growth substrate for a semiconductor device |
| 03/07/2002 | US20020028338 Method and an apparatus for forming an under bump metallization structure |
| 03/07/2002 | US20020028331 Method of using a transfer tape |
| 03/07/2002 | US20020028327 Conductive polymer interconnection configurations |
| 03/07/2002 | US20020028322 Mask for the selective growth of a solid, a manufacturing method for the mask, and a method for selectively growing a solid using the mask |
| 03/07/2002 | US20020028314 Bulk single crystal gallium nitride and method of making same |
| 03/07/2002 | US20020028293 Liquid crystal polymers for flexible circuits |
| 03/07/2002 | US20020028291 Apparatus for fabricating a III-V nitride film and a method for fabricating the same |
| 03/07/2002 | US20020028290 Rotation in gas flow; forming polycrystalline silicon |
| 03/07/2002 | US20020028131 Vacuum processing apparatus and semiconductor manufacturing line using the same |
| 03/07/2002 | US20020028045 Optical coupling structures and the fabrication processes |
| 03/07/2002 | US20020027945 Temperature measuring method in pattern drawing apparatus |
| 03/07/2002 | US20020027942 Judging method and processing apparatus |
| 03/07/2002 | US20020027825 Dram technology compatible processor/memory chips |
| 03/07/2002 | US20020027822 One-time programmable memory cell in cmos technology |
| 03/07/2002 | US20020027812 Semiconductor integrated circuit device with memory circuit |
| 03/07/2002 | US20020027810 Semiconductor integrated circuit |
| 03/07/2002 | US20020027809 Semiconductor device capable of generating internal voltage effectively |
| 03/07/2002 | US20020027804 Nonvolatile memory |
| 03/07/2002 | US20020027803 Magnetic memory device and method of reading data in magnetic memory device |
| 03/07/2002 | US20020027795 Semiconductor memory device having a circuit for testing memories |
| 03/07/2002 | US20020027762 Electrostatic chuck |
| 03/07/2002 | US20020027737 Control integrated circuit for floppy disk drive |
| 03/07/2002 | US20020027719 Optical reduction system with control of illumination polarization |
| 03/07/2002 | US20020027718 Optical reduction system with elimination of reticle diffraction induced bias |
| 03/07/2002 | US20020027681 Gate stack process for high reliability dual oxide CMOS devices and circuits |
| 03/07/2002 | US20020027663 Illumination and imaging device for multiple spectral regions, and coordinate measuring machine having an illumination and imaging device for multiple spectral regions |
| 03/07/2002 | US20020027660 Apparatus and method for determining the active dopant profile in a semiconductor wafer |
| 03/07/2002 | US20020027653 Method for inspecting defects and an apparatus of the same |
| 03/07/2002 | US20020027650 Method of and apparatus for bonding light-emitting element |
| 03/07/2002 | US20020027648 Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby |
| 03/07/2002 | US20020027647 Photolithographic system for exposing a wafer using a programmable mask |
| 03/07/2002 | US20020027646 Exposure system |
| 03/07/2002 | US20020027644 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/07/2002 | US20020027469 Bandgap voltage comparator used as a low voltage detection circuit |
| 03/07/2002 | US20020027466 Semiconductor integrated circuit and an electronic apparatus incorporating a multiplicity of semiconductor integrated circuits |
| 03/07/2002 | US20020027461 Semiconductor integrated circuit with suppressed clock skew |
| 03/07/2002 | US20020027444 Packaging and interconnection of contact structure |
| 03/07/2002 | US20020027443 High density probe card apparatus and method of manufacture |
| 03/07/2002 | US20020027442 Probe station having multiple enclosures |
| 03/07/2002 | US20020027434 Probe station |
| 03/07/2002 | US20020027433 Chuck for holding a device under test |
| 03/07/2002 | US20020027398 Method for manufacturing thin plate, piezoelectric plate, and piezoelectric vibrator |
| 03/07/2002 | US20020027298 Semiconductor device and method of manufacturing the same |
| 03/07/2002 | US20020027297 Semiconductor package |
| 03/07/2002 | US20020027296 Methods for producing packaged integrated circuit devices & packaged integrated circuit devices produced thereby |
| 03/07/2002 | US20020027294 Electrical component assembly and method of fabrication |
| 03/07/2002 | US20020027293 Three dimensional semiconductor integrated circuit device and method for making the same |
| 03/07/2002 | US20020027292 Semiconductor device having trench interconnection and method of fabricating same |
| 03/07/2002 | US20020027291 Semiconductor device for preventing corrosion of metallic featues |
| 03/07/2002 | US20020027290 Semiconductor device and method of manufacturing the same |
| 03/07/2002 | US20020027289 Semiconductor device with an improved bonding pad structure and method of bonding bonding wires to bonding pads |
| 03/07/2002 | US20020027288 Bit line structure for semiconductor device |
| 03/07/2002 | US20020027287 Semiconductor device with copper wiring and its manufacture method |
| 03/07/2002 | US20020027286 Low leakage current silicon carbonitride prepared using methane, ammonia and silane for copper diffusion barrier, etchstop and passivation applications |
| 03/07/2002 | US20020027285 Semiconductor device having a metal-semiconductor junction with a reduced contact resistance |
| 03/07/2002 | US20020027276 Circuit device and method of manufacturing the same |
| 03/07/2002 | US20020027274 Semiconductor device and fabrication method |
| 03/07/2002 | US20020027269 Electronic component, semiconductor device, methods of manufacturing the same, circuit board, and electronic instrument |
| 03/07/2002 | US20020027267 Thin-type semiconductor device and die pad thereof |
| 03/07/2002 | US20020027266 Semiconductor device and a method of manufacturing the same |
| 03/07/2002 | US20020027265 Semiconductor device, method for fabricating the semiconductor device, lead frame and method for producing the lead frame |
| 03/07/2002 | US20020027261 Selective Deposition Process For Passivating Top Interface Of Damascene-Type Cu Interconnect Lines |
| 03/07/2002 | US20020027260 Semiconductor device with isolation insulator, interlayer insulation film, and a sidewall coating film |
| 03/07/2002 | US20020027259 Highly integrated and reliable DRAM and its manufacture |
| 03/07/2002 | US20020027258 Solid-state imaging device and manufacturing method thereof and semiconductor device manufacturing method |
| 03/07/2002 | US20020027257 Method for fabricating a chip scale package using wafer level processing and devices resulting therefrom |
| 03/07/2002 | US20020027256 Semiconductor integrated circuit device |
| 03/07/2002 | US20020027255 Semiconductor device and method for producing the same |
| 03/07/2002 | US20020027254 Transistor having variable width gate electrode and method of manufacturing the same |