| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/14/2002 | WO2002021588A1 Process for producing organic film by coevaporation |
| 03/14/2002 | WO2002021587A1 Semiconductor device and method of manufacturing the semiconductor device |
| 03/14/2002 | WO2002021586A1 Dry etching gas and method for dry etching |
| 03/14/2002 | WO2002021584A1 Selective growth of semiconductor structure |
| 03/14/2002 | WO2002021581A2 Method for uniform polish microelectronic device |
| 03/14/2002 | WO2002021580A2 Portable enclosure for semiconductor processing |
| 03/14/2002 | WO2002021579A1 Wafer clamping apparatus and method |
| 03/14/2002 | WO2002021577A2 Wafer carrier |
| 03/14/2002 | WO2002021576A2 Organic nanoelectric conductors |
| 03/14/2002 | WO2002021574A2 Subframe method for displaying grey scales on an active matrix el device with subdivided msb subframe |
| 03/14/2002 | WO2002021573A2 Ccd image sensor and method of manufacturing same |
| 03/14/2002 | WO2002021565A2 Apparatus for magnetically scanning and/or switching a charged-particle beam |
| 03/14/2002 | WO2002021241A2 Circuit arrangement and a method for detecting an undesired attack on an integrated circuit |
| 03/14/2002 | WO2002021228A1 Self-diagnosis circuit of input/output circuit system |
| 03/14/2002 | WO2002021217A1 Vacuum ultraviolet transmitting direct deposit vitrified silicon oxyfluoride lithography glass photomask blanks |
| 03/14/2002 | WO2002021210A1 Halftone phase shift photomask and blank for halftone phase shift photomask |
| 03/14/2002 | WO2002021111A1 Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface |
| 03/14/2002 | WO2002021075A1 Determination of center of focus by diffraction signature analysis |
| 03/14/2002 | WO2002020882A1 Silicon sheet producing apparatus and solar cell comprising silicon sheet produced by the same |
| 03/14/2002 | WO2002020881A2 Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor |
| 03/14/2002 | WO2002020880A1 Production of low defect epitaxial films |
| 03/14/2002 | WO2002020876A2 Segmenting of processing system into wet and dry areas |
| 03/14/2002 | WO2002020871A1 Plasma boat |
| 03/14/2002 | WO2002020864A2 System and method for depositing high dielectric constant materials and compatible conductive materials |
| 03/14/2002 | WO2002020236A2 A mold |
| 03/14/2002 | WO2002005315A3 System and method for improving thin films by gas cluster ion be am processing |
| 03/14/2002 | WO2001082339A3 Method and device for the wet-chemical removal of layers and for cleaning plate-shaped individual substrates |
| 03/14/2002 | WO2001075932A3 An enhanced resist strip in a dielectric etcher using downstream plasma |
| 03/14/2002 | WO2001073830A3 Electrochemical nanostructuring method and device |
| 03/14/2002 | WO2001071796A3 Method for electrochemical polishing of a conductive material |
| 03/14/2002 | WO2001071779A3 Method and apparatus for planarizing a semiconductor contactor |
| 03/14/2002 | WO2001069658A3 One-time programmable anti-fuse element and method |
| 03/14/2002 | WO2001069656A3 Localized heating and cooling of substrates |
| 03/14/2002 | WO2001067071A3 Evaluating a property of a multilayered structure |
| 03/14/2002 | WO2001065594A3 A method of producing a schottky varicap diode |
| 03/14/2002 | WO2001063644A3 Method for producing bipolar transistors in a bicmos process |
| 03/14/2002 | WO2001046987A3 Inkjet-fabricated integrated circuits |
| 03/14/2002 | WO2001045135A3 Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates |
| 03/14/2002 | WO2001043165A3 Oxide films containing p-type dopant and process for preparing same |
| 03/14/2002 | WO2001042694A3 Distribution system of modular process lines |
| 03/14/2002 | WO2001027695A3 Removable cover for protecting a reticle, system including and method of using the same |
| 03/14/2002 | WO2000065126A9 Cvd tantalum nitride plug formation from tantalum halide precursors |
| 03/14/2002 | WO2000057629A9 Laser pattern generator |
| 03/14/2002 | WO2000052746A9 A system and method for residue entrapment utilizing a polish and sacrificial fill for semiconductor fabrication |
| 03/14/2002 | US20020032899 Method and apparatus for modifying flattened data of designed circuit pattern |
| 03/14/2002 | US20020032897 Method of designing wiring for power sources in a semiconductor chip, and a computer product |
| 03/14/2002 | US20020032896 Circuit design method and circuit design apparatus |
| 03/14/2002 | US20020032895 Optimization of a logic circuit having a hierarchical structure |
| 03/14/2002 | US20020032888 System and method for determining yield impact for semiconductor devices |
| 03/14/2002 | US20020032499 Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
| 03/14/2002 | US20020032496 Transport device |
| 03/14/2002 | US20020032493 Production process standardization system of semiconductor device and method of same and storage medium storing that method |
| 03/14/2002 | US20020032280 One-part, thermally-curable adhesive composition comprising: an epoxy resin substantially free of hydroxyl functionality; and an anhydride curing agent. |
| 03/14/2002 | US20020032136 Dilute cleaning composition and method for using same |
| 03/14/2002 | US20020031990 Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers |
| 03/14/2002 | US20020031988 System and method for creating and navigating a linear hypermedia resource program |
| 03/14/2002 | US20020031985 Chemical mechanical polishing composition and process |
| 03/14/2002 | US20020031981 Carrier head with a substrate detection mechanism for a chemical mechanical polishing system |
| 03/14/2002 | US20020031920 Deuterium treatment of semiconductor devices |
| 03/14/2002 | US20020031919 Method for improving the sidewall stoichiometry of thin film capacitors |
| 03/14/2002 | US20020031918 Method of manufacture of ceramic composite wiring structures for semiconductor devices |
| 03/14/2002 | US20020031917 Laser ablation method employing silicon as a target in oxygen gas to form a porous silicon oxide film; low relative dielectric constant |
| 03/14/2002 | US20020031916 Semiconductor device and manufacturing method thereof |
| 03/14/2002 | US20020031915 Method for forming a silicide layer |
| 03/14/2002 | US20020031914 Post-plasma processing wafer cleaning method and system |
| 03/14/2002 | US20020031912 Method of manufacturing a copper wiring in a semiconductor device |
| 03/14/2002 | US20020031911 Forming interlayer insulating film on a semiconductor substrate; forming a damascene pattern by patterning; cleaning, and forming a diffusion barrier layer on the structure, forming chemical enhancer treatment |
| 03/14/2002 | US20020031910 Method for integrating anti-reflection layer and salicide block |
| 03/14/2002 | US20020031909 Self-aligned silicone process for low resistivity contacts to thin film silicon-on-insulator mosfets |
| 03/14/2002 | US20020031908 Forming refractory metal layer on substrate and top surface and a sidewall of patterned copper layer; performing a high density plasma treatment to convert refractory metal layer into implantation layer which serves as diffusion barrier |
| 03/14/2002 | US20020031907 Depositing titanium layer over a dielectric layer; depositing an aluminum layer on titanium layer; patterning and etching titanium and aluminum layers to form an interconnect signal line |
| 03/14/2002 | US20020031906 Forming dielectric layer over semiconductor body; forming a via in dielectric layer; forming a trench pattern; etching a trench using etch chemistry comprising a less-polymerizing fluorocarbon, higher-polymerizing flurorocarbon |
| 03/14/2002 | US20020031905 Methods of making a connection component |
| 03/14/2002 | US20020031904 Semiconductor device and method for manufacturing the same |
| 03/14/2002 | US20020031903 Component mounting apparatus and method, component mounting system having the apparatus, and circuit board manufactured by the method |
| 03/14/2002 | US20020031902 Flip chip-in-leadframe package and process |
| 03/14/2002 | US20020031901 Contact and via fabrication technologies |
| 03/14/2002 | US20020031900 Method for aligning quantum dots and semiconductor device fabricated by using the same |
| 03/14/2002 | US20020031899 Apparatus and method for singulating semiconductor wafers |
| 03/14/2002 | US20020031898 Method of fabricating an isolation structure on a semiconductor substrate |
| 03/14/2002 | US20020031897 Adhesive material; board-on-chip (BOC) and lead-on-chip (LOC) semiconductor device package assembly having a semiconductor die adhered to a substrate |
| 03/14/2002 | US20020031896 Method for fabricating semiconductor device having trench isolations |
| 03/14/2002 | US20020031895 Method to reduce floating grain defects in dual-sided container capacitor fabrication |
| 03/14/2002 | US20020031893 Bipolar transistor having a high current gain |
| 03/14/2002 | US20020031892 Bipolar transistor stabilized with electrical insulating elements |
| 03/14/2002 | US20020031891 Low-resistance gate transistor and method for fabricating the same |
| 03/14/2002 | US20020031890 Semiconductor device of STI structure and method of fabricating MOS transistors having consistent threshold voltages |
| 03/14/2002 | US20020031889 Method for manufacturing a semiconductor device |
| 03/14/2002 | US20020031888 Method for reducing processing steps when fabricating a flash memory array using a blank implant |
| 03/14/2002 | US20020031887 ZPROM manufacture and design and methods for forming thin structures using spacers as an etching mask |
| 03/14/2002 | US20020031886 Flash memory cell |
| 03/14/2002 | US20020031885 Semiconductor memory device using ferroelectric film |
| 03/14/2002 | US20020031883 Method of manufacturing semiconductor device |
| 03/14/2002 | US20020031882 Method for manufacturing a semiconductor integrated circuit of triple well structure |
| 03/14/2002 | US20020031881 Semiconductor device and method of manufacturing the same |
| 03/14/2002 | US20020031880 Forming an opening in passivation layer to expose aluminum-based peripheral bond pad; forming nickel-vanadium (NiV)/copper metallization structure; coating photoresist layer; performing a selective removal on photoresist layer |
| 03/14/2002 | US20020031879 Method for fabricating semiconductor device |
| 03/14/2002 | US20020031878 Plasma etching methods |
| 03/14/2002 | US20020031877 Method of manufacturing semiconductor device including process for implanting impurities into substrate via MOS transistor gate electrode and gate insulation film |
| 03/14/2002 | US20020031876 Forming semiconductor film in peripheral circuit region; crystallizing semiconductor film using energy beam with its energy being output continuously in relation to time so that film can serve as an active film of each thin film transistor |