| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/13/2002 | EP1186024A1 Method for making a silicon substrate comprising a buried thin silicon oxide film |
| 03/13/2002 | EP1186023A1 A super-self-aligned trench-gate dmos with reduced on-resistance |
| 03/13/2002 | EP1186022A2 Method and apparatus for enabling conventional wire bonding to copper-based bond pad features |
| 03/13/2002 | EP1186021A1 Microelectronic subassembly |
| 03/13/2002 | EP1186020A1 A method of manufacturing a semiconductor device |
| 03/13/2002 | EP1186019A1 Trench semiconductor device having gate oxide layer with multiple thicknesses and processes of fabricating the same |
| 03/13/2002 | EP1186018A2 Cmos process |
| 03/13/2002 | EP1186017A2 Self-aligned source and drain extensions fabricated in a damascene contact and gate process |
| 03/13/2002 | EP1186016A1 Process of using siloxane dielectric films in the integration of organic dielectric films in electronic devices |
| 03/13/2002 | EP1186015A1 Low temperature oxidation of conductive layers for semiconductor fabrication |
| 03/13/2002 | EP1186014A1 Techniques for etching a low capacitance dielectric layer |
| 03/13/2002 | EP1186013A1 Differential trench open process |
| 03/13/2002 | EP1186012A1 Method for producing an element with material that has been made porous |
| 03/13/2002 | EP1186011A1 Controlled-stress stable metallization for electronic and electromechanical devices |
| 03/13/2002 | EP1186010A1 Nitrided re-oxidised polysilicon gate to improve hot carrier performance |
| 03/13/2002 | EP1186009A1 Method for removal of sic |
| 03/13/2002 | EP1186007A2 Process chamber assembly with reflective hot plate |
| 03/13/2002 | EP1186006A1 Method and system for cleaning a semiconductor wafer |
| 03/13/2002 | EP1186005A1 Multi-zone resistive heater |
| 03/13/2002 | EP1186004A2 Processing chamber with optical window cleaned using process gas |
| 03/13/2002 | EP1186003A1 Apparatus for processing material at controlled temperatures |
| 03/13/2002 | EP1186002A1 Ic-compatible parylene mems technology and its application in integrated sensors |
| 03/13/2002 | EP1185903A1 Method of manufacturing a device by means of a mask and phase-shifting mask for use in said method |
| 03/13/2002 | EP1185894A1 Method of fabricating a semiconductor device |
| 03/13/2002 | EP1185855A1 Optical inspection method and apparatus utilizing a variable angle design |
| 03/13/2002 | EP1185841A1 Measuring positions or coplanarity of contact elements of an electronic component with a flat illumination and two cameras |
| 03/13/2002 | EP1185727A1 Sequential hydride vapor-phase epitaxy |
| 03/13/2002 | EP1185723A1 Utilization of sih4, soak and purge in deposition processes |
| 03/13/2002 | EP1185722A1 Pecvd of tan films from tantalum halide precursors |
| 03/13/2002 | EP1185538A1 Copper source reagent compositions, and method of making and using same for microelectronic device structures |
| 03/13/2002 | EP1185481A1 Improved methods of fabricating microelectromechanical and microfluidic devices |
| 03/13/2002 | EP1185475A1 Cassette buffering within a minienvironment |
| 03/13/2002 | EP1171802A4 Novel photosensitive resin compositions |
| 03/13/2002 | EP1010151A4 Radio frequency data communications device |
| 03/13/2002 | EP0975705B1 Buffer solutions for suspensions used in chemical-mechanical polishing |
| 03/13/2002 | EP0950191B1 Contact probe unit |
| 03/13/2002 | EP0912351B1 Rigid thin windows for vacuum applications |
| 03/13/2002 | EP0898785A4 Active matrix displays and method of making |
| 03/13/2002 | EP0865342B1 Improvements in and relating to grinding machines |
| 03/13/2002 | CN2482220Y Wafer bearing device |
| 03/13/2002 | CN2482219Y Water protection device for etching process |
| 03/13/2002 | CN2482218Y Large round silicon chip film expansion heating device |
| 03/13/2002 | CN2482217Y Improved drainage module for semiconductor exhaust gas treating apparatus |
| 03/13/2002 | CN2482195Y Integrated transformer |
| 03/13/2002 | CN2481446Y Spot welder capable of direct welding enamelled wire |
| 03/13/2002 | CN1340243A Electronic element with reduced inductive coupling |
| 03/13/2002 | CN1340240A Surface wave device connected to a base with conductive adhesive |
| 03/13/2002 | CN1340215A Nitride semiconductor device and its manufacturing method |
| 03/13/2002 | CN1340214A Integrated circuit comprising an inductor which prevents latch-up and method for its manufacture |
| 03/13/2002 | CN1340212A Integrated circuit device, electronic module for chip card using said device and method for making same |
| 03/13/2002 | CN1340211A Semiconductor device with deep substrate contacts |
| 03/13/2002 | CN1340210A Method and system for polishing semiconductor wafers |
| 03/13/2002 | CN1340082A 环氧树脂组合物 The epoxy resin composition |
| 03/13/2002 | CN1339988A Method and device for treating substrates |
| 03/13/2002 | CN1339873A Method for producing piezoelectric device |
| 03/13/2002 | CN1339827A Semi-insulation diffusion potential barrier of low resistivity grid conductor |
| 03/13/2002 | CN1339826A Single chip integrated inductance |
| 03/13/2002 | CN1339825A Semiconductor and its design method and design device |
| 03/13/2002 | CN1339824A Semiconductor device and its producing method |
| 03/13/2002 | CN1339820A Method for preventing semiconductor layer bending and semiconductor device formed by said method |
| 03/13/2002 | CN1339819A Lead wire frame and its producing method |
| 03/13/2002 | CN1339818A Local chip connection method |
| 03/13/2002 | CN1339800A MRAM capable of effectively overcoming noise |
| 03/13/2002 | CN1339617A Chemical gas phase deposit method for non-crystalline silicon and forming film |
| 03/13/2002 | CN1080984C Panel assembly structure |
| 03/13/2002 | CN1080936C Method for forming metal wiring of semiconductor device |
| 03/13/2002 | CN1080935C Bump forming method |
| 03/13/2002 | CN1080934C Resin-package moulding die for production of semiconductor element |
| 03/13/2002 | CN1080932C Metallic film for sealing semiconductor |
| 03/13/2002 | CN1080931C Techonlogy for production of frame for enclosing semiconductor leadwire |
| 03/13/2002 | CN1080930C Method for making a semiconductor structure |
| 03/13/2002 | CN1080929C Method for forming fine patterns of semiconductor device |
| 03/13/2002 | CN1080928C Method for planarization of semiconductor device |
| 03/13/2002 | CN1080927C Method for detecting water defects |
| 03/13/2002 | CN1080926C Manufacture of semiconductor components |
| 03/13/2002 | CN1080895C A reticle and a method for measuring blind setting accuracy using the same |
| 03/13/2002 | CN1080703C Preparing system for super high purity ammonia, producing system for super high precision electronic components and method for supplying high purity ammonina reagent on production line |
| 03/12/2002 | USRE37580 Guard ring electrostatic chuck |
| 03/12/2002 | US6356976 LSI system capable of reading and writing at high speed |
| 03/12/2002 | US6356958 Integrated circuit module has common function known good integrated circuit die with multiple selectable functions |
| 03/12/2002 | US6356861 Deriving statistical device models from worst-case files |
| 03/12/2002 | US6356653 Method and apparatus for combined particle location and removal |
| 03/12/2002 | US6356616 Apparatus and methods for detecting position of an object along an axis |
| 03/12/2002 | US6356485 Merging write cycles by comparing at least a portion of the respective write cycle addresses |
| 03/12/2002 | US6356479 Semiconductor memory system |
| 03/12/2002 | US6356477 Cross point memory array including shared devices for blocking sneak path currents |
| 03/12/2002 | US6356453 Electronic package having flip chip integrated circuit and passive chip component |
| 03/12/2002 | US6356338 Semiconductor production system with an in-line subsystem |
| 03/12/2002 | US6356333 Conductive adhesive with conductive particles, mounting structure, liquid crystal device and electronic device using the same |
| 03/12/2002 | US6356326 Active matrix substrate of a liquid crystal display comprising an insulating layer being made of solid solution of SiOx /SINy |
| 03/12/2002 | US6356318 Active-matrix liquid crystal display having storage capacitors of area smaller than that of pixel electrodes |
| 03/12/2002 | US6356300 Automatic visual inspection apparatus automatic visual inspection method and recording medium having recorded an automatic visual inspection program |
| 03/12/2002 | US6356183 Method of manufacturing an inductor |
| 03/12/2002 | US6356144 LSI core including voltage generation circuit and system LSI including the LSI core |
| 03/12/2002 | US6356136 Nonlinear resistor circuit using capacitively-coupled multi-input MOSFETS |
| 03/12/2002 | US6356118 Semiconductor integrated circuit device |
| 03/12/2002 | US6356097 Capacitive probe for in situ measurement of wafer DC bias voltage |
| 03/12/2002 | US6356096 Test board for testing a semiconductor device utilizing first and second delay elements in a signal-transmission-path |
| 03/12/2002 | US6356095 Semiconductor integrated circuit |
| 03/12/2002 | US6356091 Automatic wafer mapping in a wet environment on a wafer cleaner |