| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/21/2002 | US20020034858 Forming trench groove in a substrate; forming a first electrically insulating layer which fills trench groove and extends over an upper surface of substrate, forming a second electrically insulating layer |
| 03/21/2002 | US20020034857 6555395 withdrawn after electronic O.G. published |
| 03/21/2002 | US20020034856 Method for forming junction electrode of semiconductor device |
| 03/21/2002 | US20020034855 Semiconductor memory device and its manufacturing method |
| 03/21/2002 | US20020034854 Process and integrated circuit for a multilevel memory cell with an asymmetric drain |
| 03/21/2002 | US20020034853 Providing a doped substrate; patterning an oxide layer to define a channel; depositing a silicon layer to form channel; growing a gate oxide layer adjacent channel; forming a first and a second gate electrodes; forming drain region; deposits |
| 03/21/2002 | US20020034852 Amorphizing region of monocrystalline silicon carbide wafer to convert a portion to amorphous silicon carbide; removing an effective amount of carbon from amorphous silicon carbide region with an etchant, converting to crystalline silicon |
| 03/21/2002 | US20020034851 Forming insulator films and conductive films on semiconductor substrate; forming mask film; patterning mask film to form cell mask film in cell transistor forming region, transistor mask film in non-cell transistor forming region; etching |
| 03/21/2002 | US20020034850 Forming an isolation layer over a semiconductor substrate having a stacked gate region and a diffusion region, forming gate oxide layer over the gate stacked region and first conductive layer over the isolation layer, removing |
| 03/21/2002 | US20020034849 Self aligned method of forming a semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling, and a memory array made thereby |
| 03/21/2002 | US20020034848 Method for forming plug of semiconductor device |
| 03/21/2002 | US20020034847 Forming spaced apart isolation regions on the substrate; forming trenches across active and isolation regions; forming a second layer of insulation material in active regions; filling trenches with a second conductive material |
| 03/21/2002 | US20020034846 Self aligned method of forming a semiconductor memory array of floating gate memory cells with control gate spacers, and a memory array made thereby |
| 03/21/2002 | US20020034845 Method of forming polycrystalline semiconductor film |
| 03/21/2002 | US20020034844 Method for increasing a very-large-scale-integrated (VLSI) capacitor size on bulk silicon and silicon-on-insulator (SOI) wafers and structure formed thereby |
| 03/21/2002 | US20020034843 Semiconductor device and method of forming a semiconductor device |
| 03/21/2002 | US20020034842 Poly-silicon thin film transistor having back bias effects and fabrication method thereof |
| 03/21/2002 | US20020034841 Method for fabricating a part depletion type SOI device preventing a floating body effect |
| 03/21/2002 | US20020034840 Plasma-processing apparatus, plasma-processing method, plasma-processed board, chip mounting method, and chip mounted assembly |
| 03/21/2002 | US20020034837 Exposing the solar cells to a gas mixture containing HCl, oxygen and nitrogen at a total gas pressure below atmospheric pressure for activation |
| 03/21/2002 | US20020034832 For temperature monitoring |
| 03/21/2002 | US20020034831 Alignment method and exposure apparatus using the method |
| 03/21/2002 | US20020034714 Method and apparatus for heat processing of substrate |
| 03/21/2002 | US20020034708 Method of making an electric conductive strip |
| 03/21/2002 | US20020034695 Manufacturing method of a phase shift mask, method of forming a resist pattern and manufacturing method of a semiconductor device |
| 03/21/2002 | US20020034694 Phaseshift mask and manufacturing the same |
| 03/21/2002 | US20020034662 For applications such as magnetic memories, magnetic sensors, spin calculation devices |
| 03/21/2002 | US20020034661 Oxidizing ferromagnetic material of sense layer, depositing aluminium on oxidized ferromagnetic material of sense layer, whereafter this aluminium oxidizes to an aluminium oxide film using oxygen from oxidized ferromagnetic material |
| 03/21/2002 | US20020034651 A substrate made of an aluminum/silicon carbide composite alloy comprises aluminum-silicon carbide alloy parts and non alloy silicon carbide parat dispersed therin; oxygen freesintering aluminum and silcon carbide powder compact |
| 03/21/2002 | US20020034645 Effecting high frequency plasma chemical vapor deposition using a source gas comprising a silicon halide (silicon chloride or fluoride) and hydrogen forming a silicon thin film |
| 03/21/2002 | US20020034626 Mesoporous silica film from a solution containing a surfactant and methods of making same |
| 03/21/2002 | US20020034625 Multiphase low dielectric constant material and method of deposition |
| 03/21/2002 | US20020034611 Process of forming a pattern on a substrate |
| 03/21/2002 | US20020034595 Substrate processing equipment and method and covering member for use therein |
| 03/21/2002 | US20020034585 Thermally decomposing cyclopentasilane and/or silylcyclopentasilane in the presence of an inert organic medium vapor under atmospheric pressure; efficiency, yield, simplification |
| 03/21/2002 | US20020034582 Print head for ejecting liquid droplets and associated methods |
| 03/21/2002 | US20020034581 Micro C-4 semiconductor die and method for depositing connection sites thereon |
| 03/21/2002 | US20020034436 Methods and apparatus for retaining a tray stack having a plurality of trays for carrying microelectronic devices |
| 03/21/2002 | US20020034434 Wafer flat zone aligner |
| 03/21/2002 | US20020034433 Method and apparatus for processing wafers |
| 03/21/2002 | US20020034429 Substrate processing pallet and related substrate processing method and machine |
| 03/21/2002 | US20020034326 Inspection data analyzing system |
| 03/21/2002 | US20020034325 Method and apparatus for inspection of patterned semiconductor wafers |
| 03/21/2002 | US20020034152 Substrate rotating device, and manufacturing method and apparatus of recording medium master |
| 03/21/2002 | US20020034100 Nonvolatile semiconductor memory device |
| 03/21/2002 | US20020034096 Read/write architecture for MRAM |
| 03/21/2002 | US20020034094 Magnetic memory |
| 03/21/2002 | US20020034093 Semiconductor memory device capable of repairing small leak failure |
| 03/21/2002 | US20020033945 Spectroscopic scatterometer system |
| 03/21/2002 | US20020033935 Exposure apparatus, imaging performance measurement method, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method |
| 03/21/2002 | US20020033934 Projection exposure apparatus and device manufacturing method |
| 03/21/2002 | US20020033907 Liquid crystal display |
| 03/21/2002 | US20020033906 Electro-optical device |
| 03/21/2002 | US20020033892 Solid image pickup apparatus |
| 03/21/2002 | US20020033810 Display driver IC |
| 03/21/2002 | US20020033710 TDDB test pattern and method for testing TDDB of MOS capacitor dielectric |
| 03/21/2002 | US20020033708 Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope |
| 03/21/2002 | US20020033707 Semiconductor device testing apparatus and semiconductor device manufacturing method using it |
| 03/21/2002 | US20020033606 Cylinder, load port using it, and production system |
| 03/21/2002 | US20020033555 Molded component and method of producing the same |
| 03/21/2002 | US20020033541 Semiconductor device manufacturing method and semiconductor device manufactured thereby |
| 03/21/2002 | US20020033540 Underfill of a bumped or raised die utilizing a barrier adjacent to the side wall of flip chip |
| 03/21/2002 | US20020033539 Semiconductor device and method of manufacturing thereof |
| 03/21/2002 | US20020033538 Etch stops; semiconductors |
| 03/21/2002 | US20020033537 Semiconductor device having a ground plane and manufacturing method thereof |
| 03/21/2002 | US20020033536 Semiconductor device and manufacturing method thereof |
| 03/21/2002 | US20020033535 Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation |
| 03/21/2002 | US20020033534 Low k dielectric materials with inherent copper ion migration barrier |
| 03/21/2002 | US20020033533 Interconnect structure for use in an integrated circuit |
| 03/21/2002 | US20020033532 Electrode bonding structure for reducing the thermal expansion of the flexible printed circuit board during the bonding process |
| 03/21/2002 | US20020033531 Method for forming a bump, semiconductor device and method of fabricating same, semiconductor chip, circuit board, and electronic instrument |
| 03/21/2002 | US20020033530 Semiconductor device and semiconductor module |
| 03/21/2002 | US20020033527 Semiconductor device and manufacturing process thereof |
| 03/21/2002 | US20020033525 Packaging method and packaging structures of semiconductor devices |
| 03/21/2002 | US20020033523 Lead-frame for semiconductor devices |
| 03/21/2002 | US20020033521 Sapphire substrate, semiconductor device, electronic component, and crystal growing method |
| 03/21/2002 | US20020033520 Semiconductor device |
| 03/21/2002 | US20020033518 Integrated circuit resistor structure |
| 03/21/2002 | US20020033517 Non-volatile semiconductor memory device |
| 03/21/2002 | US20020033516 Shallow trench isolation type semiconductor device and method of manufacturing the same |
| 03/21/2002 | US20020033513 Semiconductor device |
| 03/21/2002 | US20020033512 Transistor structures, methods of forming transistor structures, and methods of forming insulative material against conductive structures |
| 03/21/2002 | US20020033511 Advanced CMOS using super steep retrograde wells |
| 03/21/2002 | US20020033509 Semiconductor device and manufacturing method of the same |
| 03/21/2002 | US20020033508 Semiconductor device and method for fabricating the same |
| 03/21/2002 | US20020033506 Overvoltage protector having same gate thickness as the protector integrated circuit |
| 03/21/2002 | US20020033505 Semiconductor integrated circuit device and method of manufacturing the same |
| 03/21/2002 | US20020033504 Si-MOS high-frequency semiconductor device and the manufacturing method of the same |
| 03/21/2002 | US20020033503 Electrode resistance improved MOSFET with source and drain regions reduced in size beyond lithography limit and method for making the same |
| 03/21/2002 | US20020033502 Low voltage flash memory and method for manufacturing same |
| 03/21/2002 | US20020033501 Nonvolatile semiconductor memory and method of fabricating the same |
| 03/21/2002 | US20020033500 Surrounding-gate flash memory having a self-aligned control gate |
| 03/21/2002 | US20020033499 Nonvolatile memory cell with high programming efficiency |
| 03/21/2002 | US20020033498 Thermal processing of metal alloys for an improved CMP process in integrated circuit fabrication |
| 03/21/2002 | US20020033497 Haze-free BST films |
| 03/21/2002 | US20020033496 Semiconductor device and fabrication method of the same |
| 03/21/2002 | US20020033495 Semiconductor memory device and method for manufacturing the same |
| 03/21/2002 | US20020033494 Semiconductor memory device and method of fabricating the same |
| 03/21/2002 | US20020033493 Semiconductor storage device and its manufacturing method |
| 03/21/2002 | US20020033490 Semiconductor processing methods of forming contact openings, methods of forming memory circuitry, methods of forming electrical connections, and methods of forming dynamic random access memory (DRAM) circuitry |