| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/27/2002 | EP1190607A1 Integrated circuits with copper metallization for interconnections |
| 03/27/2002 | EP1190604A1 Apparatus for plasma treatment using capillary electrode discharge plasma shower |
| 03/27/2002 | EP1190487A1 High voltage protection circuit on standard cmos process |
| 03/27/2002 | EP1190455A2 Dual cmp pad conditioner |
| 03/27/2002 | EP1190454A1 Method for making a semiconductor device comprising a stack alternately consisting of silicon layers and dielectric material layers |
| 03/27/2002 | EP1190452A1 InGaAsN/GaAs QUANTUM WELL DEVICES |
| 03/27/2002 | EP1190451A1 Multi-bit trench capacitor |
| 03/27/2002 | EP1190450A2 Electrostatic discharge protection of integrated circuits |
| 03/27/2002 | EP1190449A1 Interposer and method of making same |
| 03/27/2002 | EP1190448A1 Chip package with molded underfill |
| 03/27/2002 | EP1190446A1 Component and method for the production thereof |
| 03/27/2002 | EP1190445A1 Method for manufacturing nanostructured thin film electrodes |
| 03/27/2002 | EP1190444A2 Removal of silicon oxynitride material using a wet chemical process after gate etch processing |
| 03/27/2002 | EP1190443A1 Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features |
| 03/27/2002 | EP1190442A2 Semiconductor device manufacturing using low energy high tilt angle ion implantation |
| 03/27/2002 | EP1190441A1 Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing |
| 03/27/2002 | EP1190440A1 Fluid delivery stabilization for wafer preparation systems |
| 03/27/2002 | EP1190437A1 Plasma processing system, apparatus, and method for delivering rf power to a plasma processing chamber |
| 03/27/2002 | EP1190436A1 Plasma processor with coil responsive to variable amplitude rf envelope |
| 03/27/2002 | EP1190435A1 A plasma reaction chamber component having improved temperature uniformity |
| 03/27/2002 | EP1190434A1 Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography |
| 03/27/2002 | EP1190422A1 Nanoporous material fabricated using a dissolvable reagent |
| 03/27/2002 | EP1190390A1 Two-dimensional scatter plot technique for defect inspection |
| 03/27/2002 | EP1190322A2 Semiconductor parallel tester |
| 03/27/2002 | EP1190285A1 Method and device for conditioning atmosphere in a process chamber |
| 03/27/2002 | EP1190277A1 Spin-on-glass anti-reflective coatings for photolithography |
| 03/27/2002 | EP1190276A2 Coatings on reflective mask substrates |
| 03/27/2002 | EP1190238A1 Method of and apparatus for inspection of articles by comparison with a master |
| 03/27/2002 | EP1190209A1 Method and device for measuring the thickness of a layer |
| 03/27/2002 | EP1190122A1 Method and apparatus for epitaxially growing a material on a substrate |
| 03/27/2002 | EP1190121A1 Truncated susceptor for vapor-phase deposition |
| 03/27/2002 | EP1190006A1 Slurry composition and method of chemical mechanical polishing using same |
| 03/27/2002 | EP1190005A1 Magnetic polishing fluids |
| 03/27/2002 | EP1189730A1 Abrasive processing apparatus and method employing encoded abrasive product |
| 03/27/2002 | EP1189729A1 Method of modifying a surface of a structured wafer |
| 03/27/2002 | EP1189722A1 Efficient energy transfer capillary |
| 03/27/2002 | EP1189710A1 High rpm megasonic cleaning |
| 03/27/2002 | EP1189706A1 Method and apparatus for metal oxide chemical vapor deposition on a substrate surface |
| 03/27/2002 | EP1189676A1 Organic acid scrubber & methods |
| 03/27/2002 | EP1106040B1 Method for producing interconnections with electrically conductive cross connections between the top and the bottom part of a substrate and interconnections having such cross connections |
| 03/27/2002 | EP1027355B1 Alcohol-based processors for producing nanoporous silica thin films |
| 03/27/2002 | EP0986777B1 Lithography system |
| 03/27/2002 | EP0857150B1 300 mm microenvironment pod with door on side and grounding electrical path |
| 03/27/2002 | EP0778838B1 Formation of a metalorganic compound for growing epitaxial metal or semiconductor layers |
| 03/27/2002 | EP0770265B1 Method of forming doped bst layers and integrated circuit capacitors comprising magnesium doped bst layers |
| 03/27/2002 | EP0769206B1 Thin films of abo3 with excess a-site and b-site modifiers and method of fabricating integrated circuits with same |
| 03/27/2002 | CN2483835Y Register parts of holding unit of sequencer used for IC measurement |
| 03/27/2002 | CN1342332A Trench DMOS transistor structure having low resistance path to drain contact located on upper surface |
| 03/27/2002 | CN1342331A Method for forming co-axial interconnect lines in CMOS process |
| 03/27/2002 | CN1342330A Method for forming co-axial interconnect in CMOS process |
| 03/27/2002 | CN1342329A Method of forming dual gate oxide layers of varying thickness on single substrate |
| 03/27/2002 | CN1342328A Dielectric films from organohydridosiloxane resins |
| 03/27/2002 | CN1342327A Pressure equalization system for chemical vapor deposition reactors |
| 03/27/2002 | CN1342318A IC test software system for mapping logical functional data of logic integrated circuits to physical representation |
| 03/27/2002 | CN1342220A Electrodeposition of metals in small recesses using modulated electric fields |
| 03/27/2002 | CN1342217A Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas |
| 03/27/2002 | CN1342214A Distributed control system architecture and method for material transport system |
| 03/27/2002 | CN1342213A Processing chamber for atomic layer deposition processes |
| 03/27/2002 | CN1342212A Wafer processing reactor having gas flow control system and method |
| 03/27/2002 | CN1342041A Electronic device of sealed electronic element and manufacturing method and printed wiring board |
| 03/27/2002 | CN1342037A Protecting circuit device using metal oxide semiconductor field effect transistor and its manufacturing method |
| 03/27/2002 | CN1342035A Circuit device and its manufacturing method |
| 03/27/2002 | CN1341968A 半导体集成电路装置及其制造方法 The semiconductor integrated circuit device and manufacturing method thereof |
| 03/27/2002 | CN1341967A 集成电路装置 The integrated circuit device |
| 03/27/2002 | CN1341964A Integrated electromagnetic shield device |
| 03/27/2002 | CN1341963A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof |
| 03/27/2002 | CN1341962A Semiconductor device and manufactoring method thereof |
| 03/27/2002 | CN1341961A Method for manufacturing semiconductor integrated circuit device |
| 03/27/2002 | CN1341960A Method for manufacturing conductive connecting wire |
| 03/27/2002 | CN1341959A Semiconductor baseplate carrier and its production method |
| 03/27/2002 | CN1341958A Chip pickup device and method for manufacturing semiconductor |
| 03/27/2002 | CN1341957A Method for growing silicon oxide thick film by adopting TEOS source PECVD |
| 03/27/2002 | CN1341956A Method for manufacturing field effect transistor |
| 03/27/2002 | CN1341955A Production process of polycrystalline silicon metal gate by using nitriding process |
| 03/27/2002 | CN1341954A Method for manufacturing crystal semiconductor material and method for making semiconductor device |
| 03/27/2002 | CN1341869A Control signal part and liquid crystal display containing said control signal part |
| 03/27/2002 | CN1341772A Production method of composite vapor phase deposit membrane, its used material and its production method |
| 03/27/2002 | CN1341547A Self-assembly method of potential-controlled DNA on electrode surface |
| 03/27/2002 | CN1341543A 芯片元件进给器 Chip component feeder |
| 03/27/2002 | CN1081832C Method for fabricating metal oxide semiconductor field effect transistor |
| 03/27/2002 | CN1081826C Non-volatile semiconductor store and data programing method |
| 03/27/2002 | CN1081825C 半导体集成电路器件 The semiconductor integrated circuit device |
| 03/27/2002 | CN1081804C Phase shift mask and method for fabricating the same |
| 03/27/2002 | CN1081683C Epitaxial reactor |
| 03/27/2002 | CN1081510C 改进的磨削和抛光机床 Improved grinding and polishing machine |
| 03/26/2002 | US6363500 Device and method for outputting positional information for LSI cells and recording medium for positional information output program for LSI cells |
| 03/26/2002 | US6363382 Data classification method and data management method, database and data storage medium based on that data classification method |
| 03/26/2002 | US6363329 Method in an integrated circuit (IC) manufacturing process for identifying and redirecting IC's mis-processed during their manufacture |
| 03/26/2002 | US6363296 System and method for automated defect inspection of photomasks |
| 03/26/2002 | US6363294 Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision |
| 03/26/2002 | US6363293 Video wire bonded system and method of operation |
| 03/26/2002 | US6363168 Measurement position determination on a semiconductor wafer |
| 03/26/2002 | US6363167 Method for measuring size of fine pattern |
| 03/26/2002 | US6363166 Automated photomask inspection apparatus |
| 03/26/2002 | US6363006 Asymmetric RAM cell |
| 03/26/2002 | US6363004 Nonvolatile ferroelectric memory having shunt lines |
| 03/26/2002 | US6363003 Ferroelectric memory device |
| 03/26/2002 | US6363000 Write circuit for large MRAM arrays |
| 03/26/2002 | US6362999 Semiconductor device including a repetitive pattern |
| 03/26/2002 | US6362946 Electrostatic wafer clamp having electrostatic seal for retaining gas |