| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/26/2002 | US6362048 Method of manufacturing floating gate of flash memory |
| 03/26/2002 | US6362047 Method of manufacturing EEPROM memory points |
| 03/26/2002 | US6362046 Semiconductor device allowing electrical writing and erasing of information and method of manufacturing the same |
| 03/26/2002 | US6362045 Tunneling dielectric layer is grown on semiconductor substrate, polysilicon layer is deposited, nitrogen is implanted; patterning to form floating gates, depositing silicon oxide nitride layers; depositing conductive layer |
| 03/26/2002 | US6362044 Removing a spontaneous oxidation film adhering to an amorphous silicon surface of a semiconductor substrate, heating amorphous silicon, spraying silane to form an amorphous silicon/polysicon mixed-phase active layer; annelaing |
| 03/26/2002 | US6362043 Method for coupling to semiconductor device in an integrated circuit having edge-defined, sub-lithographic conductors |
| 03/26/2002 | US6362042 DRAM having a cup-shaped storage node electrode recessed within an insulating layer |
| 03/26/2002 | US6362041 Method and structure for stacked DRAM capacitors and FETs for embedded DRAM circuits |
| 03/26/2002 | US6362040 Reduction of orientation dependent oxidation for vertical sidewalls of semiconductor substrates |
| 03/26/2002 | US6362039 Self-aligned resistor and local interconnect |
| 03/26/2002 | US6362038 Low and high voltage CMOS devices and process for fabricating same |
| 03/26/2002 | US6362037 Semiconductor device and method of fabricating same |
| 03/26/2002 | US6362036 VDMOS transistor protected against over-voltages between source and gate |
| 03/26/2002 | US6362035 Channel stop ion implantation method for CMOS integrated circuits |
| 03/26/2002 | US6362034 Method of forming MOSFET gate electrodes having reduced depletion region growth sensitivity to applied electric field |
| 03/26/2002 | US6362033 Self-aligned LDD formation with one-step implantation for transistor formation |
| 03/26/2002 | US6362032 Method for manufacturing fringe field switching mode liquid crystal display |
| 03/26/2002 | US6362031 Semiconductor TFT, producing method thereof, semiconductor TFT array substrate and liquid crystal display using the same |
| 03/26/2002 | US6362027 Semiconductor device, active matrix substrate, method of manufacturing the semiconductor device and method of manufacturing the active matrix substrate |
| 03/26/2002 | US6362026 Edge termination for silicon power devices |
| 03/26/2002 | US6362025 Method of manufacturing a vertical-channel MOSFET |
| 03/26/2002 | US6362024 Semiconductor memory device manufacturing method with fuse cutting performance improved |
| 03/26/2002 | US6362021 Silicon thin-film, integrated solar cell, module, and methods of manufacturing the same |
| 03/26/2002 | US6362014 Bonding apparatus |
| 03/26/2002 | US6362013 Semiconductor inspection apparatus and method of specifying attributes of dies on wafer in semiconductor inspection apparatus |
| 03/26/2002 | US6362012 Base layer of dielectric is deposited over the surface of a semiconductor substrate, dielectric is deposited over the surface of substrate, contact plugs are provided, multiple layers of dielectric are deposited; vias are provided |
| 03/26/2002 | US6361927 Coating an sog solution on a glass substrate by spin coating method; heat-treating sog thin film to form silicon oxide layer; coating photoresist layer, exposure; developing exposed photoresist layer and wet etching silicon oxide layer |
| 03/26/2002 | US6361912 Electrostatic printing of a metallic toner applied to solid phase crystallization and silicidation |
| 03/26/2002 | US6361907 Exposing method in which different kinds of aligning and exposing apparatuses are used |
| 03/26/2002 | US6361903 Method for predicting pattern width on semiconductor wafer and method for correcting mask pattern therethrough |
| 03/26/2002 | US6361880 CVD/PVD/CVD/PVD fill process |
| 03/26/2002 | US6361874 Manufacture of integrated circuits |
| 03/26/2002 | US6361857 Heat exchangers with substrates, sintering compacts of copper and tungsten, thin diamond film layer on substrate with copper and x-ray diffraction |
| 03/26/2002 | US6361837 Film on semiconductor substrates |
| 03/26/2002 | US6361834 Resist film baking method |
| 03/26/2002 | US6361831 Paste application method for die bonding |
| 03/26/2002 | US6361820 Dielectric films from organohydridosiloxane resins with high organic content |
| 03/26/2002 | US6361712 Comprised of water, hydroxylammonium salt, carboxylic acid, fluorine-containing compounds, and base; removes residues left after chemical-mechanical polishing and etching |
| 03/26/2002 | US6361708 Method and apparatus for polishing a metal film |
| 03/26/2002 | US6361707 Apparatus and methods for upgraded substrate processing system with microwave plasma source |
| 03/26/2002 | US6361706 Abatement using water vapor; improved safety; reduced perfluorocarbon emissions |
| 03/26/2002 | US6361705 Plasma process for selectively etching oxide using fluoropropane or fluoropropylene |
| 03/26/2002 | US6361704 Self stop aluminum pad for copper process |
| 03/26/2002 | US6361675 Method of manufacturing a semiconductor component and plating tool therefor |
| 03/26/2002 | US6361669 Apparatus and method for plating wafers, substrates and other articles |
| 03/26/2002 | US6361668 Sputtering installation with two longitudinally placed magnetrons |
| 03/26/2002 | US6361667 Ionization sputtering apparatus |
| 03/26/2002 | US6361662 Method for fabricating a semiconductor device in a magnetron sputtering system |
| 03/26/2002 | US6361648 Wafer transfer station for a chemical mechanical polisher |
| 03/26/2002 | US6361647 Method and apparatus for chemical mechanical polishing |
| 03/26/2002 | US6361646 Method and apparatus for endpoint detection for chemical mechanical polishing |
| 03/26/2002 | US6361645 Method and device for compensating wafer bias in a plasma processing chamber |
| 03/26/2002 | US6361644 Parallel-plate electrode reactor having an inductive antenna coupling power through a parallel plate electrode |
| 03/26/2002 | US6361627 Process of controlling grain growth in metal films |
| 03/26/2002 | US6361619 Thermally annealed wafers having improved internal gettering |
| 03/26/2002 | US6361614 Eliminates light-induced galvanic corrosion in semiconductor wafers and integrated circuit devices during cleaning and drying |
| 03/26/2002 | US6361611 Using alkaline water-based solution; forming alumina-silica |
| 03/26/2002 | US6361607 Apparatus for controlling polymerized teos build-up in vacuum pump lines |
| 03/26/2002 | US6361600 Film forming apparatus and film forming method |
| 03/26/2002 | US6361599 Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash |
| 03/26/2002 | US6361422 Method and apparatus for transferring semiconductor substrates using an input module |
| 03/26/2002 | US6361420 Method of chemical mechanical polishing with edge control |
| 03/26/2002 | US6361419 Carrier head with controllable edge pressure |
| 03/26/2002 | US6361418 Abrasive system |
| 03/26/2002 | US6361415 Employing an acidic liquid and an abrasive surface to polish a semiconductor topography |
| 03/26/2002 | US6361409 Polymeric polishing pad having improved surface layer and method of making same |
| 03/26/2002 | US6361407 Method of polishing a semiconductor wafer |
| 03/26/2002 | US6361406 Abrasion method of semiconductor device |
| 03/26/2002 | US6361404 Precision cutting apparatus and cutting method using the same |
| 03/26/2002 | US6361402 Method for planarizing photoresist |
| 03/26/2002 | US6361313 Ladder boat for supporting wafers |
| 03/26/2002 | US6361268 Frictionless transport apparatus and method |
| 03/26/2002 | US6360940 Method and apparatus for removing known good die |
| 03/26/2002 | US6360938 Process and apparatus to remove closely spaced chips on a multi-chip module |
| 03/26/2002 | US6360762 Method for feeding gases for use in semiconductor manufacturing |
| 03/26/2002 | US6360756 Wafer rinse tank for metal etching and method for using |
| 03/26/2002 | US6360754 Method of protecting quartz hardware from etching during plasma-enhanced cleaning of a semiconductor processing chamber |
| 03/26/2002 | US6360737 Annular saw and method of protecting the clamping edge and of cleaning the saw blade of an annular saw |
| 03/26/2002 | US6360687 Wafer flattening system |
| 03/26/2002 | US6360686 Plasma reactor with a deposition shield |
| 03/26/2002 | US6360685 Sub-atmospheric chemical vapor deposition system with dopant bypass |
| 03/26/2002 | US6360562 Methods for producing glass powders |
| 03/26/2002 | CA2243832C Cryogenic rectification system for recovery of fluorine compounds |
| 03/26/2002 | CA2242802C Mounting structure for one or more semiconductor devices |
| 03/26/2002 | CA2198552C Fabrication process of semiconductor substrate |
| 03/21/2002 | WO2002023964A1 Processing chamber with multi-layer brazed lid |
| 03/21/2002 | WO2002023845A2 Method for improving image quality and for increasing writing speed during exposure of light-sensitive layers |
| 03/21/2002 | WO2002023674A2 Thick film millimeter wave transceiver module |
| 03/21/2002 | WO2002023639A1 Photovoltaic component and module |
| 03/21/2002 | WO2002023636A1 Semiconductor memory cell comprising a trench capacitor and a select transistor and a method for the production thereof |
| 03/21/2002 | WO2002023635A1 Ferroelectric memory device and its manufacturing method, and hybrid device |
| 03/21/2002 | WO2002023631A2 Direct build-up layer on an encapsulated die package having a moisture barrier structure |
| 03/21/2002 | WO2002023630A2 Micromachined silicon block vias for transferring electrical signals to the backside of a silicon wafer |
| 03/21/2002 | WO2002023629A2 Electronic device manufacture |
| 03/21/2002 | WO2002023627A1 Semiconductor interconnection structure and method of fabrication |
| 03/21/2002 | WO2002023626A1 Improved semiconductor structure and method of fabrication |
| 03/21/2002 | WO2002023625A2 Semiconductor device and fabrication method therefor |
| 03/21/2002 | WO2002023624A2 Field effect transistor and method of fabrication |
| 03/21/2002 | WO2002023623A1 Alignment apparatus |
| 03/21/2002 | WO2002023621A2 Method and apparatus for fast automated failure classification for semiconductor wafers |