| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/03/2002 | EP1194029A1 Component mounting apparatus and method therefor |
| 04/03/2002 | EP1194022A1 Multilayer printed wiring board and method of manufacturing multilayer printed wiring board |
| 04/03/2002 | EP1193778A2 Magnetization reversal methods for magnetic film, magnetoresistive films, and magnetic memories using them |
| 04/03/2002 | EP1193769A2 Method to reduce variation in LDD series resistance |
| 04/03/2002 | EP1193767A2 Insulated gate bipolar transistor and method of making the same |
| 04/03/2002 | EP1193765A2 Power semiconductor device |
| 04/03/2002 | EP1193764A1 Integrated photodetector |
| 04/03/2002 | EP1193763A2 Semiconductor memory device and method for fabricating the same |
| 04/03/2002 | EP1193762A2 Semiconductor device and its manufacturing method |
| 04/03/2002 | EP1193761A2 Semiconductor device including intermediate wiring element |
| 04/03/2002 | EP1193760A2 Semiconductor device with SOI structure and method of manufacturing the same |
| 04/03/2002 | EP1193758A1 Anti-deciphering contacts |
| 04/03/2002 | EP1193757A2 Conductive metal particles, conductive composite metal particles and applied products using the same |
| 04/03/2002 | EP1193754A2 Semiconductor device and method of producing the same |
| 04/03/2002 | EP1193753A2 A method of forming dual thickness gate dielectric structures via use of silicon nitride layers |
| 04/03/2002 | EP1193752A1 Method to form a localized silicon-on-insulator structure |
| 04/03/2002 | EP1193751A1 Electrode, wafer stage, plasma device, method of manufacturing electrode and wafer stage |
| 04/03/2002 | EP1193750A2 Micro soldering method and apparatus |
| 04/03/2002 | EP1193749A2 SOI annealing method and SOI manufacturing method |
| 04/03/2002 | EP1193748A1 Silicon oxidation method for reduction of the charge trap concentration at the silicon-oxide interface |
| 04/03/2002 | EP1193747A2 Process for patterning a substrate |
| 04/03/2002 | EP1193745A1 Polishing composite for use in lsi manufacture and method of manufacturing lsi |
| 04/03/2002 | EP1193744A1 Reinforcement material for silicon wafer and method of manufacturing ic chip using the reinforcement material |
| 04/03/2002 | EP1193743A1 Formation of interfacial oxide layer at the SI3N4/SI interface by H2/O2 annealing |
| 04/03/2002 | EP1193742A2 Method for fabricating integrated circuits, corresponding circuits, particularly tunnel contacts |
| 04/03/2002 | EP1193741A2 Semiconductor device having thin film transistor for supplying current to driven element |
| 04/03/2002 | EP1193740A2 Soi substrate annealing method and soi substrate |
| 04/03/2002 | EP1193739A2 SOI annealing method and SOI manufacturing method |
| 04/03/2002 | EP1193738A2 Method and apparatus for manufacturing chips |
| 04/03/2002 | EP1193737A1 Method for transporting wafers |
| 04/03/2002 | EP1193736A1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
| 04/03/2002 | EP1193709A2 Optical disc, recording apparatus, and computer-readable recording medium |
| 04/03/2002 | EP1193708A2 Optical disc, recording apparatus, and computer-readable recording medium |
| 04/03/2002 | EP1193707A2 Optical disc, recording apparatus, and computer-readable recording medium |
| 04/03/2002 | EP1193706A2 Optical disc, recording apparatus, and computer-readable recording medium |
| 04/03/2002 | EP1193676A2 Thin film transistor for supplying power to an electroluminescent element |
| 04/03/2002 | EP1193598A1 Integrated memory with magnetoresistive memory cells |
| 04/03/2002 | EP1193555A1 Negative resist composition |
| 04/03/2002 | EP1193553A2 Exposure method, exposure apparatus, x-ray mask, semiconductor device and microstructure |
| 04/03/2002 | EP1193552A2 Process for establishing mask lay-out data for simulating a lithographic process and for defining an optimized mask lay-out data; corresponding equipment and programs |
| 04/03/2002 | EP1193493A1 Method and apparatus for measuring and controlling the water content of a water containing liquid mixture |
| 04/03/2002 | EP1193331A2 Chemical vapor deposition apparatus and chemical vapor deposition method |
| 04/03/2002 | EP1193330A2 Plating apparatus and plating method for substrate |
| 04/03/2002 | EP1193326A2 Apparatus for reducing particle residues in a semiconductor processing chamber |
| 04/03/2002 | EP1193325A1 Process and apparatus for forming semiconductor thin film |
| 04/03/2002 | EP1193309A1 Solvent blend for use in high purity precursor removal |
| 04/03/2002 | EP1193233A1 Ceramic substrate for semiconductor production/inspection device |
| 04/03/2002 | EP1193032A2 Polishing apparatus and polishing method |
| 04/03/2002 | EP1193031A1 Arrangement for polishing disk-like objects |
| 04/03/2002 | EP1192703A1 Charge pump circuit |
| 04/03/2002 | EP1192674A1 Universal tool interface and/or workpiece transfer apparatus for smif and open pod applications |
| 04/03/2002 | EP1192666A1 Memory cell arrangement |
| 04/03/2002 | EP1192665A1 Heterojunction iii-v transistor, in particular hemt field effect transistor or heterojunction bipolar transistor |
| 04/03/2002 | EP1192664A1 A semiconductor element |
| 04/03/2002 | EP1192661A1 Soi dram without floating body effect |
| 04/03/2002 | EP1192659A1 Multichip module and method for producing a multichip module |
| 04/03/2002 | EP1192657A1 Method of subdividing a wafer |
| 04/03/2002 | EP1192656A1 Method of protecting an underlying wiring layer during dual damascene processing |
| 04/03/2002 | EP1192655A2 Method for eliminating stress induced dislocation in cmos devices |
| 04/03/2002 | EP1192654A1 Electrical-mechanical connection between electronic circuit systems and substrates and method for the production thereof |
| 04/03/2002 | EP1192653A1 Method for lateral etching with holes for making semiconductor devices |
| 04/03/2002 | EP1192652A1 Method of producing a non-volatile semiconductor memory cell with a separate tunnel window |
| 04/03/2002 | EP1192651A1 Collector-up rf power transistor |
| 04/03/2002 | EP1192650A2 A method for the preparation of an epitaxial silicon wafer with intrinsic gettering |
| 04/03/2002 | EP1192649A1 Method for producing siliconized polysilicon contacts in integrated semiconductor structures |
| 04/03/2002 | EP1192648A2 Metal oxide thin films for high dielectric constant applications |
| 04/03/2002 | EP1192647A1 Oxidation of silicon on germanium |
| 04/03/2002 | EP1192646A1 Cyclic thermal anneal for dislocation reduction |
| 04/03/2002 | EP1192645A2 Atmospheric wafer transfer module with nest for wafer transport robot and method of implementing same |
| 04/03/2002 | EP1192644A1 Method for separating two elements and device therefor |
| 04/03/2002 | EP1192643A1 Method for validating pre-process adjustments to a wafer cleaning system |
| 04/03/2002 | EP1192642A1 Spin, rinse, and dry station with adjustable nozzle assembly for semiconductor wafer backside rinsing |
| 04/03/2002 | EP1192641A2 System for manufacturing semiconductor products |
| 04/03/2002 | EP1192640A2 Power mosfet and method of making the same |
| 04/03/2002 | EP1192593A1 Device and method for making devices comprising at least a chip mounted on a support |
| 04/03/2002 | EP1192592A1 Device and method for making devices comprising at least a chip fixed on a support |
| 04/03/2002 | EP1192590A1 Method for producing a contactless card |
| 04/03/2002 | EP1192506A1 Photoresist removal process using forming gas plasma |
| 04/03/2002 | EP1192453A1 Molecular and atomic scale evaluation of biopolymers |
| 04/03/2002 | EP1192444A1 Apparatus and method for determining the active dopant profile in a semiconductor wafer |
| 04/03/2002 | EP1192433A1 Apparatus and method for evaluating a target larger than a measuring aperture of a sensor |
| 04/03/2002 | EP1192426A1 Pressure insensitive gas control system |
| 04/03/2002 | EP1192421A1 A non-invasive system and method for diagnosing potential malfunctions of semiconductor equipment components |
| 04/03/2002 | EP1192419A1 Integrated and multi-axis sensor assembly and packaging |
| 04/03/2002 | EP1192410A1 Helium-neon laser light source generating two harmonically related, single-frequency wavelengths for use in displacement and dispersion measuring interferometry |
| 04/03/2002 | EP1192299A1 Doping of crystalline substrates |
| 04/03/2002 | EP1192293A1 CVD OF INTEGRATED Ta AND TaNx FILMS FROM TANTALUM HALIDE PRECURSORS |
| 04/03/2002 | EP1192292A1 Plasma treatment of thermal cvd tan films from tantalum halide precursors |
| 04/03/2002 | EP1192291A1 Device for monitoring intended or unavoidable layer deposits and corresponding method |
| 04/03/2002 | EP1192103A1 Control of solid state dimensional features |
| 04/03/2002 | EP1042529B1 Method for selectively depositing bismuth based ferroelectric films |
| 04/03/2002 | EP1038225B1 Parallel test method |
| 04/03/2002 | EP1029369A4 Process for fabricating organic semiconductor devices using ink-jet printing technology and device and system employing same |
| 04/03/2002 | EP1007767B1 Method for producing a filter |
| 04/03/2002 | EP0995235B1 Contact for very small liaison contacts and method for producing a contact |
| 04/03/2002 | EP0947047B1 Method of and apparatus for matching a load to a source |
| 04/03/2002 | EP0835275B1 Improved poly(arylene ether) compositions and the method for their manufacture |
| 04/03/2002 | CN2484139Y Autoamtic-manual two-purpose wire shearing machine |
| 04/03/2002 | CN1343376A Doting pastes for producing p,p+ and n, n+zones in semiconductors |
| 04/03/2002 | CN1343374A High speed ge channel heterostructures for field effect devices |