| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/11/2002 | US20020042196 Method of manufacturing a semiconductor device using anti-reflective layer and self-aligned contact technique and semiconductor device manufactured thereby |
| 04/11/2002 | US20020042195 Electrostatic discharge-protection semiconductor device |
| 04/11/2002 | US20020042194 Multilayer structure; one step masking |
| 04/11/2002 | US20020042193 Fabrication method of semiconductor integrated circuit device |
| 04/11/2002 | US20020042192 Shower head, substrate treatment apparatus and substrate manufacturing method |
| 04/11/2002 | US20020042191 Chemical vapor deposition apparatus and chemical vapor deposition method |
| 04/11/2002 | US20020042190 Method and apparatus for diffusion of an impurity into a semiconductor wafer with high in-plane diffusion uniformity |
| 04/11/2002 | US20020042189 Manufacturing method of semiconductor chip with adhesive agent |
| 04/11/2002 | US20020042188 Semiconductor raised source-drain structure |
| 04/11/2002 | US20020042186 Method of filling gaps on a semiconductor wafer |
| 04/11/2002 | US20020042185 Stability; ferroelectric film |
| 04/11/2002 | US20020042184 Reduction in well implant channeling and resulting latchup characteristics in shallow trench ilolation by implanting wells through nitride |
| 04/11/2002 | US20020042183 Two-step MOSFET gate formation for high-density devices |
| 04/11/2002 | US20020042182 Ultra-late programming ROM and method of manufacture |
| 04/11/2002 | US20020042181 Alternating zones of dielectric and electroconductivity; uniform thickness |
| 04/11/2002 | US20020042180 Nonvolatile memory structures and fabrication methods |
| 04/11/2002 | US20020042179 Techniques for improving adhesion of silicon dioxide to titanium |
| 04/11/2002 | US20020042178 Single crystal silicon substrate; carbon doping; annealing |
| 04/11/2002 | US20020042177 Arsenic and phosphorus doping |
| 04/11/2002 | US20020042173 Process of manufacturing semiconductor device |
| 04/11/2002 | US20020042172 Semiconductor integrated circuit device and the process of the same |
| 04/11/2002 | US20020042171 Electro-optical device and thin film transistor and method for forming the same |
| 04/11/2002 | US20020042170 Semiconductor device and process for producing same |
| 04/11/2002 | US20020042169 SOI substrate, a semiconductor circuit formed in a SOI substrate, and an associated production method |
| 04/11/2002 | US20020042168 Heating, crystallization, oxidation |
| 04/11/2002 | US20020042167 Thin film transistor array substrate for liquid crystal display device and method of manufacturing the same |
| 04/11/2002 | US20020042166 Use of a thin nitride spacer in a split gate embedded analog process |
| 04/11/2002 | US20020042165 Process for producing oxide thin films |
| 04/11/2002 | US20020042164 Electronic device assembly and a method of connecting electronic devices constituting the same |
| 04/11/2002 | US20020042161 Chip component assembly manufacturing method |
| 04/11/2002 | US20020042154 Forming dielectrics; polishing; etching with hydrofluoric acid |
| 04/11/2002 | US20020042029 Method for fabricating a resist pattern, a method for patterning a thin film and a method for manufacturing a micro device |
| 04/11/2002 | US20020042028 Overcoating with polymethylglutarimide; forming photoresists; exposure; development |
| 04/11/2002 | US20020042018 Positive chemically amplified resist and method for forming its pattern |
| 04/11/2002 | US20020042016 Improved dry etching resistance, adhesiveness to underlying material layers, line edge roughness of line patterns, contrast characteristics |
| 04/11/2002 | US20020042009 Configuring charged particle beam to have within projected subfield at projected-image plane distribution and cutoff half-angles such that at maximum lateral deflection of beam blur is held to no greater than threshold values |
| 04/11/2002 | US20020042007 Fabrication method of semiconductor integrated circuit device |
| 04/11/2002 | US20020042006 Scattering-reticle assemblies for electron-beam microlithography including a scattering-stencil reticle portion and a scattering-membrane reticle portion |
| 04/11/2002 | US20020042005 Technique of exposing a resist using electron beams having different accelerating voltages, and method of manufacturing a photomask using the technique |
| 04/11/2002 | US20020041983 Structural body and method of producing the same |
| 04/11/2002 | US20020041970 Dielectric layer including silicalite crystals and binder and method for producing same for microelectronic circuits |
| 04/11/2002 | US20020041953 Fill material for dual damascene processes |
| 04/11/2002 | US20020041935 Coating unit and coating method |
| 04/11/2002 | US20020041911 Resin encapsulation mold |
| 04/11/2002 | US20020041620 Thermal process apparatus for a semiconductor substrate |
| 04/11/2002 | US20020041533 Fuse circuit using anti-fuse and method for searching for failed address in semiconductor memory |
| 04/11/2002 | US20020041530 Semiconductor memory device having driver circuit which supplies temporary accelerated charge |
| 04/11/2002 | US20020041528 Semiconductor integrated circuit device and control method therefor |
| 04/11/2002 | US20020041526 Nonvolatile semiconductor memory device, process of manufacturing the same and method of operating the same |
| 04/11/2002 | US20020041515 Magnetization reversal methods for magnetic film, magnetoresistive films, and magnetic memories using them |
| 04/11/2002 | US20020041514 Memory cell configuration and method for its production |
| 04/11/2002 | US20020041513 Variable capacitor and memory device employing the same |
| 04/11/2002 | US20020041510 Semiconductor storage device |
| 04/11/2002 | US20020041444 Device for converting the intensity distribution of a laser beam and a device and method for generating a laser beam with an intensity which falls constantly along an axis from one side of the beam to the other |
| 04/11/2002 | US20020041380 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 04/11/2002 | US20020041373 Determination of center of focus by diffraction signature analysis |
| 04/11/2002 | US20020041367 Position detection apparatus having a plurality of detection sections, and exposure apparatus |
| 04/11/2002 | US20020041242 Semiconductor apparatus |
| 04/11/2002 | US20020041189 Vertical probe card |
| 04/11/2002 | US20020041178 Data processing system |
| 04/11/2002 | US20020041148 White LED and method for fabricating the same |
| 04/11/2002 | US20020041102 Robotic end effector for semiconductor wafer processing |
| 04/11/2002 | US20020041066 Wafer loading system positioning method and device |
| 04/11/2002 | US20020041039 Semiconductor device without use of chip carrier and method for making the same |
| 04/11/2002 | US20020041037 Semiconductor device and process of producing same |
| 04/11/2002 | US20020041036 Microelectronic assemblies with composite conductive elements |
| 04/11/2002 | US20020041035 Semiconductor device fabrication method for interconnects that suppresses loss of interconnect metal |
| 04/11/2002 | US20020041031 Silicon nitride film, semiconductor device, and method for fabricating semiconductor device |
| 04/11/2002 | US20020041030 Semiconductor device for suppressing detachment of conductive layer and method for manufacturing the semiconductor device |
| 04/11/2002 | US20020041029 Semiconductor structure including metal nitride and metal silicide |
| 04/11/2002 | US20020041028 Method for forming damascene interconnection of semiconductor device and damascene interconnection fabricated thereby |
| 04/11/2002 | US20020041027 Semiconductor device |
| 04/11/2002 | US20020041025 Semiconductor device and method of manufacturing the same |
| 04/11/2002 | US20020041024 Boat and assembly method for ball grid array packages |
| 04/11/2002 | US20020041023 Semiconductor device, semiconductor module and hard disk |
| 04/11/2002 | US20020041022 Radiation substrate and semiconductor module |
| 04/11/2002 | US20020041021 Semiconductor device, semiconductor module and hard disk |
| 04/11/2002 | US20020041019 Semiconductor package having implantable conductive lands and method for manufacturing the same |
| 04/11/2002 | US20020041015 Semiconductor chip, semiconductor device, methods of fabricating thereof, circuit board and electronic device |
| 04/11/2002 | US20020041013 Semiconductor device |
| 04/11/2002 | US20020041012 Semiconductor device, semiconductor module and hard disk |
| 04/11/2002 | US20020041008 Bipolar junction transistor |
| 04/11/2002 | US20020041005 Semiconductor device having capacitance element and method of producing the same |
| 04/11/2002 | US20020041004 Monolithically integrable inductor |
| 04/11/2002 | US20020041003 Semiconductor device and method of forming a semiconductor device |
| 04/11/2002 | US20020041002 Semiconductor raised source-drain structure |
| 04/11/2002 | US20020041001 Semiconductor raised source-drain structure |
| 04/11/2002 | US20020041000 Semiconductor device and method of manufacturing the same |
| 04/11/2002 | US20020040999 Semiconductor device and method for fabricating the same |
| 04/11/2002 | US20020040998 SOI semiconductor device capable of preventing floating body effect |
| 04/11/2002 | US20020040997 Semiconductor device |
| 04/11/2002 | US20020040996 Protection diode for improved ruggedness of a radio frequency power transistor and self-defining method to manufacture such protection diode |
| 04/11/2002 | US20020040994 Semiconductor device having trenches and process for same |
| 04/11/2002 | US20020040993 Method for manufacturing electronic devices having non-volatile memory cells and LV transistors with salicided junctions |
| 04/11/2002 | US20020040992 Nonvolatile semiconductor memory |
| 04/11/2002 | US20020040990 Nonvolatile semiconductor memory device and nonvolatile semiconductor memory system |
| 04/11/2002 | US20020040988 Semiconductor device and method for the manufacture thereof |
| 04/11/2002 | US20020040987 Semiconductor device |
| 04/11/2002 | US20020040986 Semiconductor device having a dummy pattern |
| 04/11/2002 | US20020040985 Base cell layout permitting rapid layout with minimum clock line capacitance on CMOS standard-cell and gate-array integrated circuits |