| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 03/28/2002 | US20020037604 Lead frame, semiconductor package having lead frame, and method of manufacturing semiconductor package |
| 03/28/2002 | US20020037603 Microelectronic device package with conductive elements and associated method of manufacture |
| 03/28/2002 | US20020037599 Semiconductor substrate, method of manufacturing the semiconductor substrate, semiconductor device and pattern forming method |
| 03/28/2002 | US20020037597 Apparatus and method for measuring wafer clamping tension |
| 03/28/2002 | US20020037596 Simulator of semiconductor device circuit characteristic and simulation method |
| 03/28/2002 | US20020037595 Semiconductor memory device utilizing tunnel magneto resistive effects and method for manufacturing the same |
| 03/28/2002 | US20020037481 Photochemical metal organic deposition patterning process |
| 03/28/2002 | US20020037479 Photoresist strippers containing reducing agents to reduce metal corrosion |
| 03/28/2002 | US20020037471 Resist film formed from polymer of acrylonitrile, acrylic acid and hydroxystyrene derivatives with an acid generator; excimer laser irradiated; given/specified exposure wavelength bands |
| 03/28/2002 | US20020037462 Resist pattern forming apparatus and method thereof |
| 03/28/2002 | US20020037461 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/28/2002 | US20020037460 Stage unit, measurement unit and measurement method, and exposure apparatus and exposure method |
| 03/28/2002 | US20020037459 Method of and apparatus for designing EB mask |
| 03/28/2002 | US20020037442 A dielectric material having two or more phases comprising: a first phase consisting of Silicon, Carbon, Oxygen and hydrogen, and atleast one second phase consisting of carbon and hydrogen and multiplicity of nanometer-sized pores |
| 03/28/2002 | US20020037412 Immersing a copper containing alloy substrate in acid to reduce the copper content of a surface region and roughen exposed metal at the surface, then forming a thin diamond layer by vapor deposition; good adhesion; for electronics |
| 03/28/2002 | US20020037372 For applying paste to adhere a semiconductor chip on a substrate |
| 03/28/2002 | US20020037371 Placing substrate in a processing liquid stored in a processing bath; feeding liquid different in specific gravity into the processing bath, thereby forming a first layer; causing relative movement of interface and substrate |
| 03/28/2002 | US20020037367 Film-forming method, film-forming apparatus and liquid film drying apparatus |
| 03/28/2002 | US20020037366 Dropping a coating solution containing solute and a solvent through discharge nozzle onto surface of substrate, mounted on horizontal turn table and turning substrate, soaking and holding a nozzle tip in soaking solution |
| 03/28/2002 | US20020037363 Imaging an external appearance of the resin extruded from a resin application device; and automatically adjusting an amount of the resin extruded from the resin application device based on the external appearance |
| 03/28/2002 | US20020037337 Dividing apparatus |
| 03/28/2002 | US20020037243 Ionizer |
| 03/28/2002 | US20020037233 Following extraction of the organic binder the green micromolds or micromold components are sintered to full density, upon which they shrink by accurately predetermined amounts; complex-shaped micrometer/ nanometer-sized precision |
| 03/28/2002 | US20020037232 Method for controlling the dimensions of bodies made from sinterable materials |
| 03/28/2002 | US20020037210 Substrate processing apparatus |
| 03/28/2002 | US20020037207 Apparatus for and method of transporting substrates to be processed |
| 03/28/2002 | US20020037099 Pattern inspection apparatus and pattern inspection method |
| 03/28/2002 | US20020036942 Semiconductor integrated circuit device having a hierarchical power source configuration |
| 03/28/2002 | US20020036940 Semiconductor memory device |
| 03/28/2002 | US20020036934 Ferroelectric memory device, method of manufacuring the same, and embedded device |
| 03/28/2002 | US20020036927 Semiconductor memory with nonvolatile memory cell array and semiconductor device with nonvolatile memory cell array and logic device |
| 03/28/2002 | US20020036924 Semiconductor device |
| 03/28/2002 | US20020036919 Circuit selection of magnetic memory cells and related cell structures |
| 03/28/2002 | US20020036918 Thin film magnetic memory device capable of reducing number of wires and reading data at high speed |
| 03/28/2002 | US20020036917 Nonvolatile solid-state memory devices and memory using magnetoresistive effect, and recording/reproducing method of the memory device and memory |
| 03/28/2002 | US20020036916 Integrated memory having memory cells and buffer capacitors |
| 03/28/2002 | US20020036904 Illumination system with plural light sources, and exposure apparatus having the same |
| 03/28/2002 | US20020036895 Method and system for mounting semiconductor device, semiconductor device separating system, and method for fabricating IC card |
| 03/28/2002 | US20020036881 Electrostatic chuck having composite base and method |
| 03/28/2002 | US20020036877 Magnetoresistance effect device, magnetic head, magnetic recording apparatus, and memory device |
| 03/28/2002 | US20020036777 Light receiving apparatus, mark detecting apparatus using light receiving apparatus, exposing apparatus, maintenance method of exposing apparatus, manufacturing method of semiconductor device using exposing apparatus and semiconductor manufacturing plant |
| 03/28/2002 | US20020036774 Apparatus and method for handling and testing of wafers |
| 03/28/2002 | US20020036771 Apparatus and method for inspecting surface of semiconductor wafer or the like |
| 03/28/2002 | US20020036769 Method and apparatus for inspecting defects of a specimen |
| 03/28/2002 | US20020036763 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 03/28/2002 | US20020036762 Projection exposure method and apparatus |
| 03/28/2002 | US20020036761 Apparatus and method applied to exposure by charged beam |
| 03/28/2002 | US20020036760 Exposure apparatus and device manufacturing method |
| 03/28/2002 | US20020036758 Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby |
| 03/28/2002 | US20020036746 Display panel and method of producing the same |
| 03/28/2002 | US20020036606 Matrix substrate and liquid crystal display as well as projector using the same |
| 03/28/2002 | US20020036539 Post-silicon methods for adjusting the rise/fall times of clock edges |
| 03/28/2002 | US20020036534 Manufacturing method of semiconductor device |
| 03/28/2002 | US20020036529 Semiconductor integrated circuit with reduced leakage current |
| 03/28/2002 | US20020036521 Semiconductor integrated circuit and semiconductor integrated circuit system |
| 03/28/2002 | US20020036514 Semiconductor device testing apparatus |
| 03/28/2002 | US20020036509 Semiconductor test apparatus and test method using the same |
| 03/28/2002 | US20020036508 Method of producing load for delay time calculation and recording medium |
| 03/28/2002 | US20020036505 Evaluating pattern for measuring an erosion of a semiconductor wafer polished by a chemical mechanical polishing |
| 03/28/2002 | US20020036493 Testing apparatus for semiconductor integrated circuits and a method for managing the same |
| 03/28/2002 | US20020036462 Display apparatus |
| 03/28/2002 | US20020036373 Holding apparatus for clamping a workpiece |
| 03/28/2002 | US20020036357 Semiconductor device comprising layered positional detection marks and manufacturing method thereof |
| 03/28/2002 | US20020036356 Microstructure array, mold for forming a microstructure array, and method of fabricating the same |
| 03/28/2002 | US20020036355 Semiconductor devices |
| 03/28/2002 | US20020036354 Semiconductor device |
| 03/28/2002 | US20020036353 Semiconductor device having a metal silicide layer and method for manufacturing the same |
| 03/28/2002 | US20020036352 Method for fabricating semiconductor device capable of reducing parasitic capacitance and semiconductor device thereby |
| 03/28/2002 | US20020036351 Method for reducing surface defects of semiconductor substrates |
| 03/28/2002 | US20020036350 Semiconductor device and method of manufacturing the same |
| 03/28/2002 | US20020036349 Semiconductor device and manufacturing |
| 03/28/2002 | US20020036348 Semiconductor device having multi-layered wiring structure |
| 03/28/2002 | US20020036347 Local interconnect structures and methods |
| 03/28/2002 | US20020036346 Semiconductor device having damascene interconnection structure that prevents void formation between interconnections |
| 03/28/2002 | US20020036345 High frequency flip chip module and assembling method thereof |
| 03/28/2002 | US20020036344 Semiconductor device provided with low melting point metal bumps |
| 03/28/2002 | US20020036343 Semiconductor fabrication device and method for preventing the attachment of extraneous particles |
| 03/28/2002 | US20020036337 Semiconductor device and fabricating method therefor |
| 03/28/2002 | US20020036336 High K dielectric de-coupling capacitor embedded in backend interconnect |
| 03/28/2002 | US20020036335 Spiral inductor and method for fabricating semiconductor integrated circuit device having same |
| 03/28/2002 | US20020036333 High-gain pnp bipolar junction transistor in a cmos device and method for forming the same |
| 03/28/2002 | US20020036331 Multi-bit magnetic memory cells |
| 03/28/2002 | US20020036330 Semiconductor device with SOI structure and method of manufacturing the same |
| 03/28/2002 | US20020036327 Method and apparatus for trench isolation process with pad gate and trench edge spacer elimination |
| 03/28/2002 | US20020036325 RF power transistor |
| 03/28/2002 | US20020036324 Hydrogen anneal before gate oxidation |
| 03/28/2002 | US20020036323 Semiconductor device and method of manufacturing the same |
| 03/28/2002 | US20020036322 SOI stacked dram logic |
| 03/28/2002 | US20020036321 Semiconductor device and maufacturing method thereof |
| 03/28/2002 | US20020036320 Semiconductor device having low parasitic resistance and small junction leakage characteristic and method of manufacturing the same |
| 03/28/2002 | US20020036319 Vertical MOSFETs having trench-based gate electrodes within deeper trench-based source electrodes and methods of forming same |
| 03/28/2002 | US20020036317 Nonvolatile semiconductor memory device having element isolating region of trench type and method of manufacturing the same |
| 03/28/2002 | US20020036316 Process for producing semiconductor memory device and semiconductor memory device |
| 03/28/2002 | US20020036315 Magnetoresistive element and magnetoresistive device using the same |
| 03/28/2002 | US20020036314 Semiconductor memory device |
| 03/28/2002 | US20020036313 Memory cell capacitor structure and method of formation |
| 03/28/2002 | US20020036312 Miniaturized capacitor with solid-state dielectric, in particular for integrated semiconductor memories, E.G. DRAMS, and method for fabricating such a capacitor |
| 03/28/2002 | US20020036310 Trench capacitor having an insulation collar, and method of producing such a trench capacitor |
| 03/28/2002 | US20020036309 Semiconductor device and method for fabricating the same |
| 03/28/2002 | US20020036308 Semiconductor memory and its production process |