| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/04/2002 | US20020039180 Projection exposure apparatus and exposure method |
| 04/04/2002 | US20020039179 Stage apparatus providing multiple degrees of freedom of movement while exhibiting reduced magnetic disturbance of a charged particle beam |
| 04/04/2002 | US20020039175 Projection exposure lens with aspheric elements |
| 04/04/2002 | US20020039144 Charge transfer device, CCD image sensor, and CCD image pickup system |
| 04/04/2002 | US20020039032 Testing method and testing device for semiconductor integrated circuits |
| 04/04/2002 | US20020038997 Apparatus for producing an organic EL display device, and process for producing an organic EL display device, using the same |
| 04/04/2002 | US20020038918 Connecting electrodes pads with photopolymerization |
| 04/04/2002 | US20020038916 Method for precise molding and alignment of structures on a substrate using a stretchable mold |
| 04/04/2002 | US20020038915 Use of residual organic compounds to facilitate gate break on a carrier substrate for a semiconductor device |
| 04/04/2002 | US20020038914 Semiconductor integrated circuit device |
| 04/04/2002 | US20020038913 Integrated circuit chip carrier assembly |
| 04/04/2002 | US20020038912 Semiconductor wafer, semiconductor device and manufacturing method therefor |
| 04/04/2002 | US20020038911 Surface modified interconnects |
| 04/04/2002 | US20020038910 Semiconductor device and method of manufacturing the same |
| 04/04/2002 | US20020038909 Semiconductor device and semiconductor device mounting interconnection board |
| 04/04/2002 | US20020038905 Semiconductor device provided in thin package and method for manufacturing the same |
| 04/04/2002 | US20020038904 Area array type semiconductor package and fabrication method |
| 04/04/2002 | US20020038902 IC chip and semiconductor device |
| 04/04/2002 | US20020038901 Semiconductor device and method of manufacturing the same |
| 04/04/2002 | US20020038899 Semiconductor device with telerance to pattern displacement |
| 04/04/2002 | US20020038898 Semiconductor device and method of producing the same |
| 04/04/2002 | US20020038897 Nonvolatile memory structures and fabrication methods |
| 04/04/2002 | US20020038896 Semiconductor device including a depletion type lateral mosfet and method of forming the same |
| 04/04/2002 | US20020038895 Insulated gate semiconductor device and its manufacturing method |
| 04/04/2002 | US20020038894 Fet whose source electrode overhangs gate electrode and its manufacture method |
| 04/04/2002 | US20020038893 Thin film transistor flat display |
| 04/04/2002 | US20020038892 Boride-based substrate for growing semiconducting layers thereon and a semiconductor devise using the same |
| 04/04/2002 | US20020038891 Silicon carbide power metal-oxide semiconductor field effect transistors having a shorting channel and methods of fabricating silicon carbide metal-oxide semiconductor field effect transistors having a shorting channel |
| 04/04/2002 | US20020038890 Semiconductor device and method for manufacturing the same, semiconductor wafer and semiconductor device manufactured thereby |
| 04/04/2002 | US20020038889 Semiconductor device |
| 04/04/2002 | US20020038888 Semiconductor integrated circuit together with timepiece and electronic equipment provided with the same |
| 04/04/2002 | US20020038887 Power semiconductor device |
| 04/04/2002 | US20020038886 Method of forming trench transistor with self-aligned source |
| 04/04/2002 | US20020038885 Semiconductor device having a double-well structure and method for manufacturing the same |
| 04/04/2002 | US20020038884 Flash memory having memory section and peripheral circuit section and manufacturing the same |
| 04/04/2002 | US20020038882 Electrically erasable, programmable, non-volatile memory device compatible with a cmos/soi production process |
| 04/04/2002 | US20020038881 Structure and manufacturing method of semiconductor device having uneven surface at memory cell capacitor part |
| 04/04/2002 | US20020038880 Rough electrode (high surface area) from Ti and TiN |
| 04/04/2002 | US20020038879 Devices having improved capacitance and methods of their fabrication |
| 04/04/2002 | US20020038878 Semiconductor memory device having redundancy function |
| 04/04/2002 | US20020038877 Semiconductor memory device having memory cell section and peripheral circuit section and method of manufacturing the same |
| 04/04/2002 | US20020038876 Method to produce data cell region and system region for semiconductor memory |
| 04/04/2002 | US20020038875 Method and structure for improved alignment tolerance in multiple, singularized plugs |
| 04/04/2002 | US20020038874 Hetero-bipolar transistor and method of manufacture thereof |
| 04/04/2002 | US20020038873 Semiconductor device including intermediate wiring element |
| 04/04/2002 | US20020038870 Nitride-based semiconductor element and method of preparing nitride-based semiconductor |
| 04/04/2002 | US20020038852 Magnetic shielding method for charged particle beam microlithography apparatus |
| 04/04/2002 | US20020038794 Laser marking system for dice carried in trays and method of operation |
| 04/04/2002 | US20020038773 Wafer container box |
| 04/04/2002 | US20020038726 Polymer stud grid array and method for producing such a polymer stud grid array |
| 04/04/2002 | US20020038722 Integrated circuit mounting structure and mounting method thereof |
| 04/04/2002 | US20020038714 Method of making an integrated circuit package |
| 04/04/2002 | US20020038692 Plasma Processing apparatus |
| 04/04/2002 | US20020038691 Plasma processing system |
| 04/04/2002 | US20020038690 Electric arc spraying |
| 04/04/2002 | US20020038688 Plasma processing apparatus and system, performance validation system and inspection method therefor |
| 04/04/2002 | US20020038681 Thin magnetic alloy film; tungsten, hafnium, zirconium, tantalanum alloy |
| 04/04/2002 | US20020038669 Gas-line system for semiconductor-manufacturing apparatus |
| 04/04/2002 | US20020038666 Solar battery module, method of manufacturing same and power generating apparatus |
| 04/04/2002 | US20020038665 Substrate treatment process |
| 04/04/2002 | US20020038662 Potted transducer array with matching network in a multiple pass configuration |
| 04/04/2002 | US20020038630 Apparatus and method for forming deposited film |
| 04/04/2002 | US20020038629 Processing bowl for receiving a pool of a processing chemical, a mounted processor head for transferring wafers, spray station has coating viscosity controller for uniform coating over irregular wafer surfaces |
| 04/04/2002 | US20020038626 Excimer laser crystallization of amorphous silicon film |
| 04/04/2002 | US20020038557 Synthetic qurtz glass and method of production |
| 04/04/2002 | US20020038528 Inflatable slit/gate valve |
| 04/04/2002 | US20020038509 Bump structure and method for making the same |
| 04/04/2002 | US20020038486 Device for cleaning a wafer of abrasive agent suspension remaining after polishing with brushes and DI water |
| 04/04/2002 | DE10144420A1 System und Verfahren zum Herstellen eines Halbleiterbauteils System and method for manufacturing a semiconductor device |
| 04/04/2002 | DE10143967A1 Process for arranging connection elements in function blocks of integrated circuits displaces elements into adjacent compatible assembly regions |
| 04/04/2002 | DE10142489A1 Three axis, six direction system for positioning wafers prior to measurement or treatment with radiation, etc. in which highly accurate positioning enables very fine structures to be measured or irradiated in lithography processes |
| 04/04/2002 | DE10139743A1 Ätzvorrichtung Etching |
| 04/04/2002 | DE10138982A1 Zuleitungsrahmen, unter Verwendung desselben hergestelltes Halbleiter-Bauelement und Verfahren zum Herstellen des Halbleiter-Bauelements Lead frame, manufactured using the same semiconductor device and method of manufacturing the semiconductor device |
| 04/04/2002 | DE10135047A1 Verfahren zum Herstellen eines Leiters und Verfahren zur Bildung eines Musters A method of manufacturing a conductor and method for forming a pattern |
| 04/04/2002 | DE10134866A1 Horizontally growing carbon nanotubes for field effect transistors, involves synthesizing carbon nanotubes at exposed surfaces of catalyst pattern |
| 04/04/2002 | DE10130836A1 Oberflächenwellenbauelement und Verfahren zum Herstellen desselben Of the same surface acoustic wave device and methods for making |
| 04/04/2002 | DE10128768A1 Diffraktive OFF-axis-Strahlformer und Stahlenteiler zum Vermindern der Empfindlichkeit bezüglich Fertigungstoleranzen Diffractive off-axis beam shaper and steel divider to reduce the sensitivity to manufacturing tolerances |
| 04/04/2002 | DE10124739A1 Halbleiterwaferanordnung und Bearbeitungsvorrichtung mit Ansaugtischen zum Halten derselben Semiconductor wafer assembly and machining apparatus for holding the same Ansaugtischen |
| 04/04/2002 | DE10115581A1 Semiconductor device has source-drain areas provided on both sides of gate electrode so that source-drain area and gate electrode have same flat surface |
| 04/04/2002 | DE10065722C1 Electrical connection formation method uses 2 separate bonding wires between spaced contact surfaces provided via ball-wedge bonding method |
| 04/04/2002 | DE10053865C1 Process for anodically bonding materials with glass components used in microsystems for joining glass with silicon comprises using niobium or tantalum phosphate glass having a specified alkali ion conductivity |
| 04/04/2002 | DE10053240A1 Kühlkörper für Halbleiterelemente, Verfahren zu seiner Herstellung sowie Formwerkzeug dafür Heat sink for semiconductor elements, process for its preparation and to mold it |
| 04/04/2002 | DE10046518A1 Verfahren zur Verbesserung der Bildqualität und zur Erhöhung der Schreibgeschwindigkeit bei Belichtung lichtempfindlicher Schichten A method for improving image quality and for increasing the writing speed at exposure of photosensitive layers |
| 04/04/2002 | DE10046170A1 Verfahren zur Herstellung eines Halbleiter-Metallkontaktes durch eine dielektrische Schicht A method for producing a semiconductor-metal contact by a dielectric layer |
| 04/04/2002 | DE10046012A1 Contact hole forming method for semiconductor arrangement forming and structuring masking layers on dielectric layer and strip conductor and forming adjustable contact hole |
| 04/04/2002 | DE10045793A1 Verfahren zum Strukturieren eines Substrats A method for patterning a substrate |
| 04/04/2002 | DE10045694A1 Halbleiterspeicherzelle mit Grabenkondensator und Auswahltransistor und Verfahren zu ihrer Herstellung A semiconductor memory cell capacitor with grave and selection transistor and processes for their preparation |
| 04/04/2002 | DE10045692A1 Integrierter Speicher mit Speicherzellen und Pufferkapazitäten Integrated memory having memory cells and buffer capacity |
| 04/04/2002 | DE10045534A1 Electronic component has capillary elements as connection elements, which are connected with contact areas of a carrier |
| 04/04/2002 | DE10045249A1 Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements Photovoltaic device and method for manufacturing the component |
| 04/04/2002 | DE10045203A1 Prüfvorrichtung und Verfahren zum Feststellen einer Kerben- beziehungsweise Nockenposition bei Scheiben Tester and method for detecting a notch or cam position in slices |
| 04/04/2002 | DE10045045A1 Herstellungsverfahren von Feldeffekttransistoren in integrierten Halbleiterschaltungen und mit einem derartigen Feldeffekttransistor hergestellte integrierte Halbleiterschaltung Manufacturing processes of field effect transistors in integrated semiconductor circuits, and with such a field-effect transistor manufactured semiconductor integrated circuit |
| 04/04/2002 | DE10045019A1 Manufacturing of conductive layer and its active region in semiconductor memory device substrate, involves forming buffer layer on first segment of floating gate and removing the buffer layer, prior to trench formation |
| 04/04/2002 | DE10044838A1 Halbleiterbauelement Semiconductor device |
| 04/04/2002 | DE10043947A1 Current conductor of integrated circuit, producing magnetic field with transitive effect, includes recess modifying field produced |
| 04/04/2002 | DE10043511A1 Kompositstruktur für elektronische Mikrosysteme sowie Verfahren zur Herstellung der Kompositstruktur The composite structure for electronic microsystems, and process for producing the composite structure |
| 04/04/2002 | DE10043204A1 Organischer Feld-Effekt-Transistor, Verfahren zur Strukturierung eines OFETs und integrierte Schaltung Organic field-effect transistor, method for structuring an OFET and integrated circuit |
| 04/04/2002 | DE10035962A1 Device for picking up and transferring CD or DVD blanks comprises vacuum cup mounted on transfer arm which is vacuum operated, operating device being connected in series with vacuum cup to common vacuum source |
| 04/04/2002 | CA2423468A1 Photoresist stripper/cleaner compositions containing aromatic acid inhibitors |
| 04/03/2002 | EP1194030A1 Method for mounting semiconductor element to circuit board, and semiconductor device |