| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/09/2002 | US6368762 Active mask exposure compensation of underlying nitride thickness variation to reduce critical dimension (CD) variation |
| 04/09/2002 | US6368754 Overcoating wafer with photoresist; adjust mask |
| 04/09/2002 | US6368753 Lithography |
| 04/09/2002 | US6368733 ELO semiconductor substrate |
| 04/09/2002 | US6368704 Conductive paste of high thermal conductivity and electronic part using the same |
| 04/09/2002 | US6368683 Pellicle for photolithography |
| 04/09/2002 | US6368673 Process control; selective heating |
| 04/09/2002 | US6368567 Point-of-use exhaust by-product reactor |
| 04/09/2002 | US6368518 Using halogen gas |
| 04/09/2002 | US6368517 Method for preventing corrosion of a dielectric material |
| 04/09/2002 | US6368516 Semiconductor manufacturing methods |
| 04/09/2002 | US6368514 Method and apparatus for batch processed capacitors using masking techniques |
| 04/09/2002 | US6368485 Forming electrolyte for forming metal oxide coating film |
| 04/09/2002 | US6368484 Lining workpiece, then adding and selectively removing a seed layer before electroplating; reduces waste, cost, and time |
| 04/09/2002 | US6368469 Inductive coils serves as additional target in sputtering; improves uniformity of deposited metal; independent bias of coils allows for additional control over sputtering |
| 04/09/2002 | US6368452 Plasma treatment apparatus and method of semiconductor processing |
| 04/09/2002 | US6368450 Processing apparatus |
| 04/09/2002 | US6368435 Device and method for transporting separate substrates |
| 04/09/2002 | US6368421 Composition for stripping photoresist and organic materials from substrate surfaces |
| 04/09/2002 | US6368416 Method for validating pre-process adjustments to a wafer cleaning system |
| 04/09/2002 | US6368415 Method for washing semiconductor substrate and washing apparatus therefor |
| 04/09/2002 | US6368412 Apparatus with high temperature gas releasing means for vapor deposition of parylene polymer without peeling |
| 04/09/2002 | US6368411 Permits purging a standard mechanical interface (smif) box or pod to isolate and control the environment in semiconductor manufacture, quickly to desired levels of relative humidity, oxygen and particulates; inlet port, check valve and filter |
| 04/09/2002 | US6368407 Single crystal-manufacturing equipment and a method for manufacturing the same |
| 04/09/2002 | US6368400 Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography |
| 04/09/2002 | US6368398 Method of depositing films by using carboxylate complexes |
| 04/09/2002 | US6368372 Fluid media particle isolating system |
| 04/09/2002 | US6368208 Cleanroom and cleanroom ventilation method |
| 04/09/2002 | US6368194 Apparatus for controlling PH during planarization and cleaning of microelectronic substrates |
| 04/09/2002 | US6368192 Wafer preparation apparatus including variable height wafer drive assembly |
| 04/09/2002 | US6368191 Carrier head with local pressure control for a chemical mechanical polishing apparatus |
| 04/09/2002 | US6368189 Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure |
| 04/09/2002 | US6368183 Wafer cleaning apparatus and associated wafer processing methods |
| 04/09/2002 | US6368182 Apparatus for optical inspection of wafers during polishing |
| 04/09/2002 | US6368181 Apparatus for optical inspection of wafers during polishing |
| 04/09/2002 | US6368051 Multi-position load lock chamber |
| 04/09/2002 | US6368049 Semiconductor manufacturing method and semiconductor manufacturing apparatus |
| 04/09/2002 | US6368044 Convertible wafer transfer machine |
| 04/09/2002 | US6368040 Apparatus for and method of transporting substrates to be processed |
| 04/09/2002 | US6367635 Ultra precision process carrier for semi-conductor manufacturing |
| 04/09/2002 | US6367529 Method of adhering wafers and wafer adhering device |
| 04/09/2002 | US6367493 Potted transducer array with matching network in a multiple pass configuration |
| 04/09/2002 | US6367490 Processing apparatus and processing method |
| 04/09/2002 | US6367486 Ethylenediaminetetraacetic acid or its ammonium salt semiconductor process residue removal process |
| 04/09/2002 | US6367415 View port of a chemical vapor deposition device for manufacturing semiconductor devices |
| 04/09/2002 | US6367413 Apparatus for monitoring substrate biasing during plasma processing of a substrate |
| 04/09/2002 | US6367410 Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
| 04/09/2002 | US6367267 Integrated phase separator for ultra high vacuum system |
| 04/09/2002 | US6367159 Method and apparatus for measuring surface shape of thin element |
| 04/09/2002 | US6367152 Method for manufacturing a heat sink |
| 04/09/2002 | US6367150 Solder flux compatible with flip-chip underfill material |
| 04/06/2002 | CA2358006A1 Method of fabricating compound semiconductor device |
| 04/04/2002 | WO2002027872A1 High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
| 04/04/2002 | WO2002027869A1 Conductive contactor with movable guide plate |
| 04/04/2002 | WO2002027805A2 A theory of the charge multiplication process in avalanche photodiodes |
| 04/04/2002 | WO2002027802A1 Method for producing a body consisting of semiconductor material having a reduced mean free path length |
| 04/04/2002 | WO2002027800A2 Trench dmos transistor having lightly doped source structure |
| 04/04/2002 | WO2002027799A2 Process for the fabrication of mosfet devices depletion, silicided source and drain junctions |
| 04/04/2002 | WO2002027797A2 Shallow trench transistor deep trench capacitor memory cell |
| 04/04/2002 | WO2002027791A2 Polymer stud grid array and method for production thereof |
| 04/04/2002 | WO2002027790A1 Barrier layers for solder joints |
| 04/04/2002 | WO2002027786A1 Semiconductor element, method of manufacturing semiconductor element, multi-layer printed circuit board, and method of manufacturing multi-layer printed circuit board |
| 04/04/2002 | WO2002027784A2 Making of fuses and antifuses with a vertical dram process |
| 04/04/2002 | WO2002027783A1 PREPARATION OF A RELAXED SiGe LAYER ON AN INSULATOR |
| 04/04/2002 | WO2002027782A2 Fault detection method and apparatus using multiple dimension measurements |
| 04/04/2002 | WO2002027781A1 A ball forming process |
| 04/04/2002 | WO2002027779A2 Singulation of semiconductor packages by tie bar cutting |
| 04/04/2002 | WO2002027778A1 Method of heat-treating silicon wafer |
| 04/04/2002 | WO2002027777A2 Silicon oxide patterning using cvd photoresist |
| 04/04/2002 | WO2002027776A1 Substrate processing method, and apparatus therefor |
| 04/04/2002 | WO2002027775A1 Method and apparatus for treating wafer |
| 04/04/2002 | WO2002027774A1 Method of disordering quantum well heterostructures |
| 04/04/2002 | WO2002027773A1 Improved high voltage device and method for making the same |
| 04/04/2002 | WO2002027772A1 Heat-treating apparatus and heat-treating method |
| 04/04/2002 | WO2002027770A2 Highly efficient capacitor structures with enhanced matching properties |
| 04/04/2002 | WO2002027769A1 Manufacturing apparatus, method and system for controlling manufacturing apparatus, and computer-readable medium storing control program for manufacturing apparatus |
| 04/04/2002 | WO2002027768A2 Fabrication of semiconductor devices |
| 04/04/2002 | WO2002027767A2 Fluid delivery ring and methods for making and implementing the same |
| 04/04/2002 | WO2002027766A1 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
| 04/04/2002 | WO2002027764A1 Device and method for the planar connection of two wafers for a thin-grinding and separation process of a wafer product |
| 04/04/2002 | WO2002027755A2 Chamber configuration for confining a plasma |
| 04/04/2002 | WO2002027753A2 System and method for delivering cooling gas from atmospheric pressure to a high vacuum through a rotating seal in a batch ion implanter |
| 04/04/2002 | WO2002027409A1 Photoresist stripper/cleaner compositions containing aromatic acid inhibitors |
| 04/04/2002 | WO2002027406A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027405A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027404A2 Mitigation of multilayer defects on a reticle |
| 04/04/2002 | WO2002027402A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027401A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027400A2 Illumination system particularly for microlithography |
| 04/04/2002 | WO2002027390A2 A method of forming electrodes or pixel electrodes and a liquid crystal display device |
| 04/04/2002 | WO2002027362A2 Electro-optic structure and process for fabricating same |
| 04/04/2002 | WO2002027310A1 Method and apparatus for measuring and controlling the water content of a water containing liquid mixture |
| 04/04/2002 | WO2002027288A1 Improved system for scatterometric measurements and applications |
| 04/04/2002 | WO2002027080A1 A technique for the desired crystalline phase formation for the manufacture of integrated circuits |
| 04/04/2002 | WO2002027079A1 Crystal growth method |
| 04/04/2002 | WO2002027078A1 Method for depositing, in particular, crystalline layers, a gas inlet element, and device for carrying out said method |
| 04/04/2002 | WO2002027077A1 Method of manufacturing silicon monocrystal and device for manufacturing semiconductor monocrystal |
| 04/04/2002 | WO2002027063A2 Vapor deposition of oxides, silicates and phosphates |
| 04/04/2002 | WO2002027061A2 Process chamber lid |
| 04/04/2002 | WO2002027060A2 Process chamber lid service system |