| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/17/2002 | CN1083153C Apparatus for cleaning semiconductor wafer |
| 04/17/2002 | CN1083152C Method for mfg. of semiconductor device |
| 04/17/2002 | CN1083116C Light control device in stepper exposure machine |
| 04/17/2002 | CN1083077C Crucible fixing method and support base and base assembly equipment |
| 04/17/2002 | CN1082868C Grinding and polishing machine tool and method and apparatus for grinding and polishing disk using the same |
| 04/17/2002 | CN1082866C Wafer polishing apparatus and plishing method |
| 04/16/2002 | US6374398 Efficient database for die-per-wafer computations |
| 04/16/2002 | US6374397 Lot determination apparatus, lot determination method, and recording medium for storing the method |
| 04/16/2002 | US6374391 Method for estimating parasitic capacitance coupled to signal line longer than critical length at high-speed |
| 04/16/2002 | US6374199 Inspection and analyzing apparatus for semiconductor integrated circuit and inspection and analyzing method |
| 04/16/2002 | US6374194 System and method of diagnosing particle formation |
| 04/16/2002 | US6374150 Method and apparatus for monitoring and/or end point detecting a process |
| 04/16/2002 | US6374149 System and method for determining the center of a wafer on a wafer table |
| 04/16/2002 | US6374144 Method and apparatus for controlling a system using hierarchical state machines |
| 04/16/2002 | US6373870 Laser irradiation apparatus and laser irradiation method |
| 04/16/2002 | US6373776 Dynamic ram and semiconductor device |
| 04/16/2002 | US6373773 Semiconductor device with DRAM and logic part integrated |
| 04/16/2002 | US6373772 Semiconductor integrated circuit device having fuses and fuse latch circuits |
| 04/16/2002 | US6373764 Semiconductor memory device allowing static-charge tolerance test between bit lines |
| 04/16/2002 | US6373763 Semiconductor memory provided with data-line equalizing circuit |
| 04/16/2002 | US6373760 Static type semiconductor memory device adopting a redundancy system |
| 04/16/2002 | US6373753 Memory array having selected word lines driven to an internally-generated boosted voltage that is substantially independent of VDD |
| 04/16/2002 | US6373747 Flash EEprom system |
| 04/16/2002 | US6373746 Nonvolatile semiconductor memory having plural data storage portions for a bit line connected to memory cells |
| 04/16/2002 | US6373717 Electronic package with high density interconnect layer |
| 04/16/2002 | US6373681 Electrostatic chuck, and method of and apparatus for processing sample using the chuck |
| 04/16/2002 | US6373679 Electrostatic or mechanical chuck assembly conferring improved temperature uniformity onto workpieces held thereby, workpiece processing technology and/or apparatus containing the same, and method(s) for holding and/or processing a workpiece with the same |
| 04/16/2002 | US6373668 Semiconductor device |
| 04/16/2002 | US6373619 Pattern generator with improved address resolution |
| 04/16/2002 | US6373572 Method and apparatus for making and using an improved fiducial for an intergrated circuit |
| 04/16/2002 | US6373555 Apparatus for projecting a mask pattern onto a wafer with reduced degradation of optical elements |
| 04/16/2002 | US6373554 Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus |
| 04/16/2002 | US6373552 Optical correction plate, and its application in a lithographic projection apparatus |
| 04/16/2002 | US6373546 Structure of a liquid crystal display and the method of manufacturing the same |
| 04/16/2002 | US6373329 Bias circuit of a bipolar transistor for high frequency power amplification |
| 04/16/2002 | US6373323 Semiconductor integrated circuit device with threshold control |
| 04/16/2002 | US6373321 CMOS semiconductor device |
| 04/16/2002 | US6373318 Electronic switching device having at least two semiconductor components |
| 04/16/2002 | US6373291 Pass transistor logic circuit for reducing power consumption |
| 04/16/2002 | US6373286 Integrated circuit with improved off chip drivers |
| 04/16/2002 | US6373274 Characteristic evaluation apparatus for insulated gate type transistors |
| 04/16/2002 | US6373267 Ball grid array-integrated circuit testing device |
| 04/16/2002 | US6373260 Single cable, single point, stimulus and response probing system and method |
| 04/16/2002 | US6373159 Substrate rotating apparatus |
| 04/16/2002 | US6373142 Method of adding filler into a non-filled underfill system by using a highly filled fillet |
| 04/16/2002 | US6373141 Bondable compliant pads for packaging of a semiconductor chip and method therefor |
| 04/16/2002 | US6373140 Semiconductor device |
| 04/16/2002 | US6373138 Integrated circuit with conductive lines disposed within isolation regions |
| 04/16/2002 | US6373137 Copper interconnect for an integrated circuit and methods for its fabrication |
| 04/16/2002 | US6373136 Damascene wiring structure and semiconductor device with damascene wirings |
| 04/16/2002 | US6373135 Semiconductor structure and method of fabrication |
| 04/16/2002 | US6373134 Semiconductor device and fabrication method introducing horizontal side-steps into vertical steps |
| 04/16/2002 | US6373132 Semiconductor die with attached heat sink and transfer mold |
| 04/16/2002 | US6373126 Method for reducing IC package delamination by use of internal baffles |
| 04/16/2002 | US6373123 Semiconductor structure having more usable substrate area and method for forming same |
| 04/16/2002 | US6373121 Silicon chip built-in inductor structure |
| 04/16/2002 | US6373120 Semiconductor device for simultaneously achieving high reliability to laser light radiation and small occupation region and method of manufacturing it |
| 04/16/2002 | US6373119 Semiconductor device and method of manufacturing the same |
| 04/16/2002 | US6373116 Two-dimensional image detector |
| 04/16/2002 | US6373114 Barrier in gate stack for improved gate dielectric integrity |
| 04/16/2002 | US6373113 Nitrogenated gate structure for improved transistor performance and method for making same |
| 04/16/2002 | US6373112 Polysilicon-germanium MOSFET gate electrodes |
| 04/16/2002 | US6373111 Work function tuning for MOSFET gate electrodes |
| 04/16/2002 | US6373110 Semiconductor device having high breakdown voltage |
| 04/16/2002 | US6373109 Semiconductor device to more precisely reflect the claimed invention |
| 04/16/2002 | US6373108 Semiconductor device having reduced sheet resistance of source/drain regions |
| 04/16/2002 | US6373107 Semiconductor storage device having four-transistor memory cells |
| 04/16/2002 | US6373106 Semiconductor device and method for fabricating the same |
| 04/16/2002 | US6373104 Circuit method for reducing parasitic bipolar effects during electrostatic discharges |
| 04/16/2002 | US6373102 Process for fabricating a channel region of a transistor device with ion implantation and the transistor device formed therefrom |
| 04/16/2002 | US6373098 Trench-gated device having trench walls formed by selective epitaxial growth and process for forming device |
| 04/16/2002 | US6373097 Field-effect-controllable, vertical semiconductor component, and monolithically integrated half bridge |
| 04/16/2002 | US6373096 Method of manufacturing semiconductor device, nonvolatile semiconductor memory device and method of manufacturing the same |
| 04/16/2002 | US6373095 NVRAM cell having increased coupling ratio between a control gate and floating gate without an increase in cell area |
| 04/16/2002 | US6373094 EEPROM cell using conventional process steps |
| 04/16/2002 | US6373093 Semiconductor memory device and method of manufacturing the same |
| 04/16/2002 | US6373092 Staggered-edge capacitor electrode |
| 04/16/2002 | US6373091 Vertical DRAM cell with TFT over trench capacitor |
| 04/16/2002 | US6373090 Scheme of capacitor and bit-line at same level and its fabrication method for 8F2 DRAM cell with minimum bit-line coupling noise |
| 04/16/2002 | US6373089 DRAM cell having storage capacitor contact self-aligned to bit lines and word lines |
| 04/16/2002 | US6373088 Edge stress reduction by noncoincident layers |
| 04/16/2002 | US6373087 Methods of fabricating a metal-oxide-metal capacitor and associated apparatuses |
| 04/16/2002 | US6373086 Notched collar isolation for suppression of vertical parasitic MOSFET and the method of preparing the same |
| 04/16/2002 | US6373085 Semiconductor memory cell having two epitaxial layers and its manufacturing method |
| 04/16/2002 | US6373084 Shared length cell for improved capacitance |
| 04/16/2002 | US6373082 Compound semiconductor field effect transistor |
| 04/16/2002 | US6373081 Field effect transistor and method of fabricating the same |
| 04/16/2002 | US6373080 Thin film transistor with electrode on one side of a trench |
| 04/16/2002 | US6373077 Group III nitride photonic devices on silicon carbide substrates with conductive buffer interlayer structure |
| 04/16/2002 | US6373076 Passivated silicon carbide devices with low leakage current and method of fabricating |
| 04/16/2002 | US6373075 Semiconductor device comprising a semiconductor film having substantially no grain boundary |
| 04/16/2002 | US6373072 Lithographic projection apparatus |
| 04/16/2002 | US6373071 Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography |
| 04/16/2002 | US6373069 Method for evaluating an epitaxial wafer for a light emitting device, recording medium readable by a computer and epitaxial wafer for a light emitting device |
| 04/16/2002 | US6373054 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/16/2002 | US6373053 Analysis of CD-SEM signal to detect scummed/closed contact holes and lines |
| 04/16/2002 | US6373033 Model-based predictive control of thermal processing |
| 04/16/2002 | US6372981 Semiconductor substrate, solar cell using same, and fabrication methods thereof |
| 04/16/2002 | US6372928 Layer forming material and wiring forming method |
| 04/16/2002 | US6372859 Thermoresistance adhesive and semiconductor device using the same |