| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/18/2002 | DE10043215C1 Verfahren zur Herstellung einer Antifuse, Antifuse zur selektiven elektrischen Verbindung von benachbarten leitenden Bereichen und integrierte Schaltung mit einer Antifuse A process for producing an antifuse, an antifuse for the selective electrical connection of adjacent conductive regions and integrated circuit having an antifuse |
| 04/18/2002 | DE10042235A1 Verfahren zur Herstellung einer elektrisch leitenden Verbindung A process for producing an electrically conductive connection |
| 04/18/2002 | DE10029286A1 Monitoring of nitrogen processes involves subjecting silicon surface to nitrogen process, producing oxide layer on the surface by thermal oxidation, and determining a thickness of oxide layer as measure for nitrogen process quality |
| 04/18/2002 | CA2425757A1 Epitaxial oxide films via nitride conversion |
| 04/18/2002 | CA2419130A1 Electrostatically clamped edge ring for plasma processing |
| 04/18/2002 | CA2389607A1 Method and apparatus for processing thin metal layers |
| 04/17/2002 | EP1198161A1 Method for securing and processing thin film materials |
| 04/17/2002 | EP1198043A2 Method of fabricating a III-V compound semiconductor device with an Aluminium-compound layer |
| 04/17/2002 | EP1198013A2 Method of producing tandem thin-film solar cell |
| 04/17/2002 | EP1198008A1 Information processing structure |
| 04/17/2002 | EP1198007A1 Improved bipolar junction transistor |
| 04/17/2002 | EP1198006A2 Compound semiconductor device and method for manufacturing |
| 04/17/2002 | EP1198005A1 Semiconductor module and method of mounting |
| 04/17/2002 | EP1198004A2 Semiconductor device having power distribution lines thereon |
| 04/17/2002 | EP1198003A1 Semiconductor device, method of manufacture thereof, circuit board, and electronic device |
| 04/17/2002 | EP1198001A2 Method of testing and mounting devices using a resilient contact structure |
| 04/17/2002 | EP1198000A1 Semiconductor device and assembly board |
| 04/17/2002 | EP1197999A1 Method of forming low-dielectric-constant film, and semiconductor substrate with low-dielectric-constant film |
| 04/17/2002 | EP1197998A2 Antireflective porogens |
| 04/17/2002 | EP1197996A2 A III nitride epitaxial wafer and usage of the same |
| 04/17/2002 | EP1197995A2 A method for fabricating a III nitride film |
| 04/17/2002 | EP1197994A1 Apparatus for manufacturing semiconductor device |
| 04/17/2002 | EP1197993A1 Apparatus for manufacturing semiconductor device |
| 04/17/2002 | EP1197992A1 Semiconductor wafer and production method therefor |
| 04/17/2002 | EP1197991A1 Verfahren zur Herstellung einer monolithischen Struktur mit einem Perovskit-Kondensator |
| 04/17/2002 | EP1197990A2 Wafer handling system |
| 04/17/2002 | EP1197989A2 Heat treatment device and process with light irradiation |
| 04/17/2002 | EP1197988A2 Multiple wafer lift apparatus and method therefor |
| 04/17/2002 | EP1197987A2 Method and apparatus for separating sample |
| 04/17/2002 | EP1197825A2 Integrated circuit with parts supplied with a different supply voltage |
| 04/17/2002 | EP1197823A2 Method and apparatus for the distribution of treatment liquids |
| 04/17/2002 | EP1197801A1 Lithographic device with two object holders |
| 04/17/2002 | EP1197776A2 System for temperature compensation of thermally loaded bodies having a low heat conductivity, especially of supports for reflective layers or substrates in optics |
| 04/17/2002 | EP1197756A2 Probe card for testing integrated circuits |
| 04/17/2002 | EP1197745A1 Through hole inspecting method and device |
| 04/17/2002 | EP1197587A2 Seed layer repair and electroplating bath |
| 04/17/2002 | EP1197586A2 Electrolyte |
| 04/17/2002 | EP1197296A2 Pad conditioning disk |
| 04/17/2002 | EP1197292A2 Substrate holding apparatus |
| 04/17/2002 | EP1196950A1 Methods of forming capacitor-over-bit line memory cells |
| 04/17/2002 | EP1196949A1 Acid blend for removing etch residue on semiconductor substrates |
| 04/17/2002 | EP1196948A2 Process for designing a mask |
| 04/17/2002 | EP1196947A1 Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method |
| 04/17/2002 | EP1196946A1 Fabrication process for dishing-free cu damascene structures |
| 04/17/2002 | EP1196945A1 Method for producing two differently doped adjacent regions in an integrated semiconductor |
| 04/17/2002 | EP1196944A1 Apparatus and method for transferring a workpiece |
| 04/17/2002 | EP1196943A1 Process for removing contaminant from a surface and composition useful therefor |
| 04/17/2002 | EP1196939A1 Object inspection and/or modification system and method |
| 04/17/2002 | EP1196938A2 Apparatus and method for exposing a substrate to plasma radicals |
| 04/17/2002 | EP1196820A2 Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows |
| 04/17/2002 | EP1196802A1 Optical system |
| 04/17/2002 | EP1196789A1 Use of converging beams for transmitting electromagnetic energy to power devices for die testing |
| 04/17/2002 | EP1196645A1 Seal means and its application in deposition reactor |
| 04/17/2002 | EP1196350A2 Nanometer-scale modulation |
| 04/17/2002 | EP1099192B1 Clocked integrated semiconductor circuit and method for operating the same |
| 04/17/2002 | EP1070444B1 Method and device for producing thin-layer structures |
| 04/17/2002 | EP1020702B1 Judging whether bump height is proper or not |
| 04/17/2002 | EP0960434B1 Device for processing semiconductor wafers |
| 04/17/2002 | EP0933802B1 Process for the production of semiconductor device |
| 04/17/2002 | EP0907906B1 Lithography exposure device |
| 04/17/2002 | EP0804313B1 Method and cutting insert for threading |
| 04/17/2002 | EP0769205B1 Device for treating wafer-shaped objects, especially silicon wafers |
| 04/17/2002 | EP0735152B1 Molybdenum-tungsten material for wiring, molybdenum-tungsten target for wiring, process for producing the same, and molybdenum-tungsten wiring thin film |
| 04/17/2002 | EP0539384B1 Process for producing a marker indicating the orientation of the crystal lattice of a wafer |
| 04/17/2002 | CN1345467A Heat sink material and method of manufacturing the heat sink material |
| 04/17/2002 | CN1345466A Nonvolatile memory |
| 04/17/2002 | CN1345465A Method and pressure jetting machine for processing semiconductor wafer |
| 04/17/2002 | CN1345464A Use of multifunctional si-based oligomer/polymer for surface modification of nanoporous silica films |
| 04/17/2002 | CN1345463A Method and apparatus for transporting articles |
| 04/17/2002 | CN1345448A Device with embedded flash and EEPROM memories |
| 04/17/2002 | CN1345177A Chip transfering device and method |
| 04/17/2002 | CN1345176A Manufacture of modular board |
| 04/17/2002 | CN1345096A Method and device for manufacture of gallium phosphide luminous component |
| 04/17/2002 | CN1345093A Storage device, its manufacture and integrated circuit |
| 04/17/2002 | CN1345092A Nonvolatile semiconductor storage and its manufacture |
| 04/17/2002 | CN1345091A Semiconductor storage using tunnel magneto-resistance effect and manufacture thereof |
| 04/17/2002 | CN1345089A Semiconductor device with ideal grid contour and manufacture thereof |
| 04/17/2002 | CN1345088A Manufacture of capacitanvce element for integrated circuit |
| 04/17/2002 | CN1345087A Contact component and its manufacture and probe contact assembly using the contact component |
| 04/17/2002 | CN1345086A Manufacture and testing apparatus for semiconductor integrated circuit device |
| 04/17/2002 | CN1345085A Monocrystalline silicon wafer crystal orientation calibrating method |
| 04/17/2002 | CN1345084A Abnormality detector for chemical and mechanical grinding |
| 04/17/2002 | CN1345083A Semiconductor device and its manufacture |
| 04/17/2002 | CN1345082A Manufacture of polycrystal tangsten silicide grid |
| 04/17/2002 | CN1345081A Treatment system of semiconductor and method of controlling humidity |
| 04/17/2002 | CN1345069A Method and device for reading memory cell of resistance crossover point array |
| 04/17/2002 | CN1345068A Circuit device and method for accelerated ageing in magnetoresistance memory |
| 04/17/2002 | CN1345067A Resistance crossover point array capable of tolerating short-circuit |
| 04/17/2002 | CN1344940A Testing method and device of semiconductor integrated circuit |
| 04/17/2002 | CN1344819A Method for manufacture of ferroelectric solid layer by using assistants |
| 04/17/2002 | CN1344817A Chemical vapour deposition device and method |
| 04/17/2002 | CN1344590A Multi-functional cleaning module and cleaning apparatus using the module |
| 04/17/2002 | CN1083162C Bipolar silicon-on-insulator transistor with increased breakdown voltage |
| 04/17/2002 | CN1083161C Thin film of ABO with excess A-site and B-site modifiers and manufacture thereof |
| 04/17/2002 | CN1083159C Method for manufacturing semiconductor device with stable bipolar transistor and schottky diode |
| 04/17/2002 | CN1083158C Manufacture of semiconductor device |
| 04/17/2002 | CN1083157C Axe-head with heating device |
| 04/17/2002 | CN1083156C Method for munufacture of semiconductor device and apparatus for same |
| 04/17/2002 | CN1083155C Method of bulging substrate by holding soldering paste stacking |
| 04/17/2002 | CN1083154C Grinding method, and method for manufacturing semiconductor device and device for making semiconductor |