| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/25/2002 | US20020048863 Semiconductor device and a method for forming patterns |
| 04/25/2002 | US20020048862 Fully self-aligned fet technology |
| 04/25/2002 | US20020048861 Thin-film transistor and method of making same |
| 04/25/2002 | US20020048860 Method of producing thin films using current of process gas and inert gas colliding with each other and apparatus for producing thin films for practicing the same method |
| 04/25/2002 | US20020048858 Methods of t-gate fabrication using a hybrid resist |
| 04/25/2002 | US20020048857 System for manufacturing semiconductor device utilizing photolithography technique, method of manufacturing semiconductor device, and semiconductor device manufactured thereby |
| 04/25/2002 | US20020048855 Semiconductor device and method of manufacturing the same |
| 04/25/2002 | US20020048853 Method of manufacturing a semiconductor device and a support plate, and a semiconductor device obtained by means of said method |
| 04/25/2002 | US20020048851 Process for making a semiconductor package |
| 04/25/2002 | US20020048850 Method for sawing a moulded leadframe package |
| 04/25/2002 | US20020048848 Flip-chip type semiconductor device having split voids within under-fill layer and its manufacturing method |
| 04/25/2002 | US20020048847 Method of mounting semiconductor chip part on substrate |
| 04/25/2002 | US20020048846 Die paddle clamping method for wire bond enhancement |
| 04/25/2002 | US20020048844 Semiconductor substrate, method of manufacturing the same, and bonded substrate stack surface shape measuring method |
| 04/25/2002 | US20020048843 Method and apparatus for packaging a microelectronic die |
| 04/25/2002 | US20020048842 Image sensing component package and manufacture method thereof |
| 04/25/2002 | US20020048841 Disposable spacer for symmetric and asymmetric schottky contact to SOI mosfet |
| 04/25/2002 | US20020048836 Low temperature buffer layer is stably grown at high rate on a sapphire substrate |
| 04/25/2002 | US20020048835 Method for manufacturing semiconducter laser diode |
| 04/25/2002 | US20020048834 Method of increasing the conductivity of a transparent conductive layer |
| 04/25/2002 | US20020048829 Light emitting device and fabricating method thereof |
| 04/25/2002 | US20020048828 Semiconductor device and method of manufacturing the same |
| 04/25/2002 | US20020048825 Process to remove semiconductor chips from a plastic package |
| 04/25/2002 | US20020048731 Pressurizing supercritical carbon dioxide and stripper chemical, then flushing |
| 04/25/2002 | US20020048726 Photosensitive polyimide precursor and its use for pattern formation |
| 04/25/2002 | US20020048723 Photoresist composition for resist flow process |
| 04/25/2002 | US20020048720 Positive photoresist composition comprises a resin having a specific silicon-containing group on the side chain, the solubility of which resin in an akali developer increases under action of an acid |
| 04/25/2002 | US20020048719 Ion-type photoacid generator containing naphthol and photosensitive polyimide composition prepared by using the same |
| 04/25/2002 | US20020048708 For making a mask for optically transferring a lithographic pattern corresponding to an integrated circuit from the mask onto semiconductor substrate, using an optical exposure tool |
| 04/25/2002 | US20020048670 Single crystalline silicon wafer, ingot and producing method thereof |
| 04/25/2002 | US20020048664 Light energy is irradiated onto the surface of the high polymer material in a desired area; improving wettability |
| 04/25/2002 | US20020048636 Method for fabricating electrode structure and method for fabricating semiconductor device |
| 04/25/2002 | US20020048635 A first reactant is chemically adsorbed on the terminated substrate by injecting the first reactant into the reaction chamber; a solid thin film is formed through chemical exchange or reaction with a second reactant |
| 04/25/2002 | US20020048634 And chemical vapor deposition; Group IIA or IVB metallates of Group IVA oxides |
| 04/25/2002 | US20020048630 Constructed to prevent corners from peeling and raising off a substrate; has a spiral configuration and includes straight lines and corners connected to the straight lines. |
| 04/25/2002 | US20020048538 Gas scrubber with automatic disassembling device |
| 04/25/2002 | US20020048509 Processing system for object to be processed |
| 04/25/2002 | US20020048507 Stack support loading and/or offloading system and a correspomding loading and/or offloading system |
| 04/25/2002 | US20020048506 Edge grip aligner with buffering capabilities |
| 04/25/2002 | US20020048505 Articulated robot |
| 04/25/2002 | US20020048503 Carrying system |
| 04/25/2002 | US20020048502 Transport apparatus and vacuum processing system using the same |
| 04/25/2002 | US20020048341 X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure |
| 04/25/2002 | US20020048311 Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using an in-situ wafer temperature optical probe |
| 04/25/2002 | US20020048288 Laser spectral engineering for lithographic process |
| 04/25/2002 | US20020048210 Semiconductor memory device having hierarchical word line structure |
| 04/25/2002 | US20020048205 Dynamic random access memory |
| 04/25/2002 | US20020048204 Semiconductor integrated circuit device |
| 04/25/2002 | US20020048200 Integrated circuit memory devices having non-volatile memory transistors and methods of fabricating the same |
| 04/25/2002 | US20020048192 Triple well flash memory cell and fabrication process |
| 04/25/2002 | US20020048190 Insulated-gate field-effect transistor integrated with negative differential resistance (NDR) FET |
| 04/25/2002 | US20020048189 Data line disturbance free memory block divided flash memory and microcomputer having flash memory therein |
| 04/25/2002 | US20020048182 Memory circuit/logic circuit integrated device capable of reducing term of works |
| 04/25/2002 | US20020048141 Enhanced capacitor shape |
| 04/25/2002 | US20020048096 Optical element deformation system |
| 04/25/2002 | US20020048085 Optical unit and optical instrument having the same |
| 04/25/2002 | US20020048020 Process and apparatus for manufacturing semiconductor device |
| 04/25/2002 | US20020048019 Monitoring substrate processing with optical emission and polarized reflected radiation |
| 04/25/2002 | US20020048018 Method for measuring coma aberration in optical system |
| 04/25/2002 | US20020048009 Balanced positioning system for use lithographic apparatus |
| 04/25/2002 | US20020048007 Illuminance measurement apparatus, exposure apparatus, and exposure method |
| 04/25/2002 | US20020048004 Environmental control apparatus for exposure apparatus |
| 04/25/2002 | US20020047956 Display apparatus |
| 04/25/2002 | US20020047951 Liquid crystal display apparatus and projection-type liquid crystal display apparatus |
| 04/25/2002 | US20020047950 Thin film transistor for a liquid crystal display device and a fabrication process thereof |
| 04/25/2002 | US20020047949 Liquid crystal displays |
| 04/25/2002 | US20020047852 Method of driving EL display device |
| 04/25/2002 | US20020047827 Display device |
| 04/25/2002 | US20020047825 Semiconductor device and manufacturing method thereof |
| 04/25/2002 | US20020047790 Correction of operational amplifier gain error in pipelined analog to digital converters |
| 04/25/2002 | US20020047789 Method of designing semiconductor integrated circuit |
| 04/25/2002 | US20020047749 Chip element mounting method and surface-mount type crystal oscillator |
| 04/25/2002 | US20020047741 Semiconductor device reduced in through current |
| 04/25/2002 | US20020047733 Transistor circuit |
| 04/25/2002 | US20020047728 Integrated circuit |
| 04/25/2002 | US20020047724 Multi-state test structures and methods |
| 04/25/2002 | US20020047723 Arrangement for testing integrated circuits |
| 04/25/2002 | US20020047721 Probe pin for a probe card |
| 04/25/2002 | US20020047705 Frequency measuring device, polishing device using the same and eddy current sensor |
| 04/25/2002 | US20020047702 Temperature-controlled thermal platform for automated testing |
| 04/25/2002 | US20020047632 Semiconductor integrated circuit |
| 04/25/2002 | US20020047581 Light emitting device and method of driving the same |
| 04/25/2002 | US20020047580 Process of crystallizing semiconductor thin film and laser irradiation system |
| 04/25/2002 | US20020047579 Process of crystallizing semiconductor thin film and laser irradiation system |
| 04/25/2002 | US20020047567 Organic led display device of active matrix drive type and fabrication method therefor |
| 04/25/2002 | US20020047555 Electronic device |
| 04/25/2002 | US20020047543 Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus |
| 04/25/2002 | US20020047542 Exposure system |
| 04/25/2002 | US20020047541 Plasma processsing method and apparatus thereof |
| 04/25/2002 | US20020047536 Plasma processing apparatus |
| 04/25/2002 | US20020047321 Linear motors and stages comprising same that produce reduced magnetic fields at an optical axis for charged-particle-beam lithography |
| 04/25/2002 | US20020047284 Apparatus for wafer transportation |
| 04/25/2002 | US20020047242 Shaft sealing apparatus |
| 04/25/2002 | US20020047218 Bond pad of semiconductor device and method of fabricating the same |
| 04/25/2002 | US20020047216 Ball grid array |
| 04/25/2002 | US20020047215 Semiconductor device and its manufacturing method |
| 04/25/2002 | US20020047213 Multi-chip package type semiconductor device |
| 04/25/2002 | US20020047212 Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
| 04/25/2002 | US20020047211 Semiconductor integrated circuit device effectively decreased in surface state regardless of non-permeable layer for chemical species against surface state and process for fabricating thereof |
| 04/25/2002 | US20020047210 Semiconductor chip, wiring board and manufacturing process thereof as well as semiconductor device |