| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/23/2002 | US20020060363 Reliability barrier integration for Cu application |
| 05/23/2002 | US20020060362 Wiring structure in semiconductor device and method for forming the same |
| 05/23/2002 | US20020060361 Semiconductor package for three-dimensional mounting, fabrication method thereof , and semiconductor device |
| 05/23/2002 | US20020060360 Integrated fluid supply apparatus, sealing device used there, and semiconductor manufacturing system using it |
| 05/23/2002 | US20020060357 Quad flat non-leaded package structure for housing CMOS sensor |
| 05/23/2002 | US20020060355 Semiconductor wafer isolation structure formed by field oxidation |
| 05/23/2002 | US20020060354 Semiconductor device and method for fabricating the same |
| 05/23/2002 | US20020060353 Semiconductor device with heavily doped shallow region and process for fabricating the same |
| 05/23/2002 | US20020060352 Semiconductor integrated circuit |
| 05/23/2002 | US20020060351 Semiconductor integrated circuit with resistor and method for fabricating thereof |
| 05/23/2002 | US20020060349 Low resistance contact structure for a select transistor of EEPROM memory cells in a NO-DPCC process |
| 05/23/2002 | US20020060348 System and device including a barrier layer |
| 05/23/2002 | US20020060347 Semiconductor read-only memory configuration with substrate contacts and polysilicon bridge cells |
| 05/23/2002 | US20020060346 Method for making transistor structure having silicide source/drain extensions |
| 05/23/2002 | US20020060342 Semiconductor device with chamfered substrate and method of making the same |
| 05/23/2002 | US20020060341 Semiconductor device |
| 05/23/2002 | US20020060339 Semiconductor device having field effect transistor with buried gate electrode surely overlapped with source region and process for fabrication thereof |
| 05/23/2002 | US20020060338 Methods of fabricating vertical field effect transistors by conformal channel layer deposition on sidewalls and vertical field effect transistors fabricated thereby |
| 05/23/2002 | US20020060335 Semiconductor device incorporating an electrical contact to an internal conductive layer and method for making the same |
| 05/23/2002 | US20020060334 Semiconductor integrated circuit device and method of manufacturing the same |
| 05/23/2002 | US20020060333 Semiconductor apparatus having a charge pump circuit |
| 05/23/2002 | US20020060332 Semiconductor integrated circuit device and manufacturing method thereof |
| 05/23/2002 | US20020060331 Integrated circuit having a memory cell transistor with a gate oxide layer which is thicker than the gate oxide layer of a peripheral circuit transistor |
| 05/23/2002 | US20020060328 Semiconductor device |
| 05/23/2002 | US20020060327 Metallic bridge structure for hetero-junction bipolar transistor |
| 05/23/2002 | US20020060324 Zinc oxide crystal luminescent element with improved orientation/crystallinity |
| 05/23/2002 | US20020060323 Composition for a wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof |
| 05/23/2002 | US20020060322 Thin film transistor having high mobility and high on-current and method for manufacturing the same |
| 05/23/2002 | US20020060321 Minimally- patterned, thin-film semiconductor devices for display applications |
| 05/23/2002 | US20020060320 Semiconductor device and method of manufacturing the same |
| 05/23/2002 | US20020060319 Crystal thin film and production method therefor |
| 05/23/2002 | US20020060317 Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure |
| 05/23/2002 | US20020060315 Equipment for communication system and semiconductor integrated circuit device |
| 05/23/2002 | US20020060307 With a mineral acid and a peroxide |
| 05/23/2002 | US20020060297 Substrate for a transfer mask, transfer mask, and method of manufacturing the transfer mask |
| 05/23/2002 | US20020060296 Lithographic apparatus, integrated circuit device manufacturing method, and integrated circuit device manufactured thereby |
| 05/23/2002 | US20020060202 Etching with a chemical liquid having a pH >/= 12 or and an oxidation-reduction potential of >/= 300 mVvsSHE |
| 05/23/2002 | US20020060201 Ions of an ion beam with predetermined polarity are extracted from an ion source and accelerated, which is then reflected and neutralizedm |
| 05/23/2002 | US20020060172 Installation for processing wafers |
| 05/23/2002 | US20020060160 Method and structure for producing bumps on an IC package substrate |
| 05/23/2002 | US20020060134 Magnetic carrying device |
| 05/23/2002 | US20020060085 Conductive cap, electronic component, and method of forming insulating film of conductive cap |
| 05/23/2002 | US20020060084 Flip-chip package with underfill dam that controls stress at chip edges |
| 05/23/2002 | US20020059981 Lower electrode design for higher uniformity |
| 05/23/2002 | US20020059947 Substrate cleaning apparatus |
| 05/23/2002 | US20020059943 Supplying clean air humidified to control a relative humidity within a predetermined range toward a surface level in the cleaning bath downwards vertically, together with exhaust of air of the cleaning draft at a predetermined exhaust rate |
| 05/23/2002 | US20020059900 In-situ post epitaxial treatment process |
| 05/23/2002 | US20020059899 Manufacturing method of semiconductor devices by using dry etching technology |
| 05/23/2002 | US20020059898 An offcut angle of from about 6 to about 10 degrees; superior morphological and material properties. |
| 05/23/2002 | US20020059755 Abrasive composition for polishing semiconductor device and method for producing semiconductor device using the same |
| 05/23/2002 | US20020059726 Method of manufacturing tandem thin-film solar cell |
| 05/23/2002 | US20020059722 Method of mounting a semiconductor device to a substrate and a mounted structure |
| 05/23/2002 | US20020059686 Cleaning processing system and cleaning processing apparatus |
| 05/23/2002 | DE10156139A1 III-V composite semiconductor used for light-emitting diodes contains a p-type doping element |
| 05/23/2002 | DE10144894A1 Half tone type phase shift mask blank manufacturing method for photolithography, involves implementing thermal treatment of translucent film at specified temperature |
| 05/23/2002 | DE10131249A1 Production of a film or a layer of semiconductor material comprises producing structures of repeating recesses on the surface of a semiconductor material |
| 05/23/2002 | DE10115248A1 Wire bonding method for wafer level chip scale package, involves forming metal bump directly on metal pad which is provided on wafer surface, without forming under bump metallurgy layer |
| 05/23/2002 | DE10114764A1 Method of production of integrated circuit with a DRAM treats device with hydrogen is plasma reactor |
| 05/23/2002 | DE10065895C1 Electronic component used as an integrated circuit comprises a screen for electromagnetic scattering, a semiconductor chip made from a semiconductor substrate and an electrically conducting trenched layer |
| 05/23/2002 | DE10057635A1 Method for processing a substrate comprises applying a photolacquer layer to the substrate and structuring so that some regions of the substrate are covered with the photolacquer |
| 05/23/2002 | DE10057491A1 Process for introducing a liquid starting material brought into gas form into a chemical vapour deposition (CVD) reactor comprises forming an aerosol, vaporizing the heat supply and removing the heat of vaporization |
| 05/23/2002 | DE10057163A1 Method of manufacturing semiconductor chips with Schottky transitions by applying a metal contact direct to the p doped inner zone |
| 05/23/2002 | DE10057134A1 Process for depositing crystalline layers onto crystalline substrates in a process chamber of a CVD reactor comprises adjusting the kinematic viscosity of the carrier gas mixed |
| 05/23/2002 | DE10056782A1 Method for dynamic manipulation and/or adjustment in the position of a subassembly in an optical system in a sub-mm range, uses actuators with motion detectors and interconnected sensors to move the subassembly |
| 05/23/2002 | DE10056476A1 Radiation-emitting semiconductor body used as a light emitting diode comprises a radiation-producing layer sequence and a window layer having one or a number of subsequent aluminum gallium arsenide layers produced by liquid phase epitaxy |
| 05/23/2002 | DE10056387A1 Cooling device for electronic component and production method has cooling fins fixed permanently on one side of the baseplate groove only |
| 05/23/2002 | DE10056297A1 Integrated semiconductor memory has connection pads which can support different functions in different stages of production |
| 05/23/2002 | DE10056295A1 Production of a ferroelectric capacitor used in the production of highly integrated non-volatile storage capacitors, especially FeRAMs, comprises inserting a dielectric between precious metal electrodes |
| 05/23/2002 | DE10056256A1 Production of a semiconductor device used as a DRAM involves forming a deep trench in the substrate and forming a dielectric filler layer |
| 05/23/2002 | DE10056162A1 Process for anisotropically etching thin metal foils, e.g. silver foils, comprises repeatedly etching using an oxidizing plasma or reactive gas in a first step as etching component |
| 05/23/2002 | DE10056159A1 Magneto-resistive random-access memory device uses selection transistors of wide channel width associated with several magnetic tunnel junction memory cells |
| 05/23/2002 | DE10055936A1 Magnetoresistive memory has optimized line shape so that magnetic field components in plane of cell field decrease rapidly with increasing distance from matrix intersection |
| 05/23/2002 | DE10055848A1 Method of manufacturing a double sided processed integrated circuit forming a contact structure for connecting metallizing structures of each individual chip |
| 05/23/2002 | DE10055765A1 Verfahren zur Herstellung eines MOS-Feldeffekt-Transistors mit Rekombinationszone A method for producing a MOS-field effect transistor with recombination |
| 05/23/2002 | DE10055763A1 Production of a high temperature resistant joint between wafers comprises forming a liquid layer of alcohols and polymerized silicic acid molecules on a wafer, partially vaporizing the alcohols, joining the two wafers, and heat treating |
| 05/23/2002 | DE10055712A1 Production of trench capacitors in a p-doped silicon layer used for DRAMs and ferroelectric semiconductor storage devices comprises using electrodes and a capacitor dielectric |
| 05/23/2002 | DE10055711A1 Production of a trench capacitor used for DRAMs and ferroelectric semiconductor storage devices comprises applying an electrolyte to a substrate followed by an electrical voltage |
| 05/23/2002 | DE10055710A1 Production of optoelectronic semiconductor element used as LED or laser diode comprises preparing a layer of amorphous Group III element nitride containing a rare earth element, and heat treating whilst inserting the rare earth element |
| 05/23/2002 | DE10045042C1 MRAM-Modulanordnung MRAM module arrangement |
| 05/23/2002 | CA2427300A1 Method of forming shallow trench isolation in silicon |
| 05/22/2002 | EP1207728A1 Automatic seperator and method to obtain circuits for microelectronics |
| 05/22/2002 | EP1207612A1 Power supply apparatus for supplying electric power to substrate carrier container |
| 05/22/2002 | EP1207564A2 Magnetoresistive device and/or multiple element magnetoresistive device |
| 05/22/2002 | EP1207562A2 Semiconductor device with heavily doped shallow region and process for fabricating the same |
| 05/22/2002 | EP1207558A1 Contact structure for ferroelectric memory device |
| 05/22/2002 | EP1207555A1 Flip-chip on film assembly for ball grid array packages |
| 05/22/2002 | EP1207552A2 Non-volatile-semiconductor memory device and fabrication process thereof |
| 05/22/2002 | EP1207551A2 Semiconductor device with a conducting structure and related method |
| 05/22/2002 | EP1207550A1 Method of etching and method of plasma treatment |
| 05/22/2002 | EP1207549A2 Method for fabricating a semiconductor device |
| 05/22/2002 | EP1207548A2 Method and apparatus for loading and unloading wafers |
| 05/22/2002 | EP1207538A1 Magnetic Random Access Memory with improved breakdown voltage |
| 05/22/2002 | EP1207470A2 Concurrent logical and physical construction of voltage islands for mixed supply voltage designs |
| 05/22/2002 | EP1207425A2 Exposure apparatus and maintenance method |
| 05/22/2002 | EP1207423A1 Chemically amplifying type positive resist composition |
| 05/22/2002 | EP1207378A1 Semiconductor pressure sensor and pressure sensing device |
| 05/22/2002 | EP1207217A1 Method of forming an interlayer insulating film |
| 05/22/2002 | EP1207215A2 A method for fabricating a III-V nitride film and an apparatus for fabricating the same |
| 05/22/2002 | EP1207141A1 Synthetic quartz glass member, photolithography apparatus, and method for producing photolithography apparatus |
| 05/22/2002 | EP1207048A1 A process and an apparatus for the formation of patterns in films using temperature gradients |