| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/04/2002 | US6399484 Semiconductor device fabricating method and system for carrying out the same |
| 06/04/2002 | US6399483 Overcoating semiconductor with dielectric; etching; contouring antireflectivity coating |
| 06/04/2002 | US6399482 Method and structure for a conductive and a dielectric layer |
| 06/04/2002 | US6399481 Process control; accuracy; forming transparent undercoating on semiconductor; applying water soluble antireflective coating; exposure to light; development |
| 06/04/2002 | US6399480 Methods and arrangements for insulating local interconnects for improved alignment tolerance and size reduction |
| 06/04/2002 | US6399479 Processes to improve electroplating fill |
| 06/04/2002 | US6399478 Method of making a dual damascene structure with modified insulation |
| 06/04/2002 | US6399477 Semiconductor devices and methods for manufacturing semiconductor devices |
| 06/04/2002 | US6399476 Multilayer passivation process for forming air gaps within a dielectric between interconnections |
| 06/04/2002 | US6399474 Method and apparatus for precoining BGA type packages prior to electrical characterization |
| 06/04/2002 | US6399473 Epitaxial growth intermetallic |
| 06/04/2002 | US6399472 Semiconductor device having a fuse and a fabrication method thereof |
| 06/04/2002 | US6399471 Assorted aluminum wiring design to enhance chip-level performance for deep sub-micron application |
| 06/04/2002 | US6399470 Method for forming contact holes on conductors having a protective layer using selective etching |
| 06/04/2002 | US6399469 Fabrication of a notched gate structure for a field effect transistor using a single patterning and etch process |
| 06/04/2002 | US6399468 Semiconductor device and method of manufacturing the same |
| 06/04/2002 | US6399467 Method of salicide formation |
| 06/04/2002 | US6399466 Method of manufacturing non-volatile semiconductor memory device storing charge in gate insulating layer therein |
| 06/04/2002 | US6399465 Method for forming a triple well structure |
| 06/04/2002 | US6399464 Packaging die preparation |
| 06/04/2002 | US6399463 Method of singulation using laser cutting |
| 06/04/2002 | US6399462 Method and structure for isolating integrated circuit components and/or semiconductor active devices |
| 06/04/2002 | US6399461 Addition of planarizing dielectric layer to reduce a dishing phenomena experienced during a chemical mechanical procedure used in the formation of shallow trench isolation regions |
| 06/04/2002 | US6399460 Semiconductor device |
| 06/04/2002 | US6399459 Double layer electrode and barrier system on hemispherical grain silicon for use with high dielectric constant materials and methods for fabricating the same |
| 06/04/2002 | US6399458 Optimized reachthrough implant for simultaneously forming an MOS capacitor |
| 06/04/2002 | US6399457 Semiconductor device having capacitor and method of manufacturing the same |
| 06/04/2002 | US6399456 Method of fabricating a resistor and a capacitor electrode in an integrated circuit |
| 06/04/2002 | US6399455 Method of fabricating a bipolar transistor with ultra small polysilicon emitter |
| 06/04/2002 | US6399454 Method of manufacturing a semiconductor film and method of manufacturing a semiconductor device |
| 06/04/2002 | US6399453 Process of manufacturing semiconductor integrated circuit device having an amorphous silicon gate |
| 06/04/2002 | US6399452 Method of fabricating transistors with low thermal budget |
| 06/04/2002 | US6399451 Semiconductor device having gate spacer containing conductive layer and manufacturing method therefor |
| 06/04/2002 | US6399450 Low thermal budget process for manufacturing MOS transistors having elevated source and drain regions |
| 06/04/2002 | US6399449 Semiconductor circuit using trench isolation and method of fabrication a trench isolator |
| 06/04/2002 | US6399448 Using nitrogen and argon dopes for silicon oxide |
| 06/04/2002 | US6399447 Method of producing dynamic random access memory (DRAM) cell with folded bitline vertical transistor |
| 06/04/2002 | US6399446 Process for fabricating high density memory cells using a metallic hard mask |
| 06/04/2002 | US6399445 Fabrication technique for controlled incorporation of nitrogen in gate dielectric |
| 06/04/2002 | US6399444 Method of making floating gate non-volatile memory cell with low erasing voltage |
| 06/04/2002 | US6399443 Method for manufacturing dual voltage flash integrated circuit |
| 06/04/2002 | US6399442 Method of manufacturing an integrated semiconductor device having a nonvolatile floating gate memory, and related integrated device |
| 06/04/2002 | US6399441 Nonvolatile memory cell, method of programming the same and nonvolatile memory array |
| 06/04/2002 | US6399440 Method to reduce the node contact resistance |
| 06/04/2002 | US6399439 Method for manufacturing semiconductor device |
| 06/04/2002 | US6399438 Method of manufacturing semiconductor integrated circuit device having a capacitor |
| 06/04/2002 | US6399437 Enhanced side-wall stacked capacitor |
| 06/04/2002 | US6399436 Method of making an electric conductive strip |
| 06/04/2002 | US6399435 Method for producing a DRAM cell with a trench capacitor |
| 06/04/2002 | US6399434 Doped structures containing diffusion barriers |
| 06/04/2002 | US6399433 Method for fabricating a memory cell |
| 06/04/2002 | US6399432 Process to control poly silicon profiles in a dual doped poly silicon process |
| 06/04/2002 | US6399431 ESD protection device for SOI technology |
| 06/04/2002 | US6399430 Field effect transistor and method of manufacturing the same |
| 06/04/2002 | US6399429 Method of forming monocrystalline silicon layer, method for manufacturing semiconductor device, and semiconductor device |
| 06/04/2002 | US6399428 Liquid crystal display and manufacturing process of thin film transistor used therein |
| 06/04/2002 | US6399427 Formation of ultra-thin active device area on semiconductor on insulator (SOI) substrate |
| 06/04/2002 | US6399426 Semiconductor flip-chip package and method for the fabrication thereof |
| 06/04/2002 | US6399425 Method of encapsulating semiconductor devices utilizing a dispensing apparatus with rotating orifices |
| 06/04/2002 | US6399424 Method of manufacturing contact structure |
| 06/04/2002 | US6399423 Semiconductor device an a method of manufacturing the same |
| 06/04/2002 | US6399422 Radiating plate structure and method for manufacturing semiconductor devices using the same structure |
| 06/04/2002 | US6399419 Production of semiconductor device |
| 06/04/2002 | US6399418 Method for forming a reduced thickness packaged electronic device |
| 06/04/2002 | US6399417 Method of fabricating plated circuit lines over ball grid array substrate |
| 06/04/2002 | US6399416 Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice |
| 06/04/2002 | US6399414 Method for forming semiconductor device |
| 06/04/2002 | US6399413 Self aligned gated Schottky diode guard ring structures |
| 06/04/2002 | US6399411 Method for forming non-single-crystal semiconductor thin film, and method for producing photovoltaic device |
| 06/04/2002 | US6399410 Method of anodizing silicon substrate and method of producing acceleration sensor |
| 06/04/2002 | US6399400 Methods and apparatuses for binning partially completed integrated circuits based upon test results |
| 06/04/2002 | US6399399 Method for manufacturing semiconductor memory and method for manufacturing capacitor |
| 06/04/2002 | US6399365 Bioarray chip reaction apparatus and its manufacture |
| 06/04/2002 | US6399286 Method of fabricating reduced critical dimension for conductive line and space |
| 06/04/2002 | US6399285 Method for forming a thin film and for manufacturing a thin film |
| 06/04/2002 | US6399284 Sub-lithographic contacts and vias through pattern, CVD and etch back processing |
| 06/04/2002 | US6399283 Exposure method and aligner |
| 06/04/2002 | US6399274 Resist composition and patterning process |
| 06/04/2002 | US6399273 Water-processable photoresist compositions |
| 06/04/2002 | US6399272 Phenylenediamine derivative-type additive useful for a chemically amplified photoresist |
| 06/04/2002 | US6399269 Bottom anti-reflective coating material composition for photoresist and method of forming resist pattern using the same |
| 06/04/2002 | US6399261 Pattern generator with improved precision |
| 06/04/2002 | US6399260 Pattern exposure method having no uniformity in pattern density or configuration |
| 06/04/2002 | US6399256 Reticle having accessory pattern divided into sub-patterns |
| 06/04/2002 | US6399220 Conformable nickel coating and process for coating an article with a conformable nickel coating |
| 06/04/2002 | US6399182 Die attachment utilizing grooved surfaces |
| 06/04/2002 | US6399178 Rigid adhesive underfill preform, as for a flip-chip device |
| 06/04/2002 | US6399151 For depositing a diamond thick film on a large substrate such as a silicon wafer; direct current plasma assisted chemical vapor deposition; includes holder for fixing the cathode to the chamber and has a cooling line for the cathode |
| 06/04/2002 | US6399143 Method for clamping and electrostatically coating a substrate |
| 06/04/2002 | US6399022 Simplified ozonator for a semiconductor wafer cleaner |
| 06/04/2002 | US6399011 Method of biaxially aligning crystalline material |
| 06/04/2002 | US6398975 Method and apparatus for localized liquid treatment of the surface of a substrate |
| 06/04/2002 | US6398943 Process for producing a porous layer by an electrochemical etching process |
| 06/04/2002 | US6398929 Plasma reactor and shields generating self-ionized plasma for sputtering |
| 06/04/2002 | US6398923 Multiple species sputtering method |
| 06/04/2002 | US6398904 Wet etching system for manufacturing semiconductor devices |
| 06/04/2002 | US6398892 Method of using pressure sensitive adhesive double coated sheet |
| 06/04/2002 | US6398875 Surfaces having high aspect ratios; surfactant and cosolvent |
| 06/04/2002 | US6398873 Method and apparatus for forming an HSG-Si layer on a wafer |
| 06/04/2002 | US6398872 Circuit forming apparatus of semiconductor device |