| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/16/2002 | US20020058200 A positive resist comprising: a resin capable of decomposing by the action of an acid to increase solubility in an alkali developer, and a compound capable of generating aromatic sulfonic acid substituted with a fluorine containing group |
| 05/16/2002 | US20020058197 A negative resist composition comprising a constituent component which has a vinyl ether structure protected with an acetal in a molecule is a film forming polymer soluble in basic solution and has an alkali soluble group |
| 05/16/2002 | US20020058188 Method for rescuing levenson phase shift mask from abnormal difference in transmittance and phase difference between phase shifter and non-phase shifter |
| 05/16/2002 | US20020058186 Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask |
| 05/16/2002 | US20020058163 Graded composition diffusion barriers for chip wiring applications |
| 05/16/2002 | US20020058162 III nitride epitaxial wafer and usage of the same |
| 05/16/2002 | US20020058158 Magneto-resistance effect element magneto-resistance effect memory cell, MRAM, and method for performing information write to or read from the magneto-resistance effect memory cell |
| 05/16/2002 | US20020058150 Method for processing a semiconductor substrate having a copper surface disposed thereon and structure formed |
| 05/16/2002 | US20020058148 Magnetic device and solid-state magnetic memory |
| 05/16/2002 | US20020058142 Low dielectric constant material having thermal resistance, insulation film between semiconductor layers using the same, and semiconductor device |
| 05/16/2002 | US20020058137 Dielectric spacing layer |
| 05/16/2002 | US20020058131 Reducing warpage by use of low temperature sinterable ceramic and an inorganic particle which constrains the shrinkage and which is not sintered at a sintering temperature |
| 05/16/2002 | US20020057963 Methods and apparatus for retaining a tray stack having a plurality of trays for carrying microelectronic devices |
| 05/16/2002 | US20020057955 Three-dimensionally movable transfer robot |
| 05/16/2002 | US20020057884 Heater module and optical waveguide module |
| 05/16/2002 | US20020057831 Pattern inspection method and apparatus |
| 05/16/2002 | US20020057623 Semiconductor memory device including non-volatile memory cell array having MOS structure in well region formed on semiconductor substrate |
| 05/16/2002 | US20020057622 Data sensing circuit of semiconductor memory |
| 05/16/2002 | US20020057610 Vertical power devices having insulated source electrodes in discontinuous deep trenches |
| 05/16/2002 | US20020057601 Semiconductor memory device |
| 05/16/2002 | US20020057600 Semiconductor memory device and method of operating the same |
| 05/16/2002 | US20020057596 Semiconductor memory device and storage method thereof |
| 05/16/2002 | US20020057593 Thin film magnetic memory device having a highly integrated memory array |
| 05/16/2002 | US20020057589 Semiconductor device including a repetitive pattern |
| 05/16/2002 | US20020057548 Post-in-crown capacitor and method of manufacture |
| 05/16/2002 | US20020057427 Method and apparatus for article inspection including speckel reduction |
| 05/16/2002 | US20020057425 Exposure apparatus, device manufacturing method, gas substituting apparatus, and gas substituting method |
| 05/16/2002 | US20020057424 Exposure apparatus, method of manufacturing semiconductor devices, semiconductor manufacturing plant, method of maintaining exposure apparatus, and position detector |
| 05/16/2002 | US20020057423 Exposure apparatus |
| 05/16/2002 | US20020057422 Exposure apparatus, maintenance method therefor, semiconductor device manufacturing method using the apparatus, and semiconductor manufacturing factory |
| 05/16/2002 | US20020057394 Liquid crystal display units |
| 05/16/2002 | US20020057393 Thin film transistor array substrate for a liquid crystal display and the method for fabricating the same |
| 05/16/2002 | US20020057187 Integrated vertical resistor structure with reduced dimensions, for high voltage, and manufacturing process thereof |
| 05/16/2002 | US20020057129 Semiconductor integrated circuit |
| 05/16/2002 | US20020057123 Dual mode fet & logic circuit having negative differential resistance mode |
| 05/16/2002 | US20020057108 Semiconductor integrated circuit |
| 05/16/2002 | US20020057104 Method and apparatus for incorporating a multiplier into an FPGA |
| 05/16/2002 | US20020057100 Threshold invariant voltage detecting device |
| 05/16/2002 | US20020057099 Contactor, method for manufacturing the same, and probe card using the same |
| 05/16/2002 | US20020057098 Probe contract system having planarity adjustment mechanism |
| 05/16/2002 | US20020057034 Surface elastic wave device having bumps in a definite area on the device and method for manufacturing the same |
| 05/16/2002 | US20020057021 Power supply apparatus for supplying electric power to substrate carrier container |
| 05/16/2002 | US20020056927 Method of making semiconductor device having first and second sealing resins |
| 05/16/2002 | US20020056926 Low-pin-count chip package and manufacturing method thereof |
| 05/16/2002 | US20020056925 Interconnections with electrically conductive adhesives: structures, materials, method and their applications |
| 05/16/2002 | US20020056924 Semiconductor package having an insulating region on an edge of a chip to prevent shorts |
| 05/16/2002 | US20020056923 Semiconductor device with a radiation absorbing conductive protection layer and method of fabricating the same |
| 05/16/2002 | US20020056922 Semiconductor device, production method thereof, and coil spring cutting jig and coil spring guiding jig applied thereto |
| 05/16/2002 | US20020056921 Semiconductor device having improved contact hole structure, and method of manufacturing the same |
| 05/16/2002 | US20020056920 High- frequency semiconductor device and method of manufacturing the same |
| 05/16/2002 | US20020056919 Semiconductor device with reduced number of intermediate interconnection pattern and method of forming the same |
| 05/16/2002 | US20020056917 Method for forming gate electrode structure with improved profile and gate electrode structure therefor |
| 05/16/2002 | US20020056916 Semiconductor integrated circuit device and the method of producing the same |
| 05/16/2002 | US20020056915 Base metal-gold wire for wire bonding in semiconductor fabrication |
| 05/16/2002 | US20020056914 Metallization structures for semiconductor device interconnects, methods for making same, and semiconductor devices including same |
| 05/16/2002 | US20020056913 Semiconductor device and method of fabricating the same |
| 05/16/2002 | US20020056912 Integrated circuit having a balanced twist for differential signal lines |
| 05/16/2002 | US20020056911 Semiconductor device |
| 05/16/2002 | US20020056910 Copper pad structure |
| 05/16/2002 | US20020056909 Semiconductor chip package and method of fabricating the same |
| 05/16/2002 | US20020056907 Semiconductor integrated circuit device and its manufacturing method |
| 05/16/2002 | US20020056906 Flip chip assembly structure for semiconductor device and method of assembling therefor |
| 05/16/2002 | US20020056905 Semiconductor device and method of fabricating the same |
| 05/16/2002 | US20020056904 Semiconductor device and method of fabricating the same |
| 05/16/2002 | US20020056903 Semiconductor chip package and manufacturing method thereof |
| 05/16/2002 | US20020056901 Semiconductor device |
| 05/16/2002 | US20020056897 Electronic component to be mounted on a circuit board having electronic circuit device sealed therein and method of manufacturing the same |
| 05/16/2002 | US20020056895 Semiconductor device and method of making same |
| 05/16/2002 | US20020056894 Leadframe having slots in a die pad |
| 05/16/2002 | US20020056893 Disposable mold runner gate for substrate based electronic packages |
| 05/16/2002 | US20020056892 Semiconductor package |
| 05/16/2002 | US20020056891 Apparatus with double laser beams for cutting two bonded glass substrates and method thereof |
| 05/16/2002 | US20020056890 Formation of a metallic interlocking structure |
| 05/16/2002 | US20020056889 Method and apparatus for adjusting impedance of matching circuit |
| 05/16/2002 | US20020056888 Inductive structure integrated on a semiconductor substrate |
| 05/16/2002 | US20020056887 Semiconductor device with reduced line-to-line capacitance and cross talk noise |
| 05/16/2002 | US20020056886 Semiconductor device having element isolation trench and method of fabricating the same |
| 05/16/2002 | US20020056885 Semiconductor integrated circuit device |
| 05/16/2002 | US20020056884 Vertical power devices having deep and shallow trenches and methods of forming same |
| 05/16/2002 | US20020056883 Radio frequency (RF) power devices having faraday shield layers therein |
| 05/16/2002 | US20020056882 Asymmetrical semiconductor device for ESD protection |
| 05/16/2002 | US20020056881 Semiconductor device and manufacturing method therefor |
| 05/16/2002 | US20020056880 Method for fabricating interconnect of capacitor |
| 05/16/2002 | US20020056879 Field effect transistor with an improved gate contact and method of fabricating the same |
| 05/16/2002 | US20020056878 Semiconductor memory device |
| 05/16/2002 | US20020056876 Semiconductor device |
| 05/16/2002 | US20020056874 Semiconductor device and method for fabricating the same |
| 05/16/2002 | US20020056873 Structure and method of controlling short-channel effect of very short channel mosfet |
| 05/16/2002 | US20020056872 Packaged power devices for radio frequency (RF) applications |
| 05/16/2002 | US20020056871 MOS-gated device having a buried gate and process for forming same |
| 05/16/2002 | US20020056870 Flash EEPROM cell and method of manufacturing the same |
| 05/16/2002 | US20020056869 Semiconductor capacitor device |
| 05/16/2002 | US20020056868 Method for fabricating self-aligned dram cell with stack capacitor |
| 05/16/2002 | US20020056867 Fork-like memory structure for ULSI DRAM and method of fabrication |
| 05/16/2002 | US20020056866 Semiconductor memory device and method for fabricating the same |
| 05/16/2002 | US20020056864 Semiconductor container structure with diffusion barrier |
| 05/16/2002 | US20020056863 Capacitor and method for forming the same |
| 05/16/2002 | US20020056862 Semiconductor storage device |
| 05/16/2002 | US20020056861 Semiconductor device and method for fabricating the same |
| 05/16/2002 | US20020056860 Image sensor and method of manufacturing same |