| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/14/2002 | US6387786 Method of salicide formation by siliciding a gate area prior to siliciding a source and drain area |
| 05/14/2002 | US6387785 Lithography and etching process |
| 05/14/2002 | US6387784 Method to reduce polysilicon depletion in MOS transistors |
| 05/14/2002 | US6387783 Methods of T-gate fabrication using a hybrid resist |
| 05/14/2002 | US6387782 Process of forming an ultra-shallow junction dopant layer having a peak concentration within a dielectric layer |
| 05/14/2002 | US6387781 Method of forming three-dimensional semiconductors structures |
| 05/14/2002 | US6387780 Fabrication process of solar cell |
| 05/14/2002 | US6387779 Method of crystallizing a silicon film and thin film transistor and fabricating method thereof using the same |
| 05/14/2002 | US6387778 Breakable tethers for microelectromechanical system devices utilizing reactive ion etching lag |
| 05/14/2002 | US6387777 Variable temperature LOCOS process |
| 05/14/2002 | US6387776 Method for forming trench isolation regions |
| 05/14/2002 | US6387775 Fabrication of MIM capacitor in copper damascene process |
| 05/14/2002 | US6387774 Methods for forming patterned layers including notched etching masks |
| 05/14/2002 | US6387773 Method for fabricating trenches having hallows along the trenches side wall for storage capacitors of DRAM semiconductor memories |
| 05/14/2002 | US6387772 Method for forming trench capacitors in SOI substrates |
| 05/14/2002 | US6387771 Low temperature oxidation of conductive layers for semiconductor fabrication |
| 05/14/2002 | US6387770 Thin-film capacitors and methods for forming the same |
| 05/14/2002 | US6387769 Method of producing a schottky varicap |
| 05/14/2002 | US6387768 Method of manufacturing a semiconductor component and semiconductor component thereof |
| 05/14/2002 | US6387767 Using mixture of silane, nitrogen and ammonia |
| 05/14/2002 | US6387766 Method for manufacturing an integrated circuit with low threshold voltage differences of the transistors therein |
| 05/14/2002 | US6387765 Method for forming an extended metal gate using a damascene process |
| 05/14/2002 | US6387764 Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth |
| 05/14/2002 | US6387763 Field-effect transistor and corresponding manufacturing method |
| 05/14/2002 | US6387762 Method of manufacturing ferroelectric memory device |
| 05/14/2002 | US6387761 Exposure to nitrogen, hydrogen while heating; forming dielectric; forming barrier electrode, intakes, drains |
| 05/14/2002 | US6387760 Method for making semiconductor device having bent gate electrode |
| 05/14/2002 | US6387759 Method of fabricating a semiconductor device |
| 05/14/2002 | US6387758 Method of making vertical field effect transistor having channel length determined by the thickness of a layer of dummy material |
| 05/14/2002 | US6387757 Sacrificial self aligned spacer layer ion implant mask method for forming a split gate field effect transistor (FET) device |
| 05/14/2002 | US6387756 Manufacturing method of non-volatile semiconductor device |
| 05/14/2002 | US6387755 Method and system for providing localized gate edge rounding with minimal encroachment and gate edge lifting |
| 05/14/2002 | US6387754 Method of forming an on-chip decoupling capacitor with bottom hardmask |
| 05/14/2002 | US6387753 Low loss capacitor structure |
| 05/14/2002 | US6387752 Semiconductor memory device and method of fabricating the same |
| 05/14/2002 | US6387751 Method of manufacturing semiconductor device having high-density capacitor elements |
| 05/14/2002 | US6387750 Method of forming MIM capacitor |
| 05/14/2002 | US6387749 Method of manufacturing a capacitor in a semiconductor device |
| 05/14/2002 | US6387748 Semiconductor circuit constructions, capacitor constructions, and methods of forming semiconductor circuit constructions and capacitor constructions |
| 05/14/2002 | US6387747 Method to fabricate RF inductors with minimum area |
| 05/14/2002 | US6387745 Method of making a semiconductor device having a polydiode element |
| 05/14/2002 | US6387744 Process for manufacturing semiconductor integrated circuit device |
| 05/14/2002 | US6387743 Semiconductor device manufacturing method and semiconductor device |
| 05/14/2002 | US6387742 Thermal conductivity enhanced semiconductor structures and fabrication processes |
| 05/14/2002 | US6387741 Manufacturing a semiconductor device with isolated circuit-element formation layers of different thicknesses |
| 05/14/2002 | US6387740 Tri-layer process for forming TFT matrix of LCD with reduced masking steps |
| 05/14/2002 | US6387738 Leaving the photoresist layer on the gate electrode after patterning it, then heating to reflow the photoresist to cover the side edges of the gate electrode; three-layer thin film is used as source, drain and pixel electrodes |
| 05/14/2002 | US6387737 Semiconductor device and manufacturing method thereof |
| 05/14/2002 | US6387736 Method and structure for bonding layers in a semiconductor device |
| 05/14/2002 | US6387735 Method for manufacturing field effect transistor capable of successfully controlling transistor characteristics relating to the short-channel effect |
| 05/14/2002 | US6387734 Semiconductor package, semiconductor device, electronic device and production method for semiconductor package |
| 05/14/2002 | US6387733 Time-based semiconductor material attachment |
| 05/14/2002 | US6387731 Method and apparatus for reducing BGA warpage caused by encapsulation |
| 05/14/2002 | US6387729 Method for adhering and sealing a silicon chip in an integrated circuit package |
| 05/14/2002 | US6387728 Method for fabricating a stacked chip package |
| 05/14/2002 | US6387726 Passivation, patterning, forming polyimide, etching |
| 05/14/2002 | US6387725 Production method for integrated angular speed sensor device |
| 05/14/2002 | US6387722 Methods for preparing an epitaxial wafer having a gallium nitride epitaxial layer deposited on a semiconductor substrate |
| 05/14/2002 | US6387719 Method for improving adhesion |
| 05/14/2002 | US6387716 Semiconductor processing methods and semiconductor defect detection methods |
| 05/14/2002 | US6387715 Integrated circuit defect detection via laser heat and IR thermography |
| 05/14/2002 | US6387712 Process for preparing ferroelectric thin films |
| 05/14/2002 | US6387602 Apparatus and method of cleaning reticles for use in a lithography tool |
| 05/14/2002 | US6387589 Copolymer; semiconductor |
| 05/14/2002 | US6387587 Mixture of copolymer, acid generator and amine |
| 05/14/2002 | US6387573 Phase shift mask using CrAION as phase shifter material and manufacturing method thereof |
| 05/14/2002 | US6387551 Multilayer; aluminum nitride, silicon nitride, silicon carbide |
| 05/14/2002 | US6387536 Aluminum alloy thin film for semiconductor device electrode with excellent corrosion resistance, hillock resistance, void resistance and low electrical resistivity, comprising as alloy components yttrium and hafnium in specified amounts |
| 05/14/2002 | US6387499 Coated solder spheres and method for producing the same |
| 05/14/2002 | US6387476 Magnetic functional element and magnetic recording medium |
| 05/14/2002 | US6387466 Single-crystal silicon wafer |
| 05/14/2002 | US6387445 Tungsten layer forming method and laminate structure of tungsten layer |
| 05/14/2002 | US6387444 Single substrate processing CVD procedure for depositing a metal film using first and second CVD processes in first and second process chambers |
| 05/14/2002 | US6387289 Planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
| 05/14/2002 | US6387288 High selectivity etch using an external plasma discharge |
| 05/14/2002 | US6387287 Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window |
| 05/14/2002 | US6387208 Inductive coupling plasma processing apparatus |
| 05/14/2002 | US6387207 Integration of remote plasma generator with semiconductor processing chamber |
| 05/14/2002 | US6387206 Removing plastic packaging with acid; capillaries fitted into beaker seal for supplying acid |
| 05/14/2002 | US6387190 Multistages; removal polishing particles, then purification |
| 05/14/2002 | US6387185 Processing chamber for atomic layer deposition processes |
| 05/14/2002 | US6387139 Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry |
| 05/14/2002 | US6386962 Wafer carrier with groove for decoupling retainer ring from water |
| 05/14/2002 | US6386957 Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus |
| 05/14/2002 | US6386956 Flattening polishing device and flattening polishing method |
| 05/14/2002 | US6386955 Carrier head with a flexible membrane for a chemical mechanical polishing system |
| 05/14/2002 | US6386951 Controlling polishing of silicon and silicon dioxide |
| 05/14/2002 | US6386950 Process for mechanical chemical polishing of layer of aluminium or aluminium alloy conducting material |
| 05/14/2002 | US6386815 Pick-up apparatus for semiconductor chips |
| 05/14/2002 | US6386715 Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system |
| 05/14/2002 | US6386466 Cleaning apparatus |
| 05/14/2002 | US6386436 Method of forming a solder ball |
| 05/14/2002 | US6386432 Semiconductor die pickup method that prevents electrostatic discharge |
| 05/14/2002 | US6386422 Solder reflow oven |
| 05/14/2002 | US6386213 Plate-tilting apparatus |
| 05/14/2002 | US6386212 A composite surface at which at least two materials having different isoelectric points are exposed is cleaned by an hf dip, followed by dip in low ph surfactant, dip in ammonium hydroxide |
| 05/14/2002 | US6386191 CSP plate holder |
| 05/14/2002 | US6385977 ESRF chamber cooling system and process |
| 05/14/2002 | US6385863 Process and device for drying disk-like objects |
| 05/14/2002 | US6385805 Scrubbing apparatus |