| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 05/30/2002 | US20020064604 A) a spin-on-glass (SOG) tube connected to a SOG tool; b) a capacitive sensor mounted on said SOG tube wherein said capacitive sensor detects gas bubbles in SOG flowing through said SOG tube. |
| 05/30/2002 | US20020064598 Method of depositing a thick titanium nitride film |
| 05/30/2002 | US20020064595 Robotic transferring device. |
| 05/30/2002 | US20020064594 Cleaning mechanism which, before the magnetic film is formed, cleans either one or both of the film-forming face and reverse face of the substrate. |
| 05/30/2002 | US20020064592 Electroless method of seed layer depostion, repair, and fabrication of Cu interconnects |
| 05/30/2002 | US20020064591 Substrate plating method and apparatus |
| 05/30/2002 | US20020064450 Reduced edge contact wafer handling system and method of retrofitting and using same |
| 05/30/2002 | US20020064442 Unified conveying apparatus, and semiconductor device manufacturing facility comprising the same |
| 05/30/2002 | US20020064440 Production line constructing system |
| 05/30/2002 | US20020064439 Drive-section-isolated FOUP opener |
| 05/30/2002 | US20020064202 Injection seeded F2 laser with pre-injection filter |
| 05/30/2002 | US20020064200 Semiconductor laser device capable of suppressing leakage current in a light emitting and surface and method for manufacturing same |
| 05/30/2002 | US20020064195 Semiconductor laser, semiconductor device and nitride series III-V group compound substrate, as well as manufacturing method thereof |
| 05/30/2002 | US20020064138 Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device |
| 05/30/2002 | US20020064080 Semiconductor memory device |
| 05/30/2002 | US20020064075 Semiconductor memory device with reduced interference between bit lines |
| 05/30/2002 | US20020064071 Nonvolatile semiconductor memory device and method for driving the same |
| 05/30/2002 | US20020064070 Non-volatile memory and semiconductor device |
| 05/30/2002 | US20020064069 Memory cell configuration and method for fabricating it |
| 05/30/2002 | US20020064067 Semiconductor memory device |
| 05/30/2002 | US20020064065 Methods of forming and reading ferroelectric memory cells |
| 05/30/2002 | US20020064064 Semiconductor device, a method of manufacturing the same and storage media |
| 05/30/2002 | US20020064032 Device mounting method |
| 05/30/2002 | US20020064012 Protection circuit for field effect transistor |
| 05/30/2002 | US20020064004 Magnetoresistive double spin filter tunnel junction |
| 05/30/2002 | US20020063974 Alignment mark system for mass transport processes |
| 05/30/2002 | US20020063865 Exposure apparatus and a device manufacturing method using the same |
| 05/30/2002 | US20020063860 Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus |
| 05/30/2002 | US20020063856 Stage unit and exposure apparatus |
| 05/30/2002 | US20020063844 Method for darkening pixel |
| 05/30/2002 | US20020063825 Reflection type liquid crystal display device and process for manufacturing the same |
| 05/30/2002 | US20020063823 Low power consumption liquid crystal display substrate |
| 05/30/2002 | US20020063790 Charge transfer device |
| 05/30/2002 | US20020063786 Charge-coupled image sensor comprising gate electrodes interconnected by shunt electrodes |
| 05/30/2002 | US20020063602 High-frequency power amplifier |
| 05/30/2002 | US20020063585 Integrated circuit including an inductive element having a large quality factor and being highly compact |
| 05/30/2002 | US20020063582 Semiconductor integrated circuit device |
| 05/30/2002 | US20020063576 Programmable impedance control circuit |
| 05/30/2002 | US20020063572 Device for evaluating characteristic of insulated gate transistor |
| 05/30/2002 | US20020063569 Semiconductor circuit extraction apparatus, autoplacement/routing apparatus, method therefor and library distribution system |
| 05/30/2002 | US20020063558 Test head connection unit |
| 05/30/2002 | US20020063557 Carrier transporting apparatus, method of transporting a carrier and transporting apparatus |
| 05/30/2002 | US20020063343 Method for making a novel graded silicon nitride/silicon oxide ( SNO) hard mask for improved deep sub-micrometer semiconductor processing |
| 05/30/2002 | US20020063342 Pre-bond encapsulation of area array terminated chip and wafer scale packages |
| 05/30/2002 | US20020063341 Semiconductor substrate and method for fabricating the same |
| 05/30/2002 | US20020063340 Semiconductor device and method for producing the same |
| 05/30/2002 | US20020063338 Semiconductor device |
| 05/30/2002 | US20020063337 Barrier layer for copper metallization in integrated circuit fabrication |
| 05/30/2002 | US20020063336 Semiconductor device and method for manufacturing semiconductor device |
| 05/30/2002 | US20020063335 Semiconductor integrated circuit with dummy patterns |
| 05/30/2002 | US20020063334 Integrated circuit devices having a composite insulation layer and methods of manufacturing same |
| 05/30/2002 | US20020063333 Low capacitance wiring layout and method for making same |
| 05/30/2002 | US20020063332 Semiconductor device and method for manufacturing the same and semiconductor device-mounted structure |
| 05/30/2002 | US20020063326 Electronic part unit and circuit board apparatus |
| 05/30/2002 | US20020063324 Semiconductor device, method of fabricating same, semiconductor device package construction, and method of mounting the semiconductor device |
| 05/30/2002 | US20020063321 Microelectronic package with an attachment layer including spacer elements |
| 05/30/2002 | US20020063319 Direct-downset flip-chip package assembly and method of fabricating the same |
| 05/30/2002 | US20020063317 Tape carrier, semiconductor assembly, and semiconductor device, methods of manufacture thereof, and electronic instrument |
| 05/30/2002 | US20020063316 Semiconductor device and a method for manufacturing the same |
| 05/30/2002 | US20020063314 Tapeless micro-leadframe |
| 05/30/2002 | US20020063312 Plasma induced depletion of fluorine from surfaces of fluorinated low-k dielectric materials |
| 05/30/2002 | US20020063311 Integrated circuits and methods for their fabrication |
| 05/30/2002 | US20020063309 Method of making a bipolar transistor having a reduced base transit time |
| 05/30/2002 | US20020063308 Integrated circuit fabrication |
| 05/30/2002 | US20020063307 Structure for a semiconductor resistive element, particularly for high voltage applications and respective manufacturing process |
| 05/30/2002 | US20020063306 Semiconductor device with a fuse box and method of manufacturing the same |
| 05/30/2002 | US20020063305 Semiconductor device having fuses or anti-fuses |
| 05/30/2002 | US20020063304 Semiconductor device |
| 05/30/2002 | US20020063300 Semiconductor device and manufacturing method of the same |
| 05/30/2002 | US20020063299 Semiconductor device and manufacturing method |
| 05/30/2002 | US20020063296 Semiconductor integrated circuit system |
| 05/30/2002 | US20020063295 Semiconductor appratus including CMOS circuits and method for fabricating the same |
| 05/30/2002 | US20020063294 Reduction of reverse short channel effects by implantation of neutral dopants |
| 05/30/2002 | US20020063293 Transistor with pi-gate structure and method for producing the same |
| 05/30/2002 | US20020063292 CMOS fabrication process utilizing special transistor orientation |
| 05/30/2002 | US20020063291 Method for producing a polysilicon circuit element |
| 05/30/2002 | US20020063290 Semiconductor device |
| 05/30/2002 | US20020063288 Integrated high quality diode |
| 05/30/2002 | US20020063287 Semiconductor device and method of manufacturing the same |
| 05/30/2002 | US20020063286 SOI device and method of fabrication |
| 05/30/2002 | US20020063285 SOI device and method of fabrication |
| 05/30/2002 | US20020063284 Semiconductor device and a method of manufacturing the same |
| 05/30/2002 | US20020063283 Passivation of sidewalls of a word line stack |
| 05/30/2002 | US20020063282 Buried transistor for a liquid crystal display system |
| 05/30/2002 | US20020063279 Tunnel oxide |
| 05/30/2002 | US20020063278 Self-aligned non-volatile memory cell |
| 05/30/2002 | US20020063277 Planar structure for non-volatile memory devices |
| 05/30/2002 | US20020063276 Method of forming a floating gate memory cell structure |
| 05/30/2002 | US20020063275 Method of forming transistor gate |
| 05/30/2002 | US20020063274 Semiconductor device and method for manufacturing the same |
| 05/30/2002 | US20020063273 Semiconductor device and method of fabricating the same |
| 05/30/2002 | US20020063272 Semiconductor device having a test element, and method of manufacturing the same |
| 05/30/2002 | US20020063271 Ferroelectric memory device and method of fabricating the same |
| 05/30/2002 | US20020063270 High frequency switch circuit device |
| 05/30/2002 | US20020063268 Mask programmed ROM inviolable by reverse engineering inspections and method of fabrication |
| 05/30/2002 | US20020063267 Semiconductor device |
| 05/30/2002 | US20020063266 Semiconductor element and manufacturing method thereof |
| 05/30/2002 | US20020063265 Bis(2,2,6,6-tetramethyl-3.5-heptanedionato)lead and germanium tetraethoxide; metal oxide chemical vapor deposition; capacitors; homogeneity of film grain size |
| 05/30/2002 | US20020063264 Semiconductor device having chip scale package |
| 05/30/2002 | US20020063263 Metal oxide semiconductor transistor with self-aligned channel implant |