| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/15/2002 | EP1205574A2 Atomic layer deposition of Ta205 and high-K dielectrics |
| 05/15/2002 | EP1205564A2 Method of recovering a copper and/or a manganese component from a particulate gas cleaning agent |
| 05/15/2002 | EP1205539A2 Method and apparatus for wet-cleaning a substrate |
| 05/15/2002 | EP1205438A1 Water-repellent porous silica, method for preparation thereof and use thereof |
| 05/15/2002 | EP1205280A1 Wafer polishing method and wafer polishing device |
| 05/15/2002 | EP1205223A1 Trap apparatus |
| 05/15/2002 | EP1205071A1 Field programmable gate array with program encryption |
| 05/15/2002 | EP1204992A1 Method for producing a trench mos power transistor |
| 05/15/2002 | EP1204990A1 An integrated circuit with metal programmable logic having enhanced reliability |
| 05/15/2002 | EP1204989A1 Nand type flash memory device |
| 05/15/2002 | EP1204988A2 Controlled compliance fine pitch interconnect |
| 05/15/2002 | EP1204987A1 Chemical vapor deposition of silicon oxide films using alkylsiloxane oligomers with ozone |
| 05/15/2002 | EP1204986A1 System and method for providing implant dose uniformity across the surface of a substrate |
| 05/15/2002 | EP1204985A1 Implanting system and method |
| 05/15/2002 | EP1204976A1 Method and apparatus for reading a magnetoresistive memory |
| 05/15/2002 | EP1204902A1 Apparatus and method for compensating critical dimension deviations across photomask |
| 05/15/2002 | EP1204875A1 System for aligning rectangular wafers |
| 05/15/2002 | EP1204872A1 Electrical contactor, especially wafer level contactor, using fluid pressure |
| 05/15/2002 | EP1204860A1 Variable angle illumination wafer inspection system |
| 05/15/2002 | EP1204853A1 Inorganic permeation layer for micro-electric device |
| 05/15/2002 | EP1204783A1 A method of forming a silicon nitride layer on a semiconductor wafer |
| 05/15/2002 | EP1204611A1 Synthetic quartz glass optical material and optical member for f 2? excimer lasers |
| 05/15/2002 | EP1204473A1 Rejuvenable ambient temperature purifier |
| 05/15/2002 | EP1185143A9 Hot plate and conductor paste |
| 05/15/2002 | EP1159659A4 Four-phase charge pump with lower peak current |
| 05/15/2002 | EP1124745A4 Transport system with integrated transport carrier and directors |
| 05/15/2002 | EP1116236B1 Method of making flexibly partitioned metal line segments for a simultaneous operation flash memory device with a flexible bank partition architecture |
| 05/15/2002 | EP1040212A4 Charge for vertical boat growth process and use thereof |
| 05/15/2002 | EP0994440B1 Noncontact ic card |
| 05/15/2002 | EP0966338B1 Integrated pad and belt for chemical mechanical polishing |
| 05/15/2002 | EP0922298B1 Process for smoothening a substrate surface |
| 05/15/2002 | EP0763259B1 Punch-through field effect transistor |
| 05/15/2002 | EP0698223B1 Reflective liquid crystal display device and method of making such a device |
| 05/15/2002 | CN2491965Y Chip bearing seat flatness regulating tool |
| 05/15/2002 | CN1349662A Semiconductor device and semiconductor substrate |
| 05/15/2002 | CN1349660A Security method and device for a chip stack with a multidimensional structure |
| 05/15/2002 | CN1349659A Burless castellation via process and product for plastic chip carrier |
| 05/15/2002 | CN1349658A Method of structuring a metal or metal-silicide layer and a capacitor produced according to said method |
| 05/15/2002 | CN1349657A Controlled collapse chip connection (C4) integrated circuit package that has a filter which seals an underfill material |
| 05/15/2002 | CN1349656A Method for transfering wafers and ring |
| 05/15/2002 | CN1349655A Device for treating silicon wafers |
| 05/15/2002 | CN1349650A Storage cell arrangement and method for producing the same |
| 05/15/2002 | CN1349568A Plasma treatment of thermal CVD tan films from tantalum halide precursors |
| 05/15/2002 | CN1349446A Method of conditioning wafer polishing pads |
| 05/15/2002 | CN1349255A Automatic alignment method of bit line contacting window and node conducting window |
| 05/15/2002 | CN1349254A Manufacture of semiconductor memory device iwth capacitor |
| 05/15/2002 | CN1349253A Method for mfg. semiconductor device, and said seconductor device |
| 05/15/2002 | CN1349252A Pattern testing device, explosure equipment control system |
| 05/15/2002 | CN1349250A Mosaic process to form grid |
| 05/15/2002 | CN1349249A Method for making semiconductor side wall fin |
| 05/15/2002 | CN1349248A Method and structure of forming lowdielectric constant material on hydrophilic dielectric material |
| 05/15/2002 | CN1349247A Method for forming metallic grid |
| 05/15/2002 | CN1349246A Semiconductor integrated circuit device mfg. method, and its mask making method |
| 05/15/2002 | CN1349245A Method of improving outline of photoresist pattern |
| 05/15/2002 | CN1349226A Thin film magnet storage device for writing easy-control data into current |
| 05/15/2002 | CN1349205A Method for assembling components |
| 05/15/2002 | CN1349131A Mask used for beam exposing, and mfg. method therefor |
| 05/15/2002 | CN1349099A 输电系统 Transmission System |
| 05/15/2002 | CN1348976A Binder and adhesive film |
| 05/15/2002 | CN1348850A Method and device for mfg. brittle substrates |
| 05/15/2002 | CN1084932C 半导体器件 Semiconductor devices |
| 05/15/2002 | CN1084931C Method of programming flash memory cell |
| 05/15/2002 | CN1084930C Read-only memory structure and its mfg. method |
| 05/15/2002 | CN1084917C Electrically conductive paste materials and applications |
| 05/15/2002 | CN1084702C Package method for LCD screen and package material |
| 05/14/2002 | US6389584 Gate input protection with a reduced number of antenna diodes |
| 05/14/2002 | US6389583 Semiconductor device and method for pattern layout for the same using total size of transistors |
| 05/14/2002 | US6389558 Embedded logic analyzer for a programmable logic device |
| 05/14/2002 | US6389381 Method and apparatus for calculating delay times in semiconductor circuit |
| 05/14/2002 | US6389364 System and method for a digital mass flow controller |
| 05/14/2002 | US6389326 Differential process control method |
| 05/14/2002 | US6389323 Method and system for yield loss analysis by yield management system |
| 05/14/2002 | US6388936 Static memory cell having independent data holding voltage |
| 05/14/2002 | US6388934 Semiconductor memory device operating at high speed with low current consumption |
| 05/14/2002 | US6388921 Nonvolatile semiconductor memory device with improved reliability and operation speed |
| 05/14/2002 | US6388918 High efficiency miniature magnetic integrated circuit structures |
| 05/14/2002 | US6388917 Method for nondestructively reading memory cells of an MRAM memory |
| 05/14/2002 | US6388911 Bank select structure layout of read only memory without the junction leakage |
| 05/14/2002 | US6388910 NOR type mask ROM with an increased data flow rate |
| 05/14/2002 | US6388888 Semiconductor device and process for manufacturing the same, liquid crystal module and process for mounting the same |
| 05/14/2002 | US6388861 Electrostatic wafer clamp |
| 05/14/2002 | US6388851 Electronic discharge protection of integrated circuits |
| 05/14/2002 | US6388823 Optical system, especially a projection light facility for microlithography |
| 05/14/2002 | US6388812 Apparatus and method for laser radiation |
| 05/14/2002 | US6388737 Exposure method and apparatus |
| 05/14/2002 | US6388736 Imaging method using phase boundary masking with modified illumination |
| 05/14/2002 | US6388733 Exposure apparatus with an anti-vibration structure |
| 05/14/2002 | US6388731 Projection aligner and exposure method using the same |
| 05/14/2002 | US6388726 Method of manufacturing liquid crystal display device |
| 05/14/2002 | US6388703 Method of realizing machining results |
| 05/14/2002 | US6388624 Parallel-planar plasma processing apparatus |
| 05/14/2002 | US6388520 Semiconductor integrated circuit |
| 05/14/2002 | US6388504 Integrated circuit device with switching between active mode and standby mode controlled by digital circuit |
| 05/14/2002 | US6388498 Semiconductor device capable of reducing noise |
| 05/14/2002 | US6388473 Logic product circuit |
| 05/14/2002 | US6388470 High voltage CMOS signal driver with minimum power dissipation |
| 05/14/2002 | US6388461 Semiconductor inspection apparatus and inspection method using the apparatus |
| 05/14/2002 | US6388456 Probe card and manufactoring method therefor |
| 05/14/2002 | US6388436 Apparatus for calibrating the alignment of a wafer cassette holder to a robot blade |
| 05/14/2002 | US6388386 Process of crystallizing semiconductor thin film and laser irradiation |