| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/03/2002 | EP1220323A2 LDMOS with improved safe operating area |
| 07/03/2002 | EP1220322A2 High breakdown-voltage semiconductor device |
| 07/03/2002 | EP1220320A1 Sigec semiconductor crystal and production method thereof |
| 07/03/2002 | EP1220319A1 Ultrahigh speed image pickup device |
| 07/03/2002 | EP1220315A2 Semiconductor integrated circuit device, circuit design apparatus, and circuit design method |
| 07/03/2002 | EP1220314A2 Power Semiconductor Modul |
| 07/03/2002 | EP1220312A1 Integration process on a SOI substrate of a semiconductor device comprising at least a dielectrically isolated well |
| 07/03/2002 | EP1220311A2 Electrostatic chuck and method of manufacturing the same |
| 07/03/2002 | EP1220310A1 Semiconductor wafer with anisotropic conductor film, and method of manufacture thereof |
| 07/03/2002 | EP1220309A1 Manufacturing method of an electronic device package |
| 07/03/2002 | EP1220308A2 Etching method for ZnSe polycrystalline substrate |
| 07/03/2002 | EP1220307A1 Method and apparatus for radiation-assisted electrochemical etching, and etched product |
| 07/03/2002 | EP1220306A1 Method of manufacturing semiconductor device |
| 07/03/2002 | EP1220304A2 Method for fabricating nitride semiconductor, method for fabricating nitride semiconductor device, and nitride semiconductor device |
| 07/03/2002 | EP1220303A1 Hot plate unit |
| 07/03/2002 | EP1220302A1 Ceramic heater for semiconductor manufacturing/testing apparatus |
| 07/03/2002 | EP1220301A2 Die bonder and/or wire bonder with a device for holding down a substrate |
| 07/03/2002 | EP1220300A2 Light irradiation part arrangement of a heating device |
| 07/03/2002 | EP1220271A2 Ion source having replaceable and sputterable solid source material |
| 07/03/2002 | EP1220187A1 Electric circuit board, tft array substrate using the same, and liquid crystal display |
| 07/03/2002 | EP1220122A1 Fast converging method for timing performances optimisation |
| 07/03/2002 | EP1220071A1 Semiconductor device |
| 07/03/2002 | EP1220040A2 Exposure apparatus and method, device manufacturing method, and discharge lamp |
| 07/03/2002 | EP1220037A2 Exposure apparatus and method of manufacturing an exposure apparatus |
| 07/03/2002 | EP1220034A2 Photomask blank and photomask |
| 07/03/2002 | EP1220012A2 Optical mount unit and oscillation damping system |
| 07/03/2002 | EP1219994A2 Semiconductor device, optoelectronic board, and production methods therefor |
| 07/03/2002 | EP1219725A1 Method for tungsten chemical vapor deposition on a semiconductor substrate |
| 07/03/2002 | EP1219660A2 Process for direct substitution of high performance polymers with unsaturated ester groups |
| 07/03/2002 | EP1219565A1 Process for manufacturing integrated devices having connections on separate wafers and stacking the same |
| 07/03/2002 | EP1219397A1 Method and apparatus for loading, unloading and transferring semiconductor bars |
| 07/03/2002 | EP1219394A2 Articulated robot |
| 07/03/2002 | EP1219141A1 Multi-zone resistance heater |
| 07/03/2002 | EP1218946A1 Apparatus for localizing production errors in a photovoltaic element |
| 07/03/2002 | EP1218944A1 Superlattice fabrication for inas/gasb/alsb semiconductor structures |
| 07/03/2002 | EP1218943A1 High-speed lateral bipolar device in soi process |
| 07/03/2002 | EP1218942A1 Semiconductor device combining the advantages of massive and soi architecture, and method for making same |
| 07/03/2002 | EP1218941A1 Non-volatile memory having high gate coupling capacitance |
| 07/03/2002 | EP1218939A2 Lead frame laminate and method for manufacturing semiconductor parts |
| 07/03/2002 | EP1218938A1 Method for providing a dopant level for polysilicon for flash memory devices |
| 07/03/2002 | EP1218937A2 Novel chip interconnect and packaging deposition methods and structures |
| 07/03/2002 | EP1218936A2 Methods and apparatuses for trench depth detection and control |
| 07/03/2002 | EP1218935A2 Interferometric method for endpointing plasma etch processes |
| 07/03/2002 | EP1218934A1 Method for determining the endpoint of etch process steps |
| 07/03/2002 | EP1218933A1 Method and apparatus for performing run-to-run control in a batch manufacturing environment |
| 07/03/2002 | EP1218932A1 Process for reducing waviness in semiconductor wafers |
| 07/03/2002 | EP1218931A2 A method for cleaning and treating a semiconductor wafer after chemical mechanical polishing |
| 07/03/2002 | EP1218930A1 Method of forming smooth morphologies in inp-based semiconductors |
| 07/03/2002 | EP1218929A1 Cleaning solution for semiconductor surfaces following chemical-mechanical polishing |
| 07/03/2002 | EP1218928A1 Integrated circuits with barrier layers and methods of fabricating same |
| 07/03/2002 | EP1218927A1 A method and system for reducing photo-assisted corrosion in wafers during cleaning processes |
| 07/03/2002 | EP1218926A1 Wafer atmospheric transport module having a controlled mini-environment |
| 07/03/2002 | EP1218925A1 Method and apparatus to reduce contaminants from semiconductor wafers |
| 07/03/2002 | EP1218918A2 Immersion lens with magnetic shield for charged particle beam system |
| 07/03/2002 | EP1218917A2 High transmission, low energy beamline apparatus for ion implanter |
| 07/03/2002 | EP1218916A1 Electron beam plasma formation for surface chemistry |
| 07/03/2002 | EP1218888A2 A symmetric segmented memory array architecture |
| 07/03/2002 | EP1218807A1 Real-time fault detection |
| 07/03/2002 | EP1218806A1 Method and apparatus for monitoring controller performance using statistical process control |
| 07/03/2002 | EP1218800A2 Ultra high resolution lithographic imaging and printing and defect reduction by exposure near the critical condition |
| 07/03/2002 | EP1218799A1 Shielding against external excitations while measuring oscillatory semiconductor membranes |
| 07/03/2002 | EP1218798A1 Method and apparatus for determining phase shifts and trim masks for an integrated circuit |
| 07/03/2002 | EP1218796A1 Extreme ultraviolet soft x-ray projection lithographic method and mask devices |
| 07/03/2002 | EP1218791A2 Multi-beam scanner including a dove prism array |
| 07/03/2002 | EP1218765A2 Wafer-level burn-in and test cartridge and methods |
| 07/03/2002 | EP1218763A1 Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator |
| 07/03/2002 | EP1218729A2 Apparatus and method for texture analysis on semiconductor wafers |
| 07/03/2002 | EP1218689A1 Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source |
| 07/03/2002 | EP1218688A2 Method and apparatus for three dimensional inspection of electronic components |
| 07/03/2002 | EP1218603A1 System and method for making wallboard or backerboard sheets including aerated concrete |
| 07/03/2002 | EP1218573A1 Method and device for depositing materials with a large electronic energy gap and high binding energy |
| 07/03/2002 | EP1218569A1 Galvanizing solution for the galvanic deposition of copper |
| 07/03/2002 | EP1218466A1 Compositions for and methods of reducing/eliminating scratches and defects in silicon dioxide cmp process |
| 07/03/2002 | EP1218465A1 Polishing system with stopping compound and method of its use |
| 07/03/2002 | EP1218464A1 Chemical mechanical polishing systems and methods for their use |
| 07/03/2002 | EP1218291A1 Method for producing high-purity hydrochloric acid |
| 07/03/2002 | EP1218264A1 Transport module with latching door |
| 07/03/2002 | EP1218202A1 Method and compositions for printing substrates |
| 07/03/2002 | EP1218143A1 Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives |
| 07/03/2002 | EP1177631A4 Heterogeneous programmable gate array |
| 07/03/2002 | EP1163379B1 Semiconductor wafer comprising a thin epitaxial silicon layer and method for producing same |
| 07/03/2002 | EP1141960B1 Read/write architecture for a mram |
| 07/03/2002 | EP1112159B1 Method for producing a hybrid frame or hybrid housing and corresponding hybrid frame or hybrid housing |
| 07/03/2002 | EP1099221B1 Magnetoresistive memory with low current density |
| 07/03/2002 | EP1066133B1 Polishing apparatus |
| 07/03/2002 | EP1038047B1 Chemical deposition method using catalyst on surface |
| 07/03/2002 | EP1025470B1 Process for determining possible configurations of machining plants |
| 07/03/2002 | EP0973962B1 Low defect density, ideal oxygen precipitating silicon |
| 07/03/2002 | EP0919012B1 Positive photoresist composition containing a 2,4-dinitro-1-naphthol |
| 07/03/2002 | EP0902976B1 High frequency microelectronics package |
| 07/03/2002 | EP0898703B1 Method and apparatus for analysing optical parameters |
| 07/03/2002 | EP0891311B1 Tape cast silicon carbide dummy wafer |
| 07/03/2002 | EP0838083B1 Support for wafer-shaped objects, in particular silicon wafers |
| 07/03/2002 | CN2498740Y Structure for integrated circuit chip assembly |
| 07/03/2002 | CN1357156A Method for producing semiconductor components |
| 07/03/2002 | CN1357110A System, method and appts. available for actively selecting scan test |
| 07/03/2002 | CN1356930A Wafer container washing appts. |
| 07/03/2002 | CN1356921A Organic acid scrubber and methods |
| 07/03/2002 | CN1356864A Multi-layer ceramic substrate and its preparing process |
| 07/03/2002 | CN1356860A Ion generator for ion beam radiator |