| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 07/04/2002 | US20020086445 Method for fabricating a dual metal gate for a semiconductor device |
| 07/04/2002 | US20020086429 Method for determination of cure and oxidation of spin-on dielectric polymers |
| 07/04/2002 | US20020086260 Chamber for uniform substrate heating |
| 07/04/2002 | US20020086259 Heat Processing apparatus |
| 07/04/2002 | US20020086248 Varible surface hot plate for improved bake uniformity of substrates |
| 07/04/2002 | US20020086241 Method of producing an integrated circuit configuration |
| 07/04/2002 | US20020086240 Method of etching, as well as frame element, mask and prefabricated substrate element for use in such etching |
| 07/04/2002 | US20020086226 Photosensitive resin composition, resist composition, fabricating method for patterned substrate, and device |
| 07/04/2002 | US20020086224 For use in photolithography for fabricating semiconductor devices, image pick-up devices, display devices such as liquid crystal panels, and magnetic heads |
| 07/04/2002 | US20020086223 Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method |
| 07/04/2002 | US20020086222 Photomask and manufacturing method of an electronic device therewith |
| 07/04/2002 | US20020086221 Efficiency |
| 07/04/2002 | US20020086220 Using sputtering to continuously form the phase shift film on transparent substrate |
| 07/04/2002 | US20020086177 Container made of a light metal alloy and process for its manufacture |
| 07/04/2002 | US20020086169 Method of forming insulating film and process for producing semiconductor device |
| 07/04/2002 | US20020086167 Useful as interlayer dielectric film in semiconductor devices; mechanical strength |
| 07/04/2002 | US20020086166 In manufacturing integrated circuits |
| 07/04/2002 | US20020086153 Coated with lightly crosslinked copolymers of vinyl pyrrolidone (VP) and dimethylaminopropyl methacrylamide (DMAPMA) |
| 07/04/2002 | US20020086137 Method of reducing wafer stress by laser ablation of streets |
| 07/04/2002 | US20020086118 Plasma spraying coating material onto plasma exposed surface of component to form a coating having surface roughness characteristics that promote adhesion of polymer deposits |
| 07/04/2002 | US20020086111 Chemisorbing monolayers of a hydrazine-based compound and one or more refractory metal compounds on a substrate to form refractory metal nitride layer |
| 07/04/2002 | US20020086110 Method for tungsten chemical vapor deposition on a semiconductor substrate |
| 07/04/2002 | US20020086109 Chemical vapor deposition wherein at least one kind of organic substance including benzene nucleuses is used as a benzene nucleus source so that insulator includes benzene nucleuses |
| 07/04/2002 | US20020086108 Platinum-rhodium stack as an oxygen barrier |
| 07/04/2002 | US20020086106 Apparatus and method for thin film deposition |
| 07/04/2002 | US20020086105 Used for applying a liquid to a substrate |
| 07/04/2002 | US20020085973 Preparing metal nitride thin film employing amine-adduct single-source precursor |
| 07/04/2002 | US20020085954 Depositing an inorganic sol-gel permeation layer on a micro-electronic device for molecular biological reactions; can be created with pre-defined porosity, pore size distribution, pore morphology, and surface area. |
| 07/04/2002 | US20020085899 Transfer chamber with integral loadlock and staging station |
| 07/04/2002 | US20020085746 Semiconductor wafer on which recognition marks are formed and method for sawing the wafer using the recognition marks |
| 07/04/2002 | US20020085606 Injection seeded laser with precise timing control |
| 07/04/2002 | US20020085447 Process and apparatus for blending and distributing a slurry solution |
| 07/04/2002 | US20020085445 Semiconductor memory device enabling reduction of test time period |
| 07/04/2002 | US20020085442 Semiconductor integrated circuit device |
| 07/04/2002 | US20020085434 Structure and process for 6F2 trench capacitor DRAM cell with vertical MOSFET and 3F bitline pitch |
| 07/04/2002 | US20020085412 Passivated magneto-resistive bit structure |
| 07/04/2002 | US20020085411 Method for preventing unwanted programming in an MRAM configuration |
| 07/04/2002 | US20020085409 Static random access memory cell and method |
| 07/04/2002 | US20020085364 Electronic package with high density interconnect layer |
| 07/04/2002 | US20020085336 High performance via capacitor and method for manufacturing same |
| 07/04/2002 | US20020085329 Electrostatic discharge protection circuit |
| 07/04/2002 | US20020085292 Mounting apparatus for an optical element |
| 07/04/2002 | US20020085291 Mounting device for an optical element |
| 07/04/2002 | US20020085286 Projection exposure device |
| 07/04/2002 | US20020085276 Illumination optical apparatus and exposure apparatus provided with illumination optical apparatus |
| 07/04/2002 | US20020085214 Measurement technique for ultra-thin oxides |
| 07/04/2002 | US20020085212 Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace |
| 07/04/2002 | US20020085211 Apparatus and method for determining the active dopant profile in a semiconductor wafer |
| 07/04/2002 | US20020085192 Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems |
| 07/04/2002 | US20020085191 Device for exposure of a peripheral area of a film circuit board |
| 07/04/2002 | US20020085190 Manufacturing method in manufacturing line, manufacturing method for exposure apparatus, and exposure apparatus |
| 07/04/2002 | US20020085185 Method and system of varying optical imaging performance in the presence of refractive index variations |
| 07/04/2002 | US20020085184 Exposure apparatus and pressure correction method |
| 07/04/2002 | US20020085139 Liquid crystal display device and fabricating method thereof |
| 07/04/2002 | US20020085137 Liquid-crystal display device with improved yield of production and method of fabricating the same |
| 07/04/2002 | US20020084886 Method for fabricating a thin film resistor |
| 07/04/2002 | US20020084835 Semiconductor device with reduced leakage of current |
| 07/04/2002 | US20020084801 Programmable logic device architectures with super-regions having logic regions and a memory region |
| 07/04/2002 | US20020084791 Measurement probe for detecting electrical signals in an integrated semiconductor circuit |
| 07/04/2002 | US20020084779 Mark forming method, mark forming apparatus and analyzing apparatus |
| 07/04/2002 | US20020084747 Light emitting device and production method thereof |
| 07/04/2002 | US20020084746 Contact between element to be driven and thin film transistor for supplying power to element to be driven |
| 07/04/2002 | US20020084566 Semiconductor wafer holder |
| 07/04/2002 | US20020084538 Apparatus and method for reducing interposer compression during molding process |
| 07/04/2002 | US20020084537 System and method for packaging a semiconductor die |
| 07/04/2002 | US20020084532 IC package pressure release apparatus and method |
| 07/04/2002 | US20020084529 Interconnect structures and a method of electroless introduction of interconnect structures |
| 07/04/2002 | US20020084528 Wafer level package and method for manufacturing the same |
| 07/04/2002 | US20020084527 Hardening of copper to improve copper CMP performance |
| 07/04/2002 | US20020084526 Semiconductor device and manufacturing method thereof |
| 07/04/2002 | US20020084523 Resin sealed semiconductor device |
| 07/04/2002 | US20020084522 Semiconductor device using interposer substrate and manufacturing method therefor |
| 07/04/2002 | US20020084521 Flip-chip on film assembly for ball grid array packages |
| 07/04/2002 | US20020084518 Semiconductor device |
| 07/04/2002 | US20020084517 Assembly with connecting structure |
| 07/04/2002 | US20020084513 Integrated circuits and methods for their fabrication |
| 07/04/2002 | US20020084512 Semiconductor wafer |
| 07/04/2002 | US20020084511 Semiconductor device |
| 07/04/2002 | US20020084509 Spiral inductor semiconducting device with grounding strips and conducting vias |
| 07/04/2002 | US20020084508 Fuse for a semiconductor configuration and method for its production |
| 07/04/2002 | US20020084507 Self-passivating Cu laser fuse |
| 07/04/2002 | US20020084506 Deep trench-buried layer array and integrated device structures for noise isolation and latch up immunity |
| 07/04/2002 | US20020084504 Photo-responsive organic field effect transistor |
| 07/04/2002 | US20020084503 High efficient pn junction solar cell |
| 07/04/2002 | US20020084500 Magnetic random access memory and method for manufacturing the same |
| 07/04/2002 | US20020084498 Methods for manufacturing semiconductor devices and semiconductor devices |
| 07/04/2002 | US20020084496 Semiconductor device having resistance elements, and process for fabricating the same |
| 07/04/2002 | US20020084495 High performance PNP bipolar device fully compatible with CMOS process |
| 07/04/2002 | US20020084494 Method for making high gain bipolar transistors in CMOS process |
| 07/04/2002 | US20020084492 Complementary MOS semiconductor device and method of manufacturing the same |
| 07/04/2002 | US20020084491 Multi-finger type electrostatic discharge protection circuit |
| 07/04/2002 | US20020084489 Semiconductor device |
| 07/04/2002 | US20020084488 Etch-stopped SOI back-gate contact |
| 07/04/2002 | US20020084487 Semiconductor device |
| 07/04/2002 | US20020084486 Metal gate double diffusion MOSFET with improved switching speed and reduced gate tunnel leakage |
| 07/04/2002 | US20020084485 Dummy layer diode structures for ESD protection |
| 07/04/2002 | US20020084484 Semiconductor memory and method of manufacture thereof |
| 07/04/2002 | US20020084483 Method and structure for an improved floating gate memory cell |
| 07/04/2002 | US20020084482 Scalable dielectric |
| 07/04/2002 | US20020084481 Multi-layer Pt electrode for DRAM and FRAM with high K dielectric materials |